Ngā painga oMā roto i te Karāhe Mā roto (TGV)me ngā tukanga Through Silicon Via (TSV) i runga i te TGV ko ngā mea matua:
(1) ngā āhuatanga hiko auau-teitei tino pai. He rauemi ārai te rauemi karāhe, ko te pūmau dielectric he tata ki te 1/3 noa iho o te rauemi silicon, ā, ko te tauwehenga ngaronga he 2-3 ngā ota o te kaha iti iho i te rauemi silicon, ka tino whakaitihia te ngaronga o te papa me ngā pānga pirinoa, ā, ka whakarite i te pono o te tohu tuku;
(2)papa karāhe rahi nui, angiangi rawa hokihe māmā noa te tiki. Ka taea e Corning, Asahi me SCHOTT me ētahi atu kaihanga karāhe te whakarato i ngā karāhe panera rahi-tino nui (>2m × 2m) me te tino angiangi (<50µm) me ngā rauemi karāhe ngāwari tino angiangi.
3) Utu iti. Mā te ngāwari o te uru atu ki te karāhe panera tino angiangi, ā, kāore e hiahiatia he whakatakotoranga o ngā paparanga ārai, ko te utu whakaputa o te pereti urutau karāhe he tata ki te 1/8 noa iho o te pereti urutau hangai-silicon;
4) He tukanga māmā. Kāore he take ki te whakatakoto i tētahi paparanga ārai ki te mata o te papa me te pakitara o roto o te TGV, ā, kāore he hiahia ki te whakaangawari i te pereti urutau tino angiangi;
(5) He pakari te pumau ā-mīhini. Ahakoa he iti iho i te 100µm te matotoru o te pereti urutau, he iti tonu te piko;
(6) He whānuitanga o ngā tono, he hangarau hononga roa hou e whakamahia ana i roto i te mara o te takai taumata-wafer, hei whakatutuki i te tawhiti poto rawa i waenga i te wafer-wafer, ko te iti rawa o te hononga e whakarato ana i te ara hangarau hou, me ngā āhuatanga hiko, wera, miihini pai rawa atu, i roto i te maramara RF, ngā pūoko MEMS teitei-mutunga, te whakaurunga pūnaha kiato teitei me ētahi atu wāhi me ngā painga ahurei, ko te whakatupuranga e whai ake nei o te maramara auau-teitei 5G, 6G 3D Ko tētahi o ngā kōwhiringa tuatahi mō te takai 3D o ngā maramara auau-teitei 5G me te 6G whakatupuranga e whai ake nei.
Ko te tukanga whakakoi o TGV ko te pupuhi onepu, te keri ultrasonic, te whakairo maku, te whakairo katote hohonu tauhohe, te whakairo photosensitive, te whakairo laser, te whakairo hohonu i puta mai i te laser, me te hanganga poka tuku arotahi.
Ko ngā hua rangahau me ngā whanaketanga hou e whakaatu ana ka taea e te hangarau te whakarite mā roto i ngā kōhao me ngā kōhao matapo 5:1 me te ōwehenga hohonu ki te whānui o te 20:1, ā, he pai te āhua. Ko te whakairo hohonu i hangaia e te reera, e hua ake ai he iti te taratara o te mata, te tikanga e tino rangahauhia ana i tēnei wā. E ai ki te Pikitia 1, he mārama ngā kapiti huri noa i te keri reera noa, ko ngā pakitara huri noa me ngā pakitara taha o te whakairo hohonu i hangaia e te reera he ma, he maeneene.
Te tukanga tukatuka oTGVKei te whakaatuhia te hononga i te Pikitia 2. Ko te kaupapa whānui ko te keri i ngā kōhao ki te papa karaihe i te tuatahi, kātahi ka whakatakoto i te paparanga ārai me te paparanga purapura ki te pakitara taha me te mata. Ka ārai te paparanga ārai i te horapa o te Cu ki te papa karaihe, me te whakanui ake i te piri o ngā mea e rua, ko te tikanga, i roto i ētahi rangahau i kitea hoki kāore e hiahiatia te paparanga ārai. Kātahi ka whakatakotoria te Cu mā te whakakikorua hiko, kātahi ka whakamahanahia, ā, ka tangohia te paparanga Cu e te CMP. Hei whakamutunga, ka whakaritea te paparanga waea RDL mā te paninga PVD, ā, ka hangaia te paparanga passivation i muri i te tangohanga o te kāpia.
(a) Te whakarite i te anga whakarewa, (b) te hanganga o te TGV, (c) te whakakikoruatanga hiko taha-rua – te whakatakotoranga o te parahi, (d) te whakamahana me te whakakanapa matū-ā-ringa CMP, te tango i te paparanga parahi mata, (e) te paninga PVD me te whakaahua, (f) te whakatakotoranga o te paparanga waea RDL, (g) te tango i te piripiri me te whakairo Cu/Ti, (h) te hanganga o te paparanga whakakorekore.
Hei whakarāpopototanga,karāhe mā roto i te kōhao (TGV)He whānui ngā tūmanakohanga tono, ā, kei te piki haere te mākete ā-rohe o nāianei, mai i ngā taputapu ki te hoahoa hua, ā, he teitei ake te tere tipu o te rangahau me te whanaketanga i te toharite o te ao.
Mena he takahi, mukua te whakapā atu
Te wā tuku: Hurae-16-2024