Gallium Nitride i runga i te wafer Silicon 4inihi 6inihi Kua Whakaritea te Aronga Papaaho Si, te Ātete, me ngā Kōwhiringa Momo-N/Momo-P
Ngā Āhuatanga
●Whānui o te Āputa:He nui te whakapainga o te mahi auau-tiketike, te mana-tiketike, me te pāmahana-tiketike a GaN (3.4 eV) ki te whakataurite ki te silicon tuku iho, ā, he mea tino pai mō ngā taputapu hiko me ngā whakakaha RF.
●Whakaritenga o te whakatakotoranga papa Si:Kōwhiria mai i ngā whakatakotoranga papa Si rerekē pēnei i te <111>, <100>, me ētahi atu hei taurite i ngā whakaritenga motuhake o te taputapu.
●Ātete Whakaritenga:Kōwhiria i waenga i ngā kōwhiringa ātete rerekē mō te Si, mai i te ārai-haurua ki te ātete-tiketike me te ātete-iti hei arotau i te mahi a te pūrere.
●Momo Whakaranu:Kei te wātea i te momo-N, momo-P rānei hei taurite i ngā whakaritenga o ngā taputapu hiko, ngā transistors RF, ngā LED rānei.
●Ngaohiko Pakaru Teitei:He teitei te ngaohiko pakaru o ngā papa GaN-on-Si (tae atu ki te 1200V), ā, ka taea e rātou te whakahaere i ngā tono ngaohiko teitei.
●Ngā Tere Whakawhiti Tere Ake:He nui ake te nekehanga irahiko a GaN me ngā ngaronga whakawhiti he iti ake i te silicon, ā, he pai rawa atu ngā anga GaN-on-Si mō ngā ara iahiko tere-tiketike.
●Te Whakarei Ake i te Mahi Wera:Ahakoa te iti o te kawe wera o te silicon, he pai tonu te pumau o te wera o te GaN-on-Si, me te pai ake o te marara wera i ngā taputapu silicon tuku iho.
Ngā Whakatakotoranga Hangarau
| Tawhā | Uara |
| Rahi o te Wafer | 4-inihi, 6-inihi |
| Te whakatakotoranga o te papa raro Si | <111>, <100>, ritenga |
| Ātete Si | Ātete-teitei, Āhua-whakamaroke, Ātete-iti |
| Momo Doping | Momo-N, Momo-P |
| Matotoru o te Paparanga GaN | 100 nm – 5000 nm (ka taea te whakarite) |
| Papa Ārai AlGaN | 24% – 28% Al (10-20 nm noa) |
| Ngaohiko Pakaru | 600V – 1200V |
| Te Nekehanga o te Irahiko | 2000 cm²/V·s |
| Auautanga Whakawhiti | Tae atu ki te 18 GHz |
| Te Pākari o te Mata o te Wafer | RMS ~0.25 nm (AFM) |
| Ātete Rau GaN | 437.9 Ω·cm² |
| Wāhanga Wafer Katoa | < 25 µm (mōrahi) |
| Te Arahi Wera | 1.3 – 2.1 W/cm·K |
Ngā tono
Hikohiko ManaHe pai rawa te GaN-on-Si mō ngā hikohiko mana pēnei i ngā whakakaha mana, ngā kaitahuri, me ngā inverters e whakamahia ana i roto i ngā pūnaha pūngao whakahou, ngā waka hiko (EV), me ngā taputapu ahumahi. Ko tōna ngaohiko pakaru teitei me te iti o te ātete-ki-te-whakaū ka whakarite kia whai hua te huringa mana, ahakoa i roto i ngā tono mana-tiketike.
Ngā Whakawhitiwhitinga RF me te NgaruitiKa tukuna e ngā wafer GaN-on-Si ngā āheinga auau teitei, ā, he mea tino pai mō ngā whakakaha hiko RF, ngā whakawhitiwhitinga amiorangi, ngā pūnaha radar, me ngā hangarau 5G. Me ngā tere whakawhiti teitei ake me te kaha ki te mahi i ngā auau teitei ake (tae atu ki te18 GHz), ka tukuna e ngā taputapu GaN te mahi tino pai i roto i ēnei tono.
Ngā Hikohiko AunoaE whakamahia ana te GaN-on-Si i roto i ngā pūnaha hiko motuka, tae atu kingā rihi i runga i te papa (OBC)meNgā kaitahuri DC-DC. Nā tōna kaha ki te mahi i ngā pāmahana teitei ake, me te tu atu ki ngā taumata ngaohiko teitei ake, he mea pai mō ngā tono waka hiko e hiahia ana ki te huringa mana pakari.
LED me te OptoelectronicsKo GaN te rauemi whiriwhiri mō ngā LED kikorangi me te māKa whakamahia ngā anga GaN-on-Si hei whakaputa i ngā pūnaha rama LED tino whai hua, e whakarato ana i te mahi tino pai i roto i te rama, ngā hangarau whakaatu, me ngā whakawhitiwhitinga whatu.
Ngā Pātai me ngā Whakautu
P1: He aha te painga o GaN i runga i te silicon i roto i ngā taputapu hiko?
A1:Kei a GaN tētahiwhānui ake te āputa o te whitiki (3.4 eV)i te silicon (1.1 eV), e āhei ai ki te tu atu i ngā ngaohiko me ngā pāmahana teitei ake. Mā tēnei āhuatanga ka taea e GaN te whakahaere i ngā tono mana-teitei me te whai hua ake, ka whakaiti i te ngaronga hiko me te whakanui ake i te mahi a te pūnaha. Ka tukuna hoki e GaN ngā tere whakawhiti tere ake, he mea nui mō ngā taputapu auau-teitei pēnei i ngā whakakaha RF me ngā kaitahuri mana.
P2: Ka taea e au te whakarite i te whakatakotoranga o te papa Si mō taku tono?
A2:Āe, ka tukuna e mātoungā whakatakotoranga papa Si kua whakariteapērā i<111>, <100>, me ētahi atu aronga i runga i ngā whakaritenga o tō pūrere. He mea nui te aronga o te papa Si ki te mahi a te pūrere, tae atu ki ngā āhuatanga hiko, te whanonga wera, me te pumau ā-pūkaha.
P3: He aha ngā painga o te whakamahi i ngā anga GaN-on-Si mō ngā tono auau-tiketike?
A3:He pai ake ngā hua o ngā wafer GaN-on-Singā tere whakawhiti, e āhei ai te mahi tere ake i ngā auau teitei ake i te silicon. Nā tēnei ka pai ai rātou mōRFmengaruitingā tono, me te auau teiteingā taputapu hikopērā iNgā HEMT(Ngā Pūwhakawhiti Nekeneke Irahiko Teitei) meNgā whakakaha RF. Nā te nekenekehanga irahiko teitei ake o GaN ka iti ake ngā mate whakawhiti me te pai ake o te whai huatanga.
P4: He aha ngā kōwhiringa tāpiringa e wātea ana mō ngā wafer GaN-on-Si?
A4:Ka tukuna e mātou ngā mea e ruaMomo-NmeMomo-Pngā kōwhiringa tāpiringa, e whakamahia whānuitia ana mō ngā momo taputapu haurua-ira rerekē.Te whakapōrearea momo-Nhe mea tino pai mōngā transistors manameNgā whakakaha RF, i te meaTe whakapōrearea momo-Pe whakamahia pinepine ana mō ngā taputapu hikohiko pēnei i ngā rama LED.
Whakamutunga
Ko ā mātou Wafers Gallium Nitride on Silicon (GaN-on-Si) kua Whakaritea hei otinga tino pai mō ngā tono auau teitei, mana teitei, me te pāmahana teitei. Me ngā whakatakotoranga papa Si kua whakaritea, te ātete, me te tāpiritanga momo-N/momo-P, kua whakaritea ēnei wafers kia tutuki ai ngā hiahia motuhake o ngā ahumahi mai i ngā hikohiko mana me ngā pūnaha motuka ki ngā hangarau whakawhitiwhiti RF me te LED. Mā te whakamahi i ngā āhuatanga pai o GaN me te kaha tauine o te silicon, ka tukuna e ēnei wafers he mahi whakarei ake, he pai te whai hua, me te ārai i te heke mai mō ngā taputapu o te whakatupuranga e whai ake nei.
Kauwhata Taipitopito
