Papa Hanga-Hau-Whakamaroke Silicon Carbide (SiC) Tino-Parakore mō ngā Karāhe Ar

He Papa Hanga-Hau-Whakamaroke Silicon Carbide (SiC) he Parakore-Teitei mō ngā Karāhe Ar Whakaahua Matua

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Ko ngā paparanga silicon carbide (SiC) haurua-whakamaroke teitei he rauemi motuhake i hangaia mai i te silicon carbide, e whakamahia whānuitia ana i roto i te hanga hikohiko mana, ngā taputapu auau reo irirangi (RF), me ngā wāhanga haurua-haurua teitei-auau, pāmahana-teitei. Ko te silicon carbide, hei rauemi haurua-haurua whānui-rohe, he tino pai ngā āhuatanga hiko, wera, me te miihini, ā, he tino pai mō ngā tono i roto i ngā taiao ngaohiko teitei, auau-teitei, me te pāmahana-teitei.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

Tirohanga Whānui o te Hua o ngā Wafer SiC Āhua-Whakamaroke

Kua hangaia ā mātou Wafer SiC Haurua-Whakamaroke-Teitei mō ngā hikohiko mana matatau, ngā wāhanga RF/ngaruiti, me ngā tono optoelectronic. He mea hanga ēnei wafer mai i ngā tioata takitahi 4H-, 6H-SiC rānei kounga teitei, mā te whakamahi i te tikanga tipu Kawe Kohu Tinana (PVT) kua whakatikatikaina, ā, whai muri ko te whakamahana taumata-hohonu. Ko te hua he wafer me ēnei āhuatanga tino pai:

Ātete Tino-Teitei: ≥1×10¹² Ω·cm, e whakaiti ana i ngā ia turuturu i roto i ngā taputapu whakawhiti ngaohiko-tiketike.
Āputa Whānui (~3.2 eV)Ka whakarite i te mahi tino pai i roto i ngā taiao pāmahana teitei, mara teitei, me te nui o te irahiko.
Te Arahi Wera Tino Pai: >4.9 W/cm·K, e whakarato ana i te tohatoha wera whai hua i roto i ngā tono mana-tiketike.
Kaha Mīhini Tino PaiKo te pakeketanga o te matū Mohs he 9.0 (tuarua ki te taimana anake), he iti te horapa wera, ā, he kaha te pumau matū.
Mata Maeneene Ātomi: Ra < 0.4 nm me te kiato hapa < 1/cm², he mea tino pai mō te epitaxy MOCVD/HVPE me te hanga micro-nano.

Ngā Rahi e Wātea anaKo ngā rahi paerewa ko te 50, 75, 100, 150, me te 200 mm (2"–8"), me ngā diameter ritenga tae atu ki te 250 mm.
Awhe Matotoru: 200–1,000 μm, me te manawanui o ±5 μm.

Te Tukanga Hanga o ngā Wafer SiC Haurua-Whakamātao

Te Whakaritenga Paura SiC Parakore-Teitei

Rauemi TīmatangaPaura SiC 6N-grade, i purea mā te whakamahi i te whakangawari korehau maha-wāhanga me ngā maimoatanga wera, kia iti ai te poke o te konganuku (Fe, Cr, Ni < 10 ppb) me te iti rawa o ngā whakaurunga polycrystalline.

Te Tipu Kotahi-Karaihe PVT Kua Whakarerekētia

TaiaoTata-korehau (10⁻³–10⁻² Torr).
Te pāmahana: I whakamahanahia te oko paraiwha ki te ~2,500 °C me te pikinga pāmahana whakahaeretia o ΔT ≈ 10–20 °C/cm.
Rere Hau me te Hoahoa ParaMā ngā wehewehe para me ngā wehewehe pūwero kua whakaritea kia rite te tohatoha o te kohu, ā, kia pehia ai te whakapūtanga kāore e hiahiatia.
Whāngai Hihiri me te HurihangaKo te whakakī anō i te paura SiC i ia wā, me te hurihanga o te karaihe-tokotoko ka hua ake he iti te matotoru o te nekehanga (<3,000 cm⁻²) me te whakatakotoranga 4H/6H ōrite.

Te Whakamahana Whakautu Taumata-Hohonu

Te Whakamahana HauwaiI whakahaerehia i roto i te āhuarangi H₂ i ngā pāmahana i waenga i te 600–1,400 °C hei whakahohe i ngā mahanga taumata hohonu me te whakau i ngā kaikawe ā-roto.
Te Whakaranu-Nui-Al (Whiringa)Te whakaurunga o te Al (kaiwhakawhiwhi) me te N (kaituku) i te wā tipu, i muri rānei i te tipu o te CVD hei hanga i ngā takirua kaituku-kaituku pumau, ka akiaki i ngā tihi ātete.

Te Tapahi Tika me te Tākai Maha-Wāhanga

Te Kani Waea TaimanaKo ngā angaanga tapatapahia kia matotoru ki te 200–1,000 μm, he iti noa te pakaru, ā, he ātete ki te ±5 μm.
Tukanga Whakapā: Mā ngā kongakonga taimana raupapa-maha mai i te taratara ki te matariki ka tangohia te kino o te kani, ka rite ai te papa whakarewa mō te whakakanapa.

Te Whakakanapa Matū Ā-Mīhini (CMP)

Pāpāho WhakakanapaHe parai nano-waikura (SiO₂, CeO₂ rānei) i roto i te otinga kawakore ngawari.
Whakahaere TukangaMā te oro iti-aukati ka whakaitihia te taratara, ka tutuki te taratara RMS o te 0.2–0.4 nm, ā, ka whakakorea hoki ngā karawarawa moroiti.

Te Horoi Whakamutunga me te Tākai

Horoi UltrasonicHe tukanga horoi maha-taahiraa (te whakarewa waro, ngā maimoatanga waikawa/pūtake, me te horoi wai tango-ioniti) i roto i te taiao rūma ma Akomanga-100.
Te Hiri me te TākaiTe whakamaroke i te angaanga me te whakamahi i te hauota, kua hiritia ki roto i ngā putea tiaki kua whakakiia ki te hauota, ā, kua tākaihia ki roto i ngā pouaka o waho ārai-pūmau, whakamātao-wiri.

Ngā Whakatakotoranga o ngā Wafer SiC Āhua-Whakamaroke

Te Mahi a te Hua	Tau P	Tau D
I. Ngā Tawhā Karaihe	I. Ngā Tawhā Karaihe	I. Ngā Tawhā Karaihe
Momo Kiriata	4H	4H
Taupū Whakaata a	>2.6 @589nm	>2.6 @589nm
Te Auau Ngongo a	≤0.5% @450-650nm	≤1.5% @450-650nm
Tuku MP a (Kāore i pania)	≥66.5%	≥66.2%
Kohu a	≤0.3%	≤1.5%
Whakaurunga Momo-maha a	Kāore e whakaaetia	Te horahanga tāpiri ≤20%
Te Matotoru o te Paipa Maikoro a	≤0.5 /cm²	≤2 /cm²
Korekore ā-Hexagonal a	Kāore e whakaaetia	Kāore he
Whakaurunga Āhuatanga a	Kāore e whakaaetia	Kāore he
Whakaurunga MP a	Kāore e whakaaetia	Kāore he
II. Ngā Tawhā Ā-Mīhini	II. Ngā Tawhā Ā-Mīhini	II. Ngā Tawhā Ā-Mīhini
Diameter	150.0 mm +0.0 mm / -0.2 mm	150.0 mm +0.0 mm / -0.2 mm
Te whakatakotoranga o te mata	{0001} ±0.3°	{0001} ±0.3°
Roa Papatahi Tuatahi	Te kokoru	Te kokoru
Roa Papatahi Tuarua	Kāore he whare tuarua	Kāore he whare tuarua
Te Aronga o te Koki	<1-100> ±2°	<1-100> ±2°
Koki Whakatō	90° +5° / -1°	90° +5° / -1°
Hōhonutanga o te Kohao	1 mm mai i te taha +0.25 mm / -0.0 mm	1 mm mai i te taha +0.25 mm / -0.0 mm
Te Maimoatanga Mata	Mata-C, Mata-Si: Te Whakakanapa Matū-Mīhini (CMP)	Mata-C, Mata-Si: Te Whakakanapa Matū-Mīhini (CMP)
Tapa o te Wafer	Pokarekare (Porowhita)	Pokarekare (Porowhita)
Te Pākari o te Mata (AFM) (5μm x 5μm)	Si-kanohi, C-kanohi: Ra ≤ 0.2 nm	Si-kanohi, C-kanohi: Ra ≤ 0.2 nm
Matotoru a (Tropel)	500.0 μm ± 25.0 μm	500.0 μm ± 25.0 μm
LTV (Tropel) (40mm x 40mm) a	≤ 2 µm	≤ 4 μm
Rerekētanga Matotoru Katoa (TTV) a (Tropel)	≤ 3 μm	≤ 5 μm
Kopere (Uara Tino) a (Tropel)	≤ 5 μm	≤ 15 μm
Whakapikohia (Tropel)	≤ 15 μm	≤ 30 μm
III. Ngā Tawhā Mata	III. Ngā Tawhā Mata	III. Ngā Tawhā Mata
Maramara/Notch	Kāore e whakaaetia	≤ 2 ngā wahi, ia roa me ia whānui ≤ 1.0 mm
Waruhia he (Si-kanohi, CS8520)	Te roa katoa ≤ 1 x Te whānui	Te roa katoa ≤ 3 x Te whānui
Matūriki a (Si-mata, CS8520)	≤ 500 ngā wahi	Kāore he
Pakaru	Kāore e whakaaetia	Kāore e whakaaetia
Te poke	Kāore e whakaaetia	Kāore e whakaaetia

Ngā Whakamahinga Matua o ngā Wafer SiC Haurua-Whakamaroke

Ngā Hikohiko Mana-TiketikeKa whai hua ngā MOSFET e hangai ana ki te SiC, ngā diode Schottky, me ngā kōwae mana mō ngā waka hiko (EV) i ngā āheinga ātete iti me te ngaohiko teitei o te SiC.
RF me te NgaruitiHe tino pai te mahi auau-teitei a SiC me te ātete ki te irahiko mō ngā whakakaha teihana turanga 5G, ngā kōwae radar, me ngā whakawhitiwhitinga amiorangi.
Ngā taputapu hikohikoKa whakamahia e ngā UV-LED, ngā taiaho kikorangi-reera, me ngā taputapu whakaahua ngā papa SiC maeneene ā-ngota hei whakatipu epitaxial ōrite.
Te Pūrongo Taiao Tino NuiNā te pumau o te SiC i ngā pāmahana teitei (>600 °C) he mea tino pai mō ngā pūoko i ngā taiao uaua, tae atu ki ngā tāpine hau me ngā pūoko karihi.
Rererangi me te TiakiKa roa te mau o ngā hikohiko mana i roto i ngā amiorangi, ngā pūnaha pere, me ngā hikohiko rererangi nā te SiC.
Rangahau MatatauNgā otinga ritenga mō te rorohiko irahiko, te moroiti-whatu, me ētahi atu tono rangahau motuhake.

Ngā Pātai Auau

He aha te take i whakamahia ai te SiC haurua-whakamaroke i runga ake i te SiC kawe hiko?
He nui ake te ātete o te SiC haurua-whakamaroke, e whakaiti ana i ngā ia turuturu i roto i ngā taputapu ngaohiko teitei me te auau teitei. He pai ake te SiC kawe hiko mō ngā tono e hiahiatia ana te kawe hiko.
Ka taea te whakamahi i ēnei papa angiangi mō te tipu epitaxial?
Ae, kua rite ēnei papa angiangi mō te MOCVD, HVPE, MBE rānei, me ngā maimoatanga mata me te whakahaere hapa hei whakarite i te kounga teitei o te paparanga epitaxial.
Me pēhea te whakarite kia ma te keke wafer?
Mā te tukanga horoi rūma Akomanga-100, te horoinga ultrasonic maha-taahiraa, me te takai hiri-hauota ka oati kia kore he poke, he toenga, me ngā karawarawa moroiti i roto i ngā papa.
Kia pēhea te roa o te wā e tukuna ai ngā ota?
Ko te tikanga ka tukuna ngā tauira i roto i ngā rā pakihi e 7–10, ko ngā ota whakaputa ka tukuna i roto i ngā wiki e 4–6, i runga i te rahi o te wafer me ngā āhuatanga ritenga.
Ka taea e koe te whakarato i ngā āhua ritenga?
Ae, ka taea e mātou te waihanga i ngā papa hanga ritenga i roto i ngā āhua rerekē pēnei i ngā matapihi papatahi, ngā awaawa-V, ngā karāhe porowhita, me te maha atu.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.