Ngā taputapu hangarau taiaho Microjet e tapahi ana i te tukatuka rauemi SiC

Ngā taputapu hangarau taiaho Microjet e tapahi ana i te wafer tukatuka rauemi SiC Whakaahua Matua

Whakaahuatanga Poto:

Ko ngā taputapu hangarau taiaho microjet he momo pūnaha miihini tika e whakakotahi ana i te taiaho kaha teitei me te wai rererangi taumata-micron. Mā te hono i te hihi taiaho ki te wai rererangi tere-teitei (wai whakakore iona, wai motuhake rānei), ka taea te whakatutuki i te tukatuka rauemi me te tino tika me te iti o te kino wera. He tino pai tēnei hangarau mō te tapahi, te keri me te tukatuka hanganga moroiti o ngā rauemi pakeke me te pakarukaru (pēnei i te SiC, te hapaira, te karāhe), ā, he whānuitia te whakamahinga i roto i te semiconductor, te whakaaturanga photoelectric, ngā taputapu hauora me ētahi atu mara.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Te kaupapa mahi:

1. Hononga taiaho: ka arotahihia te taiaho pāorooro (UV/kakariki/whero) ki roto i te rerenga wai hei hanga i tētahi hongere tuku pūngao pumau.

2. Arataki wai: he pupuhi tere-teitei (tere rere 50-200m/s) e whakamatao ana i te wāhi tukatuka me te tango atu i ngā paru hei karo i te kohikohinga wera me te parahanga.

3. Te tango rauemi: Ka puta te pānga cavitation i roto i te wai mā te pūngao taiaho hei whakatutuki i te tukatuka matao o te rauemi (rohe e pāngia ana e te wera <1μm).

4. Mana whakahaere hihiri: te whakarerekētanga wā-tūturu o ngā tawhā taiaho (mana, auau) me te pēhanga jet hei whakatutuki i ngā hiahia o ngā rauemi me ngā hanganga rerekē.

Ngā tawhā matua:

1. Mana taiaho: 10-500W (ka taea te whakarite)

2. Te whānui o te jet: 50-300μm

3. Tika o te mīhini: ±0.5μm (tapahi), ōwehenga hohonu ki te whānui 10:1 (keri)

Ngā painga hangarau:

(1) Kāore rawa he kino o te wera
- Mā te whakamatao wai e whakahaere te rohe e pāngia ana e te wera (HAZ) ki **<1μm**, ka karohia ngā kapiti moroiti i puta mai i te tukatuka taiaho tikanga (ko te HAZ he >10μm te nuinga).

(2) Te miihini tino tika
- Te tika o te tapahi/keri tae atu ki te **±0.5μm**, te taratara o te taha Ra<0.2μm, ka whakaitihia te hiahia mō te whakakanapa i muri mai.

- Tautoko i te tukatuka hanganga 3D matatini (pērā i ngā kōhao kōniko, ngā mokowā āhua).

(3) He whānui te hototahitanga o ngā rauemi
- Ngā rauemi mārō, pakarukaru hoki: SiC, hapaira, karāhe, uku (he ngāwari te pakaru o ngā tikanga tuku iho).

- Ngā rauemi e pāngia ana e te wera: ngā pūhui, ngā kiko koiora (kāore he mōrearea o te pirau wera).

(4) Te tiaki taiao me te whai huatanga
- Kāore he parahanga puehu, ka taea te hangarua me te tātari i te wai.

- Te pikinga 30%-50% o te tere tukatuka (ki te whakataurite ki te miihini).

(5) Mana whakahaere atamai
- Te whakanoho tirohanga whakauru me te arotautanga tawhā AI, te matotoru rauemi urutau me ngā hapa.

Ngā whakaritenga hangarau：

Te rōrahi o te papa kaute	300300150	400400200
Tuaka rārangi XY	Mōta raina. Mōta raina	Mōta raina. Mōta raina
Tuaka rārangi Z	150	200
Te tika o te tūnga μm	+/-5	+/-5
Te tika o te tūnga μm	+/-2	+/-2
Whakaterenga G	1	0.29
Mana whakahaere tau	Tuaka 3 / tuaka 3+1 / tuaka 3+2	Tuaka 3 / tuaka 3+1 / tuaka 3+2
Momo mana tau	DPSS Nd:YAG	DPSS Nd:YAG
Roangaru nm	532/1064	532/1064
Mana whakatauranga W	50/100/200	50/100/200
Pūwero wai	40-100	40-100
Pae pēhanga pūwero	50-100	50-600
Ngā Ine (mīhini) (whānui * roa * teitei) mm	144519442260	170015002120
Rahi (kāpata whakahaere) (W * R * T)	70025001600	70025001600
Taumaha (taputapu) T	2.5	3
Taumaha (kāpata whakahaere) KG	800	800
Te āheinga tukatuka	Te taratara o te mata Ra≤1.6um Tere whakatuwheratanga ≥1.25mm/s Tapahi porowhita ≥6mm/s Tere tapahi rārangi ≥50mm/s	Te taratara o te mata Ra≤1.2um Tere whakatuwheratanga ≥1.25mm/s Tapahi porowhita ≥6mm/s Tere tapahi rārangi ≥50mm/s
	Mō te tioata gallium nitride, ngā rauemi haurua whakawhiti whānui-rahi (taimana/waikura gallium), ngā rauemi motuhake ā-rangi, te papa uku waro LTCC, te tioata photovoltaic, te tioata scintillator me ētahi atu rauemi tukatuka. Kia mōhio: Ka rerekē te kaha tukatuka i runga i ngā āhuatanga o te rauemi

Te tukatuka i te kēhi:

Ngā ratonga a XKH:

Ka whakaratohia e XKH te whānuitanga katoa o te tautoko ratonga huringa ora katoa mō ngā taputapu hangarau taiaho microjet, mai i te whanaketanga tukanga wawe me te kōrero mō te whiriwhiri taputapu, ki te whakaurunga pūnaha whakaritenga wā-waenga (tae atu ki te taurite motuhake o te pūtake taiaho, te pūnaha jet me te kōwae aunoa), ki te whakangungu whakahaere me te tiaki i muri mai me te arotau tukanga tonu, kua rite te tukanga katoa ki te tautoko a te tīma hangarau ngaio; I runga i te 20 tau o te wheako miihini tika, ka taea e mātou te whakarato i ngā otinga kotahi-mutu tae atu ki te manatoko taputapu, te whakaurunga whakaputa papatipu me te urupare tere i muri i te hoko (24 hāora o te tautoko hangarau + rahui wāhanga e manawapahia ana) mō ngā ahumahi rerekē pēnei i te semiconductor me te hauora, me te oati mō te 12 marama te roa o te whakamana me te ratonga tiaki me te whakapai ake mo te wa katoa. Me whakarite kia mau tonu te mahi tukatuka me te pumau o ngā taputapu kiritaki.