He papa angiangi hāora-hauora, he papa angiangi matotoru, he papa angiangi, he papa whakamātautau hoki.
Whakauruhia te pouaka wafer
| Hua | Ngā papa waikura wera (Si+SiO2) |
| Tikanga Whakaputa | LPCVD |
| Te Whakakanapa Mata | SSP/DSP |
| Diameter | 2 inihi / 3 inihi / 4 inihi / 5 inihi / 6 inihi |
| Momo | Momo P / Momo N |
| Te matotoru o te paparanga waikura | 100nm ~1000nm |
| Te Whakatakotoranga | <100> <111> |
| Ātete hiko | 0.001-25000(Ω•cm) |
| Tono | Whakamahia mō te kawe tauira irahiko synchrotron, te paninga PVD/CVD hei papa, te tauira tipu magnetron sputtering, XRD, SEM,Te kaha atomika, te tirotiro irahiko pūwhero, te tirotiro irahiko fluorescence me ētahi atu papa whakamātautau tātari, ngā papa tipu epitaxial hihi ngota, te tātari hihi-X o ngā haurua-ā-ira tioata |
Ko ngā papa waikura silicon he kiriata hauhā silicon i whakatipuria ki runga i te mata o ngā papa silicon mā te hāora, te mamaoa wai rānei i ngā pāmahana teitei (800°C~1150°C) mā te whakamahi i te tukanga waikura wera me ngā taputapu ngongo oumu pēhanga hau. Ko te matotoru o te tukanga kei waenganui i te 50 nanometer ki te 2 microns, ko te pāmahana tukanga tae atu ki te 1100 nekehanga Celsius, ka wehea te tikanga whakatipu ki ngā momo e rua o te "hāora mākū" me te "hāora maroke". Ko te Waikura Wera he paparanga waikura "tipu", he rite ake te āhua, he pai ake te whakakī me te kaha dielectric teitei ake i ngā paparanga waikura kua whakatakotoria ki te CVD, ka hua ake he kounga teitei.
Te Waikura Hāora Maroke
Ka tauhohe te silicon ki te hāora, ā, ka neke tonu te paparanga waikura ki te paparanga papa. Me mahi te waikura maroke i ngā pāmahana mai i te 850 ki te 1200°C, me ngā tere tipu iti ake, ā, ka taea te whakamahi mō te tipu kuaha kua whakamahanatia e te MOS. He pai ake te waikura maroke i te waikura mākū ina hiahiatia he paparanga waikura silicon kounga teitei, tino angiangi. Te kaha waikura maroke: 15nm~300nm.
2. Te Waikura Makuku
Ka whakamahia e tēnei tikanga te mamaoa wai hei hanga i tētahi paparanga waikura mā te tomo ki roto i te ngongo oumu i raro i ngā āhuatanga pāmahana teitei. He paku kino ake te whakakīkī o te waikura hāora mākū i te waikura hāora maroke, engari ki te whakatauritea ki te waikura hāora maroke, ko tōna painga he tere ake te tipu, he pai mō te tipu kiriata neke atu i te 500nm. Te kaha waikura mākū: 500nm~2µm.
Ko te ngongo oumu whakahāngaitanga pēhanga hauhautanga a AEMD he ngongo oumu whakapae Czech, e tohuhia ana e te pumau tukatuka teitei, te ōritetanga kiriata pai me te whakahaere matūriki pai rawa atu. Ka taea e te ngongo oumu silicon oxide te tukatuka tae atu ki te 50 ngā anga ia ngongo, me te ōritetanga pai o roto me waenga-anga.
Kauwhata Taipitopito
