Papa Hiko Hiko SiC 6 Inihi, Diameter 4H, Ra≤0.2nm Warp≤35μm

Papa Hiko Hiko SiC 6 Inihi, Diameter 4H, 150mm Ra≤0.2nm Warp≤35μm, Whakaahua Matua

Whakaahuatanga Poto:

Nā te whai a te umanga haurua-irahiko ki te mahi teitei ake me te utu iti iho, kua puta te papa hiato SiC kawe hiko 6-inihi. Mā te hangarau hiato rauemi auaha, ka tutuki i tēnei papa hiato 6-inihi te 85% o te mahi a ngā papa hiato 8-inihi tuku iho, engari he 60% noa iho te utu. Ko ngā taputapu hiko i roto i ngā tono o ia rā pēnei i ngā teihana utu waka hiko hou, ngā kōwae hiko teihana turanga 5G, tae atu ki ngā puku auau-rerekē i roto i ngā taputapu kāinga papai, tera pea kei te whakamahi kē i tēnei momo papa hiato. Mā tā mātou hangarau tipu epitaxial maha-paparanga kua patenttia ka taea ngā atanga hiato papatahi taumata-atomika i runga i ngā turanga SiC, me te kiato āhua atanga i raro i te 1×10¹¹/cm²·eV – he whakatakotoranga kua eke ki ngā taumata matua o te ao.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Ngā tawhā hangarau

Ngā taonga	Te whakaputangamāka	Tāngamāka
Diameter	6-8 inihi	6-8 inihi
Matotoru	350/500±25.0 μm	350/500±25.0 μm
Momo maha	4H	4H
Ātete	0.015-0.025 ohm·cm	0.015-0.025 ohm·cm
TTV	≤5 μm	≤20 μm
Wāwhati	≤35 μm	≤55 μm
Te taratara o mua (Si-mata)	Ra≤0.2 nm (5μm×5μm)	Ra≤0.2 nm (5μm×5μm)

Ngā Āhuatanga Matua

1. Painga Utu: Ko tā mātou papa hiko SiC 6-inihi e whakamahi ana i te hangarau "paparanga ārai kua whakarōpūtia" e arotau ana i te hanganga rauemi hei whakaiti i ngā utu rauemi mata mā te 38% me te pupuri tonu i te mahi hiko tino pai. E whakaatu ana ngā inenga tuturu ka tutuki i ngā taputapu MOSFET 650V e whakamahi ana i tēnei papa he whakahekenga 42% i roto i te utu mō ia wāhanga horahanga ki te whakataurite ki ngā otinga tuku iho, he mea nui tēnei mō te whakatairanga i te tangohanga o ngā taputapu SiC i roto i ngā hikohiko kaihoko.
2. Ngā Āhuatanga Arataki Tino Pai: Mā roto i ngā tukanga whakahaere tāpiri hauota tika, ka tutuki i tā mātou papa hiato arataki SiC 6-inihi te ātete tino iti o te 0.012-0.022Ω·cm, me te rerekētanga e whakahaeretia ana i roto i te ±5%. He mea nui, ka mau tonu tā mātou ōritetanga ātete ahakoa i roto i te rohe taha 5mm o te wafer, e whakaoti ana i tētahi raruraru pānga taha roa i roto i te umanga.
3. Mahi Wera: Ko te kōwae 1200V/50A i whakawhanakehia mā te whakamahi i tā mātou papaaho e whakaatu ana i te pikinga pāmahana hononga 45℃ anake i runga ake i te taiao i te mahi kawenga katoa - 65℃ te iti iho i ngā taputapu rite-hangarau. Ka taea tēnei e tā mātou hanganga hiato "hongere wera 3D" e whakapai ake ana i te kawe wera taha ki te 380W/m·K me te kawe wera poutū ki te 290W/m·K.
4. Hototahi Tukanga: Mō te hanganga ahurei o ngā papa hiato SiC kawe hiko 6-inihi, i whakawhanakehia e mātou he tukanga tapahi taiaho huna e ōrite ana, e eke ana ki te tere tapahi 200mm/s me te whakahaere i te maramara taha i raro i te 0.3μm. Hei tāpiri, kei a mātou ngā kōwhiringa papa kua whakakikoruatia ki te nikara e āhei ai te here tika i te mate, ka penapena i ngā taahiraa tukanga e rua mā ngā kiritaki.

Ngā Taupānga Matua

Ngā Taputapu Matapihi Atamai Hira:

I roto i ngā pūnaha tuku hiko tere-teitei (UHVDC) e whakahaerehia ana i te ±800kV, ka whakaatuhia e ngā taputapu IGCT e whakamahi ana i ā mātou papa hiko SiC 6-inihi te roa, he whakapainga whakamiharo. Ka tutuki i ēnei taputapu te whakaiti i ngā ngaronga whakawhiti mā te 55% i roto i ngā tukanga whakawhiti, me te whakanui ake i te pai o te pūnaha katoa ki te neke atu i te 99.2%. Mā te kawe wera pai rawa atu o ngā papa hiko (380W/m·K) ka taea e ngā hoahoa kaitahuri kiato te whakaiti i te tapuwae o te teihana hiko mā te 25% ki te whakataurite ki ngā otinga e hangai ana ki te silicon tuku iho.

Ngā Pūkaha Waka Pūngao Hou:

Mā te pūnaha taraiwa e whakauru ana i ā mātou papa hiko SiC 6-inihi e tutuki ai te kaha o te inverter onge o te 45kW/L - he whakapainga 60% i tō rātou hoahoa 400V silicon o mua. Ko te mea tino whakamiharo, ka mau tonu te pūnaha i te 98% o te whai huatanga puta noa i te awhe pāmahana whakahaere katoa mai i te -40℃ ki te +175℃, e whakaoti ana i ngā wero mahi makariri kua whakararu i te whakamahinga EV i ngā āhuarangi raki. E whakaatu ana ngā whakamātautau o te ao tūturu i te pikinga 7.5% o te awhe hotoke mō ngā waka e mau ana i tēnei hangarau.

Ngā Puku Auau Taurangi Ahumahi:

Ko te whakaurunga o ā mātou papa i roto i ngā kōwae mana atamai (IPM) mō ngā pūnaha servo ahumahi kei te huri i te aunoatanga hanga. I roto i ngā pokapū mīhini CNC, ka tukuna e ēnei kōwae he urupare motuka 40% tere ake (ka whakaiti i te wā whakatere mai i te 50ms ki te 30ms) me te tapahi i te haruru hikohiko mā te 15dB ki te 65dB(A).

Ngā Hikohiko Kaihoko:

Kei te haere tonu te hurihanga hikohiko kaihoko me ā mātou papaaho e āhei ai ngā rihi tere GaN 65W o te whakatipuranga e whai ake nei. Ka tutuki i ēnei urutau hiko kiato te whakaiti i te rōrahi 30% (ki raro ki te 45cm³) me te pupuri tonu i te putanga mana katoa, nā ngā āhuatanga whakawhiti pai o ngā hoahoa SiC. E whakaatu ana te whakaahua wera i ngā pāmahana mōrahi o te pouaka he 68°C noa iho i te wā e mahi tonu ana - he 22°C te mātao atu i ngā hoahoa tuku iho - he whakapai ake i te roa o te ora me te haumaru o te hua.

Ngā Ratonga Whakaritenga XKH

Ka whakaratohia e XKH te tautoko whakaritenga whānui mō ngā papa hiato SiC kawe hiko 6-inihi:

Whakaritenga Matotoru: Ngā kōwhiringa tae atu ki ngā whakaritenga 200μm, 300μm, me te 350μm
2. Mana Ātete: Ka taea te whakarite i te kukū tāpiritanga momo-n mai i te 1×10¹⁸ ki te 5×10¹⁸ cm⁻³

3. Te Tirohanga o te Tioata: Tautoko mō ngā whakatakotoranga maha tae atu ki te (0001) i waho o te tuaka 4°, 8° rānei

4. Ngā Ratonga Whakamātautau: Ngā pūrongo whakamātautau tawhā taumata-wafer katoa

E waru wiki pea te roa o te wā ārahi mai i te hanga tauira ki te hanga papatipu. Mō ngā kiritaki rautaki, ka tukuna e mātou he ratonga whakawhanake tukanga motuhake hei whakarite kia tino ōrite ki ngā whakaritenga taputapu.