LT Rithium Tantalate (LiTaO3) Karaihe 2 inihi/3 inihi/4 inihi/6 inihi Orientation Y-42°/36°/108° Matotoru 250-500um

LT Rithium Tantalate (LiTaO3) Karaihe 2 inihi/3 inihi/4 inihi/6 inihi Orientaiton Y-42°/36°/108° Matotoru 250-500um Whakaahua Matua

Whakaahuatanga Poto:

Ko ngā anga LiTaO₃ he pūnaha rauemi piezoelectric me te ferroelectric tino nui, e whakaatu ana i ngā tauwehenga piezoelectric tino pai, te pumau wera, me ngā āhuatanga whatu, e mea nui ai mō ngā tātari ngaru oro mata (SAW), ngā resonators ngaru oro papatipu (BAW), ngā modulators whatu, me ngā pūoko infrared. He tohunga a XKH ki te R&D me te whakaputa anga LiTaO₃ kounga teitei, ma te whakamahi i ngā tukanga tipu tioata Czochralski (CZ) matatau me te epitaxy wāhanga wai (LPE) hei whakarite i te ōritetanga tioata pai ake me ngā kiato hapa <100/cm².

Ka tukuna e XKH ngā anga LiTaO₃ 3-inihi, 4-inihi, me te 6-inihi me ngā whakatakotoranga tioata maha (X-cut, Y-cut, Z-cut), e tautoko ana i te tāpiringa ritenga (Mg, Zn) me ngā maimoatanga poling hei whakatutuki i ngā whakaritenga tono motuhake. Ko te pūmau dielectric o te rauemi (ε~40-50), te tauwehenga piezoelectric (d₃₃~8-10 pC/N), me te pāmahana Curie (~600°C) ka whakatū i te LiTaO₃ hei papa pai mō ngā tātari auau-tiketike me ngā pūoko tika.

Ko tā mātou mahi hanga poutū kua whakauruhia ko te whakatipu tioata, te whakapūkara, te whakakanapa, me te whakatakotoranga kiriata angiangi, me te kaha whakaputa marama neke atu i te 3,000 ngā pūkara hei mahi i ngā whakawhitiwhiti kōrero 5G, ngā hikohiko kaihoko, ngā whakaahua, me ngā ahumahi tiaki. Ka whakaratohia e mātou he ratonga tohutohu hangarau whānui, he tautuhi tauira, me ngā ratonga tauira iti-rahi hei tuku i ngā otinga LiTaO₃ kua arotauhia.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Ngā tawhā hangarau

Ingoa	LiTaO3 karaehe-whatu	Taumata ripanga oro LiTaO3
Āki	Tapahi Z + / - 0.2 °	36 ° Y tapahi / 42 ° Y tapahi / X tapahi(+ / - 0.2°)
Diameter	76.2mm + / - 0.3mm/100±0.2mm	76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm
Papa rā	22mm + / - 2mm	22mm + /-2mm32mm + /-2mm
Matotoru	500um + /-5mm1000um + /-5mm	500um + /-20mm350um + /-20mm
TTV	≤ 10um	≤ 10um
Te pāmahana o te Curie	605 °C + / - 0.7 °C (tikanga DTA)	605 °C + / -3 °C (tikanga DTA
Kounga mata	Te whakakanapa taha-rua	Te whakakanapa taha-rua
Ngā tapa porotaka	te whakaawhiwhi i te taha	te whakaawhiwhi i te taha

Ngā Āhuatanga Matua

1. Hanganga Kiriata me te Mahi Hiko

· Te Pūmautanga o te Tioata: 100% te mana o te momo maha 4H-SiC, kāore he whakaurunga maha-tioata (hei tauira, 6H/15R), me te whānui-katoa o te pihi ruku XRD i te haurua-mōrahi (FWHM) ≤32.7 arcsec.
· Te Nekehanga Kawe Nui: Te nekenekehanga irahiko o te 5,400 cm²/V·s (4H-SiC) me te nekenekehanga kōhao o te 380 cm²/V·s, e āhei ai te hoahoa taputapu auau-tiketike.
·Pakeketanga Irahiko: Ka ātete ki te irahiko niutron 1 MeV me te paepae kino nekehanga o te 1×10¹⁵ n/cm², he mea tino pai mō ngā tono rererangi me te karihi.

2. Ngā Āhuatanga Wera me te Āhuatanga Ā-Mīhini

· Te Awe Wera Tino Pai: 4.9 W/cm·K (4H-SiC), e toru ngā wā i te silicon, e tautoko ana i te mahi i runga ake i te 200°C.
· Tauwehenga Whānui Wera Iti: CTE o te 4.0×10⁻⁶/K (25–1000°C), e whakarite ana i te hototahitanga ki ngā takai hanga-silicon me te whakaiti i te ahotea wera.

3. Te Whakahaere Hapa me te Tukatuka Tika

· Te Matotoru o te Paipa Makoro: <0.3 cm⁻² (ngā papa 8-inihi), te matotoru o te nekehanga <1,000 cm⁻² (i manatokohia mā te whakairo KOH).
· Kounga Mata: Kua orohia ki te CMP ki te Ra <0.2 nm, e tutuki ana i ngā whakaritenga papatahi o te EUV lithography.

Ngā Taupānga Matua

Rohe	Ngā horopaki tono	Ngā Painga Hangarau
Whakawhitiwhiti Kōrero Whatu	Ngā taiaho 100G/400G, ngā kōwae ranu photonics silicon	Mā ngā papa purapura InP ka taea te whakapūmau i te āputa hononga tika (1.34 eV) me te heteroepitaxy e hangai ana ki te Si, ka whakaitihia te ngaronga hononga whatu.
Ngā Waka Pūngao Hou	Ngā kaitahuri hiko-teitei 800V, ngā rihi kei roto i te whare (OBC)	Ka taea e ngā papa 4H-SiC te tu atu ki te >1,200 V, ka whakaiti i ngā ngaronga ara iahiko mā te 50% me te rōrahi pūnaha mā te 40%.
Ngā Whakawhitiwhiti Kōrero 5G	Ngā taputapu RF mirimita-ngaru (PA/LNA), ngā whakakaha hiko teihana turanga	Mā ngā papa SiC haurua-whakamaroke (ātete >10⁵ Ω·cm) ka taea te whakauru ā-auau-tiketike (60 GHz+).
Ngā Taputapu Ahumahi	Ngā pūoko pāmahana teitei, ngā whakawhiti iahiko, ngā aroturuki tauhohenga karihi	Ka tukuna e ngā papa purapura InSb (0.17 eV band gap) te aro ki te aukume tae atu ki te 300%@10 T.

Ngā Wafer LiTaO₃ - Ngā Āhuatanga Matua

1. Mahi Piezoelectric Pai Rawa

· Mā ngā tauwehenga piezoelectric teitei (d₃₃~8-10 pC/N, K²~0.5%) ka taea e ngā taputapu SAW/BAW auau-teitei me te ngaronga whakaurunga <1.5dB mō ngā tātari RF 5G

· He pai te hononga hikohiko e tautoko ana i ngā hoahoa tātari whānui-whanui (≥5%) mō ngā tono iti iho i te 6GHz me te mmWave

2. Ngā Āhuatanga Whatu

· Te māramatanga whānui (>70% te tuku mai i te 400-5000nm) mō ngā whakarerekētanga hiko-whatu e tutuki ana i te whānui >40GHz

· He kaha te ātete ki te whatu kore-raina (χ⁽²⁾~30pm/V) e āwhina ana i te whakaputanga haurorika tuarua whai hua (SHG) i roto i ngā pūnaha taiaho

3. Te Pūmautanga o te Taiao

· Mā te pāmahana Curie teitei (600°C) ka mau tonu te urupare piezoelectric i roto i ngā taiao waka (-40°C ki te 150°C)

· Mā te koretake o ngā matū ki ngā waikawa/kawakore (pH1-13) ka pono ai ngā tono pūoko ahumahi

4. Ngā Āheinga Whakaritenga

· Hangarau aronga: Tapahi-X (51°), Tapahi-Y (0°), Tapahi-Z (36°) mō ngā urupare piezoelectric kua whakaritea

· Ngā kōwhiringa tāpiringa: Tāpirihia ki te Mg (ātete ki te kino whatu), Tāpirihia ki te Zn (whakarei ake i te d₃₃)

· Ngā whakaotinga mata: Te whakakanapa rite-epitaxial (Ra<0.5nm), te whakakoi ITO/Au

Ngā Wafer LiTaO₃ - Ngā Whakamahinga Matua

1. Ngā Kōwae Mua-Mua RF

· Ngā tātari SAW 5G NR (Band n77/n79) me te tauwehenga pāmahana auau (TCF) <|-15ppm/°C|

· Ngā pūorooro BAW whānui-rahi mō te WiFi 6E/7 (5.925-7.125GHz)

2. Ngā Whakaahua Whakakotahi

· Ngā whakarerekētanga Mach-Zehnder tere-teitei (>100Gbps) mō ngā whakawhitiwhitinga whatu mārama

· Ngā pūoko pūwero QWIP me ngā roangaru tapahi ka taea te whakarerekē mai i te 3-14μm

3. Ngā Hikohiko Aunoa

· Ngā pūoko waka ultrasonic me te auau mahi >200kHz

· Ka ora tonu ngā whakawhiti piezoelectric TPMS i te huringa wera -40°C ki te 125°C

4. Ngā Pūnaha Parepare

· Ngā tātari kaiwhiwhi EW me te whakakorenga i waho o te roopu >60dB

· Ngā matapihi IR rapu pere e tuku ana i te irahiko MWIR 3-5μm

5. Ngā Hangarau Hou

· Ngā whakawhiti irahiko optomechanical mō te tahuritanga ngaruiti-ki-whatu

· Ngā rarangi PMUT mō te whakaahua ultrasound hauora (taumira >20MHz)

Ngā Wafer LiTaO₃ - Ngā Ratonga XKH

1. Whakahaere mekameka tuku

· Tukatuka Boule-ki-wafer me te wā arahi 4-wiki mō ngā whakaritenga paerewa

· Te whakaputanga kua arotauhia te utu, e whakarato ana i te painga utu 10-15% ki ngā hoa whakataetae

2. Ngā Otinga Ritenga

· Te whakapūtanga motuhake ki te aronga: 36°±0.5° te tapahi-Y mō te mahi SAW tino pai

· Ngā hanganga i tāpirihia: Te tāpiri MgO (5mol%) mō ngā tono whatu

Ngā ratonga whakarewa: Te tauira hiko Cr/Au (100/1000Å)

3. Tautoko Hangarau

· Te āhua o ngā rauemi: Ngā pihi ruku XRD (FWHM<0.01°), te tātaritanga mata AFM

· Whakatauira taputapu: Whakatauira FEM mō te arotautanga hoahoa tātari SAW

Whakamutunga

Ka taea tonu e ngā angiangi LiTaO₃ te whakahohe i ngā whanaketanga hangarau puta noa i ngā whakawhitiwhitinga RF, ngā pūoko photonics whakauru, me ngā pūoko taiao-kino. Mā te tohungatanga rauemi a XKH, te tika o te hanga, me te tautoko hangarau tono ka āwhina i ngā kiritaki ki te wikitoria i ngā wero hoahoa i roto i ngā pūnaha hiko o te whakatupuranga e whai ake nei.