Momo-p 4H/6H-P 3C-N Momo SIC papaaho 4inihi 〈111〉± 0.5°Kore MPD
Ripanga tawhā noa mō ngā paparanga hiato SiC Momo 4H/6H-P
4 inihi te whānui o te SiliconPapa Whakarewa Warowaihā (SiC) Whakatakotoranga
| Tau | Kore MPD Production Tau (Z) (Kaute) | Te Hanga Paerewa Taumata (P (Kaute) | Tauira Tauira (D (Kaute) | ||
| Diameter | 99.5 mm~100.0 mm | ||||
| Matotoru | 350 μm ± 25 μm | ||||
| Te Aronga o te Wafer | Kei waho o te tuaka: 2.0°-4.0° ki te [11]20] ± 0.5° mō te 4H/6H-P, Otuaka n:〈111〉± 0.5° mō te 3C-N | ||||
| Te Kīanga o te Paipa Maikoro | 0 cm-2 | ||||
| Ātete | momo-p 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| momo-n 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Te whakatakotoranga papatahi tuatahi | 4H/6H-P | - {1010} ± 5.0° | |||
| 3C-N | - {110} ± 5.0° | ||||
| Roa Papatahi Tuatahi | 32.5 mm ± 2.0 mm | ||||
| Roa Papatahi Tuarua | 18.0 mm ± 2.0 mm | ||||
| Te whakatakotoranga papatahi tuarua | Te mata o te silicon ki runga: 90° CW. mai i te papatahi o Prime±5.0° | ||||
| Te Whakakore i te Tapa | 3 mm | 6 mm | |||
| LTV/TTV/Pīkau/Whā | ≤2.5 μm/≤5 μm/≤15 μm/≤30 µm | ≤10 μm/≤15 μm/≤25 μm/≤40 µm | |||
| Te taratara | Pōrana Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa | Kāore | Te roa tāpiri ≤ 10 mm, te roa takitahi ≤2 mm | |||
| Pereti Hex mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤0.05% | Te horahanga tāpiri ≤0.1% | |||
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Kāore | Te horahanga tāpiri ≤3% | |||
| Ngā Whakaurunga Waro Tirohanga | Te horahanga tāpiri ≤0.05% | Te horahanga tāpiri ≤3% | |||
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Kāore | Te roa tāpiri ≤1 × te diameter o te angaanga | |||
| Ngā Maramara Tapa Teitei Mā te Mārama Kaha | Kāore i whakaaetia te whānui me te hohonu ≥0.2mm | 5 e whakaaetia ana, ≤1 mm ia | |||
| Te Parahanga o te Mata Silicon mā te Kaha Nui | Kāore | ||||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | ||||
Ngā Tuhipoka:
※Ka pā ngā herenga hapa ki te mata katoa o te papa angiangi engari ko te wāhi e kore e āraia te taha. # Me tirotiro ngā karawarawa ki te mata Si anake.
Ko te papa SiC momo-P 4H/6H-P 3C-N momo 4-inihi me te whakatakotoranga 〈111〉± 0.5° me te tohu Kore MPD e whakamahia whānuitia ana i roto i ngā tono hiko mahi-teitei. Nā tōna kawe wera pai me te ngaohiko pakaru teitei e pai ai mō ngā hikohiko mana, pērā i ngā pana ngaohiko-teitei, ngā inverters, me ngā kaitahuri mana, e mahi ana i roto i ngā āhuatanga tino kino. Hei tāpiri, ko te ātete o te papa ki ngā pāmahana teitei me te waikura e whakarite ana i te mahi pumau i roto i ngā taiao uaua. Ko te whakatakotoranga tika 〈111〉± 0.5° e whakarei ake ana i te tika o te hanga, e pai ai mō ngā taputapu RF me ngā tono auau-teitei, pērā i ngā pūnaha radar me ngā taputapu whakawhitiwhiti ahokore.
Ko ngā painga o ngā papa hiato SiC momo-N ko:
1. Te Awe Wera Teitei: He pai te tohatoha wera, e tika ana mō ngā taiao pāmahana teitei me ngā tono mana teitei.
2. Ngaohiko Pakaru Teitei: Ka whakarite i te mahi pono i roto i ngā tono ngaohiko teitei pēnei i ngā kaitahuri hiko me ngā kaitahuri hiko.
3. Kore he hapa MPD (Micro Pipe Defect): Ka oati he iti noa ngā hapa, ka whakarato i te pumau me te pono nui i roto i ngā taputapu hiko nui.
4. Ātete ki te Waikura: He pakari i roto i ngā taiao uaua, kia roa ai te mahi i roto i ngā āhuatanga uaua.
5. Tika <111> ± 0.5° Te whakatakotoranga: Ka taea te whakarite tika i te wā e hanga ana, ka whakapai ake i te mahi a te taputapu i roto i ngā tono auau-tiketike me te RF.
I te nuinga o te wā, ko te papa SiC momo-P 4H/6H-P 3C-N momo 4-inihi me te whakatakotoranga 〈111〉± 0.5° me te tohu Zero MPD he rauemi mahi-teitei e pai ana mō ngā tono hiko matatau. Nā tōna kawe wera pai me te ngaohiko pakaru teitei e tino pai ana mō ngā hikohiko mana pēnei i ngā pana ngaohiko-teitei, ngā kaitahuri, me ngā kaitahuri. Mā te tohu Zero MPD ka iti rawa ngā hapa, ka whakarato i te pono me te pumau i roto i ngā taputapu nui. Hei tāpiri, mā te ātete o te papa ki te waikura me ngā pāmahana teitei ka mau te pakari i roto i ngā taiao uaua. Mā te whakatakotoranga tika 〈111〉± 0.5° ka taea te whakarite tika i te wā hanga, ka tino pai mō ngā taputapu RF me ngā tono auau-teitei.
Kauwhata Taipitopito
