4H-N/6H-N SiC Wafer Reasearch production Dummy grade Dia150mm Silicon carbide tïpako
6 inihi te diameter silicon carbide (SiC) te whakatakotoranga tïpako
Kōeke | Kore MPD | Whakaputa | Koeke Rangahau | Kōeke Dummy |
Diamita | 150.0mm±0.25mm | |||
Te matotoru | 4H-N | 350um±25um | ||
4H-SI | 500um±25um | |||
Takotoranga Wafer | I runga tuaka :<0001>±0.5°mo 4H-SI | |||
Papa tuatahi | {10-10}±5.0° | |||
Te Roa Papatahi Tuatahi | 47.5mm±2.5mm | |||
Te whakakorenga taha | 3mm | |||
TTV/Kopere/Warp | ≤15um/≤40um/≤60um | |||
Kiatotanga Micropipe | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
Parenga 4H-N 4H-SI | 0.015~0.028Ω!cm | |||
≥1E5Ω!cm | ||||
Te taratara | Polish Ra ≤1nm CMP Ra≤0.5nm | |||
# Kapiti na te rama kaha teitei | Karekau | 1 whakaaetia ,≤2mm | Roa whakaemi ≤10mm, kotahi roa≤2mm | |
* Nga pereti Hex na te rama tino kaha | Horahanga whakahiato ≤1% | Horahanga whakahiato ≤ 2% | Horahanga whakahiato ≤ 5% | |
*Nga waahanga polytype ma te rama tino kaha | Karekau | Horahanga whakahiato ≤ 2% | Horahanga whakahiato ≤ 5% | |
*&Kua pakaruhia e te rama tino kaha | 3 karawarawa ki te 1 x angiangi diameter te roa whakahiato | 5 rakuraku ki te 1 x angiangi diameter te roa whakaemi | E 5 nga pakaru ki te 1 x te whanui angiangi te roa whakahiato | |
maramara taha | Karekau | 3 whakaaetia ,≤0.5mm ia | 5 whakaaetia, ≤1mm ia | |
Te poke i te marama kaha teitei | Karekau
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Hoko & Ratonga Kaihoko
Te hoko rawa
Ko te tari hoko rawa te kawenga ki te kohikohi i nga rawa mata katoa e hiahiatia ana hei whakaputa i to hua. Kei te waatea tonu te whaiwhai i nga hua me nga rawa katoa, tae atu ki te matū me te tātari tinana.
Kounga
I te wa i muri mai i te hanga, i te mahi miihini ranei o o hua, kei te whai waahi te tari whakahaere kounga ki te whakarite kia tutuki nga taonga katoa me nga whakamanawanui ki runga ake ranei i to whakaritenga.
Ratonga
He whakahīhī mātou ki te whai kaimahi miihini hoko neke atu i te 5 tau nga wheako ki te umanga semiconductor. Kua whakangungua ratou ki te whakautu i nga patai hangarau me te whakarato i nga korero mo o hiahia.
kei to taha matou i nga wa katoa ka raru koe, ka whakatau i roto i nga haora 10.