Te hanga rangahau mō te anga wafer SiC 4H-N/6H-N, he papa hangahanga kāpia silicon Diameter150mm.
Whakatakotoranga papa hiko waro (SiC) 6 inihi te whānui
| Tau | Kore MPD | Te whakaputanga | Taumata Rangahau | Tauira Tauira |
| Diameter | 150.0mm±0.25mm | |||
| Matotoru | 4H-N | 350um±25um | ||
| 4H-SI | 500um±25um | |||
| Te Aronga o te Wafer | I runga i te tuaka:<0001>±0.5°mō te 4H-SI | |||
| Papa Matua | {10-10}±5.0° | |||
| Roa Papatahi Tuatahi | 47.5mm±2.5mm | |||
| Te aukati taha | 3mm | |||
| TTV/Pīkau/Whā | ≤15um/≤40um/≤60um | |||
| Te Kīanga o te Paipa Maikoro | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
| Ātete 4H-N 4H-SI | 0.015~0.028Ω!cm | |||
| ≥1E5Ω!cm | ||||
| Te taratara | Pōro Ra ≤1nm CMP Ra≤0.5nm | |||
| #Ngā pakaru i te mārama kaha | Kāore | 1 e whakaaetia ana, ≤2mm | Te roa tāpiri ≤10mm, te roa kotahi ≤2mm | |
| *Ngā pereti hex mā te rama kaha teitei | Te horahanga tāpiri ≤1% | Te horahanga tāpiri ≤ 2% | Te horahanga tāpiri ≤ 5% | |
| *Ngā wāhi momo-ira mā te mārama kaha-nui | Kāore | Te horahanga tāpiri ≤ 2% | Te horahanga tāpiri ≤ 5% | |
| *&Ka rakurakuhia e te mārama kaha | 3 ngā karawarawa ki te 1 x te whānui o te wafer, te roanga whakaemi | 5 ngā karawarawa ki te 1 x te whānui o te wafer, te roanga whakaemi | 5 ngā rakuraku ki te 1 x te whānui o te wafer, te roanga whakaemi | |
| Maramara taha | Kāore | 3 e whakaaetia ana, ≤0.5mm ia | 5 e whakaaetia ana, ≤1mm ia | |
| Te poke i te mārama kaha | Kāore
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Ratonga Hoko me te Kaihoko
Te Hokonga Rauemi
Ko te tari hoko rauemi te kawenga mō te kohikohi i ngā rauemi mata katoa e hiahiatia ana hei hanga i tāu hua. Kei te wātea tonu te whai i ngā hua me ngā rauemi katoa, tae atu ki te tātari matū me te tātari ā-tinana.
Kounga
I te wā e hangaia ana, e miihini ana rānei o āu hua, ka whai wāhi te tari whakahaere kounga ki te whakarite kia tutuki, kia hipa rānei i tāu whakaritenga ngā rauemi me ngā ātete katoa.
Ratonga
E whakahīhī ana mātou ki te whai i ngā kaimahi miihini hokohoko me te neke atu i te 5 tau o ngā wheako ki te umanga haurua-waea. Kua whakangungua rātou ki te whakautu i ngā pātai hangarau me te whakarato i ngā whakatau tata e tika ana mō ō hiahia.
Kei tō taha mātou i ngā wā katoa ka raru koe, ā, ka whakatau mātou i roto i ngā haora 10.
Kauwhata Taipitopito
