Papa SiC Momo-P 4H/6H-P 3C-N 4inihi me te matotoru o te 350um Taumata whakaputa Taumata hangahanga
Ripanga tawhā 4 inihi SiC papa P-momo 4H/6H-P 3C-N
4 inihi te whānui o te SiliconPapa Whakarewa Warowaihā (SiC) Whakatakotoranga
| Tau | Kore MPD Production Tau (Z) (Kaute) | Te Hanga Paerewa Taumata (P (Kaute) | Tauira Tauira (D (Kaute) | ||
| Diameter | 99.5 mm~100.0 mm | ||||
| Matotoru | 350 μm ± 25 μm | ||||
| Te Aronga o te Wafer | Kei waho o te tuaka: 2.0°-4.0° ki te [11]20] ± 0.5° mō te 4H/6H-P, Otuaka n:〈111〉± 0.5° mō te 3C-N | ||||
| Te Kīanga o te Paipa Maikoro | 0 cm-2 | ||||
| Ātete | momo-p 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| momo-n 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Te whakatakotoranga papatahi tuatahi | 4H/6H-P | - {1010} ± 5.0° | |||
| 3C-N | - {110} ± 5.0° | ||||
| Roa Papatahi Tuatahi | 32.5 mm ± 2.0 mm | ||||
| Roa Papatahi Tuarua | 18.0 mm ± 2.0 mm | ||||
| Te whakatakotoranga papatahi tuarua | Te mata o te silicon ki runga: 90° CW. mai i te papatahi o Prime±5.0° | ||||
| Te Whakakore i te Tapa | 3 mm | 6 mm | |||
| LTV/TTV/Pīkau/Whā | ≤2.5 μm/≤5 μm/≤15 μm/≤30 µm | ≤10 μm/≤15 μm/≤25 μm/≤40 µm | |||
| Te taratara | Pōrana Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa | Kāore | Te roa tāpiri ≤ 10 mm, te roa takitahi ≤2 mm | |||
| Pereti Hex mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤0.05% | Te horahanga tāpiri ≤0.1% | |||
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Kāore | Te horahanga tāpiri ≤3% | |||
| Ngā Whakaurunga Waro Tirohanga | Te horahanga tāpiri ≤0.05% | Te horahanga tāpiri ≤3% | |||
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Kāore | Te roa tāpiri ≤1 × te diameter o te angaanga | |||
| Ngā Maramara Tapa Teitei Mā te Mārama Kaha | Kāore i whakaaetia te whānui me te hohonu ≥0.2mm | 5 e whakaaetia ana, ≤1 mm ia | |||
| Te Parahanga o te Mata Silicon mā te Kaha Nui | Kāore | ||||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | ||||
Ngā Tuhipoka:
※Ka pā ngā herenga hapa ki te mata katoa o te papa angiangi engari ko te wāhi e kore e āraia te taha. # Me tirotiro ngā karawarawa ki te mata Si anake.
Ko te papa SiC momo-P 4H/6H-P 3C-N 4-inihi te rahi, he 350 μm te matotoru, e whakamahia whānuitia ana i roto i te hanga taputapu hiko me te hiko matatau. He pai te kawe wera, te ngaohiko pakaru teitei, me te ātete kaha ki ngā taiao tino kino, he pai rawa atu tēnei papa mō ngā hiko hiko mahi-teitei pērā i ngā pana ngaohiko-teitei, ngā kaitahuri, me ngā taputapu RF. Ka whakamahia ngā papa whakaputa-tauine i roto i te hanga tauine nui, kia mau ai te mahi pono, te tino tika o ngā taputapu, he mea nui mō ngā hiko hiko me ngā tono auau-teitei. Engari, ko ngā papa tauira-tauira, ka whakamahia whānuitia mō te whakatikatika tukanga, te whakamātautau taputapu, me te whakawhanake tauira, hei āwhina i te pupuri i te mana kounga me te ōrite o te tukanga i roto i te hanga semiconductor.
WhakatakotorangaKo ngā painga o ngā papa hiato SiC momo-N ko
- Te Awe Wera TeiteiNā te pai o te marara wera ka tino pai te papa mō ngā whakamahinga pāmahana teitei me te mana teitei.
- Ngaohiko Pakaru TeiteiTautoko ana i te mahi ngaohiko teitei, kia mau ai te pono o ngā hikohiko mana me ngā taputapu RF.
- Te Ātete ki ngā Taiao KinoHe pakari i roto i ngā āhuatanga tino kino pēnei i te pāmahana teitei me ngā taiao waikura, kia roa ai te mahi.
- Te Tika o te WhakaputaKa whakarite i te kounga teitei me te pono o te mahi i roto i te hangahanga nui, e tika ana mō ngā tono hiko matatau me te RF.
- Tauira-Rūpahu mō te WhakamātautauKa taea te whakatikatika tika i ngā tukanga, te whakamātautau taputapu, me te hanga tauira, me te kore e whakararu i ngā anga whakaputa.
I te nuinga o te wā, ko te papa SiC momo-P 4H/6H-P 3C-N 4-inihi te rahi, he 350 μm te matotoru, he painga nui mō ngā tono hiko mahi-teitei. Nā tōna kawe wera me te ngaohiko pakaru teitei, he mea tino pai mō ngā taiao mana-teitei me te pāmahana teitei, ā, ko tōna ātete ki ngā āhuatanga uaua ka whakarite i te roa me te pono. Ka whakarite te papa whakaputa-papa i te mahi tika me te rite tonu i roto i te hanga nui o ngā hiko hiko me ngā taputapu RF. I taua wā, he mea nui te papa tauira-papa mō te whakatikatika tukanga, te whakamātautau taputapu, me te tauira, e tautoko ana i te whakahaere kounga me te rite tonu i roto i te hanga semiconductor. Mā ēnei āhuatanga ka tino whai hua ngā papa SiC mō ngā tono matatau.
Kauwhata Taipitopito
