Raina Aunoatanga Whakakanapa Hononga-Wāhanga Whā o te Wafer Silicon / Silicon Carbide (SiC) (Raina Whakahaere Whai muri i te Whakakanapa)

Raina Aunoa Whakakanapa Hononga-Wāhanga Whā o te Wafer Silicon / Silicon Carbide (SiC) (Raina Whakahaere Whai muri i te Whakakanapa) Whakaahua Matua

Whakaahuatanga Poto:

Ko tēnei Raina Aunoatanga Whakakanapa Hononga-Whā he otinga whakauru, ā-roto i hangaia mōmuri i te whakakanapa / muri i te CMPngā mahi osiliconmekāpira silicon (SiC)ngā papa angiangi. I hangaia huri noangā kawe uku (ngā pereti uku), ka whakakotahi te pūnaha i ngā mahi maha ki te rārangi kotahi kua whakaritea—e āwhina ana i ngā kamupene hanga ki te whakaiti i te whakahaere ā-ringa, ki te whakatau i te wā tango, me te whakapakari i te whakahaere poke.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

Raina Aunoa Whakakanapa Hononga-Wāhanga Whā o te Wafer Silicon / Silicon Carbide (SiC) (Raina Whakahaere Whai muri i te Whakakanapa)4

Tirohanga Whānui

I roto i te hangahanga semiconductor,te horoi whai hua i muri i te CMPe mōhiotia whānuitia ana hei taahiraa matua hei whakaiti i ngā hapa i mua i te tukanga e whai ake nei, me ngā huarahi matatau (tae atu kihoroinga megasonic) e kōrerohia whānuitia ana hei whakapai ake i te mahi tango matūriki.

Mō te SiC, inā koate pakeke teitei me te koretake o te matūka uaua te whakakanapa (he maha ngā wā e pā ana ki te iti o te tere tango rauemi me te nui ake o te mōrearea o te kino o te mata/o raro i te mata), ā, ka tino whai hua te aunoatanga pumau i muri i te whakakanapa me te horoi/whakahaere whakahaere kua whakahaeretia.

Raina Aunoa Whakakanapa Hononga-Wāhanga Whā o te Hanganga ...

Raina Aunoa Whakakanapa Hononga-Wāhanga Whā o te Wafer Silicon / Silicon Carbide (SiC) (Raina Whakahaere Whai muri i te Whakakanapa)2

Ngā Painga Matua

He raina kotahi kua whakauruhia e tautoko ana i:

Te wehenga me te kohikohinga o te anga(i muri i te whakakanapa)
Te ārai/te rokiroki o te kawe uku
Te horoi i te kawe uku
Te whakapiri (te whakapiri) o te angaanga ki runga i ngā kawe uku
He mahi whakakotahi, kotahi-rārangi mōngā papa angiangi 6–8 inihi

Ngā Whakatakotoranga Hangarau (Mai i te Pepa Raraunga kua Whakaratohia)

Ngā Ahu Taputapu (R×W×H):13643 × 5030 × 2300 mm
Pūtake Hiko:AC 380 V, 50 Hz
Mana Katoa:119 kW
Te Horoi o te Whakamaunga:0.5 μm < 50 ia; 5 μm < 1 ia
Te Papatahi o te Whakamaunga:≤ 2 µm

Tohutoro Whakaputa (Mai i te Pepa Raraunga kua Whakaratohia)

Ngā Ahu Taputapu (R×W×H):13643 × 5030 × 2300 mm
Pūtake Hiko:AC 380 V, 50 Hz
Mana Katoa:119 kW
Te Horoi o te Whakamaunga:0.5 μm < 50 ia; 5 μm < 1 ia
Te Papatahi o te Whakamaunga:≤ 2 µm

Rere Raina Noa

Whāngai / atanga mai i te rohe whakakanapa o runga
Te wehenga me te kohikohinga o te wafer
Te ārai/te rokiroki i ngā kaikawe uku (te wetewete wā-taka)
Te horoi i te kawe uku
Te whakamau angiangi ki runga i ngā kawe (me te whakahaere horoi me te papatahi)
Whāngai atu ki te tukanga, ki te mahi rānei i raro iho

Ngā Pātai Auau

P1: He aha ngā raruraru matua e whakatauhia ana e tēnei raina?
A: Ka whakangawari i ngā mahi whai muri i te whakakanapa mā te whakauru i te wehenga/kohikohi o te wafer, te ārai kawe uku, te horoi kawe, me te whakairinga wafer ki roto i te raina aunoa kotahi—ka whakaiti i ngā pā ā-ringa me te whakatau i te auau whakaputa.

Q2: Ko ēhea ngā rauemi me ngā rahi o te angaanga e tautokona ana?
A:Te Hiraka me te SiC,6–8 inihingā papa (e ai ki ngā whakaritenga kua whakaratohia).

P3: He aha i aro nui ai te horoi i muri i te CMP i roto i te umanga?
A: E whakaatu ana ngā tuhinga ahumahi kua piki ake te hiahia mō te horoi whai hua i muri i te CMP hei whakaiti i te kiato o ngā hapa i mua i te taahiraa e whai ake nei; he mea rangahau te nuinga o ngā huarahi e ahu mai ana i te megasonic hei whakapai ake i te tango matūriki.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.