Ngā Otinga Whakairo Makuku me te Maroke mō te Wafer Whakairo Hapaira

He Wafer Whakairoiro Hapaira Ngā Otinga Whakairoiro Mākū me te Maroke Whakaahua Matua

Whakaahuatanga Poto:

Ka hangaia ngā anga hapaira kua whakairohia mā te whakamahi i ngā papa hapaira kotahi-kirihiri (Al₂O₃) tino parakore, ka tukatukahia mā te whakaahua whakaahua matatau me ngā hangarau whakairo mākū me te whakairo maroke. He tino ōrite ngā tauira hanganga moroiti o ngā hua, he tino tika ngā āhuatanga, me te pumau ā-tinana me te matū, e pai ai mō ngā tono pono teitei i roto i ngā hikohiko moroiti, ngā hikohiko opto, ngā takai haurua-ira, me ngā mara rangahau matatau.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

Ngā Otinga Whakairo Makuku me te Maroke mō te Wafer Whakairo Hapaira

Whakataki Hua

Ka hangaia ngā anga hapaira kua whakairohia mā te whakamahi i ngā papa hapaira kotahi-kirihiri (Al₂O₃) tino parakore, ka tukatukahia mā te whakaahua whakaahua matatau me tengā hangarau whakairo mākū me te whakairo marokeHe tino ōrite ngā tauira hanganga moroiti o ngā hua, he tino tika ngā āhuatanga, ā, he tino pumau te āhua ā-tinana me te matū, e pai ai mō ngā tono pono-nui i roto i ngā hiko moroiti, ngā hiko opto, ngā takai haurua-ira, me ngā mara rangahau matatau.

E mōhiotia whānuitia ana te hapaira mō tōna pakeke tino pai me tōna pumau hanganga, me te pakeke Mohs o te 9, ko te tuarua anake ki te taimana. Mā te whakahaere tika i ngā tawhā whakairo, ka taea te hanga i ngā hanganga moroiti kua tautuhia pai me te taea te whakahoki i runga i te mata o te hapaira, kia tino koi ai ngā taha tauira, kia pumau ai te āhua, me te tino ōrite puta noa i ngā puranga.

Ngā Hangarau Whakairo

Te Whakairo Makuku

Ka whakamahia e te whakairo mākū ngā otinga matū motuhake hei tango tīpako i te rauemi hapaira me te hanga i ngā hanganga moroiti e hiahiatia ana. Ka tukuna e tēnei tukanga he nui te kaha mahi, he ōrite pai, ā, he iti ake te utu tukatuka, he mea pai mō te hanga tauira whānui me ngā tono me ngā whakaritenga kōtaha taha taha.

Mā te whakahaere tika i te hanganga o te otinga, te pāmahana, me te wā whakairo, ka taea te whakatutuki i te whakahaere pumau o te hohonutanga whakairo me te āhua o te mata. He whānuitia te whakamahinga o ngā papa hapaira whakairo-mākū i roto i ngā papa tākai LED, ngā paparanga tautoko hanganga, me ētahi tono MEMS kua tohua.

Te Whakairo Maroke

Ko te whakairo maroke, pērā i te whakairo plasma, te whakairo ion tauhohe rānei (RIE), ka whakamahi i ngā ion pūngao-teitei, i ngā momo tauhohe rānei hei whakairo i te hapaira mā roto i ngā tikanga ā-tinana me te matū. Mā tēnei tikanga ka puta te anisotropy pai rawa atu, te tino tika, me te kaha whakawhiti tauira pai rawa atu, ka taea ai te hanga i ngā āhuatanga pai me ngā hanganga moroiti ōwehenga-teitei.

He tino pai te whakairo maroke mō ngā tono e hiahia ana kia mārama ngā taha poutū, kia mārama te tautuhi āhuatanga, me te whakahaere ā-whānui, pērā i ngā taputapu Micro-LED, ngā takai haurua-ira matatau, me ngā hanganga MEMS mahi-teitei.

Ngā Āhuatanga Matua me ngā Painga

He papa hapaira kotahi-karaihe tino parakore, he kaha ā-ringa tino pai
Ngā kōwhiringa tukanga ngāwari: te whakairo mākū, te whakairo maroke rānei i runga i ngā whakaritenga tono
Te pakeke teitei me te ātete kakahu mō te pono mō te wā roa
He tino pumau te pāmahana me te matū, he pai mō ngā taiao uaua
Teitei o te māramatanga whatu me ngā āhuatanga hiko pumau
Te ōritetanga teitei o te tauira me te ōritetanga o ia puranga

Ngā tono

Ngā papa tākai me ngā papa whakamātautau LED me Micro-LED
Ngā kaikawe maramara haurua-whakahaere me ngā takai matatau
Ngā pūoko MEMS me ngā pūnaha hiko-iti
Ngā wāhanga whatu me ngā hanganga whakatikatika tika
Ngā whare rangahau me te whanaketanga hanganga moroiti kua whakaritea

Whakaritenga me ngā Ratonga

Ka tukuna e mātou he ratonga whakaritenga whānui, tae atu ki te hoahoa tauira, te whiriwhiri tikanga whakairo (mākū, maroke rānei), te whakahaere hohonu o te whakairo, ngā kōwhiringa matotoru me te rahi o te papa, te whakairo taha-kotahi, taha-rua rānei, me ngā taumata whakakanapa mata. Mā te mana kounga me ngā tikanga tirotiro pakari ka tutuki i ia anga whakairo hapaira ngā paerewa pono me te mahi teitei i mua i te tukunga.

Ngā Pātai Auau – Ngā Pātai Auau

Q1: He aha te rerekētanga i waenga i te whakairo mākū me te whakairo maroke mō te hapaira?

A:Ko te whakairo mākū e hangai ana ki ngā tauhohenga matū, ā, he pai mō te tukatuka i roto i te wāhi nui me te iti o te utu, ko te whakairo maroke ia e whakamahi ana i ngā tikanga e hangai ana ki te parāuma, ki te katote rānei hei whakatutuki i te tika teitei ake, te anisotropy pai ake, me te whakahaere āhuatanga pai ake. Ko te kōwhiringa e whakawhirinaki ana ki te uaua o te hanganga, ngā whakaritenga tika, me ngā whakaaro utu.

P2: Ko tēhea tukanga whakairo me whiriwhiri e au mō taku tono?

A:E taunakihia ana te whakairo mākū mō ngā tono e hiahia ana ki ngā tauira ōrite me te tika taurite, pērā i ngā papa LED paerewa. He pai ake te whakairo maroke mō ngā tono taumira teitei, ōwehenga-āhua teitei, Micro-LED me MEMS rānei e tino hiahiatia ana te āhuahanga tika.

Q3: Ka taea e koe te tautoko i ngā tauira me ngā whakaritenga kua whakaritea?

A:Āe. Ka tautoko mātou i ngā hoahoa kua whakaritea katoatia, tae atu ki te tahora tauira, te rahi āhuatanga, te hohonutanga o te whakairo, te matotoru o te papa, me ngā rahi o te papa.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.