Taputapu Whakatipu Ingota Hapira Tikanga Czochralski CZ mō te Hanga i ngā Wafer Hapira 2inihi-12inihi

Whakaahuatanga Poto:

Ko te Taputapu Whakatipu Ingota Hapira (Tikanga Czochralski) he pūnaha matatau kua hangaia mō te tipu karaihe kotahi o te hapira he tino parakore, he iti te hapa. Mā te tikanga Czochralski (CZ) ka taea te whakahaere tika i te tere kukume karaihe purapura (0.5–5 mm/h), te tere hurihuri (5–30 rpm), me ngā pikinga pāmahana i roto i te ipu iridium, ka puta he tioata ōrite tuaka tae atu ki te 12 inihi (300 mm) te whānui. Ka tautokohia e tēnei taputapu te whakahaere i te whakatakotoranga karaihe C/A-papa, ka taea ai te tipu o te hapira kounga-whatu, kounga-hiko, me te hapira kua tāpirihia (hei tauira, te rupi Cr³⁺, te hapira whetu Ti³⁺).

Ka whakaratohia e XKH ngā otinga whānui, tae atu ki te whakaritenga taputapu (te hanga wafer 2–12-inihi), te arotautanga tukanga (te kiato hapa <100/cm²), me te whakangungu hangarau, me te putanga marama o te 5,000+ wafer mō ngā tono pēnei i ngā papa LED, te epitaxy GaN, me te takai semiconductor.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kaupapa Mahi

Ko te tikanga CZ e whakahaerehia ana i roto i ngā mahi e whai ake nei:
1. Te Rewa i ngā Rauemi Mata: Ka rewahia te Al₂O₃ tino parakore (te parakore >99.999%) i roto i te ipu para iridium i te 2050–2100°C.
2. Whakataki ki te Karaihe Kākano: Ka tukuna te karaihe kākano ki roto i te wai rewa, ā, ka tōia teretia kia hanga he kaki (te whānui <1 mm) hei whakakore i ngā nekehanga.
3. Te Hanganga o te Pakihiwi me te Tipu Papatipu: Ka whakaitihia te tere kukume ki te 0.2–1 mm/h, ka āta whakanuia te diameter tioata ki te rahi e hiahiatia ana (hei tauira, 4–12 inihi).
4. Te Whakamahana me te Whakamatao: Ka whakamataohia te karaihe i te 0.1–0.5°C/min hei whakaiti i te pakaru i puta mai i te ahotea wera.
5. Ngā Momo Karaihe Hototahi:
Tau Hiko: Ngā papa hiko hiko (TTV <5 μm)
Taumata Whatu: Matapihi taiaho UV (whakawhiti >90%@200 nm)
Ngā Momo Kua Tāpirihia: Rūpī (te kukū o te Cr³⁺ 0.01–0.5 wt.%), ngongo hapaira kikorangi

Ngā Wāhanga Pūnaha Matua

1. Pūnaha Rewa
Iridium Crucible: Ātete ki te 2300°C, ātete ki te waikura, hototahi ki ngā rewa nui (100–400 kg).
Ouma Whakamahana Whakaoho: Whakahaere pāmahana motuhake maha-rohe (± 0.5°C), ngā pikinga wera kua arotauhia.

2. Pūnaha Tōia me te Hurihuri
Mōta Ratonga Tino Tika: Taumira kukume 0.01 mm/h, kokonga hurihuri <0.01 mm.
Hiri Wai Aukume: Tuku kore-pā mō te tipu tonu (>72 hāora).

3. Pūnaha Whakahaere Wera
Mana Porowhita-Kati PID: Whakaritenga mana wā-tūturu (50–200 kW) hei whakau i te papa wera.
Parenga Hau Korekore: Ranunga Ar/N₂ (99.999% parakore) hei ārai i te waikura.

4. Aunoatanga me te Aroturukitanga
Aroturukitanga o te Diameter CCD: Urupare wā-tūturu (tika ±0.01 mm).
Whakamātautau Pūwero: Aroturuki i te āhua o te atanga totoka-wai.

Te Whakataurite i te Tikanga CZ me te Tikanga KY

Tawhā	Tikanga CZ	Tikanga KY
Rahi Nui o te Tioata	12 inihi (300 mm)	400 mm (ingota āhua-pea)
Te Matotoru o te Hapa	<100/cm²	<50/cm²
Te tere tipu	0.5–5 mm/h	0.1–2 mm/h
Te Whakamahinga Pūngao	50–80 kWh/kg	80–120 kWh/kg
Ngā tono	Ngā papa LED, te epitaxy GaN	Matapihi whatu, ngā porowhita nui
Te utu	He iti te haumitanga ki ngā taputapu	Teitei (tukanga uaua)

Ngā Taupānga Matua

1. Ahumahi Ārahi-Haumaru
Ngā Papa Epitaxial GaN: Ngā papa angiangi 2–8-inihi (TTV <10 μm) mō ngā Micro-LED me ngā taiaho taiaho.
Ngā Wafer SOI: Te taratara o te mata <0.2 nm mō ngā maramara whakauru-3D.

2. Ngā Optoelectronics
Ngā Matapihi Taiaho UV: Ka taea te tu atu ki te 200 W/cm² te mātotoru mana mō ngā karu whakairo.
Ngā Wāhanga Pūwhero: Tauwehenga mimiti <10⁻³ cm⁻¹ mō te whakaahua wera.

3. Ngā Hikohiko Kaihoko
Ngā Taupoki Kāmera Waea Atamai: Whakapai ake i te pakeketanga Mohs 9, 10× te ātete ki te rakuraku.
Ngā Whakaaturanga Mataaratanga Atamai: Matotoru 0.3–0.5 mm, whakawhiti >92%.

4. Te Tiaki me te Rererangi
Matapihi Tauhohenga Karihi: Te ātete ki te irahiko tae atu ki te 10¹⁶ n/cm².
Ngā Whakaata Taiaho Mana-Teitei: Te whakarerekētanga wera <λ/20@1064 nm.

Ngā Ratonga a XKH

1. Whakaritenga Taputapu
Hoahoa Rūma Tauine: Ngā whirihoranga Φ200–400 mm mō te hanga wafer 2–12-inihi.
Ngāwari te Tāpiri: Tautoko i te tāpiri whenua-onge (Er/Yb) me te tāpiri konganuku whakawhiti (Ti/Cr) mō ngā āhuatanga optoelectronic kua whakaritea.

2. Tautoko Mutunga-ki-Mutu
Arotau Tukanga: Ngā tohutao kua whakamanahia i mua (50+) mō ngā rama LED, ngā taputapu RF, me ngā wāhanga kua whakapakeketia e te irahiko.
Whatunga Ratonga Ao: Tātaritanga mamao 24/7 me te tiaki i te papaanga me te whakamana 24-marama.

3. Te Tukatuka o raro
Te Hanganga Angaanga: Te tapatapahi, te huri, me te whakakanapa mō ngā angaanga 2–12-inihi (papa-C/A).
Hua Tāpiri Uara:
Ngā Wāhanga Tirohanga: Ngā matapihi UV/IR (te matotoru 0.5–50 mm).
Ngā Rauemi Whakapaipai: Rūpī Cr³⁺ (kua whakamanahia e te GIA), hapaira whetu Ti³⁺.

4. Te Kaiārahi Hangarau
Tiwhikete: Ngā angaanga e tutuki ana i ngā whakaritenga EMI.
Ngā Patene: Ngā patene matua i roto i te auahatanga tikanga CZ.

Whakamutunga

Ka tukuna e ngā taputapu tikanga CZ te hototahitanga rahi-rahi, ngā reiti hapa tino iti, me te pumau o te tukanga, ka waiho hei paearu ahumahi mō ngā tono LED, semiconductor, me te parepare. Ka whakaratohia e XKH te tautoko whānui mai i te whakatinanatanga o ngā taputapu ki te tukatuka i muri i te tipu, ka taea ai e ngā kiritaki te whakatutuki i te hanga karaihe hapaira mahi-teitei, utu-whai hua.