SICOI (Silicon Carbide on Insulator) Wafers SiC Kiriata ON Silicon

Kiriata SiC ON Silicon Wafers (SICOI) Whakaahua Matua o te Silicon

Whakaahuatanga Poto:

Ko ngā papa whakarewa Silicon Carbide on Insulator (SICOI) he papa haurua-ā-ira o te whakatupuranga e whai ake nei e whakauru ana i ngā āhuatanga ā-tinana me te hiko o te silicon carbide (SiC) me ngā āhuatanga wehe hiko tino pai o tētahi paparanga ārai ārai, pērā i te silicon dioxide (SiO₂) te silicon nitride rānei (Si₃N₄). Ko tētahi papa whakarewa SICOI noa he paparanga SiC epitaxial angiangi, he kiriata ārai waenga, me tētahi papa turanga tautoko, ka taea te silicon, te SiC rānei.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

Te whakaurunga o ngā papa whakarewa Silicon Carbide on Insulator (SICOI)

Kua hangaia tēnei hanganga ranu hei whakatutuki i ngā tono pakari o ngā taputapu hiko mana-teitei, auau-teitei, me te pāmahana-teitei. Mā te whakauru i tētahi paparanga ārai, ka whakaitihia e ngā papa SICOI te kaha o te pirinoa me te pehi i ngā ia turuturu, kia pai ake ai te auau mahi, te pai ake o te whai huatanga, me te whakapai ake i te whakahaere wera. Nā ēnei painga ka tino whai hua rātou i roto i ngā rāngai pēnei i ngā waka hiko, ngā hanganga whakawhitiwhiti kōrero 5G, ngā pūnaha rererangi, ngā hikohiko RF matatau, me ngā hangarau pūoko MEMS.

Te Mātāpono Whakaputa o ngā Wafers SICOI

Ka hangaia ngā papa SICOI (Silicon Carbide on Insulator) mā te hangarau matataute tukanga here me te angiangi o te anga:

Te Tipu Papa SiC– Ka whakaritea he anga SiC kotahi-kirikiri kounga teitei (4H/6H) hei rauemi tuku.
Te Whakatakotoranga Paparanga Ārai– Ka hangaia he kiriata ārai (SiO₂, Si₃N₄ rānei) ki runga i te anga kawe (Si, SiC rānei).
Te Herenga Wafer– Ka honoa te anga SiC me te anga kawe i raro i te pāmahana teitei, i te āwhina plasma rānei.
Te Whakaangawari me te Whakakanapa– Ka whakaangahia te anga whāriki SiC ki ētahi maikiromita, kātahi ka orohia kia whiwhi ai i tētahi mata maeneene pēnei i te ngota.
Tirotiro Whakamutunga– Ka whakamatautauria te anga SICOI kua oti mō te ōritetanga o te matotoru, te taratara o te mata, me te mahi whakamarumaru.

Mā tēnei tukanga, hepaparanga SiC angiangi hohehe mea hanga ki ngā āhuatanga hiko me te wera tino pai, ā, ka honoa ki tētahi kiriata ārai me tētahi papa tautoko, ka hangaia he tūāpapa mahi-teitei mō ngā taputapu hiko me te RF o te whakatipuranga e whai ake nei.

Ngā Painga Matua o ngā Wafer SICOI

Kāwai Āhuatanga	Ngā Āhuatanga Hangarau	Ngā Painga Matua
Hanganga Rauemi	Paparanga hohe 4H/6H-SiC + kiriata ārai (SiO₂/Si₃N₄) + Kaikawe Si, SiC rānei	Ka tutuki te wehenga hiko kaha, ka whakaiti i te pokanoa pirinoa
Ngā Āhuatanga Hiko	Te kaha pakaru teitei (>3 MV/cm), te iti o te ngaronga hiko	Kua arotauhia mō te mahi ngaohiko teitei me te auau teitei
Ngā Āhuatanga Wera	Te kawe wera tae atu ki te 4.9 W/cm·K, pumau i runga ake i te 500°C	Te tohatoha wera whai hua, te mahi tino pai i raro i ngā kawenga wera nui
Ngā Āhuatanga Mīhini	Tino pakeke (Mohs 9.5), iti te tauwehenga o te whakawhānui wera	He pakari ki te ahotea, he roa ake te ora o te taputapu
Kounga Mata	Mata tino maeneene (Ra <0.2 nm)	Ka whakatairanga i te epitaxy kore-hapa me te hanga taputapu pono
Te whakamarumaru	Ātete >10¹⁴ Ω·cm, iti te rerenga o te iahiko	Mahi pono i roto i ngā tono wehewehe RF me te ngaohiko teitei
Rahi me te Whakaritenga	Kei te wātea i roto i ngā whakatakotoranga 4, 6, me te 8-inihi; te matotoru SiC 1–100 μm; te whakamarumaru 0.1–10 μm	Hoahoa ngāwari mō ngā whakaritenga tono rerekē

Ngā Wāhanga Taupānga Matua

Rāngai Taupānga	Ngā Whakamahinga Noa	Ngā Painga Mahi
Hikohiko Mana	Ngā kaitahuri hiko, ngā teihana utu, ngā taputapu hiko ahumahi	Teitei o te ngaohiko pakaru, te whakaiti i te ngaronga whakawhiti
RF me te 5G	Ngā whakakaha hiko o te teihana turanga, ngā wāhanga ngaru-mirimita	He iti ngā pararutiki, e tautoko ana i ngā mahi awhe-GHz
Ngā Pūoko MEMS	Ngā pūoko pēhanga taiao-kino, ngā MEMS taumata-whakatere	Te pumau wera teitei, te ātete ki te irahiko
Rererangi me te Tiaki	Ngā whakawhitiwhiti kōrero amiorangi, ngā kōwae hiko rererangi	Te pono i roto i ngā pāmahana tino kino me te pānga o te hihi
Mātiti Atamai	Ngā kaitahuri HVDC, ngā whati ara iahiko āhua-totoka	Ka whakaitihia te ngaronga hiko e te whakamarumaru teitei
Ngā taputapu hikohiko	Ngā rama UV LED, ngā papaaho taiaho	Ka tautoko te kounga tioata teitei i te tukunga mārama whai hua

Te hanga o te 4H-SiCOI

Ka tutuki te hanga o ngā papa 4H-SiCOI mā roto ingā tukanga here me te angiangi o te anga, e āhei ai ngā atanga ārai kounga teitei me ngā paparanga hohe SiC kore-hapa.

aHe hoahoa o te hanganga o te tūāpapa rauemi 4H-SiCOI.
bHe whakaahua o tētahi anga 4H-SiCOI 4-inihi te whānui mā te whakamahi i te hononga me te angiangi; kua tohua ngā rohe hapa.
cTe tautuhi i te matotoru ōrite o te papa 4H-SiCOI.
dWhakaahua whatu o te mate 4H-SiCOI.
eTe rere o te tukanga mō te hanga i tētahi resonator kōpae moroiti SiC.
fHe whakaaturanga SEM o tētahi resonator kōpae moroiti kua oti.
gKo te SEM kua whakanuia e whakaatu ana i te pakitara taha o te resonator; ko te whakaurunga AFM e whakaatu ana i te maeneene o te mata nano.
hHe SEM whakawhiti-wāhanga e whakaatu ana i te mata o runga āhua parabolic.

Ngā Pātai Auau mō ngā Wafers SICOI

P1: He aha ngā painga o ngā wafer SICOI i ngā wafer SiC tuku iho?
A1: He rerekē ki ngā papa SiC paerewa, kei roto i ngā papa SICOI he paparanga ārai e whakaiti ana i te kaha pirinoa me ngā ia turuturu, ka hua ake he pai ake te whai huatanga, he pai ake te urupare auau, me te mahi wera pai ake.

Q2: He aha ngā rahi o te wafer e wātea ana?
A2: Ko ngā papa SICOI e hangaia ana i ngā whakatakotoranga 4-inihi, 6-inihi, me te 8-inihi, me te matotoru SiC me te paparanga whakamahana ritenga e wātea ana i runga i ngā whakaritenga a te taputapu.

Q3: Ko ēhea ngā ahumahi e tino whai hua ana mai i ngā wafer SICOI?
A3: Ko ngā ahumahi matua ko ngā hikohiko mana mō ngā waka hiko, ngā hikohiko RF mō ngā whatunga 5G, ngā MEMS mō ngā pūoko rererangi, me ngā hikohiko optoelectronics pērā i ngā rama UV LED.

P4: Me pēhea te whakapai ake a te paparanga ārai i te mahi a te taputapu?
A4: Ka ārai te kiriata ārai (SiO₂, Si₃N₄ rānei) i te turuturu o te iahiko, ā, ka whakaiti i te whakawhitiwhiti hiko, ka taea ai te manawanui teitei ake i te ngaohiko, te whakawhiti pai ake, me te whakaiti i te ngaronga wera.

Q5: He pai ngā papa SICOI mō ngā whakamahinga pāmahana teitei?
A5: Ae, me te kawe wera teitei me te ātete ki tua atu i te 500°C, kua hangaia ngā papa SICOI kia mahi pono i raro i te wera nui me ngā taiao uaua.

Q6: Ka taea te whakarite i ngā wafer SICOI?
A6: Ae. Ka tukuna e ngā kaihanga ngā hoahoa kua whakaritea mō ngā matotoru motuhake, ngā taumata tāpiringa, me ngā huinga papa hei whakatutuki i ngā hiahia rangahau me ngā hiahia ahumahi rerekē.

O mua: Mīhini Tapahi Waea Taimana mō te SiC | Hapaira | Kuata | Karāhe

Panuku: Mīhini Kani Taimana Maha-Waea mō ngā Rauemi Pakaru Tino-Pakeke o te Hapaira SiC