Ngā Wafer Quartz Hanumi Parakore-Teitei mō ngā Whakamahinga Whatu Ārahi, Whakaahua 2″4″6″8″12″
Kauwhata Taipitopito
He Tirohanga Whānui mō te Karāhe Quartz
Ko ngā papa kuaha te poutokomanawa o ngā taputapu hou maha e ārahi ana i te ao matihiko o ēnei rā. Mai i te whakatere i roto i tō waea atamai ki te poutokomanawa o ngā teihana turanga 5G, ka tukuna marietia e te kuaha te pumau, te parakore, me te tika e hiahiatia ana i roto i ngā hikohiko me ngā hangarau whakaahua teitei. Ahakoa e tautoko ana i ngā ara iahiko ngāwari, e whakahohe ana i ngā pūoko MEMS, e hanga ana rānei i te pūtake mō te rorohiko irahiko, ko ngā āhuatanga ahurei o te kuaha he mea nui puta noa i ngā ahumahi.
Ko te "Hiko Hiraka Whakakotahi" te "Kuata Whakakotahi" rānei, koinei te wāhanga kore-āhua o te kuata (SiO2). Ina whakaritea ki te karāhe borosilicate, kāore he tāpiringa o te silika whakakotahi; nō reira kei roto i tōna āhua parakore, arā, ko te SiO2. He nui ake te tuku o te silika whakakotahi i roto i te whānuitanga whero me te hihi ultraviolet ina whakaritea ki te karāhe noa. Ka puta te silika whakakotahi mā te rewa me te whakapakeke anō i te SiO2 tino parakore. Ko te silika whakakotahi hangai, i tētahi atu ringa, he mea hanga mai i ngā matū matū whai rawa i te silicon pērā i te SiCl4 ka whakakāhia, kātahi ka waikurahia i roto i te hau H2 + O2. Ko te puehu SiO2 i hangaia i tēnei take ka whakakotahitia ki te silica i runga i te papa. Ka tapahia ngā poraka silika whakakotahi kia rite ki ngā papa angiangi, ā, muri iho ka whakakanapahia ngā papa angiangi.
Ngā Āhuatanga Matua me ngā Painga o te Wafer Karāhe Quartz
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Te Parakore Tino-Teitei (≥99.99% SiO2)
He tino pai mō ngā tukanga haurua-ira me ngā tukanga whakaahua tino ma, ina me whakaiti te poke o ngā rauemi. -
Whānuitanga Whakahaere Wera
Ka pupuri i te pumau o te hanganga mai i ngā pāmahana waiokore tae atu ki runga ake i te 1100°C, me te kore e piko, e pirau rānei. -
Te Tuku UV me te IR Tino Pai
He tino mārama te hihi o te rā mai i te hihi ultraviolet hōhonu (DUV) ki te hihi infrared tata (NIR), e tautoko ana i ngā tono hihi tino tika. -
Tauwehenga Whānui Wera Iti
Ka whakarei ake i te pumau o ngā āhuatanga i raro i ngā piki me ngā heke o te pāmahana, ka whakaiti i te ahotea me te whakapai ake i te pono o te tukanga. -
Ātete Matū Pai Rawa
Kāore e pāngia e te nuinga o ngā waikawa, ngā kawakore, me ngā whakarewa—nō reira he pai mō ngā taiao matū kaha. -
Ngāwari o te Whakaotinga Mata
E wātea ana me ngā mutunga tino maeneene, taha-kotahi, taha-rua rānei kua orohia, e hototahi ana ki ngā whakaritenga photonics me MEMS.
Te Tukanga Hanga o te Wafer Karāhe Quartz
Ka hangaia ngā papa kiripaka kua hanumi mā roto i tētahi raupapa o ngā mahi whakahaere me te tika:
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Kōwhiringa Rauemi Mata
Te kōwhiringa o ngā pūtake kiripaka maori parakore-teitei, ngā pūtake SiO₂ hangai rānei. -
Te Rewa me te Hanumi
Ka rewahia te kuata i te ~2000°C i roto i ngā oumu hiko i raro i te hau e whakahaerehia ana hei whakakore i ngā whakaurunga me ngā mirumiru. -
Te Hanga Poraka
Ka whakamataohia te silica rewa hei poraka totoka, hei ingota rānei. -
Te Tapahi Wafer
Ka whakamahia ngā kani taimana, ngā kani waea rānei, hei tapahi i ngā poro hei hanga i ngā mea angiangi. -
Te Whakakoi me te Whakakanapa
Kua papatahitia, kua orohia hoki ngā mata e rua kia tutuki ai ngā whakaritenga whatu, matotoru, me te taratara. -
Te Horoi me te Tirotiro
Ka horoia ngā angaanga i roto i ngā rūma ma ISO Class 100/1000, ā, ka tirotirohia kia tino kitea ngā hapa me te ōrite ki ngā āhuatanga.
Ngā Āhuatanga o te Wafer Karāhe Kuata
| ngā whakaritenga | waeine | 4" | 6" | 8" | 10" | 12" |
|---|---|---|---|---|---|---|
| Diameter / rahi (tapawhā rānei) | mm | 100 | 150 | 200 | 250 | 300 |
| Manawanui (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Matotoru | mm | 0.10, neke atu rānei | 0.30, neke atu rānei | 0.40, neke atu rānei | 0.50, neke atu rānei | 0.50, neke atu rānei |
| Papa tohutoro matua | mm | 32.5 | 57.5 | Haurua-kōhao | Haurua-kōhao | Haurua-kōhao |
| LTV (5mm×5mm) | µm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
| TTV | µm | < 2 | < 3 | < 3 | < 5 | < 5 |
| Kopere | µm | ±20 | ±30 | ±40 | ±40 | ±40 |
| Wāwhati | µm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV (5mm×5mm) < 0.4μm | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Te Whakapōtawhiti Tapa | mm | E tutuki ana i te Paerewa SEMI M1.2 / tirohia te IEC62276 | ||||
| Momo Mata | Taha Kotahi Kua Orohia / Taha Takirua Kua Orohia | |||||
| Taha oro Ra | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Ngā Paearu o te taha whakamuri | µm | whānui 0.2-0.7, whakarite rānei | ||||
Te Kuata me ētahi atu Rauemi Mārama
| Taonga | Karāhe Kuata | Karāhe Borosilicate | Hapira | Karāhe Paerewa |
|---|---|---|---|---|
| Te Mahana Whakahaere Mōrahi | ~1100°C | ~500°C | ~2000°C | ~200°C |
| Tuku UV | Tino pai (JGS1) | rawakore | Pai | Tino rawakore |
| Ātete Matū | Tino pai | Waenga | Tino pai | rawakore |
| Te parakore | Tino teitei | Iti ki te taurite | Teitei | Iti |
| Whakawhanuitanga Wera | Tino iti | Waenga | Iti | Teitei |
| Utu | Waenga ki te teitei | Iti | Teitei | Tino iti |
Ngā Pātai Auau mō te Wafer Karāhe Quartz
P1: He aha te rerekētanga i waenga i te quartz kua hanumi me te silica kua hanumi?
Ahakoa he āhua kore-āhua o te SiO₂ e rua, ko te kuata hanumi i ahu mai i ngā pūtake kuata tūturu, ko te silica hanumi ia he mea hanga mā te hangarau. He rite tonu te mahi a ēnei, engari he nui ake te parakore me te ōritetanga o te silica hanumi.
P2: Ka taea te whakamahi i ngā papa kiripaka kua hanumi i roto i ngā taiao korehau nui?
Āe. Nā te iti o ngā āhuatanga whakaputa hau me te ātete wera nui, he tino pai ngā papa quartz hanumi mō ngā pūnaha korehau me ngā tono rererangi.
P3: He pai ēnei angaanga mō ngā whakamahinga taiaho UV-hohonu?
Āe. He nui te whakawhiti o te kiripaka hanumi tae atu ki te ~185 nm, he mea tino pai mō ngā whatu DUV, ngā kopare lithography, me ngā pūnaha taiaho excimer.
Q4: E tautoko ana koe i te hanga anga ritenga?
Āe. Ka tukuna e mātou ngā whakaritenga katoa tae atu ki te diameter, te matotoru, te kounga o te mata, ngā papatahi/ngā kōhao, me te tauira taiaho, i runga i ō whakaritenga tono motuhake.
Mō Mātou
He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.
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