He papa anga HPSI SiC 6 inihi, he papa anga Silicon Carbide SiC whakakino-haurua
Hangarau Tipu PVT Silicon Carbide Crystal SiC
Ko ngā tikanga whakatipu o nāianei mō te tioata kotahi SiC ko ēnei e toru: te tikanga wai, te tikanga whakatakoto kohu matū pāmahana teitei, me te tikanga kawe kohu ā-tinana (PVT). I roto i ēnei, ko te tikanga PVT te hangarau tino rangahautia me te tino pakari mō te whakatipu tioata kotahi SiC, ā, ko ōna uauatanga hangarau ko:
(1) Ko te tioata kotahi SiC i te pāmahana teitei o te 2300 ° C i runga ake i te rūma karāpeti kua kati hei whakaoti i te tukanga whakahou "totoka - hau - totoka", he roa te huringa tipu, he uaua ki te whakahaere, ā, he ngāwari ki te whakauru i ngā microtubules, ngā whakaurunga me ētahi atu hapa.
(2) He tioata kotahi te silicon carbide, neke atu i te 200 ngā momo tioata rerekē, engari kotahi anake te momo tioata e hangaia ana i te nuinga o te wā, he ngāwari ki te whakaputa i te momo tioata whakawhiti i roto i te tukanga tipu ka hua ake he maha-momo whakauru hapa, he uaua ki te whakahaere i te pumau o te tukanga whakarite o te momo tioata motuhake kotahi, hei tauira, ko te nuinga o nāianei o te momo-4H.
(3) I roto i te mara wera o te tipu o te karaihe kotahi, ka puta he pikinga pāmahana, ka puta he ahotea ā-roto taketake i roto i te tukanga tipu karaihe, ā, ka puta he nekehanga, he hapa me ētahi atu hapa.
(4) Me tino whakahaere te tukanga tipu tioata kotahi o te silicon carbide i te whakaurunga o ngā poke o waho, kia whiwhi ai i tētahi tioata haurua-whakamaroke tino parakore, i tētahi tioata arataki rānei kua tāpirihia te ahunga. Mō ngā papa silicon carbide haurua-whakamaroke e whakamahia ana i roto i ngā taputapu RF, me whakatutuki ngā āhuatanga hiko mā te whakahaere i te kukū poke tino iti me ngā momo hapa pūwāhi motuhake i roto i te tioata.



