Otinga Whakauru Paninga Kākano SiC–Hononga–Sintering

Whakaahuatanga Poto:

Hurihia te here purapura SiC mai i te mahi e whakawhirinaki ana ki te kaiwhakahaere ki tētahi tukanga ka taea te tukurua, e whakahaerehia ana e ngā tawhā: te matotoru o te paparanga piripiri e whakahaeretia ana, te whakaritenga pokapū me te pēhi i te pēke hau, te tango i te mirumiru korehau, me te whakakotahitanga waro ka taea te whakarite i te pāmahana/pēhanga. I hangaia mō ngā horopaki whakaputa 6/8/12-inihi.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

SiC 晶体生长炉 SiC Crystal Growth Furnace SiC Kakano paninga–hononga–Sintering Integrated Solution

Mīhini Paninga SiC Mīhini Paninga SiC Otinga Whakauru Paninga Kākano–Hononga–Sintering

Paninga Rehu Tika • Hononga Whakarite Pokapū • Whakakore i te Kohu • Whakakotahitanga Waro/Sintering

Tirohanga Whānui o te Hua

He aha te mea

Kua hangaia tēnei otinga whakauru mō te taahiraa whakarunga o te tipu tioata SiC, te wāhi e herea ai te purapura/te angaanga ki te pepa karāpeti/pereti karāpeti (me ngā atanga e pā ana). Ka kati i te porowhita tukanga puta noa i:

Paninga (piripiri rehu) → Hononga (whakahāngai + pēhi + whakakore mirumiru korehau) → Sintering/Warohanga (whakakotahi me te whakamaroke)

Mā te whakahaere i te hanganga piri, te tango mirumiru, me te whakakotahitanga whakamutunga hei mekameka kotahi, ka whakapai ake te otinga i te ōritetanga, te kaha hanga, me te kaha tauine.

Otinga Whakauru Paninga Kākano SiC–Hononga–Sintering 1

Ngā Kōwhiringa Whirihoranga

A. Raina haurua-aunoa
Mīhini Paninga Rehu SiC → Mīhini Herea SiC → Oumu Sintering SiC

B. Raina aunoa katoa
Mīhini Whakakī me te Herenga Rehu Aunoa → Oumu Sintering SiC
Ngā whakaurunga kōwhiringa: te whakahaere karetao, te whakatikatika/te whakahāngai, te pānui ID, te kimi mirumiru

Otinga Whakauru Paninga Kākano SiC–Hononga–Sintering 2

Ngā Painga Matua

• Te matotoru me te hipoki o te paparanga piri kia pai ake ai te whakahokinga
• Te whakahāngaitanga o waenganui me te pēhi i te pēke hau kia ōrite te pa me te tohatoha pēhanga
• Whakakore mirumiru mā te horoi mirumiru hei whakaiti i ngā mirumiru/āputa i roto i te paparanga piri
• Te whakakotahitanga waro i te pāmahana/pēhanga ka taea te whakarite hei whakau i te hononga whakamutunga
• Ngā kōwhiringa aunoa mō te wā huringa pumau, te whai i ngā āhuatanga, me te whakahaere kounga ā-roto

Kaupapa

He aha te uaua o ngā tikanga tuku iho
Ko te mahi here purapura e herea ana e ngā taurangi hono e toru:

Te ōritetanga o te paparanga piri (te matotoru me te ōritetanga)
Te whakahaere mirumiru/korekore (te hau e mau ana i roto i te paparanga piri)
Te pumau i muri i te herenga i muri i te whakamaroke/te whakawaro

Ko te paninga ā-ringa ka hua ake he rerekētanga o te matotoru, he uaua ki te tango i ngā mirumiru, he nui ake te mōrearea o ngā āputa o roto, he rakuraku pea o ngā mata karāpeti, me te ngoikore o te tauine mō te hanga papatipu.

Ka taea e te paninga hurihuri te whakaputa i te matotoru koretake nā te whanonga rere o te piri, te kukū o te mata, me te kaha whakatere. Tērā pea ka pāngia e te paru taha me ngā here whakapiri i runga i te pepa/pereti karāhe, ā, ka uaua pea ki ngā piri he totoka te paninga kia ōrite.

Otinga Whakauru Paninga Kākano SiC–Hononga–Sintering 3

Te mahi a te huarahi whakauru

Paninga: Ka hangaia e te paninga rehu he matotoru o te paparanga piri me te hipoki i ngā mata e hiahiatia ana (purapura/wafer, pepa karāhe/pereti).

Te herenga: Mā te whakarite pokapū + te pēhi i te pēke hau ka tautoko i te pa tonu; mā te tango korehau ka whakaitihia te hau kua mau, ngā mirumiru, me ngā āputaputa i roto i te paparanga piri.

Te Whakapūmau/Te Whakawaro: Mā te whakakotahitanga pāmahana teitei me te pāmahana me te pēhanga ka taea te whakarerekē ka whakau te atanga hononga whakamutunga, me te whai kia kore he mirumiru me ngā hua pēhi ōrite.

Tauākī mahi tohutoro
Ka taea e te hua here waro te eke ki te 90%+ (tohutoro tukanga). Kei te wāhanga Ngā Take Matarohia ngā tohutoro hua here noa.

Tukanga

A. Rerenga Mahi Āhua-Aunoa

Hipanga 1 — Paninga Rehu (Pani)
Tāpirihia he piripiri mā te paninga rehu ki ngā mata ūnga kia pumau ai te matotoru me te hipoki ōrite.

Hipanga 2 — Te Whakarite me te Hononga (Hononga)
Whakaritea te pokapū, pēhia te pēke hau, ā, whakamahia te tango mirumiru korehau hei tango i te hau kua mau i roto i te paparanga piripiri.

Hipanga 3 — Whakakotahitanga Waro (Sintering/Waro)
Whakawhitia ngā wāhanga kua herea ki roto i te oumu whakawera, ka whakahaere i te whakakotahitanga waro pāmahana teitei me te pāmahana me te pēhanga ka taea te whakarerekē hei whakau i te here whakamutunga.

B. Rerenga Mahi Aunoa Katoa

Ka whakauruhia e te mīhini paninga me te here aunoa ngā mahi paninga me te here, ā, ka uru pea ki te whakahaere me te whakatikatika karetao. Ka uru pea ki ngā kōwhiringa ā-roto te pānui ID me te kimi mirumiru hei whai me te whakahaere kounga. Kātahi ka haere ngā wāhanga ki te oumu sintering hei whakakotahi i te waro.

Ngāwari o te ara tukanga
I runga i ngā rauemi atanga me te mahi e pai ana ki te whakamahi, ka taea e te pūnaha te tautoko i ngā raupapa paninga rerekē me ngā ara rehu taha-kotahi, taha-rua rānei, me te pupuri tonu i te whāinga kotahi: paparanga piri pumau → whakakore mirumiru whai hua → whakakotahitanga ōrite.

Otinga Whakauru Paninga Kākano SiC–Hononga–Sintering 4

Ngā tono

Te tono matua
Te hononga o te tipu tioata SiC ki te taha whakarunga o te purapura: te hononga o te purapura/te angaanga ki te pepa karāpeti/pereti karāpeti me ngā atanga e pā ana, ā, muri iho ka whakakotahi i te waro.

Ngā āhuatanga rahi
Tautoko ana i ngā tono here 6/8/12-inihi mā te kōwhiringa whirihoranga me te ara tukanga kua whakamanahia.

Ngā tohu taunga noa
• Ka rerekē te matotoru, ka mirumiru/karekau he āputa, ka rakuraku, ka koretake te hua nā te paninga ā-ringa
• Kāore i te pumau, i te uaua rānei te matotoru o te paninga hurihuri i runga i te pepa/pereti karāhe; kei reira ngā herenga mō te poke taha/te whakapiri
• Me whai koe i te hanga tauine-rahi me te kaha ki te whakahoki anō, me te iti ake o te whakawhirinaki ki te kaiwhakahaere
• E hiahia ana koe ki ngā kōwhiringa aunoatanga, te whai i ngā āhuatanga, me te QC ā-roto (ID + te kimi mirumiru)

Ngā Take Matarohia (Ngā Hua Noa)

Kia mōhio: Ko ngā raraunga tohutoro/tohutoro tukanga noa iho ēnei e whai ake nei. Ko te mahi tuturu e whakawhirinaki ana ki te pūnaha piri, ngā āhuatanga o ngā rauemi e tae mai ana, te matapihi tukanga kua whakamanahia, me ngā paerewa tirotiro.

Take 1 — Herenga Kākano 6/8-inihi (Tohutoro Putanga me te Hua)
Kāore he pereti karāhe: 6 ngā wahi/wāhanga/rā
Me te pereti karāhe: 2.5 pcs/wāhanga/rā
Hua here: ≥95%

Take 2 — Herenga Kākano 12-inihi (Tohutoro Putanga me te Hua)
Kāore he pereti karāhe: 5 ngā wahi/wāhanga/rā
Me te pereti karāhe: 2 ngā wahi/wāhanga/rā
Hua here: ≥95%

Take 3 — Tohutoro Hua Whakakotahitanga Waro
Te hua o te here waro: 90%+ (tohutoro tukanga)
Putanga whainga: kāore he mirumiru, ā, he ōrite ngā hua pēhi (kei raro i ngā paearu whakamana me te tirotiro)

Otinga Whakauru Paninga Kākano SiC–Hononga–Sintering 5

Ngā Pātai Auau

P1: He aha te raru matua e arohia ana e tēnei otinga?
A: Ka whakau i te hononga o te purapura mā te whakahaere i te matotoru/te taupoki o te piripiri, te mahi whakakore mirumiru, me te whakaū i muri i te hononga—ka huri i te taahiraa e whakawhirinaki ana ki te pūkenga hei tukanga hanga ka taea te tukurua.

P2: He aha te take e hua ai he mirumiru/āputaputa i te paninga ā-ringa?
A: He uaua ki ngā tikanga ā-ringa te pupuri i te matotoru ōrite, ka uaua ake te whakakore i ngā mirumiru, ka nui ake hoki te tūponotanga o te hau mau. Tērā pea ka rakurakuhia e rātou ngā mata karāpeti, ā, he uaua ki te whakataurite i te rōrahi.

P3: He aha i kore ai e pumau te paninga hurihuri mō tēnei tono?
A: He tairongo te matotoru ki te whanonga rere o te piri, te kukū o te mata, me te kaha porowhita. Ka taea te whakawhāiti i te paninga pepa/pereti graphite e te tūponotanga o te whakapiri me te poke taha, ā, ka uaua ki te miro ōrite te paninga o ngā piri he totoka te ihirangi.

Mō Mātou

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