Wafer LiTaO3 2inihi-8inihi 10x10x0.5 mm 1sp 2sp mō te Whakawhitiwhiti Kōrero 5G/6G
Ngā tawhā hangarau
| Ingoa | LiTaO3 karaehe-whatu | Taumata ripanga oro LiTaO3 |
| Āki | Tapahi Z + / - 0.2 ° | 36 ° Y tapahi / 42 ° Y tapahi / X tapahi (+ / - 0.2°) |
| Diameter | 76.2mm + / - 0.3mm/ 100±0.2mm | 76.2mm + /-0.3mm 100mm + /-0.3mm 0r 150±0.5mm |
| Papa rā | 22mm + / - 2mm | 22mm + /-2mm 32mm + /-2mm |
| Matotoru | 500um + /-5mm 1000um + /-5mm | 500um + /-20mm 350um + /-20mm |
| TTV | ≤ 10um | ≤ 10um |
| Te pāmahana o te Curie | 605 °C + / - 0.7 °C (tikanga DTA) | 605 °C + / -3 °C (tikanga DTA |
| Kounga mata | Te whakakanapa taha-rua | Te whakakanapa taha-rua |
| Ngā tapa porotaka | te whakaawhiwhi i te taha | te whakaawhiwhi i te taha |
Ngā Āhuatanga Matua
1. Te Mahi Hiko me te Mahi Whatu
· Tauwehenga Hiko-Whiti: ka eke a r33 ki te 30 pm/V (X-cut), 1.5× teitei ake i te LiNbO3, ka taea ai te whakarerekētanga hiko-whatu whānui rawa (>40 GHz te whānui o te hononga).
· Urupare Whānui mō te Tirohanga: Te whānuitanga tuku 0.4–5.0 μm (matotoru 8 mm), me te taha mimiti hihi ultraviolet he iti iho i te 280 nm, he mea tino pai mō ngā taiaho UV me ngā taputapu ira kuantum.
· Tauwehenga Hiko Iti: dP/dT = 3.5×10⁻⁴ C/(m²·K), e whakarite ana i te pumau i roto i ngā pūoko pūwero whero-mahana teitei.
2. Ngā Āhuatanga Wera me te Āhuatanga Ā-Mīhini
· Te Awe Wera Teitei: 4.6 W/m·K (X-cut), e whā ngā whakarea o te quartz, e mau tonu ana i te huringa wera -200–500°C.
· Tauwehenga Whānui Wera Iti: CTE = 4.1×10⁻⁶/K (25–1000°C), hototahi ki te takai silicon hei whakaiti i te ahotea wera.
3. Te Whakahaere Hapa me te Tukatuka Tika
· Te Matotoru o te Paipa Makoro: <0.1 cm⁻² (ngā papa 8-inihi), te matotoru o te nekehanga <500 cm⁻² (i manatokohia mā te whakairo KOH).
· Kounga Mata: Kua orohia ki te CMP ki te Ra <0.5 nm, e tutuki ana i ngā whakaritenga papatahi o te EUV lithography.
Ngā Taupānga Matua
| Rohe | Ngā horopaki tono | Ngā Painga Hangarau |
| Whakawhitiwhiti Kōrero Whatu | Ngā taiaho DWDM 100G/400G, ngā kōwae ranu photonics silicon | Mā te whānui o te tuku hihi o te wafer LiTaO3 me te iti o te ngaronga arataki ngaru (α <0.1 dB/cm) ka taea te whakawhānui i te roopu-C. |
| Whakawhitiwhiti Kōrero 5G/6G | Ngā tātari SAW (1.8–3.5 GHz), ngā tātari BAW-SMR | Ka tutuki i ngā anga tapahi-Y 42° te Kt² >15%, ka iti te ngaronga whakaurunga (<1.5 dB) me te nui o te takahuri (>30 dB). |
| Ngā Hangarau Kuantum | Ngā pūoko photon kotahi, ngā pūtake tahuritanga-whakararo tawhā | Ko te tauwehenga kore-raina teitei (χ(2)=40 pm/V) me te tere tatau pōuri iti (<100 tatau/s) ka whakarei ake i te pono o te irahiko. |
| Te Pūtaiao Ahumahi | Ngā pūoko pēhanga pāmahana-tiketike, ngā whakawhiti iahiko | He pai te urupare piezoelectric o te wafer LiTaO3 (g33 >20 mV/m) me te manawanui ki te pāmahana teitei (>400°C) ki ngā taiao tino kino. |
Ngā Ratonga XKH
1. Hanganga Angiangi Ritenga
· Rahi me te Tapahi: Ngā angaanga 2–8-inihi me te tapahi-X/Y/Z, tapahi-42°Y, me ngā tapahi koki ritenga (±0.01° te manawanui).
· Mana Whakaranu: Te whakaranu Fe, Mg mā te tikanga Czochralski (awhe kukū 10¹⁶–10¹⁹ cm⁻³) hei whakapai ake i ngā tauwehenga hiko-whatu me te pumau wera.
2. Ngā Hangarau Tukanga Matatau
· Te Whakatō Ā-Wā (PPLT): Hangarau Tapahi Atamai mō ngā wafer LTOI, e tutuki ai te tika o te rohe ±10 nm me te tahuritanga auau quasi-phase-matched (QPM).
· Whakaurunga Rerekē: Ngā paparanga hiato LiTaO3 (POI) e hangai ana ki te Si me te mana whakahaere matotoru (300–600 nm) me te kawe wera tae atu ki te 8.78 W/m·K mō ngā tātari SAW auau-teitei.
3. Ngā Pūnaha Whakahaere Kounga
· Whakamātautau Mutunga-ki-Mutu: Te tirotiro Raman (manatoko momo-maha), XRD (kirikiri), AFM (āhua o te mata), me te whakamātautau ōritetanga whatu (Δn <5×10⁻⁵).
4. Tautoko mekameka tuku o te ao
· Te Kaha Whakaputa: Putanga ia marama >5,000 ngā wafer (8-inihi: 70%), me te tuku ohorere 48-hāora.
· Whatunga Whakahaere: Ka kapi i Ūropi, Amerika Te Raki, me Āhia-Moananui mā te uta rererangi/moana me ngā takai e whakahaeretia ana te pāmahana.









