Papa SiC momo-P 4H/6H-P 3C-N 6inihi te matotoru 350 μm me te whakatakotoranga papatahi tuatahi
Whakatakotoranga 4H/6H-P Momo SiC Composite Composite Ripanga tawhā noa
6 Papa Hanga Silicon Carbide (SiC) he inihi te whānui Whakatakotoranga
| Tau | Kore MPD ProductionTau (Z) (Kaute) | Te Hanga PaerewaTaumata (P (Kaute) | Tauira Tauira (D (Kaute) | ||
| Diameter | 145.5 mm~150.0 mm | ||||
| Matotoru | 350 μm ± 25 μm | ||||
| Te Aronga o te Wafer | -Offtuaka: 2.0°-4.0°ki te [1120] ± 0.5° mō te 4H/6H-P, I runga i te tuaka:〈111〉± 0.5° mō te 3C-N | ||||
| Te Kīanga o te Paipa Maikoro | 0 cm-2 | ||||
| Ātete | momo-p 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| momo-n 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Te whakatakotoranga papatahi tuatahi | 4H/6H-P | -{1010} ± 5.0° | |||
| 3C-N | -{110} ± 5.0° | ||||
| Roa Papatahi Tuatahi | 32.5 mm ± 2.0 mm | ||||
| Roa Papatahi Tuarua | 18.0 mm ± 2.0 mm | ||||
| Te whakatakotoranga papatahi tuarua | Te mata o te silicon ki runga: 90° CW. mai i te papatahi Matua ± 5.0° | ||||
| Te Whakakore i te Tapa | 3 mm | 6 mm | |||
| LTV/TTV/Pīkau/Whā | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
| Te taratara | Pōrana Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa | Kāore | Te roa tāpiri ≤ 10 mm, te roa takitahi ≤2 mm | |||
| Pereti Hex mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤0.05% | Te horahanga tāpiri ≤0.1% | |||
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Kāore | Te horahanga tāpiri ≤3% | |||
| Ngā Whakaurunga Waro Tirohanga | Te horahanga tāpiri ≤0.05% | Te horahanga tāpiri ≤3% | |||
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Kāore | Te roa tāpiri ≤1 × te diameter o te angaanga | |||
| Ngā Maramara Tapa Teitei Mā te Mārama Kaha | Kāore i whakaaetia te whānui me te hohonu ≥0.2mm | 5 e whakaaetia ana, ≤1 mm ia | |||
| Te Parahanga o te Mata Silicon mā te Kaha Nui | Kāore | ||||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | ||||
Ngā Tuhipoka:
※ Ka pā ngā herenga hapa ki te mata katoa o te papa angiangi engari ko te wāhi ārai taha. # Me tirotiro ngā karawarawa ki te mata Si o
Ko te wafer SiC momo-P, 4H/6H-P 3C-N, me tōna rahi 6-inihi me te matotoru 350 μm, he mahi nui tana i roto i te hanga ahumahi o ngā hikohiko mana mahi-teitei. Nā tōna kawe wera pai me te ngaohiko pakaru teitei, he mea tino pai mō te hanga i ngā wāhanga pēnei i ngā pana hiko, ngā diode, me ngā transistors e whakamahia ana i roto i ngā taiao pāmahana-teitei pēnei i ngā waka hiko, ngā whatunga hiko, me ngā pūnaha pūngao whakahou. Mā te kaha o te wafer ki te mahi pai i roto i ngā āhuatanga uaua ka whakarite i te mahi pono i roto i ngā tono ahumahi e hiahia ana ki te kiato mana teitei me te whai huatanga o te pūngao. Hei tāpiri, ko tōna whakatakotoranga papatahi tuatahi ka āwhina i te whakarite tika i te wā hanga taputapu, ka whakarei ake i te whai huatanga o te whakaputa me te ōritetanga o te hua.
Ko ngā painga o ngā papa hiato SiC momo-N ko:
- Te Awe Wera TeiteiKa tere te whakamarara o te wera e ngā papa SiC momo-P, ā, he mea tino pai mō ngā tono pāmahana teitei.
- Ngaohiko Pakaru TeiteiKa taea te tu atu i ngā ngaohiko teitei, kia mau ai te pono o ngā hikohiko me ngā taputapu ngaohiko teitei.
- Te Ātete ki ngā Taiao KinoHe tino pakari i roto i ngā āhuatanga tino kino, pērā i te pāmahana teitei me ngā taiao waikura.
- Te Huringa Mana Whai HuaMā te tāpiritanga momo-P ka māmā ake te whakahaere mana, ka pai ai te wafer mō ngā pūnaha hurihanga pūngao.
- Te whakatakotoranga papatahi tuatahi: Ka whakarite kia tika te whakarārangi i te wā e hanga ana, kia pai ake ai te tika me te ōrite o te taputapu.
- Hanganga Angiangi (350 μm)Mā te matotoru tino pai o te anga ka taea te whakauru ki ngā taputapu hiko matatau, he iti nei te wāhi.
I te nuinga o te wā, he maha ngā painga o te papa SiC momo-P, 4H/6H-P 3C-N, e tino pai ana mō ngā mahi ahumahi me ngā mahi hiko. Nā tōna kawe wera me te ngaohiko pakaru teitei ka taea te mahi pono i roto i ngā taiao pāmahana teitei me te ngaohiko teitei, ā, nā tōna ātete ki ngā āhuatanga uaua ka roa te mau. Mā te tāpiritanga momo-P ka taea te hurihanga hiko whai hua, ka pai mō ngā hikohiko mana me ngā pūnaha pūngao. Hei tāpiri, mā te whakatakotoranga papatahi tuatahi o te papa ka whakarite kia tika te tūnga i te wā o te tukanga hanga, ka whakarei ake i te ōritetanga o te whakaputanga. Me te matotoru o te 350 μm, he pai mō te whakauru ki ngā taputapu matatau, kiato.
Kauwhata Taipitopito
