SiC wafer 4H-N 6H-N HPSI 4H-semi 6H-semi 4H-P 6H-P 3C momo 2inihi 3inihi 4inihi 6inihi 8inihi
Ngā Āhuatanga
4H-N me te 6H-N (N-momo SiC Wafers)
Taupānga:E whakamahia whānuitia ana i roto i ngā hikohiko mana, ngā hikohiko opto, me ngā tono pāmahana teitei.
Awhe Diameter:50.8 mm ki te 200 mm.
Matotoru:350 μm ± 25 μm, me ngā matotoru whiriwhiri o te 500 μm ± 25 μm.
Ātete:Momo-N 4H/6H-P: ≤ 0.1 Ω·cm (taumata-Z), ≤ 0.3 Ω·cm (taumata-P); Momo-N 3C-N: ≤ 0.8 mΩ·cm (taumata-Z), ≤ 1 mΩ·cm (taumata-P).
Te taratara:Ra ≤ 0.2 nm (CMP, MP rānei).
Te Matotoru o te Paipa Maikoro (MPD):< 1 ia/cm².
TTV: ≤ 10 μm mō ngā diameter katoa.
Wāhanga: ≤ 30 μm (≤ 45 μm mō ngā anga 8-inihi).
Te Whakakorenga o te Tapa:3 mm ki te 6 mm, i runga i te momo anga.
Tākai:He rīpene angamaha-maha, he ipu angamaha kotahi rānei.
He maha atu ngā rahi e wātea ana: 3 inihi, 4 inihi, 6 inihi, 8 inihi
HPSI (Ngā Wafer SiC Āhua-Whakamaroke Teitei)
Taupānga:Whakamahia mō ngā taputapu e hiahia ana ki te ātete teitei me te mahi pumau, pēnei i ngā taputapu RF, ngā tono photonic, me ngā pūoko.
Awhe Diameter:50.8 mm ki te 200 mm.
Matotoru:Ko te matotoru paerewa he 350 μm ± 25 μm me ngā kōwhiringa mō ngā anga matotoru ake tae atu ki te 500 μm.
Te taratara:Ra ≤ 0.2 nm.
Te Matotoru o te Paipa Maikoro (MPD): ≤ 1 ia/cm².
Ātete:He ātete teitei, e whakamahia ana i roto i ngā mahi ārai-haurua.
Wāhanga: ≤ 30 μm (mō ngā rahi iti ake), ≤ 45 μm mō ngā diameter nui ake.
TTV: ≤ 10 μm.
He maha atu ngā rahi e wātea ana: 3 inihi, 4 inihi, 6 inihi, 8 inihi
4H-P、6H-P&3C Wafer SiC(Ngā Wafer SiC Momo-P)
Taupānga:Mō ngā taputapu hiko me ngā taputapu auau teitei te nuinga.
Awhe Diameter:50.8 mm ki te 200 mm.
Matotoru:350 μm ± 25 μm, ngā kōwhiringa ritenga rānei.
Ātete:Momo-P 4H/6H-P: ≤ 0.1 Ω·cm (taumata-Z), ≤ 0.3 Ω·cm (taumata-P).
Te taratara:Ra ≤ 0.2 nm (CMP, MP rānei).
Te Matotoru o te Paipa Maikoro (MPD):< 1 ia/cm².
TTV: ≤ 10 μm.
Te Whakakorenga o te Tapa:3 mm ki te 6 mm.
Wāhanga: ≤ 30 μm mō ngā rahi iti ake, ≤ 45 μm mō ngā rahi nui ake.
He maha atu ngā rahi e wātea ana: 3 inihi, 4 inihi, 6 inihi5×5 10×10
Ripanga Tawhā Raraunga Wāhanga
| Taonga | 2 inihi | 3 inihi | 4 inihi | 6 inihi | 8 inihi | |||
| Momo | 4H-N/HPSI/ | 4H-N/HPSI/ | 4H-N/HPSI//4H/6H-P/3C; | 4H-N/HPSI//4H/6H-P/3C; | 4H-N/HPSI/4H-SEMI | |||
| Diameter | 50.8 ± 0.3 mm | 76.2±0.3mm | 100±0.3mm | 150±0.3mm | 200 ± 0.3 mm | |||
| Matotoru | 330 ± 25 um | 350 ±25 um | 350 ±25 um | 350 ±25 um | 350 ±25 um | |||
| 350±25um; | 500±25um | 500±25um | 500±25um | 500±25um | ||||
| kua whakaritea rānei | kua whakaritea rānei | kua whakaritea rānei | kua whakaritea rānei | kua whakaritea rānei | ||||
| Te taratara | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | |||
| Wāwhati | ≤ 30um | ≤ 30um | ≤ 30um | ≤ 30um | ≤45um | |||
| TTV | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | |||
| Waru/Keri | CMP/MP | |||||||
| MPD | <1 ia/cm-2 | <1 ia/cm-2 | <1 ia/cm-2 | <1 ia/cm-2 | <1 ia/cm-2 | |||
| Āhua | Porowhita, Papatahi 16mm; roa 22mm; roa 30/32.5mm; roa 47.5mm; KŌKŌ; KŌKŌ; | |||||||
| Herea | 45°, Āhua HĀWHI; Āhua C | |||||||
| Tau | Tohu whakaputa mō te MOS&SBD; Tohu rangahau; Tohu rūpahu, Tohu kākano wafer | |||||||
| Ngā Kōrero | Te whānui, te matotoru, te whakatakotoranga, ka taea te whakarite i ngā whakaritenga i runga ake nei kia rite ki tāu tono | |||||||
Ngā tono
·Hikohiko Mana
He mea nui ngā anga SiC momo-N i roto i ngā taputapu hiko mana nā te mea ka taea e rātou te whakahaere i ngā ngaohiko teitei me te iahiko teitei. He mea whakamahi noa ēnei i roto i ngā kaitahuri hiko, ngā inverters, me ngā puku motuka mō ngā ahumahi pēnei i te pūngao whakahou, ngā waka hiko, me te aunoatanga ahumahi.
· Ngā taputapu hiko
Ko ngā rauemi SiC momo-N, inā koa mō ngā tono optoelectronic, e whakamahia ana i roto i ngā taputapu pēnei i ngā diode emitting light (LED) me ngā diode laser. Nā te kaha o te kawe wera me te whānui o te āputa roopu e pai ai mō ngā taputapu optoelectronic mahi teitei.
·Ngā tono pāmahana teitei
He tino pai ngā anga 4H-N 6H-N SiC mō ngā taiao pāmahana teitei, pērā i ngā pūoko me ngā taputapu hiko e whakamahia ana i roto i ngā mahi rererangi, ngā mahi motuka, me ngā mahi ahumahi, ina he mea nui te marara me te pumau o te wera i ngā pāmahana teitei.
·Ngā Pūrere RF
E whakamahia ana ngā anga 4H-N 6H-N SiC i roto i ngā taputapu auau reo irirangi (RF) e mahi ana i ngā awhe auau teitei. E whakamahia ana ēnei i roto i ngā pūnaha whakawhitiwhiti kōrero, te hangarau radar, me ngā whakawhitiwhiti kōrero amiorangi, e hiahiatia ana te pai me te mahi kaha teitei.
·Ngā tono whakaahua
I roto i te hangarau whakaahua, ka whakamahia ngā anga SiC mō ngā taputapu pēnei i ngā taputapu kimi whakaahua me ngā taputapu whakarerekē. Nā ngā āhuatanga ahurei o te rauemi ka whai hua ki te whakaputa mārama, ki te whakarerekē, me te kimi i roto i ngā pūnaha whakawhitiwhiti kōrero whatu me ngā taputapu whakaahua.
·Ngā Pūoko
E whakamahia ana ngā anga SiC i roto i ngā momo mahi pūoko, inā koa i roto i ngā taiao uaua ka pakaru pea ētahi atu rauemi. Kei roto i ēnei ko ngā pūoko pāmahana, pēhanga, me ngā matū, he mea nui ēnei i roto i ngā mara pēnei i te motuka, te hinu me te hau, me te aroturuki taiao.
·Ngā Pūnaha Taraiwa Waka Hiko
He mea nui te hangarau SiC i roto i ngā waka hiko mā te whakapai ake i te whai huatanga me te mahi a ngā pūnaha taraiwa. Mā ngā haurua hiko SiC, ka taea e ngā waka hiko te whakatutuki i te roanga o te pākahiko, te tere ake o te wā utu, me te nui ake o te whai huatanga o te pūngao.
·Ngā Pūoko Matatau me ngā Kaitahuri Whakaahua
I roto i ngā hangarau pūoko matatau, ka whakamahia ngā anga SiC hei hanga pūoko tino tika mō ngā tono i roto i te karetao, ngā taputapu hauora, me te aroturuki taiao. I roto i ngā kaitahuri photonic, ka whakamahia ngā āhuatanga o te SiC hei whakahohe i te huringa pai o te pūngao hiko ki ngā tohu whatu, he mea nui tēnei i roto i ngā hanganga whakawhitiwhiti kōrero me te ipurangi tere-tiketike.
Ngā Pātai me ngā Whakautu
QHe aha te 4H i roto i te 4H SiC?
A:Ko te "4H" i roto i te 4H SiC e pā ana ki te hanganga tioata o te silicon carbide, he āhua hexagonal me ngā paparanga e whā (H). Ko te "H" e tohu ana i te momo momo hexagonal polytype, e wehewehe ana i a ia mai i ētahi atu momo SiC pēnei i te 6H, 3C rānei.
Q:He aha te kawe wera o te 4H-SiC?
AKo te kawe wera o te 4H-SiC (Silicon Carbide) he tata ki te 490-500 W/m·K i te pāmahana rūma. Nā te kawe wera teitei nei i pai ai mō ngā tono i roto i ngā hikohiko mana me ngā taiao pāmahana teitei, he mea nui te tohatoha wera pai.














