He aha te Wafer Chipping, ā, me pēhea te whakatau?

He tukanga tino nui te tapahi wafer i roto i te hanga semiconductor, ā, he pānga tika ki te kounga me te mahi o te maramara whakamutunga. I roto i te hanga tuturu,te maramara wafer—ina koate pakaru o muamete pakaru o te taha o muri—he hapa nui, he maha tonu te pānga ki te pai o te whakaputa me te hua. Ehara i te mea ko te āhua o ngā maramara anake te pānga o te pakaru engari ka taea hoki te whakararu i te mahi hiko me te pono o te miihini.

Te Whakamāramatanga me ngā Momo o te Wafer Chipping

Ko te maramara wafer e pā ana kingā kapiti, ngā pakaru rānei o ngā rauemi i ngā taha o ngā maramara i te wā e tapatapahia ana. Ko te tikanga ka whakarōpūtia ki roto ite pakaru o muamete pakaru o te taha o muri:

• Te maramara o muaka puta i runga i te mata hohe o te maramara kei roto ngā tauira ara iahiko. Mēnā ka toro atu te maramara ki roto i te rohe ara iahiko, ka tino heke te mahi hiko me te pono mō te wā roa.

• Te pakaru o te taha o murika puta i muri i te angiangi o te papa angiangi, te putanga mai o ngā whati i te whenua, i te paparanga pakaru rānei i te taha o muri.

Mai i te tirohanga hanganga,Ko te pakaru o te taha mua ka puta mai i ngā whati o ngā paparanga epitaxial, o te mata rānei, i te meai ahu mai te maramara o muri i ngā paparanga kino i hangaia i te wā e angiangi ana te papa me te tango i ngā rauemi papa.

Ka taea te whakarōpū anō i te maramara o mua ki ngā momo e toru:

1. Te maramara tuatahi– ka puta i te nuinga o te wā i te wā o mua i te tapahi, ina tāutahia he mata hou, ā, ko te āhuatanga o tēnei ko te pakaru o ngā mata he āhua rerekē.

2. Te tapatapahi ā-wā (hurihuri)– ka puta pinepine, ka puta auau hoki i ngā mahi tapahi tonu.

3. Te pakaru rerekē– nā te oma o te mata, te tere whāngai hē, te hohonutanga tapahi nui rawa, te nekehanga o te anga, te whakarerekētanga rānei.

Ngā Take Pūtake o te Pakaru Wafer

1. Ngā Take o te Pakaru Tuatahi

• Kāore i te rawaka te tika o te tāutanga o te mata

• Kāore i tika te hanga o te mata kia porowhita pai

• Te whakaaturanga o te kōpura taimana kāore i oti

Ki te tāutahia te mata me te piko iti, ka puta he kaha tapahi kore taurite. Ko te mata hou kāore i te pai te whakakakahu ka whakaatu i te koretake o te porowhita, ka arahi ki te pekapeka o te ara tapahi. Ki te kore e tino kitea ngā kirikiri taimana i te wā o mua i te tapahi, ka kore e puta he mokowā maramara whai hua, ka piki ake te tūponotanga o te maramara.

2. Ngā Take o te Pakaru Ā-Wā

• Te pakaru o te mata o te mata

• Ngā matūriki taimana nunui e pupū ake ana

• Te piri o ngā matūriki ke (te kapia, ngā paru whakarewa, me ētahi atu)

I te wā e tapahi ana, ka puta pea ngā kohao moroiti nā te pānga o te maramara. Ka kukumehia te ahotea ā-rohe e ngā kōhao taimana nui e puta mai ana, ā, ka whakararuraruhia te pumau o te tapahi e ngā toenga, ngā poke rānei o tāwāhi ki te mata o te mata.

3. Ngā Take o te Pakaru Tauhou

• Te oma o te mata i te korenga o te taurite hihiri i te tere teitei

• Te tere whāngai hē, te hohonu rawa rānei o te tapahi

• Te nekehanga, te whakarerekētanga rānei o te anga i te wā e tapahi ana

Nā ēnei āhuatanga ka hua ake ngā kaha tapahi kāore i te pumau, ka peka ke atu hoki i te ara tapahi kua whakaritea, ka pakaru tika ai te mata.

4. Ngā Take o te Pakaru o te taha whakamuri

Ko te pakaru o te taha o muri ka puta mai i te nuinga o te wāte kohikohinga ahotea i te wā e angiangi ana te papa me te piko o te papa.

I te wā e angiangi ana, ka puta he paparanga pakaru ki te taha o muri, ka whakararuraru i te hanganga tioata, ka puta he ahotea ā-roto. I te wā e tapatapahia ana, ka hua ake te tukunga ahotea i te tīmatanga o te pakaru moroiti, ka horapa haere ki ngā pakaru nui o te taha o muri. I te hekenga o te matotoru o te anga, ka ngoikore tōna ātete ki te ahotea, ka piki ake te piko—ka nui ake te tūponotanga o te pakaru o te taha o muri.

Te Pānga o te Whakatakoto Maramara ki ngā Maramara me ngā Mahi Ārai

Pānga ki te Mahi Maramara

Ka tino whakaitihia te pakarukaha ā-mīhiniAhakoa ngā kapiti iti i te taha, ka horapa tonu pea i te wā e takai ana, e whakamahia ana rānei, ā, ka mutu, ka pakaru te maramara me te pakaru hiko. Mēnā ka uru te maramara o mua ki ngā wāhi porowhita, ka whakararu tika i te mahi hiko me te pono o te taputapu mō te wā roa.

Ngā Otinga Whai Hua mō te Whakawete Wafer

1. Te Arotau i ngā Tawhā Tukanga

Me whakarerekē te tere tapahi, te tere whāngai, me te hohonutanga tapahi i runga i te horahanga o te anga, te momo rauemi, te matotoru, me te ahunga o te tapahi hei whakaiti i te kukū o te ahotea.
Mā te whakaurute tirohanga mīhini me te aroturukitanga e hangai ana ki te AI, ka taea te kite i te āhua o te mata me te whanonga pakaru i te wā tūturu, ā, ka taea te whakarerekē aunoa i ngā tawhā tukatuka mō te whakahaere tika.

2. Te Tiaki me te Whakahaere Taputapu

He mea nui te tiaki auau i te mīhini tapatapahi kia tika ai:

• Te tika o te porowhita

• Te pumau o te pūnaha tuku

• Te whai huatanga o te pūnaha whakamatao

Me whakatinana he pūnaha aroturuki mō te roanga o te oranga o te mata hei whakarite kia whakakapia ngā mata kua tino tawhito i mua i te hekenga o te mahi, ā, ka pakaru.

3. Te Kōwhiringa me te Arotautanga o te Mata

Ngā āhuatanga o te mata penei i tete rahi o te kōpura taimana, te pakeke o te here, me te mātotoru o te kōpurahe kaha te awe ki te whanonga maramara:

• Ka nui ake te pakaru o te taha mua i ngā kirikiri taimana nunui ake.

• Ka whakaitihia te pakaru o ngā konganuku iti engari ka iti ake te whai huatanga tapahi.

• Ka whakaitihia te pakaru o te taputapu mēnā he iti te mātotoru o te witi, engari ka whakapotohia te roa o te ora o te taputapu.

• Ka whakaitihia te pakaru e ngā rauemi ngawari o te hononga engari ka tere ake te pakaru.

Mō ngā taputapu e hangai ana ki te silicon,ko te rahi o te kōpura taimana te mea tino nuiMā te whiriwhiri i ngā mata kounga teitei, he iti noa te nui o ngā kakano, ā, he kaha hoki te whakahaere i te rahi o ngā kakano, ka ārai i te pakaru o te taha o mua, me te pupuri tonu i te utu.

4. Ngā Mahi Whakahaere i te Pakaru o te Taha-muri

Ko ngā rautaki matua ko:

• Te arotau i te tere o te porowhita

• Te whiriwhiri i ngā mea whakakoi taimana kirikiri pai

• Te whakamahi i ngā rauemi here ngohengohe me te kukū iti o te whakakoi

• Te whakarite kia tika te tāutanga o te mata me te wiri pūmau o te porowhita

Ka nui ake te tūponotanga o te whati o te tuara i te tere hurihuri tino teitei, tino iti rānei. Ka taea e te hurihanga o te mata, te wiri rānei o te porowhita te pakaru o te tuara i te wāhi nui. Mō ngā anga angiangi rawa,ngā maimoatanga whai muri i te mahi pēnei i te CMP (Chemical Mechanical Polishing), te whakairo maroke, me te whakairo matū mākūāwhina ki te tango i ngā paparanga kino e toe ana, te tuku i te ahotea o roto, te whakaiti i te piko, me te whakapakari ake i te kaha o te maramara.

5. Ngā Hangarau Tapahi Matatau

Ko ngā tikanga tapahi kore-pā me te iti-aukati e whakarato ana i ētahi atu whakapainga:

• Te tapahi taiahoka whakaiti i te pa atu ā-mīhini me te whakaiti i te pakaru mā te tukatuka kiato-pūngao teitei.

• Te tapahi i te wai-pūweroka whakamahia te wai pēhanga teitei i konatunatua ki ngā mea whakakoi moroiti, ka tino whakaiti i te ahotea wera me te ahotea ā-mīhini.

Te Whakapakari i te Mana Whakahaere me te Tirotiro Kounga

Me whakatū he pūnaha whakahaere kounga tino pakari puta noa i te mekameka whakaputa katoa—mai i te tirotiro rauemi mata ki te manatoko hua whakamutunga. Ngā taputapu tirotiro tino tika pēnei i tengā karuārai whatu me ngā karuārai irahiko matawai (SEM)me whakamahi hei tirotiro mārire i ngā angiangi i muri i te tapatapahia, kia taea ai te kite wawe me te whakatika i ngā hapa maramara.

Whakamutunga

He hapa uaua, he maha ngā āhuatanga o te pakaru o te angaanga, e uru ana kingā tawhā tukanga, te āhua o ngā taputapu, ngā āhuatanga o te mata, te ahotea o te papa, me te whakahaere koungaMā te arotautanga pūnaha anake i ēnei wāhanga katoa ka taea te whakahaere pai i te pakaru o te maramara—ā, ka whakapai akete hua whakaputa, te pono o te maramara, me te mahi whānui o te taputapu.