Wafer Epitaxial 4H-N HPSI SiC 6H-N 6H-P 3C-N SiC mō te MOS, te SBD rānei
Papa SiC Epi-wafer Poto
Kei a mātou he kohinga katoa o ngā papa SiC kounga teitei me ngā papa sic i roto i ngā momo polytype me ngā kōtaha doping—tae atu ki te 4H-N (kawe momo-n), 4H-P (kawe momo-p), 4H-HPSI (haurua-whakamaroke parakore teitei), me te 6H-P (kawe momo-p)—i roto i ngā diameter mai i te 4″, 6″, me te 8″ tae noa ki te 12″. Haunga ngā papa tahanga, ka tukuna e ā mātou ratonga tipu papa epi uara-tāpiri ngā papa epitaxial (epi) me te matotoru e tino whakahaeretia ana (1–20 µm), ngā kukū doping, me ngā kiato hapa.
Ka tirotirohia ia wafer sic me ia wafer epi kia tino matatau (te mātotoru o te micropipe <0.1 cm⁻², te taratara o te mata Ra <0.2 nm) me te whakaahuatanga hiko katoa (CV, mahere ātete) kia tino ōrite te tioata me te mahi. Ahakoa e whakamahia ana mō ngā waeine hiko mana, ngā whakakaha RF auau-teitei, ngā taputapu optoelectronic rānei (ngā LED, ngā photodetector), ka tukuna e ā mātou raina hua SiC me te wafer epi te pono, te pumau wera, me te kaha pakaru e hiahiatia ana e ngā tono tino uaua o ēnei rā.
Ngā āhuatanga me te whakamahinga o te momo SiC Substrate 4H-N
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Hanganga (Hexagonal) o te papa 4H-N SiC
Mā te whānui o te āputa irahiko o te ~3.26 eV ka pumau te mahi hiko me te pakari o te wera i raro i ngā āhuatanga pāmahana teitei me te mara hiko teitei.
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Papa SiCTe Whakatōnga Momo-N
Mā te tāpiri hauota e whakahaeretia tika ana ka puta he kukū kawe mai i te 1×10¹⁶ ki te 1×10¹⁹ cm⁻³ me te nekenekehanga irahiko i te pāmahana rūma tae atu ki te ~900 cm²/V·s, ka whakaitihia ngā ngaronga ara iahiko.
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Papa SiCĀtete Whānui me te Taurite
Ko te awhe ātete e wātea ana o te 0.01–10 Ω·cm me te matotoru o te paparanga 350–650 µm me te ±5% te manawanui i roto i te tāpiringa me te matotoru—he mea tino pai mō te hanga taputapu mana-tiketike.
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Papa SiCTe Matotoru Koha Tino-Iti
Ko te mātotoru o te paipa iti < 0.1 cm⁻² me te mātotoru o te nekehanga papa-papa < 500 cm⁻², e whakarato ana i te hua o te taputapu > 99% me te kounga tioata pai rawa atu.
- Papa SiCTe Arahi Wera Tino Pai
Mā te kawe wera tae atu ki te ~370 W/m·K ka taea te tango wera pai, ka whakanui ake i te pono o te taputapu me te mātotoru o te mana.
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Papa SiCNgā Taupānga Whāinga
Ngā MOSFET SiC, ngā diode Schottky, ngā kōwae hiko me ngā taputapu RF mō ngā puku waka hiko, ngā inverter pūngao rā, ngā puku ahumahi, ngā pūnaha kukume, me ētahi atu mākete hikohiko kaha e hiahiatia ana.
Ngā whakatakotoranga o te wafer SiC momo 4H-N 6inihi | ||
| Taonga | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Tau | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Diameter | 149.5 mm - 150.0 mm | 149.5 mm - 150.0 mm |
| Momo-maha | 4H | 4H |
| Matotoru | 350 µm ± 15 µm | 350 µm ± 25 µm |
| Te Aronga o te Wafer | Ki waho o te tuaka: 4.0° ki te <1120> ± 0.5° | Ki waho o te tuaka: 4.0° ki te <1120> ± 0.5° |
| Te Kīanga o te Paipa Maikoro | ≤ 0.2 henimita² | ≤ 15 henimita² |
| Ātete | 0.015 - 0.024 Ω·cm | 0.015 - 0.028 Ω·cm |
| Te whakatakotoranga papatahi tuatahi | [10-10] ± 50° | [10-10] ± 50° |
| Roa Papatahi Tuatahi | 475 mm ± 2.0 mm | 475 mm ± 2.0 mm |
| Te Whakakore i te Tapa | 3 mm | 3 mm |
| LTV/TIV / Kopere / Wīwī | ≤ 2.5 µm / ≤ 6 µm / ≤ 25 µm / ≤ 35 µm | ≤ 5 µm / ≤ 15 µm / ≤ 40 µm / ≤ 60 µm |
| Te taratara | Pōrana Ra ≤ 1 nm | Pōrana Ra ≤ 1 nm |
| CMP Ra | ≤ 0.2 nm | ≤ 0.5 nm |
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa | Te roa tāpiri ≤ 20 mm te roa kotahi ≤ 2 mm | Te roa tāpiri ≤ 20 mm te roa kotahi ≤ 2 mm |
| Pereti Hex mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 0.1% |
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 3% |
| Ngā Whakaurunga Waro Tirohanga | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 5% |
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Te roa tāpiri ≤ 1 te whānui o te anga | |
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei | Kāore e whakaaetia he whānui me te hohonu ≥ 0.2 mm | 7 e whakaaetia ana, ≤ 1 mm ia |
| Te Nekehanga o te Tīwiri Miro | < 500 henimita³ | < 500 henimita³ |
| Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei | ||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei |
Ngā whakatakotoranga o te wafer SiC momo 4H-N 8inihi | ||
| Taonga | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Tau | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Diameter | 199.5 mm - 200.0 mm | 199.5 mm - 200.0 mm |
| Momo-maha | 4H | 4H |
| Matotoru | 500 µm ± 25 µm | 500 µm ± 25 µm |
| Te Aronga o te Wafer | 4.0° ki te <110> ± 0.5° | 4.0° ki te <110> ± 0.5° |
| Te Kīanga o te Paipa Maikoro | ≤ 0.2 henimita² | ≤ 5 henimita² |
| Ātete | 0.015 - 0.025 Ω·cm | 0.015 - 0.028 Ω·cm |
| Te Aronga Rangatira | ||
| Te Whakakore i te Tapa | 3 mm | 3 mm |
| LTV/TIV / Kopere / Wīwī | ≤ 5 µm / ≤ 15 µm / ≤ 35 µm / 70 µm | ≤ 5 µm / ≤ 15 µm / ≤ 35 µm / 100 µm |
| Te taratara | Pōrana Ra ≤ 1 nm | Pōrana Ra ≤ 1 nm |
| CMP Ra | ≤ 0.2 nm | ≤ 0.5 nm |
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa | Te roa tāpiri ≤ 20 mm te roa kotahi ≤ 2 mm | Te roa tāpiri ≤ 20 mm te roa kotahi ≤ 2 mm |
| Pereti Hex mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 0.1% |
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 3% |
| Ngā Whakaurunga Waro Tirohanga | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 5% |
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Te roa tāpiri ≤ 1 te whānui o te anga | |
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei | Kāore e whakaaetia he whānui me te hohonu ≥ 0.2 mm | 7 e whakaaetia ana, ≤ 1 mm ia |
| Te Nekehanga o te Tīwiri Miro | < 500 henimita³ | < 500 henimita³ |
| Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei | ||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei |
He rauemi mahi-teitei te 4H-SiC e whakamahia ana mō ngā hikohiko mana, ngā taputapu RF, me ngā tono pāmahana-teitei. Ko te "4H" e pā ana ki te hanganga karaihe, he hexagonal, ā, ko te "N" e tohu ana i te momo tāpiringa e whakamahia ana hei whakapai ake i te mahi a te rauemi.
Te4H-SiCe whakamahia whānuitia ana te momo mō:
Te Hikohiko Mana:Whakamahia ana i roto i ngā taputapu pēnei i ngā diode, MOSFET, me ngā IGBT mō ngā pūnaha hiko waka hiko, ngā mīhini ahumahi, me ngā pūnaha pūngao whakahou.
Hangarau 5G:I te mea e hiahiatia ana ngā wāhanga auau-tiketike me te tino whai hua e te 5G, nā te kaha o SiC ki te whakahaere i ngā ngaohiko teitei me te mahi i ngā pāmahana teitei, he mea tino pai mō ngā whakakaha hiko teihana turanga me ngā taputapu RF.
Ngā Pūnaha Pūngao Rā:He tino pai ngā āhuatanga whakahaere hiko pai rawa atu o SiC mō ngā kaitahuri me ngā pūtahuri photovoltaic (mana o te rā).
Ngā Waka Hiko (EV):E whakamahia whānuitia ana te SiC i roto i ngā pūnaha hiko EV hei whakapiki i te pai o te hurihanga pūngao, hei whakaiti i te whakaputa wera, me te whakapiki ake i te kiato mana.
Ngā āhuatanga me te whakamahinga o te momo SiC Substrate 4H Semi-Insulating
Ngā Āhuatanga:
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Ngā tikanga whakahaere mātotoru kore-paipaKa whakarite kia kore he paipa moroiti, ka whakapai ake i te kounga o te papa.
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Ngā tikanga whakahaere monocrystalline: Ka whakamana i tētahi hanganga tioata kotahi hei whakarei ake i ngā āhuatanga rauemi.
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Ngā tikanga whakahaere whakaurungaKa whakaiti i te aroaro o ngā poke, ngā whakaurunga rānei, kia pai ai te āhua o te papa.
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Ngā tikanga whakahaere ātete: Ka taea te whakahaere tika i te ātete hiko, he mea nui tēnei mō te mahi a te taputapu.
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Ngā tikanga whakahaere me te whakahaere i te poke: Whakahaere me te whakawhāiti i te whakaurunga mai o ngā poke hei pupuri i te kounga o te papa.
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Ngā tikanga whakahaere whānui o ngā taahiraa papa: Ka whakarato i te mana whakahaere tika mō te whānui o ngā kaupae, kia rite ai te āhua puta noa i te papa
Whakatakotoranga papa 6Inihi 4H-haurua SiC | ||
| Taonga | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Diameter (mm) | 145 mm - 150 mm | 145 mm - 150 mm |
| Momo-maha | 4H | 4H |
| Matotoru (um) | 500 ± 15 | 500 ± 25 |
| Te Aronga o te Wafer | I runga i te tuaka: ±0.0001° | I runga i te tuaka: ±0.05° |
| Te Kīanga o te Paipa Maikoro | ≤ 15 cm-2 | ≤ 15 cm-2 |
| Ātete (Ωcm) | ≥ 10E3 | ≥ 10E3 |
| Te whakatakotoranga papatahi tuatahi | (0-10)° ± 5.0° | (10-10)° ± 5.0° |
| Roa Papatahi Tuatahi | Te kokoru | Te kokoru |
| Te Ārai Tapa (mm) | ≤ 2.5 µm / ≤ 15 µm | ≤ 5.5 µm / ≤ 35 µm |
| LTV / Peihana / Wāhanga | ≤ 3 µm | ≤ 3 µm |
| Te taratara | Pōrana Ra ≤ 1.5 µm | Pōrana Ra ≤ 1.5 µm |
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei | ≤ 20 µm | ≤ 60 µm |
| Ngā Pereti Wera mā te Mārama Kaha Teitei | Whakaemi ≤ 0.05% | Whakaemi ≤ 3% |
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Ngā Whakaurunga Waro Tirohanga ≤ 0.05% | Whakaemi ≤ 3% |
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | ≤ 0.05% | Whakaemi ≤ 4% |
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei (Rahi) | Kāore e whakaaetia kia > 02 mm te Whānui me te Hōhonu | Kāore e whakaaetia kia > 02 mm te Whānui me te Hōhonu |
| Te Whakawhanuitanga o te Tīwiri Āwhina | ≤ 500 µm | ≤ 500 µm |
| Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei | ≤ 1 x 10^5 | ≤ 1 x 10^5 |
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei |
Whakatakotoranga Papaaho SiC 4-Inihi 4H-Hapori-Whakamātao
| Tawhā | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
|---|---|---|
| Ngā Āhuatanga Ā-tinana | ||
| Diameter | 99.5 mm – 100.0 mm | 99.5 mm – 100.0 mm |
| Momo-maha | 4H | 4H |
| Matotoru | 500 μm ± 15 μm | 500 μm ± 25 μm |
| Te Aronga o te Wafer | I te tuaka: <600h > 0.5° | I runga i te tuaka: <000h > 0.5° |
| Ngā Āhuatanga Hiko | ||
| Te Matotoru o te Paipa Maikoro (MPD) | ≤1 henimita⁻² | ≤15 henimita⁻² |
| Ātete | ≥150 Ω·cm | ≥1.5 Ω·cm |
| Ngā Ātete Āhuahanga | ||
| Te whakatakotoranga papatahi tuatahi | (0x10) ± 5.0° | (0x10) ± 5.0° |
| Roa Papatahi Tuatahi | 52.5 mm ± 2.0 mm | 52.5 mm ± 2.0 mm |
| Roa Papatahi Tuarua | 18.0 mm ± 2.0 mm | 18.0 mm ± 2.0 mm |
| Te whakatakotoranga papatahi tuarua | 90° CW mai i te papatahi Matua ± 5.0° (Si anga whakarunga) | 90° CW mai i te papatahi Matua ± 5.0° (Si anga whakarunga) |
| Te Whakakore i te Tapa | 3 mm | 3 mm |
| LTV / TTV / Kopere / Wīwī | ≤2.5 μm / ≤5 μm / ≤15 μm / ≤30 μm | ≤10 μm / ≤15 μm / ≤25 μm / ≤40 μm |
| Kounga Mata | ||
| Te Pākari o te Mata (Poronīhi Ra) | ≤1 nm | ≤1 nm |
| Te Pākari o te Mata (CMP Ra) | ≤0.2 nm | ≤0.2 nm |
| Ngā Kapiti Tapa (Te Mārama Kaha-Nui) | Kāore e whakaaetia | Te roa tāpiri ≥10 mm, te kapiti kotahi ≤2 mm |
| Ngā Koha o te Pereti Hexagonal | ≤0.05% horahanga whakaemi | ≤0.1% horahanga whakaemi |
| Ngā Wāhi Whakauru Polytype | Kāore e whakaaetia | ≤1% te horahanga whakaemi |
| Ngā Whakaurunga Waro Tirohanga | ≤0.05% horahanga whakaemi | ≤1% te horahanga whakaemi |
| Ngā Karakura Mata Silicon | Kāore e whakaaetia | ≤1 te whānui o te angaanga, te roanga whakaemi |
| Maramara Tapa | Kāore e whakaaetia (≥0.2 mm te whānui/te hohonu) | ≤5 maramara (ia maramara ≤1 mm) |
| Te Parahanga o te Mata Silicon | Kāore i tohua | Kāore i tohua |
| Tākai | ||
| Tākai | Rīpene anga-maha, ipu anga-kotahi rānei | Rīpene angiangi maha, rānei |
Taupānga:
TeNgā papa SiC 4H Āhua-Whakamātaoe whakamahia ana i roto i ngā taputapu hiko mana-teitei me te auau-teitei, inā koa i roto i ngāMara RFHe mea nui ēnei papa mō ngā momo mahi tae atu kingā pūnaha whakawhitiwhiti kōrero ngaruiti, radar rarangi ā-wāhanga, mengā pūoko hiko ahokoreNā te kaha o te kawe wera me ngā āhuatanga hiko tino pai, he mea tino pai mō ngā tono uaua i roto i ngā hikohiko mana me ngā pūnaha whakawhitiwhiti kōrero.
Ngā āhuatanga me te whakamahinga o te SiC epi wafer momo 4H-N
Ngā Āhuatanga me ngā Whakamahinga o te Wafer Epi Momo SiC 4H-N
Ngā Āhuatanga o te Wafer Epi Momo SiC 4H-N:
Te Hanganga o ngā Rauemi:
SiC (Karapi Hiraka)E mōhiotia ana mō tōna pakeke tino pai, tōna kawe wera teitei, me ōna āhuatanga hiko tino pai, he mea tino pai te SiC mō ngā taputapu hiko mahi teitei.
Momo-maha 4H-SiCE mōhiotia ana te momo 4H-SiC mō tōna tino whai huatanga me te pumau i roto i ngā tono hiko.
Te Whakatōpā Momo-NMā te tāpiritanga momo-N (kua tāpirihia ki te hauota) ka pai te nekenekehanga irahiko, ka pai ai te SiC mō ngā tono auau-tiketike me te mana-tiketike.
Te Awe Wera Teitei:
He pai ake te kawe wera o ngā papa SiC, mai i te120–200 W/m·K, e āhei ai rātou ki te whakahaere tika i te wera i roto i ngā taputapu mana-tiketike pērā i ngā transistors me ngā diodes.
Āputa Whānui:
Me te āputa o te whitiki3.26 eV, ka taea e te 4H-SiC te mahi i ngā ngaohiko, ngā auau, me ngā pāmahana teitei ake ki te whakaritea ki ngā taputapu hiko-silicon tuku iho, he mea tino pai mō ngā tono tino whai hua, tino mahi.
Ngā Āhuatanga Hiko:
Nā te nekehanga teitei me te kawe hiko o te SiC he mea tino pai mōhikohiko mana, e tuku ana i ngā tere whakawhiti tere me te kaha whakahaere iahiko me te ngaohiko teitei, ka hua ake he pūnaha whakahaere mana whai hua ake.
Ātete Ā-Mīhini me te Ātete Matū:
Ko te SiC tētahi o ngā rauemi tino mārō, tuarua i te taimana anake, ā, he tino ātete ki te waikura me te waikura, nō reira he pakari i roto i ngā taiao uaua.
Ngā tono o te SiC 4H-N Momo Epi Wafer:
Te Hikohiko Mana:
He whānuitia te whakamahinga o ngā papa epi momo SiC 4H-N i roto ingā MOSFET mana, Ngā IGBT, mengā diodemōte hurihanga hikoi roto i ngā pūnaha pērā ingā kaitahuri pūngao rā, ngā waka hiko, mengā pūnaha rokiroki pūngao, e tuku ana i te mahi pai ake me te whai huatanga o te pūngao.
Ngā Waka Hiko (EV):
In ngā pūnaha hiko o ngā waka hiko, ngā kaiwhakahaere motuka, mengā teihana utu, ka āwhina ngā anga SiC ki te whakatutuki i te pai o te mahi a te pākahiko, te tere o te utu, me te whakapai ake i te mahi pūngao whānui nā tō rātou kaha ki te whakahaere i te mana me ngā pāmahana tiketike.
Ngā Pūnaha Pūngao Whakahou:
Ngā Hurihuri Rā: E whakamahia ana ngā papa SiC i roto ingā pūnaha pūngao rāhei huri i te hiko DC mai i ngā panera rā ki te hiko AC, hei whakanui ake i te whai huatanga me te mahi a te pūnaha whānui.
Ngā Tāpine Hau: E whakamahia ana te hangarau SiC i roto ingā pūnaha whakahaere hau, te arotau i te whai huatanga o te whakaputa hiko me te hurihanga.
Te Rererangi me te Tiaki:
He pai rawa ngā papa SiC mō te whakamahi i roto ingā hikohiko ā-rangimengā tono hōia, tae atu kingā pūnaha radarmengā hiko amiorangi, te wāhi e tino hira ai te ātete teitei ki te irahiko me te pumau o te wera.
Ngā tono pāmahana-teitei me te auau-teitei:
He tino pai ngā wafer SiCngā hikohiko pāmahana teitei, e whakamahia ana i roto ingā miihini rererangi, waka mokowhiti, mengā pūnaha whakamahana ahumahi, i te mea ka mau tonu tā rātou mahi i roto i ngā āhuatanga wera nui. Hei tāpiri, ko tō rātou āputa whānui e āhei ai te whakamahi i roto ingā tono auau teiteiriteNgā taputapu RFmengā whakawhitiwhiti kōrero ngaruiti.
| Whakatakotoranga axial epit momo-N 6-inihi | |||
| Tawhā | waeine | Z-MOS | |
| Momo | Te Aroturukitanga / Te Tāpiri | - | Momo-N / Hauota |
| Apa Pūrua | Matotoru o te Apa Pūwero | um | 1 |
| Te Manawanui ki te Matotoru o te Apa Pūwero | % | ±20% | |
| Te Kukū o te Papa Pūwero | cm-3 | 1.00E+18 | |
| Te Manawanui ki te Kukū o te Papa Pūwero | % | ±20% | |
| Paparanga Epi Tuatahi | Matotoru o te Paparanga Epi | um | 11.5 |
| Te ōritetanga o te matotoru o te paparanga Epi | % | ±4% | |
| Te Manawanui Matotoru o ngā Papa Epi((Spec- Teitei (Mōrahi), Te Iti)/Te Whakatakotoranga) | % | ±5% | |
| Te Kukū o te Papa Epi | cm-3 | 1E 15~ 1E 18 | |
| Te Manawanui ki te Kukū o te Papa Epi | % | 6% | |
| Te ōritetanga o te kukū o te paparanga Epi (σ /te tikanga) | % | ≤5% | |
| Te ōritetanga o te kukū o te paparanga Epi <(mōrahi-iti rawa)/(mōrahi+iti rawa> | % | ≤ 10% | |
| Āhua o te Angaanga Epitaixal | Kopere | um | ≤±20 |
| WHAWHĀ | um | ≤30 | |
| TTV | um | ≤ 10 | |
| LTV | um | ≤2 | |
| Ngā Āhuatanga Whānui | Te roa o ngā karawarawa | mm | ≤30mm |
| Maramara Tapa | - | KĀORE | |
| Te whakamāramatanga o ngā hapa | ≥97% （I inehia ki te 2*2） Kei roto i ngā hapa kino: Paipa iti / Ngā rua nui, Kāreti, Tapatoru | ||
| Parahanga whakarewa | ngā ngota/cm² | d f f ll i ≤5E10 ngota/cm2 (Al, Cr, Fe, Ni, Cu, Zn, (Hg,Na,K,Ti,Ca me teMn) | |
| Mōkihi | Ngā whakaritenga mō te tākai | ngā pcs/pouaka | rīpene anga maha, ipu anga kotahi rānei |
| Whakatakotoranga epitaxial momo-N 8-inihi | |||
| Tawhā | waeine | Z-MOS | |
| Momo | Te Aroturukitanga / Te Tāpiri | - | Momo-N / Hauota |
| Paparanga ārai | Matotoru o te Apa Pūwero | um | 1 |
| Te Manawanui ki te Matotoru o te Apa Pūwero | % | ±20% | |
| Te Kukū o te Papa Pūwero | cm-3 | 1.00E+18 | |
| Te Manawanui ki te Kukū o te Papa Pūwero | % | ±20% | |
| Paparanga Epi Tuatahi | Te Matotoru Toharite o ngā Paparanga Epi | um | 8~ 12 |
| Te Matotoru o ngā Papa Epi Te ōritetanga (σ/toharite) | % | ≤2.0 | |
| Te Manawanui Matotoru o ngā Papa Epi ((Spec -Max，Min)/Spec) | % | ±6 | |
| Te Tohatoha Kupenga o ngā Papa Epi | cm-3 | 8E+15 ~2E+16 | |
| Te ōritetanga o te Doping Kupenga o ngā Papa Epi (σ/toharite) | % | ≤5 | |
| Te Manawanui ki te Doping Kupenga o ngā Papa Epi ((Spec -Max， | % | ± 10.0 | |
| Āhua o te Angaanga Epitaixal | Mi )/S ) Wāwhati | um | ≤50.0 |
| Kopere | um | ± 30.0 | |
| TTV | um | ≤ 10.0 | |
| LTV | um | ≤4.0 (10mm×10mm) | |
| Whānui Ngā Āhuatanga | Ngā karawarawa | - | Te roa tāpiri ≤ 1/2 Diameter o te wafer |
| Maramara Tapa | - | ≤2 maramara, Ia pūtoro ≤1.5mm | |
| Te Parahanga o ngā Konganuku Mata | ngā ngota/cm2 | ≤5E10 ngota/cm2 (Al, Cr, Fe, Ni, Cu, Zn, (Hg,Na,K,Ti,Ca me teMn) | |
| Tirotiro Hapa | % | ≥ 96.0 (Ko ngā hapa 2X2 ko ngā paipa iti/ngā poka nui, Kāreti, Ngā hapa tapatoru, Ngā hinganga, (Raina/IGSF-s, BPD) | |
| Te Parahanga o ngā Konganuku Mata | ngā ngota/cm2 | ≤5E10 ngota/cm2 (Al, Cr, Fe, Ni, Cu, Zn, (Hg,Na,K,Ti,Ca me teMn) | |
| Mōkihi | Ngā whakaritenga mō te tākai | - | rīpene anga maha, ipu anga kotahi rānei |
Ngā Pātai me ngā Whakautu a te Wafer SiC
P1: He aha ngā painga matua o te whakamahi i ngā anga SiC ki ngā anga silicon tuku iho i roto i ngā hikohiko mana?
A1:
He maha ngā painga matua o ngā anga SiC ki ngā anga silicon (Si) tuku iho i roto i ngā hikohiko mana, tae atu ki:
Te Whai Huatanga Teitei AkeHe whānui ake te āputa o te SiC (3.26 eV) ki te whakaritea ki te silicon (1.1 eV), ā, ka taea e ngā taputapu te mahi i ngā ngaohiko, ngā auau, me ngā pāmahana teitei ake. Ka hua ake tēnei i te iti o te ngaronga hiko me te pai ake o te whai huatanga i roto i ngā pūnaha hurihanga hiko.
Te Awe Wera TeiteiHe nui ake te kawe wera o te SiC i tō te silicon, e āhei ai te tohatoha wera pai ake i ngā tono mana-tiketike, e whakapai ake ana i te pono me te roa o te ora o ngā taputapu hiko.
Te Whakahaere i te Ngaohiko me te Auaha TeiteiKa taea e ngā taputapu SiC te whakahaere i ngā taumata ngaohiko me te iahiko teitei ake, e tika ana mō ngā tono mana-tiketike pēnei i ngā waka hiko, ngā pūnaha pūngao whakahou, me ngā puku motuka ahumahi.
Tere Whakawhiti TereHe tere ake ngā āheinga whakawhiti a ngā taputapu SiC, e whai wāhi ana ki te whakaiti i te ngaronga pūngao me te rahi o te pūnaha, e pai ai mō ngā tono auau-tiketike.
Q2: He aha ngā whakamahinga matua o ngā anga SiC i roto i te umanga motuka?
A2:
I roto i te umanga motuka, ka whakamahia ngā wafer SiC i roto i:
Ngā Pūkaha Waka Hiko (EV)Ngā wāhanga e hangai ana ki te SiC pērā ingā kaitahurimengā MOSFET manawhakapai ake i te whai huatanga me te mahi a ngā pūnaha hiko o ngā waka hiko mā te whakahohe i ngā tere whakawhiti tere me te kiato pūngao teitei ake. Ka hua ake tēnei i te roa o te ora o te pākahiko me te pai ake o te mahi a te waka whānui.
Ngā Utu Whakamahi i runga i te PapaMā ngā taputapu SiC ka pai ake te whai huatanga o ngā pūnaha utu hiko i runga i te papa mā te whakahohe i ngā wā utu tere ake me te whakahaere wera pai ake, he mea nui tēnei mō ngā EV kia tautoko i ngā teihana utu hiko-teitei.
Ngā Pūnaha Whakahaere Pūhiko (BMS): Ka whakapai ake te hangarau SiC i te whai huatanga ongā pūnaha whakahaere pākahiko, e āhei ai te whakahaere ngaohiko pai ake, te whakahaere mana nui ake, me te roa ake o te ora o te pākahiko.
Ngā Kaitahuri DC-DC: E whakamahia ana ngā papa SiC i roto iNgā kaitahuri DC-DCkia pai ake ai te huri i te mana DC ngaohiko tiketike ki te mana DC ngaohiko iti, he mea nui tēnei i roto i ngā waka hiko hei whakahaere i te mana mai i te pākahiko ki ngā wāhanga rerekē o te waka.
Nā te pai o te mahi a SiC i roto i ngā tono hiko-tiketike, pāmahana-tiketike, me te whai hua-tiketike, he mea nui tēnei mō te nekehanga a te umanga motuka ki te nekenekehanga hiko.
Ngā whakatakotoranga o te wafer SiC momo 4H-N 6inihi | ||
| Taonga | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Tau | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Diameter | 149.5 mm – 150.0 mm | 149.5 mm – 150.0 mm |
| Momo-maha | 4H | 4H |
| Matotoru | 350 µm ± 15 µm | 350 µm ± 25 µm |
| Te Aronga o te Wafer | Ki waho o te tuaka: 4.0° ki te <1120> ± 0.5° | Ki waho o te tuaka: 4.0° ki te <1120> ± 0.5° |
| Te Kīanga o te Paipa Maikoro | ≤ 0.2 henimita² | ≤ 15 henimita² |
| Ātete | 0.015 – 0.024 Ω·cm | 0.015 – 0.028 Ω·cm |
| Te whakatakotoranga papatahi tuatahi | [10-10] ± 50° | [10-10] ± 50° |
| Roa Papatahi Tuatahi | 475 mm ± 2.0 mm | 475 mm ± 2.0 mm |
| Te Whakakore i te Tapa | 3 mm | 3 mm |
| LTV/TIV / Kopere / Wīwī | ≤ 2.5 µm / ≤ 6 µm / ≤ 25 µm / ≤ 35 µm | ≤ 5 µm / ≤ 15 µm / ≤ 40 µm / ≤ 60 µm |
| Te taratara | Pōrana Ra ≤ 1 nm | Pōrana Ra ≤ 1 nm |
| CMP Ra | ≤ 0.2 nm | ≤ 0.5 nm |
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa | Te roa tāpiri ≤ 20 mm te roa kotahi ≤ 2 mm | Te roa tāpiri ≤ 20 mm te roa kotahi ≤ 2 mm |
| Pereti Hex mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 0.1% |
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 3% |
| Ngā Whakaurunga Waro Tirohanga | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 5% |
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Te roa tāpiri ≤ 1 te whānui o te anga | |
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei | Kāore e whakaaetia he whānui me te hohonu ≥ 0.2 mm | 7 e whakaaetia ana, ≤ 1 mm ia |
| Te Nekehanga o te Tīwiri Miro | < 500 henimita³ | < 500 henimita³ |
| Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei | ||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei |
Ngā whakatakotoranga o te wafer SiC momo 4H-N 8inihi | ||
| Taonga | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Tau | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Diameter | 199.5 mm – 200.0 mm | 199.5 mm – 200.0 mm |
| Momo-maha | 4H | 4H |
| Matotoru | 500 µm ± 25 µm | 500 µm ± 25 µm |
| Te Aronga o te Wafer | 4.0° ki te <110> ± 0.5° | 4.0° ki te <110> ± 0.5° |
| Te Kīanga o te Paipa Maikoro | ≤ 0.2 henimita² | ≤ 5 henimita² |
| Ātete | 0.015 – 0.025 Ω·cm | 0.015 – 0.028 Ω·cm |
| Te Aronga Rangatira | ||
| Te Whakakore i te Tapa | 3 mm | 3 mm |
| LTV/TIV / Kopere / Wīwī | ≤ 5 µm / ≤ 15 µm / ≤ 35 µm / 70 µm | ≤ 5 µm / ≤ 15 µm / ≤ 35 µm / 100 µm |
| Te taratara | Pōrana Ra ≤ 1 nm | Pōrana Ra ≤ 1 nm |
| CMP Ra | ≤ 0.2 nm | ≤ 0.5 nm |
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa | Te roa tāpiri ≤ 20 mm te roa kotahi ≤ 2 mm | Te roa tāpiri ≤ 20 mm te roa kotahi ≤ 2 mm |
| Pereti Hex mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 0.1% |
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 3% |
| Ngā Whakaurunga Waro Tirohanga | Te horahanga tāpiri ≤ 0.05% | Te horahanga tāpiri ≤ 5% |
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Te roa tāpiri ≤ 1 te whānui o te anga | |
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei | Kāore e whakaaetia he whānui me te hohonu ≥ 0.2 mm | 7 e whakaaetia ana, ≤ 1 mm ia |
| Te Nekehanga o te Tīwiri Miro | < 500 henimita³ | < 500 henimita³ |
| Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei | ||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei |
Whakatakotoranga papa 6Inihi 4H-haurua SiC | ||
| Taonga | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
| Diameter (mm) | 145 mm – 150 mm | 145 mm – 150 mm |
| Momo-maha | 4H | 4H |
| Matotoru (um) | 500 ± 15 | 500 ± 25 |
| Te Aronga o te Wafer | I runga i te tuaka: ±0.0001° | I runga i te tuaka: ±0.05° |
| Te Kīanga o te Paipa Maikoro | ≤ 15 cm-2 | ≤ 15 cm-2 |
| Ātete (Ωcm) | ≥ 10E3 | ≥ 10E3 |
| Te whakatakotoranga papatahi tuatahi | (0-10)° ± 5.0° | (10-10)° ± 5.0° |
| Roa Papatahi Tuatahi | Te kokoru | Te kokoru |
| Te Ārai Tapa (mm) | ≤ 2.5 µm / ≤ 15 µm | ≤ 5.5 µm / ≤ 35 µm |
| LTV / Peihana / Wāhanga | ≤ 3 µm | ≤ 3 µm |
| Te taratara | Pōrana Ra ≤ 1.5 µm | Pōrana Ra ≤ 1.5 µm |
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei | ≤ 20 µm | ≤ 60 µm |
| Ngā Pereti Wera mā te Mārama Kaha Teitei | Whakaemi ≤ 0.05% | Whakaemi ≤ 3% |
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Ngā Whakaurunga Waro Tirohanga ≤ 0.05% | Whakaemi ≤ 3% |
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | ≤ 0.05% | Whakaemi ≤ 4% |
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei (Rahi) | Kāore e whakaaetia kia > 02 mm te Whānui me te Hōhonu | Kāore e whakaaetia kia > 02 mm te Whānui me te Hōhonu |
| Te Whakawhanuitanga o te Tīwiri Āwhina | ≤ 500 µm | ≤ 500 µm |
| Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei | ≤ 1 x 10^5 | ≤ 1 x 10^5 |
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei |
Whakatakotoranga Papaaho SiC 4-Inihi 4H-Hapori-Whakamātao
| Tawhā | Kore Tohu Whakaputa MPD (Tohu Z) | Taumata Rūpahu (Taumata D) |
|---|---|---|
| Ngā Āhuatanga Ā-tinana | ||
| Diameter | 99.5 mm – 100.0 mm | 99.5 mm – 100.0 mm |
| Momo-maha | 4H | 4H |
| Matotoru | 500 μm ± 15 μm | 500 μm ± 25 μm |
| Te Aronga o te Wafer | I te tuaka: <600h > 0.5° | I runga i te tuaka: <000h > 0.5° |
| Ngā Āhuatanga Hiko | ||
| Te Matotoru o te Paipa Maikoro (MPD) | ≤1 henimita⁻² | ≤15 henimita⁻² |
| Ātete | ≥150 Ω·cm | ≥1.5 Ω·cm |
| Ngā Ātete Āhuahanga | ||
| Te whakatakotoranga papatahi tuatahi | (0×10) ± 5.0° | (0×10) ± 5.0° |
| Roa Papatahi Tuatahi | 52.5 mm ± 2.0 mm | 52.5 mm ± 2.0 mm |
| Roa Papatahi Tuarua | 18.0 mm ± 2.0 mm | 18.0 mm ± 2.0 mm |
| Te whakatakotoranga papatahi tuarua | 90° CW mai i te papatahi Matua ± 5.0° (Si anga whakarunga) | 90° CW mai i te papatahi Matua ± 5.0° (Si anga whakarunga) |
| Te Whakakore i te Tapa | 3 mm | 3 mm |
| LTV / TTV / Kopere / Wīwī | ≤2.5 μm / ≤5 μm / ≤15 μm / ≤30 μm | ≤10 μm / ≤15 μm / ≤25 μm / ≤40 μm |
| Kounga Mata | ||
| Te Pākari o te Mata (Poronīhi Ra) | ≤1 nm | ≤1 nm |
| Te Pākari o te Mata (CMP Ra) | ≤0.2 nm | ≤0.2 nm |
| Ngā Kapiti Tapa (Te Mārama Kaha-Nui) | Kāore e whakaaetia | Te roa tāpiri ≥10 mm, te kapiti kotahi ≤2 mm |
| Ngā Koha o te Pereti Hexagonal | ≤0.05% horahanga whakaemi | ≤0.1% horahanga whakaemi |
| Ngā Wāhi Whakauru Polytype | Kāore e whakaaetia | ≤1% te horahanga whakaemi |
| Ngā Whakaurunga Waro Tirohanga | ≤0.05% horahanga whakaemi | ≤1% te horahanga whakaemi |
| Ngā Karakura Mata Silicon | Kāore e whakaaetia | ≤1 te whānui o te angaanga, te roanga whakaemi |
| Maramara Tapa | Kāore e whakaaetia (≥0.2 mm te whānui/te hohonu) | ≤5 maramara (ia maramara ≤1 mm) |
| Te Parahanga o te Mata Silicon | Kāore i tohua | Kāore i tohua |
| Tākai | ||
| Tākai | Rīpene anga-maha, ipu anga-kotahi rānei | Rīpene angiangi maha, rānei |
| Whakatakotoranga axial epit momo-N 6-inihi | |||
| Tawhā | waeine | Z-MOS | |
| Momo | Te Aroturukitanga / Te Tāpiri | - | Momo-N / Hauota |
| Apa Pūrua | Matotoru o te Apa Pūwero | um | 1 |
| Te Manawanui ki te Matotoru o te Apa Pūwero | % | ±20% | |
| Te Kukū o te Papa Pūwero | cm-3 | 1.00E+18 | |
| Te Manawanui ki te Kukū o te Papa Pūwero | % | ±20% | |
| Paparanga Epi Tuatahi | Matotoru o te Paparanga Epi | um | 11.5 |
| Te ōritetanga o te matotoru o te paparanga Epi | % | ±4% | |
| Te Manawanui Matotoru o ngā Papa Epi((Spec- Teitei (Mōrahi), Te Iti)/Te Whakatakotoranga) | % | ±5% | |
| Te Kukū o te Papa Epi | cm-3 | 1E 15~ 1E 18 | |
| Te Manawanui ki te Kukū o te Papa Epi | % | 6% | |
| Te ōritetanga o te kukū o te paparanga Epi (σ /te tikanga) | % | ≤5% | |
| Te ōritetanga o te kukū o te paparanga Epi <(mōrahi-iti rawa)/(mōrahi+iti rawa> | % | ≤ 10% | |
| Āhua o te Angaanga Epitaixal | Kopere | um | ≤±20 |
| WHAWHĀ | um | ≤30 | |
| TTV | um | ≤ 10 | |
| LTV | um | ≤2 | |
| Ngā Āhuatanga Whānui | Te roa o ngā karawarawa | mm | ≤30mm |
| Maramara Tapa | - | KĀORE | |
| Te whakamāramatanga o ngā hapa | ≥97% （I inehia ki te 2*2） Kei roto i ngā hapa kino: Paipa iti / Ngā rua nui, Kāreti, Tapatoru | ||
| Parahanga whakarewa | ngā ngota/cm² | d f f ll i ≤5E10 ngota/cm2 (Al, Cr, Fe, Ni, Cu, Zn, (Hg,Na,K,Ti,Ca me teMn) | |
| Mōkihi | Ngā whakaritenga mō te tākai | ngā pcs/pouaka | rīpene anga maha, ipu anga kotahi rānei |
| Whakatakotoranga epitaxial momo-N 8-inihi | |||
| Tawhā | waeine | Z-MOS | |
| Momo | Te Aroturukitanga / Te Tāpiri | - | Momo-N / Hauota |
| Paparanga ārai | Matotoru o te Apa Pūwero | um | 1 |
| Te Manawanui ki te Matotoru o te Apa Pūwero | % | ±20% | |
| Te Kukū o te Papa Pūwero | cm-3 | 1.00E+18 | |
| Te Manawanui ki te Kukū o te Papa Pūwero | % | ±20% | |
| Paparanga Epi Tuatahi | Te Matotoru Toharite o ngā Paparanga Epi | um | 8~ 12 |
| Te Matotoru o ngā Papa Epi Te ōritetanga (σ/toharite) | % | ≤2.0 | |
| Te Manawanui Matotoru o ngā Papa Epi ((Spec -Max，Min)/Spec) | % | ±6 | |
| Te Tohatoha Kupenga o ngā Papa Epi | cm-3 | 8E+15 ~2E+16 | |
| Te ōritetanga o te Doping Kupenga o ngā Papa Epi (σ/toharite) | % | ≤5 | |
| Te Manawanui ki te Doping Kupenga o ngā Papa Epi ((Spec -Max， | % | ± 10.0 | |
| Āhua o te Angaanga Epitaixal | Mi )/S ) Wāwhati | um | ≤50.0 |
| Kopere | um | ± 30.0 | |
| TTV | um | ≤ 10.0 | |
| LTV | um | ≤4.0 (10mm×10mm) | |
| Whānui Ngā Āhuatanga | Ngā karawarawa | - | Te roa tāpiri ≤ 1/2 Diameter o te wafer |
| Maramara Tapa | - | ≤2 maramara, Ia pūtoro ≤1.5mm | |
| Te Parahanga o ngā Konganuku Mata | ngā ngota/cm2 | ≤5E10 ngota/cm2 (Al, Cr, Fe, Ni, Cu, Zn, (Hg,Na,K,Ti,Ca me teMn) | |
| Tirotiro Hapa | % | ≥ 96.0 (Ko ngā hapa 2X2 ko ngā paipa iti/ngā poka nui, Kāreti, Ngā hapa tapatoru, Ngā hinganga, (Raina/IGSF-s, BPD) | |
| Te Parahanga o ngā Konganuku Mata | ngā ngota/cm2 | ≤5E10 ngota/cm2 (Al, Cr, Fe, Ni, Cu, Zn, (Hg,Na,K,Ti,Ca me teMn) | |
| Mōkihi | Ngā whakaritenga mō te tākai | - | rīpene anga maha, ipu anga kotahi rānei |
P1: He aha ngā painga matua o te whakamahi i ngā anga SiC ki ngā anga silicon tuku iho i roto i ngā hikohiko mana?
A1:
He maha ngā painga matua o ngā anga SiC ki ngā anga silicon (Si) tuku iho i roto i ngā hikohiko mana, tae atu ki:
Te Whai Huatanga Teitei AkeHe whānui ake te āputa o te SiC (3.26 eV) ki te whakaritea ki te silicon (1.1 eV), ā, ka taea e ngā taputapu te mahi i ngā ngaohiko, ngā auau, me ngā pāmahana teitei ake. Ka hua ake tēnei i te iti o te ngaronga hiko me te pai ake o te whai huatanga i roto i ngā pūnaha hurihanga hiko.
Te Awe Wera TeiteiHe nui ake te kawe wera o te SiC i tō te silicon, e āhei ai te tohatoha wera pai ake i ngā tono mana-tiketike, e whakapai ake ana i te pono me te roa o te ora o ngā taputapu hiko.
Te Whakahaere i te Ngaohiko me te Auaha TeiteiKa taea e ngā taputapu SiC te whakahaere i ngā taumata ngaohiko me te iahiko teitei ake, e tika ana mō ngā tono mana-tiketike pēnei i ngā waka hiko, ngā pūnaha pūngao whakahou, me ngā puku motuka ahumahi.
Tere Whakawhiti TereHe tere ake ngā āheinga whakawhiti a ngā taputapu SiC, e whai wāhi ana ki te whakaiti i te ngaronga pūngao me te rahi o te pūnaha, e pai ai mō ngā tono auau-tiketike.
Q2: He aha ngā whakamahinga matua o ngā anga SiC i roto i te umanga motuka?
A2:
I roto i te umanga motuka, ka whakamahia ngā wafer SiC i roto i:
Ngā Pūkaha Waka Hiko (EV)Ngā wāhanga e hangai ana ki te SiC pērā ingā kaitahurimengā MOSFET manawhakapai ake i te whai huatanga me te mahi a ngā pūnaha hiko o ngā waka hiko mā te whakahohe i ngā tere whakawhiti tere me te kiato pūngao teitei ake. Ka hua ake tēnei i te roa o te ora o te pākahiko me te pai ake o te mahi a te waka whānui.
Ngā Utu Whakamahi i runga i te PapaMā ngā taputapu SiC ka pai ake te whai huatanga o ngā pūnaha utu hiko i runga i te papa mā te whakahohe i ngā wā utu tere ake me te whakahaere wera pai ake, he mea nui tēnei mō ngā EV kia tautoko i ngā teihana utu hiko-teitei.
Ngā Pūnaha Whakahaere Pūhiko (BMS): Ka whakapai ake te hangarau SiC i te whai huatanga ongā pūnaha whakahaere pākahiko, e āhei ai te whakahaere ngaohiko pai ake, te whakahaere mana nui ake, me te roa ake o te ora o te pākahiko.
Ngā Kaitahuri DC-DC: E whakamahia ana ngā papa SiC i roto iNgā kaitahuri DC-DCkia pai ake ai te huri i te mana DC ngaohiko tiketike ki te mana DC ngaohiko iti, he mea nui tēnei i roto i ngā waka hiko hei whakahaere i te mana mai i te pākahiko ki ngā wāhanga rerekē o te waka.
Nā te pai o te mahi a SiC i roto i ngā tono hiko-tiketike, pāmahana-tiketike, me te whai hua-tiketike, he mea nui tēnei mō te nekehanga a te umanga motuka ki te nekenekehanga hiko.
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