Wafer SiC 4H/6H-P 6inihi, Kore MPD, Kore MPD, Kore Tauira Whakaputa, Kore Tauira Tauira
Ripanga tawhā noa mō ngā paparanga hiato SiC Momo 4H/6H-P
6 Papa Hanga Silicon Carbide (SiC) he inihi te whānui Whakatakotoranga
| Tau | Kore MPD ProductionTau (Z) (Kaute) | Te Hanga PaerewaTaumata (P (Kaute) | Tauira Tauira (D (Kaute) | ||
| Diameter | 145.5 mm~150.0 mm | ||||
| Matotoru | 350 μm ± 25 μm | ||||
| Te Aronga o te Wafer | -Offtuaka: 2.0°-4.0°ki te [1120] ± 0.5° mō te 4H/6H-P, I runga i te tuaka:〈111〉± 0.5° mō te 3C-N | ||||
| Te Kīanga o te Paipa Maikoro | 0 cm-2 | ||||
| Ātete | momo-p 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| momo-n 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Te whakatakotoranga papatahi tuatahi | 4H/6H-P | -{1010} ± 5.0° | |||
| 3C-N | -{110} ± 5.0° | ||||
| Roa Papatahi Tuatahi | 32.5 mm ± 2.0 mm | ||||
| Roa Papatahi Tuarua | 18.0 mm ± 2.0 mm | ||||
| Te whakatakotoranga papatahi tuarua | Te mata o te silicon ki runga: 90° CW. mai i te papatahi Matua ± 5.0° | ||||
| Te Whakakore i te Tapa | 3 mm | 6 mm | |||
| LTV/TTV/Pīkau/Whā | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
| Te taratara | Pōrana Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa | Kāore | Te roa tāpiri ≤ 10 mm, te roa takitahi ≤2 mm | |||
| Pereti Hex mā te Mārama Kaha Teitei | Te horahanga tāpiri ≤0.05% | Te horahanga tāpiri ≤0.1% | |||
| Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei | Kāore | Te horahanga tāpiri ≤3% | |||
| Ngā Whakaurunga Waro Tirohanga | Te horahanga tāpiri ≤0.05% | Te horahanga tāpiri ≤3% | |||
| Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Kāore | Te roa tāpiri ≤1 × te diameter o te angaanga | |||
| Ngā Maramara Tapa Teitei Mā te Mārama Kaha | Kāore i whakaaetia te whānui me te hohonu ≥0.2mm | 5 e whakaaetia ana, ≤1 mm ia | |||
| Te Parahanga o te Mata Silicon mā te Kaha Nui | Kāore | ||||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | ||||
Ngā Tuhipoka:
※ Ka pā ngā herenga hapa ki te mata katoa o te papa angiangi engari ko te wāhi ārai taha. # Me tirotiro ngā karawarawa ki te mata Si o
Ko te momo 4H/6H-P 6-inihi SiC me te tohu Zero MPD me te tohu whakaputa, te tohu rūpahu rānei, e whakamahia whānuitia ana i roto i ngā tono hiko matatau. Nā tōna kawe wera pai, te ngaohiko pakaru teitei, me te ātete ki ngā taiao uaua, he mea tino pai mō ngā hikohiko mana, pērā i ngā pana ngaohiko teitei me ngā kaitahuri. Mā te tohu Zero MPD ka whakarite kia iti rawa ngā hapa, he mea nui mō ngā taputapu pono teitei. Ka whakamahia ngā wafer tohu whakaputa i roto i te hanga nui o ngā taputapu mana me ngā tono RF, he mea nui te mahi me te tika. Ko ngā wafer tohu rūpahu, i tetahi atu taha, ka whakamahia mō te whakatikatika tukanga, te whakamātautau taputapu, me te tauira, ka taea ai te whakahaere kounga pumau i roto i ngā taiao whakaputa semiconductor.
Ko ngā painga o ngā papa hiato SiC momo-N ko:
- Te Awe Wera TeiteiKa tere te whakamarara o te wera e te anga 4H/6H-P SiC, ā, he pai mō ngā tono hiko pāmahana teitei me te mana teitei.
- Ngaohiko Pakaru TeiteiNā tōna kaha ki te whakahaere i ngā ngaohiko teitei me te kore he rahunga, he mea tino pai mō ngā hikohiko mana me ngā tono whakawhiti ngaohiko teitei.
- Kore MPD (Hapa Paipa Iti)Mā te iti o te mātotoru o ngā hapa ka nui ake te pono me te mahi, he mea nui mō ngā taputapu hiko uaua.
- Taumata Whakaputa mō te Hanga PapatipuHe pai mō te hanga nui o ngā taputapu haurua-ā-ira mahi teitei me ngā paerewa kounga tino pakari.
- Tauira-Pūrākau mō te Whakamātautau me te WhakatikatikaKa taea te arotau i ngā tukanga, te whakamātautau taputapu, me te hanga tauira me te kore e whakamahi i ngā anga hanga utu nui.
I te nuinga o te wā, ko ngā wafer SiC 4H/6H-P 6-inihi me te tohu Zero MPD, te tohu whakaputa, me te tohu rūpahu he painga nui mō te whanaketanga o ngā taputapu hiko mahi-teitei. He tino whai hua ēnei wafer i roto i ngā tono e hiahia ana ki te mahi pāmahana teitei, te kiato mana teitei, me te huringa mana whai hua. Mā te tohu Zero MPD ka whakarite kia iti rawa ngā hapa mō te mahi pono me te pumau o te taputapu, ko ngā wafer tohu whakaputa e tautoko ana i te hanga nui me ngā mana whakahaere kounga tino pakari. Ka whakaratohia e ngā wafer tohu rūpahu he otinga utu-whai hua mō te arotau tukanga me te whakatikatika taputapu, ka waiho hei mea nui mō te hanga semiconductor tino tika.
Kauwhata Taipitopito
