He aha ngā TTV, te kopere, te warp, ā, me pēhea te ine?

'Rārangi Kōrero

1. Ngā Ariā Matua me ngā Inenga

2. Ngā Tikanga Ine

3.​​ Te Tukatuka Raraunga me ngā Hapa​​

4. Ngā Pānga o te Tukanga

I roto i te hangahanga haurua-ira, ko te matotoru ōrite me te papatahi o te mata o ngā angaanga he mea nui e pā ana ki te hua o te tukanga. Ko ngā tawhā matua pēnei i te Total Thickness Variation (TTV), te Bow (arcuate warpage), te Warp (global warpage), me te Microwarp (nano-topography) ka pā tika ki te tika me te pumau o ngā tukanga matua pēnei i te arotahi photolithography, te oro matū miihini (CMP), me te whakatakotoranga kiriata angiangi.

Ngā Ariā Matua me ngā Inenga

​​TTV (Rerekētanga Matotoru Katoa)

Ngā Tikanga Ine

1. Ngā Tikanga Ine TTV

• ​​Whakaahuatanga Mata-Rua
• Te Inenga Whakawhitiwhiti o Fizeau:Ka whakamahi i ngā tawhā whakararuraru i waenganui i te papa tohutoro me te mata o te papa. He pai mō ngā mata maeneene engari he iti noa iho i ngā papa piko nui.
• Te Inenga Matawai Mārama Mā (SWLI):Ka ine i ngā teitei tuturu mā roto i ngā takai mārama iti-taurite. He whai hua mō ngā mata rite ki ngā takahanga engari he herenga nā te tere matawai ā-mīhini.
• Ngā Tikanga Whakapūmau:Whakatutukihia te taumira iti-micron mā roto i ngā mātāpono o te pinhole, te marara rānei. He pai mō ngā mata taratara, mārama rānei, engari he puhoi nā te matawai i ia tohu.
• Tapatoru Reera:He tere te urupare engari ka ngaro te tika i ngā rerekētanga o te whakaata o te mata.

• Hononga Tuku/Whakaata
• Ngā Pūoko Pūngao Upoko-Rua: Ko te whakatakotoranga ōrite o ngā pūoko i ngā taha e rua e ine ana i te matotoru i te mea ko T = L – d₁ – d₂ (L = tawhiti tūāpapa). He tere engari he tairongo ki ngā āhuatanga rauemi.
• Ellipsometry/Spectroscopic Reflectometry: Ka tātari i ngā taunekeneke o te māramatanga-matū mō te matotoru o te kiriata angiangi engari kāore e tika mō te TTV papatipu.

2. Te Ine i te Kopere me te Whanga

• ​​Ngā Huinga Pūngao Maha-Tirohanga: Hopukia ngā raraunga teitei o te mara katoa i runga i te atamira e mau ana i te hau mō te hanga hou 3D tere.
• ​​Whakaaturanga Mārama Hanganga: He whakaahua 3D tere-teitei mā te whakamahi i te whakaahua whatu.
• ​​Interferometry NA-Iti​​: Mahere mata taumira teitei engari he tairongo ki te wiri.

3. Te Ine i te Moroiti

• ​​Tātari Auautanga Mokowā:

1. Whiwhi i te āhua o te mata he tino taumira.
2. Tātaihia te mātotorutanga o te mana (PSD) mā te 2D FFT.
3. Whakamahia ngā tātari whakawhiti-roopu (hei tauira, 0.5–20 mm) hei wehe i ngā roangaru matua.
4. Tātaihia ngā uara RMS, PV rānei mai i ngā raraunga kua tātarihia.

• ​​Whakatauira o te Chuck Korehau:Tāwhaihia ngā pānga kume o te ao tūturu i te wā e tā ana i te peita.

​​Te Tukatuka Raraunga me ngā Pūtake Hapa​

Rerenga Mahi Tukatuka

• TTV:Whakahāngaihia ngā taunga o te mata o mua/o muri, tatauhia te rerekētanga matotoru, ka tangohia ngā hapa pūnaha (hei tauira, te nekenekehanga wera).
• 'Kopere/Whārangi:Whakauruhia te papa LSQ ki ngā raraunga teitei; Kopere = te toenga o te pūwāhi pokapū, Whā = te toenga tihi-ki-awaawa.
• 'Ngāwariwari:Tātarihia ngā auau ā-wāhi, tatauhia ngā tatauranga (RMS/PV).

Ngā Pūtake Hapa Matua

• Ngā āhuatanga taiao:Te wiri (he mea nui mō te ine irahiko), te aueue o te hau, te nekenekehanga wera.
• Ngā Herenga o te Pūoko:Haruru wāhanga (whakawhitiwhiti), hapa whakatikatika roangaru (whakapūmautanga), urupare e pā ana ki ngā rauemi (pūngao).
• Te Whakahaere i te Wafer:Te hē o te whakarārangi taha, ngā hapa o te wāhanga nekehanga i roto i te tuitui.

Pānga ki te Hiranga o te Tukanga

• Te tuhituhi:Ka whakaitihia te DOF e te microwarp ā-rohe, ka puta ai te rerekētanga CD me ngā hapa paparua.
• CMP:Ko te kore taurite o te TTV tuatahi ka hua ake te pēhanga whakakanapa kore-taurite.
• Tātaritanga ahotea:E whakaatu ana te whanaketanga o te kopere/te piko i te whanonga ahotea wera/mīhini.
• Tākai:Mā te nui rawa o te TTV ka puta he āputa i roto i ngā atanga hononga.

Te Wafer Hapaira a XKH