Papa whakarewa SiC silicon carbide 8 inihi momo 4H-N momo 0.5mm taumata whakaputa taumata rangahau kua orohia ritenga

Papa whakarewa ritenga kua orohia, he papa hanga 8 inihi SiC silicon carbide momo 4H-N 0.5mm te taumata rangahau. Whakaahua Matua

Whakaahuatanga Poto:

Ko te Silicon carbide (SiC), e mōhiotia ana ko te Silicon carbide, he haurua-whakakotahi kei roto te silicon me te waro me te tātai matū SiC. Ka whakamahia te SiC i roto i ngā taputapu hiko haurua-whakakotahi e mahi ana i ngā pāmahana teitei, i ngā pēhanga teitei rānei, i ngā mea e rua rānei. Ko te SiC tētahi o ngā wāhanga nui o te LED, he papa noa mō te whakatipu i ngā taputapu GaN, ā, ka taea hoki te whakamahi hei totohu wera mō ngā LED mana-teitei.
Ko te paparanga silicon carbide 8-inihi he wāhanga nui o te tuatoru o ngā whakatupuranga o ngā rauemi semiconductor, he āhuatanga o te kaha o te mara pakaru teitei, te kawe wera teitei, te tere nekehanga irahiko teitei, me ētahi atu, ā, he pai mō te hanga taputapu hiko pāmahana teitei, ngaohiko teitei, me te mana teitei. Ko ōna mara tono matua ko ngā waka hiko, te kawe tereina, te tuku me te whakawhiti hiko ngaohiko teitei, te photovoltaics, te whakawhitiwhiti kōrero 5G, te rokiroki pūngao, te rererangi, me ngā pokapū raraunga mana rorohiko matua AI.

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Ngā Āhuatanga

Ko ngā āhuatanga matua o te paparanga silicon carbide 8-inihi momo 4H-N ko:

1. Te mātotoru o ngā ngongo iti: ≤ 0.1/cm², iti iho rānei, pērā i te hekenga nui o te mātotoru o ngā ngongo iti ki raro iho i te 0.05/cm² i roto i ētahi hua.
2. Ōwehenga āhua karaihe: Ka eke te ōwehenga āhua karaihe 4H-SiC ki te 100%.
3. Ātete: 0.014~0.028 Ω·cm, pumau ake rānei i waenga i te 0.015-0.025 Ω·cm.
4. Te taratara o te mata: CMP Si Mata Ra≤0.12nm.
5. Matotoru: Ko te tikanga he 500.0±25μm, he 350.0±25μm rānei.
6. Koki anga: 25±5°, 30±5° rānei mō A1/A2, i runga i te matotoru.
7. Te tapeke o te mātotorutanga o te nekehanga: ≤3000/cm².
8. Te poke o te mata o te konganuku: ≤1E+11 ngota/cm².
9. Piko me te whanoke: ≤ 20μm me ≤2μm, ia.
Nā ēnei āhuatanga e whai hua nui ai ngā papa hiko warowaihā 8-inihi ki te hanga i ngā taputapu hiko pāmahana-tiketike, auau-tiketike, me te mana-tiketike.

He maha ngā whakamahinga o te anga waro silicon carbide 8-inihi.

1. Ngā taputapu hiko: E whakamahia whānuitia ana ngā papa SiC i roto i te hanga i ngā taputapu hiko hiko pēnei i ngā MOSFET hiko (ngā transistor pānga mara whakarewa-waikura-haurua), ngā diode Schottky, me ngā kōwae whakauru hiko. Nā te kawe wera nui, te ngaohiko pakaru nui, me te nekehanga irahiko teitei o te SiC, ka taea e ēnei taputapu te whakatutuki i te huringa hiko whai hua, mahi-teitei i roto i ngā taiao pāmahana teitei, ngaohiko teitei, me te auau teitei.

2. Ngā taputapu hikohiko: He mea nui te mahi a ngā anga SiC i roto i ngā taputapu hikohiko, e whakamahia ana hei hanga i ngā taputapu whakaahua, ngā taiaho taiaho, ngā pūtake hihi ultraviolet, me ētahi atu. Nā ngā āhuatanga hikohiko me te hihi whatu pai rawa atu o te karawiti silicon, koinei te rauemi whiriwhiri, inā koa i roto i ngā tono e hiahia ana ki ngā pāmahana teitei, ngā auau teitei, me ngā taumata mana teitei.

3. Ngā Pūrere Auautanga Reo Irirangi (RF): Ka whakamahia hoki ngā maramara SiC hei hanga i ngā pūrere RF pēnei i ngā whakakaha hiko RF, ngā pana auau-tiketike, ngā pūoko RF, me ētahi atu. Nā te pumau wera teitei o te SiC, ngā āhuatanga auau-tiketike, me te iti o ngā mate, he mea tino pai mō ngā tono RF pēnei i ngā whakawhitiwhiti kōrero ahokore me ngā pūnaha radar.

4. Ngā hikohiko pāmahana-tiketike: Nā te pumau o te pāmahana me te ngāwari o te pāmahana, ka whakamahia ngā anga SiC hei whakaputa hua hiko kua hangaia hei mahi i roto i ngā taiao pāmahana-tiketike, tae atu ki ngā hikohiko mana pāmahana-tiketike, ngā pūoko, me ngā kaiwhakahaere.

Ko ngā huarahi tono matua o te papa hiko silicon carbide 8-inihi momo 4H-N ko te hanga i ngā taputapu hiko pāmahana-tiketike, auau-tiketike, me te mana-tiketike, inā koa i roto i ngā mara o ngā hiko motuka, te pūngao o te rā, te whakaputa hiko hau, ngā waka tereina hiko, ngā tūmau, ngā taputapu kāinga, me ngā waka hiko. Hei tāpiri, kua whakaatuhia e ngā taputapu pēnei i ngā SiC MOSFET me ngā Schottky diodes te mahi tino pai i roto i ngā auau whakawhiti, ngā whakamātautau ara iahiko-poto, me ngā tono inverter, e akiaki ana i tō rātou whakamahinga i roto i ngā hiko mana.

Ka taea te whakarite i te XKH me ngā matotoru rerekē kia rite ki ngā hiahia o te kiritaki. He rerekē ngā momo maimoatanga whakakoi me te whakakanapa mata e wātea ana. He rerekē ngā momo tāpiringa (pēnei i te tāpiringa hauota) e tautokona ana. Ka taea e te XKH te whakarato tautoko hangarau me ngā ratonga kōrero hei whakarite kia taea e ngā kiritaki te whakaoti rapanga i roto i te tukanga whakamahinga. He nui ngā painga o te papa silicon carbide 8-inihi i roto i te whakaiti i te utu me te whakanui ake i te kaha, ka taea te whakaiti i te utu maramara waeine mā te 50% ki te whakataurite ki te papa 6-inihi. Hei tāpiri, ko te matotoru ake o te papa 8-inihi ka āwhina i te whakaiti i ngā peka āhuahanga me te piko o te taha i te wā miihini, ā, ka whakapai ake i te hua.