Ngongo Ouma Whakapae Silicon Carbide (SiC)
Kauwhata Taipitopito
Te Tūnga Hua me te Whakatakotoranga Uara
Ko te Ngongo Ōumu Whakapae Silicon Carbide (SiC) te rūma tukatuka matua me te rohe pēhanga mō ngā tauhohenga hau pāmahana-tiketike me ngā maimoatanga wera e whakamahia ana i roto i te hanga hauāuru, te hanga photovoltaic, me te tukatuka rauemi matatau.
I hangaia tēnei ngongo me te hanganga SiC kotahi-wahi, he mea hanga-tāpiri, me te paparanga tiaki CVD-SiC matotoru, ka tukuna e ia he kawe wera tino pai, he iti noa te poke, he kaha te pumau o te miihini, me te ātete matū tino pai.
Mā tōna hoahoa ka whakarite kia ōrite te pāmahana, kia roa ake te wā mahi, kia pumau hoki te mahi mō te wā roa.
Ngā Painga Matua
-
Ka whakanui ake i te ōritetanga o te pāmahana o te pūnaha, te ma, me te whai huatanga whānui o ngā taputapu (OEE).
-
Ka whakaiti i te wā kore mahi horoi, ka whakaroa hoki i ngā huringa whakakapinga, ka whakaiti i te utu katoa o te mana whakahaere (TCO).
-
He rūma roa te ora e āhei ai te whakahaere i ngā matū waikura me te matū whai rawa i te hauwai i te pāmahana teitei me te iti rawa o te mōrearea.
Ngā Āhua me te Matapihi Tukanga e Pā Ana
-
Ngā hau tauhohe: te hāora (O₂) me ētahi atu ranunga waikura
-
Ngā hau kawe/hau tiaki: te hauota (N₂) me ngā hau korekore tino parakore
-
Ngā momo hototahi: ngā hau iti kei roto he chlorine (e whakahaeretia ana te kukū me te wā noho mā te tohutao)
Ngā Tukanga Noangā āhuatanga: te waikura maroke/mākū, te whakamahana, te horapa, te whakatakotoranga LPCVD/CVD, te whakahohenga mata, te whakakorenga photovoltaic, te tipu kiriata angiangi mahi, te whakawaro, te whakanitora, me ētahi atu.
Ngā Tikanga Whakahaere
-
Pāmahana: pāmahana rūma tae atu ki te 1250 °C (kia 10–15% te tawhiti haumaru i runga i te hoahoa whakamahana me te ΔT)
-
Pēhanga: mai i ngā taumata korehau iti-pēhanga/LPCVD ki te pēhanga pai tata-hauātea (ngā whakaritenga whakamutunga mō ia ota hoko)
Rauemi me te Arorau Hanganga
Tinana SiC Monolithic (Tāpiri Hangaia)
-
He β-SiC kiato-teitei, he SiC maha-wāhanga rānei, i hangaia hei wāhanga kotahi—kāore he hononga, he tuitui rānei kua whakamārōhia ka turuturu, ka waihanga rānei i ngā pūwāhi ahotea.
-
Mā te kawe wera teitei ka tere te urupare wera me te ōritetanga pāmahana tuaka/whāiti tino pai.
-
Mā te tauwehenga whakawhanui wera iti, pumau (CTE) ka pumau ngā āhuatanga me ngā hiri pono i ngā pāmahana teitei.
Paninga Mahi CVD SiC
-
He mea whakatakoto ki te wāhi tūturu, he tino parakore (ngā poke o te mata/paninga < 5 ppm) hei pehi i te whakaputanga matūriki me te tukunga katote whakarewa.
-
He tino ātete matū ki ngā hau whakahāweawe me ngā hau e mau ana i te hauwai, e ārai ana i te whakaekenga o te pakitara, i te whakatakotoranga anō rānei.
-
Ngā kōwhiringa matotoru motuhake mō te rohe hei whakataurite i te ātete ki te waikura me te urupare ki te wera.
Painga WhakakotahiMā te tinana SiC pakari ka kaha te hanganga me te kawe wera, ko te paparanga CVD ka oati i te ma me te ātete ki te waikura mō te pono me te kaha whakaputa.
Ngā Whāinga Mahi Matua
-
Te pāmahana whakamahi tonu:≤ 1250 °C
-
Ngā poke o te papa matua:< 300 ppm
-
Ngā poke o te mata CVD-SiC:< 5 ppm
-
Ngā ātete ā-ahu: OD ±0.3–0.5 mm; coaxiality ≤ 0.3 mm/m (kei te wātea he whāiti ake)
-
Te taratara o roto o te pakitara: Ra ≤ 0.8–1.6 µm (he kōwhiringa te whakaotinga oro, tata-whakaata rānei)
-
Te tere turuturu o te hauhā: ≤ 1 × 10⁻⁹ Pa·m³/s
-
Te manawanui ki te ru wera: ka ora tonu i te huringa wera/makariri auau, me te kore e pakaru, e pakaru rānei
-
Huinga rūma ma: Akomanga ISO 5–6 me ngā taumata toenga matūriki/konganuku-katote kua whakamanahia
Ngā Whirihoranga me ngā Kōwhiringa
-
ĀhuahangaOD 50–400 mm (nui ake mā te aromatawai) me te hanganga roa kotahi-wahi; he matotoru pakitara kua arotauhia mō te kaha miihini, te taumaha, me te rerenga wera.
-
Ngā hoahoa mutungangā flange, te waha pere, te bayonet, ngā mowhiti tauwāhi, ngā awaawa mowhiti-O, me ngā putanga papu-puta, putanga pēhanga rānei ritenga.
-
Ngā tauranga mahi: ngā whāngai werawera, ngā nohoanga karāhe tirohanga, ngā putanga hau karo—he mea hanga katoa mō te mahi pāmahana teitei, ātete turuturu.
-
Ngā kaupapa paninga: pakitara o roto (taunoa), pakitara o waho, te kapi katoa rānei; te parenga kua tohua, te matotoru kua whakaritea rānei mō ngā rohe e tino pāngia ana.
-
Te maimoatanga mata me te horoi: ngā taumata taratara maha, te horoinga ultrasonic/DI, me ngā tikanga tunu/maroke ritenga.
-
Ngā Taputapu: ngā āputa karāti/uku/whakarewa, ngā hiri, ngā taputapu kimi, ngā ringaringa whakahaere, me ngā pou rokiroki.
Whakataurite Mahi
| Ine | Ngongo SiC | Ngongo Kuata | Ngongo Arumina | Ngongo Karāwhite |
|---|---|---|---|---|
| Te kawe wera | Teitei, ōrite | Iti | Iti | Teitei |
| Kaha/ngoki pāmahana teitei | Tino pai | Tika | Pai | Pai (kāore e pāngia e te waikura) |
| Ru wera | Tino pai | ngoikore | Waenga | Tino pai |
| Te ma / ngā iona whakarewa | Tino pai (iti) | Waenga | Waenga | rawakore |
| Te Waikura me te Matū Cl | Tino pai | Tika | Pai | Korekore (ka waikura) |
| Te utu me te roa o te ratonga | Te roa o te ora | Iti / poto | Waenga / waenga | Waenga / taiao-herea |
Ngā Pātai Auau (FAQ)
P1. He aha i whiriwhiri ai i tētahi tinana SiC monolithic kua tāia-3D?
A. Ka whakakorea ngā hononga me ngā whiri e turuturu ana, e whakawhāiti ana rānei i te ahotea, ā, ka tautoko i ngā āhuahanga uaua me te tika o ngā āhuatanga.
P2. He ātete te SiC ki ngā hau e mau ana i te chlorine?
Āe. He tino koretake te CVD-SiC i roto i ngā rohe pāmahana me te pēhanga kua tohua. Mō ngā wāhi pānga nui, e taunakihia ana kia whakamahia he paninga matotoru ā-rohe me ngā pūnaha horoi/purea pakari.
P3. He aha te pai ake o tēnei mahi i ngā ngongo quartz?
A. Ka roa ake te ora o te SiC, ka pai ake te ōritetanga o te pāmahana, ka iti ake te poke o te matūriki/konganuku-katote, ā, ka pai ake te TCO—ina koa i tua atu i te ~900 °C, i roto rānei i ngā āhuarangi waikura/hauora.
P4. Ka taea e te ngongo te tu atu i te pikinga tere o te wera?
Āe, mēnā ka whaihia ngā aratohu mōrahi ΔT me te tere-whakatere. Mā te hono i tētahi tinana SiC κ-teitei me tētahi paparanga CVD angiangi ka tautoko i ngā whakawhiti wera tere.
Q5. Āhea te wā e hiahiatia ai te whakakapinga?
A. Whakakapia te ngongo mēnā ka kitea e koe he ngatata o te flange, o te taha rānei, he poka paninga, he pakaru rānei, he pikinga o te rerenga o te turuturu, he nui te paheketanga o te pāmahana, he rerekē rānei te putanga o ngā matūriki.
Mō Mātou
He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.
