Pūnaha Aronga Wafer mō te Ine Aronga Kiriata
Whakataki Taputapu
He taputapu tino tika ngā taputapu whakatakotoranga angiangi e ahu mai ana i ngā mātāpono o te diffraction hihi-X (XRD), e whakamahia nuitia ana i roto i te hanga semiconductor, ngā rauemi whatu, ngā uku, me ētahi atu ahumahi rauemi tioata.
Mā ēnei taputapu ka whakatau i te whakatakotoranga o te whatu karaihe, ā, ka ārahi hoki i ngā tukanga tapahi, whakakanapa rānei. Ko ngā āhuatanga matua ko:
- Ngā inenga tino tika:Ka taea te whakatau i ngā papa tioata me ngā taumira koki tae atu ki te 0.001°.
- Hototahitanga tauira nui:Ka tautoko i ngā angaanga tae atu ki te 450 mm te whānui me te taumaha o te 30 kg, he pai mō ngā rauemi pēnei i te silicon carbide (SiC), te hapaira, me te silicon (Si).
- Hoahoa ā-pūrere:Ko ngā āhuatanga ka taea te whakawhānui ko te tātari pihi ruku, te mahere koha mata 3D, me ngā taputapu whakarārangi mō te tukatuka tauira-maha.
Ngā Tawhā Hangarau Matua
| Kāwai Tawhā | Ngā Uara/Whirihoranga Noa |
| Pūtake hihi-X | Cu-Kα (ira arotahi 0.4×1 mm), ngaohiko whakatere 30 kV, iahiko ngongo whakarerekē 0–5 mA |
| Awhe Koki | θ: -10° ki te +50°; 2θ: -10° ki te +100° |
| Te tika | Taumira koki honga: 0.001°, kitenga hapa mata: ±30 hēkona āwhata (piko ru) |
| Tere Matawai | Ka oti te whakatakoto katoa o te whatunga i roto i te 5 hēkona; ka roa te matawai Theta ~1 meneti |
| Wāhanga Tauira | Awaawa-V, momi hau, hurihanga maha-koki, hototahi ki ngā anga 2–8-inihi |
| Ngā Mahi Whakawhanui | Tātaritanga pihi ru, mahere 3D, taputapu whakarārangi, kimi hapa whatu (ngā rakuraku, GB) |
Te Kaupapa Mahi
1. Te Pūtake Whakarerekētanga Hiko-X
- Ka taunekeneke ngā hihi-X me ngā karihi ngota me ngā irahiko i roto i te whatunga tioata, ka puta he tauira whakarara. Ko te Ture a Bragg (nλ = 2d sinθ) te mea e whakahaere ana i te whanaungatanga i waenga i ngā koki whakarara (θ) me te mokowā whatunga (d).
Ka hopukina e ngā taputapu kite ēnei tauira, ka tātarihia hei hanga anō i te hanganga tioata.
2. Hangarau Matawai Omega
- Ka hurihuri tonu te tioata i tētahi tuaka pumau, ka whakamāramahia e ngā hihi-X.
- Ka kohia e ngā taputapu kite ngā tohu whakawhitiwhiti puta noa i ngā papa tioata maha, ka taea ai te whakatau i te whakatakotoranga whatunga katoa i roto i te 5 hēkona.
3. Tātari Piko Ruku
- He koki karaihe pumau me ngā koki taunga hihi-X rerekē hei ine i te whānui o te tihi (FWHM), hei aromatawai i ngā hapa whatunga me te taumahatanga.
4. Mana Aunoa
- Mā ngā atanga PLC me te mata pa ka taea te whakarite i ngā koki tapahi kua whakaritea, te urupare wā-tūturu, me te whakaurunga ki ngā mīhini tapahi mō te whakahaere porowhita-kati.
Ngā Painga me ngā Āhuatanga
1. Te Tika me te Whai Hua
- Te tika o te koki ±0.001°, te taumira kimi hapa <30 hēkona āwhata.
- E 200x te tere o te matawai Omega i ngā matawai Theta tuku iho.
2. Te Āhuatanga me te Tauine
- Ka taea te whakawhanui mō ngā tono motuhake (hei tauira, ngā anga SiC, ngā mata tāpoi).
- Ka hono atu ki ngā pūnaha MES mō te aroturukitanga whakaputa wā-tūturu.
3. Hototahi me te Pūmautanga
- E whakauru ana ki ngā tauira āhua koretake (hei tauira, ngā poro hapaira pakaru).
- Ka whakaitihia te hiahia tiaki e te hoahoa hau-whakamatao.
4. Te Mahi Maamaa
- Te whakatikatika kotahi-pāwhiri me te tukatuka maha-mahi.
- Whakatikatika-aunoa me ngā tioata tohutoro hei whakaiti i te hapa tangata.
Ngā tono
1. Te Hanganga Ārahi-Haumaru
- Te whakatakotoranga o te tapahi anga: Te whakatau i ngā whakatakotoranga o te anga Si, SiC, GaN kia pai ake ai te whai huatanga o te tapahi.
- Mahere hapa: Ka tautuhi i ngā karawarawa mata, i ngā nekehanga rānei hei whakapai ake i te hua o te maramara.
2. Ngā Rauemi Whatu
- Ngā tioata kore-raina (hei tauira, LBO, BBO) mō ngā taputapu taiaho.
- Tohu mata tohutoro angiangi hapaira mō ngā papa LED.
3. Ngā Uku me ngā Mea Whakakotahi
- Ka tātari i te takotoranga o te witi i roto i te Si3N4 me te ZrO2 mō ngā tono pāmahana teitei.
4. Rangahau me te Whakahaere Kounga
- Ngā whare wānanga/taiwhanga mō te whakawhanaketanga rauemi hou (hei tauira, ngā koranu entropy-teitei).
- Te QC ahumahi hei whakarite i te ōritetanga o te puranga.
Ngā Ratonga a XKH
Ka tukuna e XKH te tautoko hangarau whānui mō ngā taputapu whakatakoto anga wafer, tae atu ki te tāutanga, te arotau i ngā tawhā tukanga, te tātari i te pihi ru, me te mahere hapa mata 3D. Ka whakaratohia ngā otinga kua whakaritea (hei tauira, te hangarau tāpae ingot) hei whakarei ake i te pai o te hanga rauemi haurua-ira me te whatu mā te neke atu i te 30%. Ka whakahaerehia e te tīma motuhake te whakangungu i te papaanga, ā, ko te tautoko mamao 24/7 me te whakakapinga wāhanga tāpui tere ka whakarite i te pono o te taputapu.
