Taputapu Tapahi Mowhiti Wafer Aunoa Katoa Rahi Mahi 8inihi/12inihi Tapahi Mowhiti Wafer
Ngā tawhā hangarau
| Tawhā | Wāhanga | Whakatakotoranga |
| Rahi Mahi Mōrahi | mm | ø12" |
| Wīra | Whirihoranga | Kotahi te Wīra |
| Tere | 3,000–60,000 rpm | |
| Mana Putanga | 1.8 kW (2.4 kōwhiringa) i te 30,000 min⁻¹ | |
| Te Dia o te Mata Mōrahi. | Ø58 mm | |
| Tuaka-X | Awhe Tapahi | 310 mm |
| Tuaka-Y | Awhe Tapahi | 310 mm |
| Pikinga Hipanga | 0.0001 mm | |
| Te Tika o te Tūnga | ≤0.003 mm/310 mm, ≤0.002 mm/5 mm (hapa kotahi) | |
| Tuaka-Z | Whakataunga Nekehanga | 0.00005 mm |
| Te āheinga ki te whakahoki anō | 0.001 mm | |
| Tuaka-θ | Hurihanga Mōrahi | 380 nekehanga |
| Momo Wīra | Kotahi te miro, he mata pakari hei tapahi mowhiti | |
| Te Tika o te Tapahi Mowhiti | µm | ±50 |
| Te Tika o te Tūnga o te Wafer | µm | ±50 |
| Te Whai Hua o te Wafer Kotahi | meneti/wafer | 8 |
| Te Whai Hua o te Wafer Maha | Tae atu ki te 4 ngā papa angiangi ka tukatukahia i te wā kotahi | |
| Taumaha Taputapu | kg | ≈3,200 |
| Ngā Ahu Taputapu (W×H×T) | mm | 2,730 × 1,550 × 2,070 |
Kaupapa Whakahaere
Ka tutuki i te pūnaha te mahi tapahi tino pai mā roto i ēnei hangarau matua:
1. Pūnaha Whakahaere Nekehanga Atamai:
· Puku motuka raina tino tika (tika tūnga auau: ±0.5μm)
· Mana whakahaere tukutahi ono-tuaka e tautoko ana i te whakamahere ara uaua
· Ngā rauropi pehi wiri-tūturu e whakarite ana i te pumau o te tapahi
2. Pūnaha Kimi Matatau:
· Pūoko teitei taiaho 3D whakauru (tika: 0.1μm)
· Taunga tirohanga CCD teitei-taumira (5 megapixels)
· Wāhanga tirotiro kounga ipurangi
3. Tukanga Aunoa Katoa:
· Te uta/te tango aunoa (hototahi ki te atanga paerewa FOUP)
· Pūnaha whakarōpū atamai
· Wāhanga horoi porowhita-kati (ma: Akomanga 10)
Ngā tono noa
He nui te uara o tēnei taputapu puta noa i ngā tono hanga haurua-ā-ira:
| Mara tono | Ngā Rauemi Tukanga | Ngā Painga Hangarau |
| Hanga IC | Ngā Waferi Silikon 8/12" | Whakapai ake i te tūnga o te tuhi whakaahua |
| Ngā Pūrere Hiko | Ngā Wafer SiC/GaN | Ārai i ngā hapa taha |
| Ngā Pūoko MEMS | Ngā Wafer SOI | Ka whakarite i te pono o te taputapu |
| Ngā Pūrere RF | Ngā Wafer GaAs | Whakapai ake i te mahi auau teitei |
| Tākai Matatau | Ngā Waferi Kua Whakahouhia | Ka whakanui ake i te hua o te takai |
Ngā Āhuatanga
1. Whirihoranga teihana-whā mō te pai o te tukatuka;
2. Te wetewete me te tango i te mowhiti TAIKO pumau;
3. Hototahi teitei ki ngā taonga matua;
4. Mā te hangarau kuti tukutahi maha-tuaka ka tino tika te tapahi taha;
5. Ka tino whakaitihia ngā utu mahi e te rere o te tukanga aunoa;
6. Ko te hoahoa tēpu mahi ritenga ka taea te tukatuka pumau o ngā hanganga motuhake;
Ngā Mahi
1. Pūnaha kimi mowhiti-taka;
2. Horoi aunoa i te tēpu mahi;
3. Pūnaha tango hononga UV atamai;
4. Te tuhi i te rātaka mahi;
5. Whakaurunga mōrahi aunoatanga wheketere;
Te Whakapūmau Ratonga
Ka whakaratohia e XKH ngā ratonga tautoko whānui, katoa i roto i te huringa ora kua hangaia hei whakanui ake i te mahi a ngā taputapu me te whai huatanga whakahaere puta noa i tō haerenga whakaputa.
1. Ratonga Whakaritenga
· Whirihoranga Taputapu Whakaritea: Ka mahi tahi tā mātou tīma hangarau me ngā kiritaki ki te arotau i ngā tawhā pūnaha (tere tapahi, kōwhiringa mata, me ētahi atu) i runga i ngā āhuatanga rauemi motuhake (Si/SiC/GaAs) me ngā whakaritenga tukanga.
· Tautoko Whakawhanake Tukanga: Ka tukuna e mātou he tukatuka tauira me ngā pūrongo tātari taipitopito tae atu ki te ine i te taratara o te taha me te mahere hapa.
· Te Whakawhanake Ngātahi i ngā Rauemi Whakapau: Mō ngā rauemi hou (hei tauira, Ga₂O₃), ka mahi tahi mātou me ngā kaihanga matua o ngā rauemi whakapau hei whakawhanake i ngā mata/ngā whatu laser motuhake ki te tono.
2. Tautoko Hangarau Ngaio
· Tautoko Motuhake i te Pae: Whakaritea ngā miihini whaimana mō ngā wāhanga pikinga nui (te tikanga 2-4 wiki), e kapi ana i:
Te whakatikatika taputapu me te whakatikatika tukanga
Te whakangungu pūkenga kaiwhakahaere
Aratohu whakauru rūma ma ISO Akomanga 5
· Tiaki Matapae: Ngā tirotiro hauora ia hauwhā me te tātari wiri me te tātaritanga motuka servo hei ārai i te wā whakatā kore i whakamaheretia.
· Aroturuki Mamao: Te aroturuki i te mahi taputapu i te wā tūturu mā roto i tā mātou tūāpapa IoT (JCFront Connect®) me ngā whakatūpato rerekē aunoa.
3. Ngā Ratonga Tāpiri Uara
· Pūtake Mātauranga Tukanga: Whakauru atu ki te 300+ tohutao tapahi kua whakamanahia mō ngā momo rauemi (kua whakahoutia ia hauwhā).
· Te Whakaritenga o te Mahere Hangarau: Whakapakari i tō haumitanga ā muri ake nei mā te whakamahi i ngā ara whakahou taputapu/pūmanawa (hei tauira, te waeine kimi hapa e ahu mai ana i te AI).
· Urupare Āwhati: Kua whakamanahia te tātaritanga mamao mō ngā hāora 4 me te wawaotanga ā-papa mō ngā hāora 48 (kapinga ā-ao).
4. Hanganga Ratonga
· Taurangi Mahi: Te whakapau kaha kirimana ki te ≥98% te wā mahi o ngā taputapu me ngā wā urupare e tautokona ana e te SLA.
Whakapai Tonu
Ka whakahaerehia e mātou ngā rangahau mō te pai o te kiritaki i ia tau, ā, ka whakatinanahia hoki ngā kaupapa Kaizen hei whakapai ake i te tuku ratonga. Ka whakamaoritia e tā mātou tīma R&D ngā māramatanga mara ki ngā whakapainga taputapu - 30% o ngā whakapainga pūmanawa i ahu mai i ngā urupare a te kiritaki.
