3 inihi te Maamaa Teitei (Kāore i Tāpirihia) Ngā Waferi Silicon Carbide Āhua-Whakamaroke Sic (HPSl)

3 inihi te Maamaa Teitei (Kāore i Tāpirihia) Ngā Wafers Silicon Carbide Āhua-Whakamātao Sic (HPSl) Whakaahua Matua

Whakaahuatanga Poto:

Ko te angaanga 3-inihi te roa, he mea hanga ki te Silicon Carbide (SiC) High Purity Semi-Insulating (HPSI) he paparanga kounga teitei kua arotauhia mō ngā tono hiko-teitei, auau-teitei, me te optoelectronic. He mea hanga ki te rauemi 4H-SiC kore-whakapiripiri, he tino parakore, e whakaatu ana ēnei angaanga i te kawe wera pai rawa atu, te whānui o te āputa roopu, me ngā āhuatanga haurua-whakamātautau tino pai, e mea nui ai mō te whanaketanga taputapu matatau. Me te kounga hanganga me te kounga mata pai rawa atu, ka noho ngā paparanga HPSI SiC hei turanga mō ngā hangarau o te whakatupuranga e whai ake nei i roto i ngā ahumahi hikohiko mana, whakawhitiwhiti kōrero, me te rererangi, e tautoko ana i te auahatanga puta noa i ngā mara kanorau.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

1. Ngā Āhuatanga Ā-tinana me ngā Āhuatanga Hanganga
●Momo Rauemi: Teitei te Parakore (Kāore i Tāpirihia) Silicon Carbide (SiC)
●Diameter: 3 inihi (76.2 mm)
●Matotoru: 0.33-0.5 mm, ka taea te whakarite kia rite ki ngā whakaritenga o te tono.
●Hanganga Tioata: 4H-SiC momo maha me te whatunga hexagonal, e mōhiotia ana mō te nekenekehanga irahiko teitei me te pumau wera.
●Te Aronga:
oPaerewa: [0001] (papa-C), e tika ana mō te whānuitanga o ngā mahi.
oWhiringa: Ki waho o te tuaka (hohonu 4°, 8° rānei) hei whakanui ake i te tipu epitaxial o ngā paparanga taputapu.
●Papatahi: Rerekētanga matotoru katoa (TTV) ●Kounga Mata:
oKua orohia kia iti te hapa o te mātotoru (<10/cm² te mātotoru o ngā paipa iti). 2. Ngā Āhuatanga Hiko ●Te Ātete: >109^99 Ω·cm, ka mau tonu mā te tango i ngā tāpiringa kua whakaritea.
●Kaha Hiko-ā-Iwi: He pakari ngaohiko teitei me te iti o ngā mate hiko-ā-iwi, he mea tino pai mō ngā tono mana-nui.
●Te Arahi Wera: 3.5-4.9 W/cm·K, e āhei ai te tohatoha wera whai hua i roto i ngā taputapu mahi teitei.

3. Ngā Āhuatanga Wera me te Āhuatanga Ā-Mīhini
●Whānui Āputa: 3.26 eV, e tautoko ana i te mahi i raro i ngā āhuatanga ngaohiko teitei, pāmahana teitei, me te irahiko teitei.
●Pakeke: Tauine Mohs 9, e whakarite ana i te pakari ki te pakaru ā-mīhini i te wā e tukatukahia ana.
●Tauwehenga Whānuitanga Wera: 4.2×10−6/K4.2 \times 10^{-6}/\text{K}4.2×10−6/K, e whakarite ana i te pumau o ngā āhuatanga i raro i ngā rerekētanga pāmahana.

Tawhā	Taumata Whakaputa	Taumata Rangahau	Tauira Tauira	Wāhanga
Tau	Taumata Whakaputa	Taumata Rangahau	Tauira Tauira
Diameter	76.2 ± 0.5	76.2 ± 0.5	76.2 ± 0.5	mm
Matotoru	500 ± 25	500 ± 25	500 ± 25	µm
Te Aronga o te Wafer	I runga i te tuaka: <0001> ± 0.5°	I runga i te tuaka: <0001> ± 2.0°	I runga i te tuaka: <0001> ± 2.0°	tohu
Te Matotoru o te Paipa Maikoro (MPD)	≤ 1	≤ 5	≤ 10	cm−2^-2−2
Ātete Hiko	≥ 1E10	≥ 1E5	≥ 1E5	Ω·cm
Tāpiri	Kua whakakorea te waipiro	Kua whakakorea te waipiro	Kua whakakorea te waipiro
Te whakatakotoranga papatahi tuatahi	{1-100} ± 5.0°	{1-100} ± 5.0°	{1-100} ± 5.0°	tohu
Roa Papatahi Tuatahi	32.5 ± 3.0	32.5 ± 3.0	32.5 ± 3.0	mm
Roa Papatahi Tuarua	18.0 ± 2.0	18.0 ± 2.0	18.0 ± 2.0	mm
Te whakatakotoranga papatahi tuarua	90° CW mai i te papatahi tuatahi ± 5.0°	90° CW mai i te papatahi tuatahi ± 5.0°	90° CW mai i te papatahi tuatahi ± 5.0°	tohu
Te Whakakore i te Tapa	3	3	3	mm
LTV/TTV/Pīkau/Whā	3 / 10 / ±30 / 40	3 / 10 / ±30 / 40	5 / 15 / ±40 / 45	µm
Te Pākari o te Mata	Mata-Si: CMP, Mata-C: Orohia	Mata-Si: CMP, Mata-C: Orohia	Mata-Si: CMP, Mata-C: Orohia
Ngā Kapiti (Te Mārama Kaha-Nui)	Kāore	Kāore	Kāore
Pereti Hex (Rama Kaha-Tiketike)	Kāore	Kāore	Te horahanga tāpiri 10%	%
Ngā Rohe Momo-maha (Marama Kaha-Tiketike)	Te horahanga tāpiri 5%	Te horahanga tāpiri 20%	Te horahanga tāpiri 30%	%
Ngā Karakura (Te Mārama Kaha-Nui)	≤ 5 ngā karawarawa, te roanga o te katoa ≤ 150	≤ 10 ngā karawarawa, te roanga o te katoa ≤ 200	≤ 10 ngā karawarawa, te roanga o te katoa ≤ 200	mm
Tapahi Tapa	Kāore he whānui/hohonu ≥ 0.5 mm	2 e whakaaetia ana ≤ 1 mm te whānui/te hohonu	5 e whakaaetia ana ≤ 5 mm te whānui/te hohonu	mm
Te Parahanga o te Mata	Kāore	Kāore	Kāore

Ngā tono

1. Ngā Hikohiko Mana
Nā te whānui o te āputa ira me te kawe wera teitei o ngā papa HPSI SiC, he mea tino pai mō ngā taputapu hiko e mahi ana i roto i ngā āhuatanga tino kino, pēnei i:
●Ngā Pūrere Ngaohiko-Teitei: Tae atu ki ngā MOSFET, IGBT, me ngā Schottky Barrier Diodes (SBD) mō te hurihanga hiko whai hua.
●Ngā Pūnaha Pūngao Whakahou: Pēnei i ngā pūwhakahuri hiko o te rā me ngā pūmana hau.
●Ngā Waka Hiko (EV): Whakamahia i roto i ngā inverters, ngā rihi, me ngā pūnaha powertrain hei whakapai ake i te whai huatanga me te whakaiti i te rahi.

2. Ngā Whakamahinga RF me te Ngaruiti
He mea nui te ātete teitei me te iti o ngā mate hiko-kore o ngā papa HPSI mō ngā pūnaha auau-reo irirangi (RF) me ngā pūnaha ngaruiti, tae atu ki:
●Hanganga Whakawhitiwhiti Kōrero: Ngā teihana turanga mō ngā whatunga 5G me ngā whakawhitiwhiti kōrero amiorangi.
●Te Rererangi me te Parepare: Ngā pūnaha radar, ngā pūihi whakarārangi-wāhanga, me ngā wāhanga rererangi.

3. Ngā taputapu hikohiko
Nā te mārama me te whānui o te āputa o te 4H-SiC ka taea te whakamahi i roto i ngā taputapu optoelectronic, pēnei i:
●Ngā Pūoko Whakaahua UV: Mō te aroturuki taiao me te tātaritanga hauora.
●Ngā LED Mana-Tiketike: Te tautoko i ngā pūnaha rama āhua-totoka.
●Ngā Taiaho Taiaho: Mō ngā whakamahinga ahumahi me te hauora.

4. Rangahau me te Whakawhanake
E whakamahia whānuitia ana ngā papa HPSI SiC i roto i ngā taiwhanga rangahau me te whanaketanga mātauranga me te ahumahi hei tūhura i ngā āhuatanga rauemi matatau me te hanganga taputapu, tae atu ki:
●Te Tipu o te Paparanga Epitaxial: Ngā rangahau mō te whakaiti i te hapa me te arotau i te paparanga.
●Ngā Rangahau Nekehanga Kawe: Te rangahau i te kawe irahiko me te pū kōhao i roto i ngā rauemi tino parakore.
●Te Tauira: Te whanaketanga tuatahi o ngā taputapu me ngā ara iahiko hou.

Ngā Painga

Kounga Pai Rawa:
Ko te tino parakore me te iti o te mātotoru hapa e whakarato ana i tētahi tūāpapa pono mō ngā tono matatau.

Te Pūmautanga o te Wera:
Nā ngā āhuatanga tino pai o te torengi wera, ka taea e ngā taputapu te mahi pai i raro i ngā āhuatanga mana me te pāmahana teitei.

Hototahi Whānui:
Mā ngā whakatakotoranga e wātea ana me ngā kōwhiringa matotoru ritenga ka taea te urutau mō ngā whakaritenga katoa o te pūrere.

Te pakari:
Mā te tino pakari me te pumau o te hanganga ka whakaitihia te pakaru me te rerekētanga i te wā e tukatukahia ana me te whakahaeretia ana.

Ngā mahi maha:
He pai mō te whānuitanga o ngā ahumahi, mai i te pūngao hou ki te rererangi me te whakawhitiwhiti kōrero.

Whakamutunga

Ko te papa whakarewa Silicon Carbide Semi-Insulating Teitei 3-inihi te teitei, te tihi o te hangarau papa mō ngā taputapu hiko-teitei, auau-teitei, me te optoelectronic. Ko tōna huinga o ngā āhuatanga wera, hiko, me te miihini pai rawa atu ka whakarite i te mahi pono i roto i ngā taiao wero. Mai i ngā hikohiko mana me ngā pūnaha RF ki ngā hikohiko optoelectronic me te R&D matatau, ka whakaratohia e ēnei papa HPSI te turanga mō ngā auahatanga o āpōpō.
Mō ētahi atu pārongo, mō te tuku ota rānei, whakapā mai ki a mātou. Kei te wātea tā mātou tīma hangarau ki te whakarato aratohu me ngā kōwhiringa whakaritenga e tika ana mō ō hiahia.