Paepae uku SiC Kapu momi uku miihini tika kua whakaritea
Ngā āhuatanga o te rauemi:
1. Te pakeketanga teitei: ko te pakeketanga Mohs o te silicon carbide he 9.2-9.5, ko te tuarua anake ki te taimana, he kaha te ātete ki te kakahu.
2. Te kawe wera teitei: ko te kawe wera o te silicon carbide e eke ana ki te 120-200 W/m·K, ka taea te tere te whakamarara i te wera, ā, he pai hoki mō te taiao pāmahana teitei.
3. Tauwehenga whakawhanui wera iti: he iti te tauwehenga whakawhanui wera o te silicon carbide (4.0-4.5×10⁻⁶/K), ka taea tonu te pupuri i te pumau o ngā āhuatanga i te pāmahana tiketike.
4. Te pumau matū: te ātete ki te waikura waikawa me te kawakore o te silicon carbide, he pai mō te whakamahi i roto i te taiao waikura matū.
5. Kaha ā-mīhini teitei: he kaha piko teitei te silicon carbide me te kaha pēhi, ā, ka taea te tu atu i te ahotea ā-mīhini nui.
Ngā Āhuatanga:
1. I roto i te umanga haurua-ira, me whakanoho ngā angaanga tino angiangi ki runga i te kapu momi korehau, ka whakamahia te momi korehau hei whakapiri i ngā angaanga, ā, ka mahia te tukanga whakawātea, te whakaitiiti, te whakawātea, te horoi me te tapahi ki runga i ngā angaanga.
2. He pai te kawe wera o te pūwero warowaihā silicon, ka taea te whakapoto i te wā whakawā me te wā whakawā, me te whakapai ake i te pai o te whakaputa.
3. He pai hoki te ātete waikawa me te kawakore o te ngongo korehau karawaka silicon.
4. Ki te whakatauritea ki te pereti kawe korundum tuku iho, ka whakapotohia te wā whakamahana me te whakamatao i te uta me te tango, ka whakapai ake i te whai huatanga o te mahi; I te wa ano, ka taea te whakaiti i te kakahu i waenga i nga pereti o runga me raro, te pupuri i te tika o te papa, me te whakaroa i te roa o te ratonga ma te 40%.
5. He iti te rahinga o ngā rauemi, he māmā hoki. He māmā ake mā ngā kaiwhakahaere te kawe i ngā papa, ka whakaiti i te tūponotanga o te pakaru i puta mai i ngā uauatanga kawe waka mā te 20%.
6. Rahi: te whānui mōrahi 640mm; Papatahi: 3um, iti iho rānei
Mara tono:
1. Te hanga i ngā mea hiko-haurua
●Te tukatuka anga:
Mō te whakapiri i te angaanga i roto i te whakaahua-ipurangi, te whakairo, te whakatakoto kiriata angiangi me ētahi atu tukanga, kia tino tika ai, kia rite ai hoki te tukanga. He pai te ātete ki te pāmahana me te waikura mō ngā taiao hanga haurua-ā-ira uaua.
●Te tipu o te epitaxial:
I roto i te tipu epitaxial SiC, GaN rānei, hei kawe ki te whakamahana me te whakatika i ngā anga, hei whakarite i te ōritetanga o te pāmahana me te kounga tioata i ngā pāmahana teitei, hei whakapai ake i te mahi a te taputapu.
2. Ngā taputapu hikohiko
●Te Hanganga LED:
Whakamahia hei whakapiri i te papa hapaira, i te SiC rānei, hei kawe whakamahana hoki i roto i te tukanga MOCVD, hei whakarite i te ōritetanga o te tipu epitaxial, hei whakapai ake i te pai me te kounga o te kanapa LED.
●Te taiaho taiaho:
Hei taputapu tino tika, ka taea te whakatika me te whakamahana i te turanga hei whakarite i te pumau o te pāmahana tukanga, hei whakapai ake i te mana putanga me te pono o te taiaho taiaho.
3. Te miihini tika
●Te tukatuka wāhanga whatu:
E whakamahia ana mō te whakapiri i ngā wāhanga tino tika pērā i ngā karu whatu me ngā tātari kia tino tika ai, kia iti ai hoki te parahanga i te wā e tukatukahia ana, ā, he pai hoki mō te miihini kaha-teitei.
●Te tukatuka uku:
He taputapu pumau teitei, he pai mō te miihini tika o ngā rauemi uku hei whakarite i te tika me te ōritetanga o te miihini i raro i te pāmahana tiketike me te taiao waikura.
4. Ngā whakamātautau pūtaiao
●Whakamātautau pāmahana teitei:
Hei taputapu whakapiri tauira i ngā taiao pāmahana teitei, ka tautoko i ngā whakamātautau pāmahana tino nui i runga ake i te 1600°C hei whakarite i te ōritetanga o te pāmahana me te pumau o te tauira.
●Whakamātautau korehau:
Hei whakamahana me te whakatika tauira i roto i te taiao korehau, hei whakarite i te tika me te auau o te whakamātautau, he mea tika mō te paninga korehau me te maimoatanga wera.
Ngā whakaritenga hangarau：
| (Taonga rauemi) | (Wāhanga) | (ssic) | |
| (Ihirangi SiC) |
| (Taumaha)% | >99 |
| (Rahi toharite o te witi) |
| maikorona | 4-10 |
| (Kiato) |
| kg/dm3 | >3.14 |
| (Te āhua o te pūngao) |
| Vo1% | <0.5 |
| (Te mārō o Vickers) | HV 0.5 | GPa | 28 |
| *(Kaha piko) | 20ºC | MPa | 450 |
| (Kaha pēhi) | 20ºC | MPa | 3900 |
| (Te Tauwehenga Ārai) | 20ºC | GPa | 420 |
| (Te pakari o te whati) |
| MPa/m'% | 3.5 |
| (Te kawe wera) | 20°ºC | W/(m*K) | 160 |
| (Ātete) | 20°ºC | Ōhm.cm | 106-108 |
|
| a(RT**...80ºC) | K-1*10-6 | 4.3 |
|
|
| 0ºC | 1700 |
Me ngā tau maha o te kohikohi hangarau me te wheako ahumahi, ka taea e XKH te whakarite i ngā tawhā matua pēnei i te rahi, te tikanga whakamahana me te hoahoa mimiti korehau o te chuck kia rite ki ngā hiahia motuhake o te kiritaki, kia tino urutau ai te hua ki te tukanga a te kiritaki. Kua noho ngā chuck uku silicon carbide SiC hei wāhanga tino nui i roto i te tukatuka wafer, te tipu epitaxial me ētahi atu tukanga matua nā te mea he pai te kawe wera, te pumau pāmahana teitei me te pumau matū. Ina koa i roto i te hanga rauemi semiconductor tuatoru o te whakatupuranga pēnei i te SiC me te GaN, kei te piki haere tonu te hiahia mō ngā chuck uku silicon carbide. I te heke mai, me te tere o te whanaketanga o te 5G, ngā waka hiko, te matauranga horihori me ētahi atu hangarau, ka whānui ake ngā tirohanga tono o ngā chuck uku silicon carbide i roto i te umanga semiconductor.
Kauwhata Taipitopito
