Mīhini Kani Taimana Maha-Waea mō ngā Rauemi Pakaru Tino-Pakeke o te Hapaira SiC
He Kupu Whakataki ki te Mīhini Kani Taimana Maha-Waea
Ko te mīhini kani taimana maha-waea he pūnaha tapahi hou rawa atu i hangaia mō te tukatuka i ngā rauemi tino mārō me te pakarukaru. Mā te whakamahi i ngā waea maha kua pania ki te taimana whakarara, ka taea e te mīhini te tapahi i ngā anga maha i te wā kotahi i roto i te huringa kotahi, ka tutuki ai te kaha whakaputa me te tika. Kua noho tēnei hangarau hei taputapu nui i roto i ngā ahumahi pēnei i ngā semiconductors, ngā photovoltaics solar, ngā LED, me ngā uku matatau, inā koa mō ngā rauemi pēnei i te SiC, te hapaira, te GaN, te quartz, me te alumina.
Ki te whakatauritea ki te tapahi waea kotahi noa, ka tukuna e te whirihoranga waea maha ngā tekau ki ngā rau o ngā poro mō ia puranga, ka whakaiti i te wā huringa me te pupuri i te papatahi pai (Ra < 0.5 μm) me te tika o ngā āhuatanga (±0.02 mm). Ko tōna hoahoa modular e whakauru ana i te whakaroa waea aunoa, ngā pūnaha whakahaere rauemi mahi, me te aroturuki ipurangi, kia roa ai te wā whakaputa, kia pumau ai, kia tino aunoa ai hoki.
Ngā Tawhā Hangarau o te Mīhini Kani Taimana Maha-Waea
| Taonga | Whakatakotoranga | Taonga | Whakatakotoranga |
|---|---|---|---|
| Rahi mahi mōrahi (Tapawhā) | 220 × 200 × 350 mm | Motuka taraiwa | 17.8 kW × 2 |
| Rahi mahi mōrahi (Porowhita) | Φ205 × 350 mm | Mōta taraiwa waea | 11.86 kW × 2 |
| Te mokowā o te taura | Φ250 ±10 × 370 × 2 tuaka (mm) | Mōta hiki tēpu mahi | 2.42 kW × 1 |
| Tuaka matua | 650 mm | Mōta hurihuri | 0.8 kW × 1 |
| Te tere o te rere o te waea | 1500 m/min | Mōta whakaritenga | 0.45 kW × 2 |
| Diameter waea | Φ0.12–0.25 mm | Mōta tāmitanga | 4.15 kW × 2 |
| Tere hiki | 225 mm/min | Mōta paru | 7.5 kW × 1 |
| Te hurihanga ripanga mōrahi | ±12° | Te kaha o te tāke paru | 300 rita |
| Koki piu | ±3° | Te rere o te wai whakamatao | 200 rita/meneti |
| Auautanga piu | ~30 ngā wā/meneti | Te tika o te pāmahana | ±2 °C |
| Te tere whāngai | 0.01–9.99 mm/min | Pūtake hiko | 335+210 (mm²) |
| Te tere whāngai waea | 0.01–300 mm/min | Hau kōpeke | 0.4–0.6 MPa |
| Rahi mīhini | 3550 × 2200 × 3000 mm | Taumaha | 13,500 kirokaramu |
Tikanga Mahi o te Mīhini Kani Taimana Maha-Waea
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Nekehanga Tapahi Maha-Waea
Ka neke ngā waea taimana maha i ngā tere tukutahi tae atu ki te 1500 m/min. Mā ngā pūrei ārahi-tika me te mana whakahaere kume porowhita kati (15–130 N) ka noho pumau ngā waea, ka whakaiti i te tūponotanga o te pekapeka, te whati rānei. -
Te Whāngai me te Tūnga Tika
Ka tutuki te tika o te whakanoho e peia ana e te servo ki te ±0.005 mm. Mā te whakaritenga laser, tirohanga rānei e āwhina ana, ka pai ake ngā hua mō ngā āhua uaua. -
Te Whakamatao me te Tango Para
Ka tangohia tonutia e te whakamatao pēhanga teitei ngā maramara me te whakamatao i te wāhi mahi, ka ārai i te kino o te wera. Ka roa ake te ora o te whakamatao mā te tātari maha-wāhanga, ā, ka whakaitihia te wā kore mahi. -
Pūhara Whakahaere Atamai
Ka whakarerekētia te whāngai, te kume, me te tere waea e ngā taraiwa servo urupare-teitei (<1 ms). Mā te whakahaere tunu kai whakauru me te whakawhiti tawhā pāwhiri-kotahi ka whakangawari ake i te hanga papatipu.
Ngā Painga Matua o te Mīhini Kani Taimana Maha-Waea
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Te Hua Teitei
Ka taea te tapahi i te 50–200 ngā anga i ia oma, me te ngaronga kerf <100 μm, ka whakapai ake i te whakamahinga rauemi tae atu ki te 40%. Ko te putanga tere he 5–10× i tērā o ngā pūnaha waea kotahi tuku iho. -
Mana Whakahaere Tika
Mā te pumau o te kume waea i roto i te ±0.5 N ka puta he hua ōrite ki ngā rauemi pakarukaru. Ko te aroturukitanga wā-tūturu i runga i te atanga HMI 10" e tautoko ana i te rokiroki tunu kai me te mahi mamao. -
Hanganga Ngāwari, Āhua-Wāhanga
Hototahi ki ngā diameter waea mai i te 0.12–0.45 mm mō ngā tukanga tapahi rerekē. Mā te whakahaere karetao whiriwhiri ka taea te whakahaere aunoa i ngā raina whakaputa. -
Te Pono o te Taumata-Ahumahi
Ka whakaitihia te rerekētanga o te āhua (<0.01 mm) e ngā anga whakarewa/whakairo taumaha. Neke atu i te 8000 hāora te roa o te ora mahi a ngā pūre arataki me ngā paninga uku, kāpira rānei.
Ngā Āpure Whakamahinga o te Mīhini Kani Taimana Maha-Waea
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Ngā Kaiārahi-hauruaTe tapahi i te SiC mō ngā waeine hiko EV, ngā papa GaN mō ngā taputapu 5G.
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Ngā pūngao whakaahuaTe tapahi i te anga silicon tere-teitei me te ōritetanga ±10 μm.
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LED me ngā Tirohanga MataNgā papa hapaira mō te epitaxy me ngā huānga whatu tika me te maramara taha <20 μm.
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Ngā Uku MatatauTe tukatuka i te alumina, te AlN, me ngā rauemi rite mō ngā wāhanga whakahaere rererangi me te wera.
Ngā Pātai Auau – Mīhini Kani Taimana Maha-Waea
Q1: He aha ngā painga o te kani maha-waea ki te whakataurite ki ngā mīhini kani kotahi-waea?
A: Ka taea e ngā pūnaha waea maha te tapahi i ngā tekau ki ngā rau o ngā angaanga i te wā kotahi, ka whakanui ake i te pai o te mahi mā te 5–10×. He nui ake hoki te whakamahinga o ngā rauemi me te ngaronga kerf i raro i te 100 μm, he mea tino pai mō te hanga papatipu.
Q2: He aha ngā momo rauemi ka taea te tukatuka?
A: Kua hangaia te mīhini mō ngā rauemi mārō me ngā rauemi pakarukaru, tae atu ki te silicon carbide (SiC), te hapaira, te gallium nitride (GaN), te quartz, te alumina (Al₂O₃), me te konumohe nitride (AlN).
Q3: He aha te tika me te kounga o te mata e taea te whakatutuki?
A: Ka taea e te taratara o te mata te eke ki te Ra <0.5 μm, me te tika o ngā āhuatanga ±0.02 mm. Ka taea te whakahaere i te pakaru o te taha ki te <20 μm, kia tutuki ai ngā paerewa ahumahi haurua-ira me te hikohiko opto.
Q4: Ka pakaru, ka pakaru rānei te tukanga tapahi?
A: Mā te whakamahi i te whakamatao pēhanga teitei me te whakahaere kumetanga porowhita-katia, ka whakaitihia te mōrearea o ngā kapiti moroiti me te kino o te ahotea, kia tino pai ai te hanganga o te wafer.
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