Papa hiato SiC Momo SEMI 6 Inihi 4H Matotoru 500μm TTV≤5μm MOS tohu
Ngā tawhā hangarau
| Ngā taonga | Whakatakotoranga | Ngā taonga | Whakatakotoranga |
| Diameter | 150±0.2 mm | Te taratara o mua (Si-mata) | Ra≤0.2 nm (5μm×5μm) |
| Momo maha | 4H | Tapa Maramara, Rakuraku, Ngatata (tirotiro ā-kanohi) | Kāore |
| Ātete | ≥1E8 Ω·cm | TTV | ≤5 μm |
| Matotoru o te paparanga whakawhiti | ≥0.4 μm | Wāwhati | ≤35 μm |
| Korekore (2mm>D>0.5mm) | ≤5 ia/Wafer | Matotoru | 500±25 μm |
Ngā Āhuatanga Matua
1. Mahi Auau-Teitei Tino Pai
Ko te paparanga SiC haurua-whakamaroke 6-inihi te roa e whakamahi ana i tētahi hoahoa paparanga dielectric kua whakarōpūtia, e whakarite ana i te rerekētanga pūmau dielectric o te <2% i roto i te Ka-band (26.5-40 GHz) me te whakapai ake i te ōritetanga o te wāhanga mā te 40%. 15% te pikinga o te pai me te 20% te iti iho o te whakamahinga hiko i roto i ngā kōwae T/R e whakamahi ana i tēnei paparanga.
2. Te Whakahaere Wera Pakari
Mā te hanganga hiato "piriti wera" ahurei ka taea te kawe wera taha o te 400 W/m·K. I roto i ngā kōwae PA teihana turanga 5G 28 GHz, ka piki te pāmahana hononga mā te 28°C anake i muri i te 24 hāora o te mahi tonu—50°C te iti iho i ngā otinga tuku iho.
3. Kounga Pai rawa atu o te Wafer
Mā te tikanga Kawe Kohu Tinana (PVT) kua arotauhia, ka tutuki i a mātou te kiato nekehanga <500/cm² me te Rerekētanga Matotoru Katoa (TTV) <3 μm.
4. Tukatuka Hoa-Hanganga
Ko tā mātou tukanga whakamahana taiaho i hangaia mō te papa hiato SiC haurua-whakamaroke 6-inihi te roa ka whakaiti i te kiato āhua mata mā te rua ngā whakarea o te kaha i mua i te epitaxy.
Ngā Taupānga Matua
1. Ngā Wāhanga Matua o te Teihana Tūāpapa 5G
I roto i ngā rarangi pūihi MIMO nui, ka tutuki i ngā taputapu GaN HEMT i runga i ngā papa hiato SiC haurua-whakamaroke 6-inihi te mana putanga 200W me te pai ake o te 65%. I whakaatuhia e ngā whakamātautau mara i te 3.5 GHz he pikinga 30% o te radius kapinga.
2. Ngā Pūnaha Whakawhitiwhiti Kōrero Amiorangi
Ko ngā tukuwhiti amiorangi Low-Earth orbit (LEO) e whakamahi ana i tēnei papaaho ka whakaatu i te 8 dB teitei ake o te EIRP i roto i te Q-band (40 GHz) me te whakaiti i te taumaha mā te 40%. Kua whakamahia e ngā pūrua SpaceX Starlink mō te hanga papatipu.
3. Ngā Pūnaha Radar Hōia
Ka tutuki i ngā kōwae T/R radar whakarārangi-wāhanga i runga i tēnei papaaho te whānui o te hononga 6-18 GHz me te iti o te haruru ki te 1.2 dB, ka whakawhānui ake i te whānuitanga kite mā te 50 km i roto i ngā pūnaha radar whakatūpato wawe.
4. Radar Mirimita-Ngaru Aunoa
Mā ngā maramara radar motuka 79 GHz e whakamahi ana i tēnei papaaho ka whakapai ake i te taumira koki ki te 0.5°, ka tutuki ai ngā whakaritenga taraiwa motuhake L4.
Kei a mātou he otinga ratonga whakaritenga whānui mō ngā papa hiato SiC haurua-whakamaroke 6-inihi. Mō te whakaritenga i ngā tawhā rauemi, e tautoko ana mātou i te whakahaere tika o te ātete i roto i te awhe 10⁶-10¹⁰ Ω·cm. Ina koa mō ngā tono hōia, ka taea e mātou te tuku i tētahi kōwhiringa ātete tino-tiketike o te >10⁹ Ω·cm. E toru ngā whakatakotoranga matotoru e tukuna ana, arā, 200μm, 350μm me te 500μm i te wā kotahi, me te manawanui e whakahaeretia ana i roto i te ±10μm, e tutuki ana i ngā whakaritenga rerekē mai i ngā taputapu auau-tiketike ki ngā tono mana-tiketike.
Mō ngā tukanga maimoatanga mata, e rua ngā otinga ngaio e tukuna ana e mātou: Ka taea e te Whakakanapa Matū (CMP) te whakatutuki i te papatahi o te mata taumata-atomika me te Ra<0.15nm, e tutuki ai ngā whakaritenga tipu epitaxial tino uaua; Ka taea e te hangarau maimoatanga mata kua rite ki te epitaxial mō ngā tono whakaputa tere te whakarato i ngā mata tino maeneene me te matotoru Sq<0.3nm me te matotoru waikura toenga <1nm, e whakangawari ana i te tukanga maimoatanga o mua i te pito o te kiritaki.
Ka whakaratohia e XKH ngā otinga whakaritenga whānui mō ngā papa hiato SiC haurua-whakamaroke 6-inihi
1. Whakaritenga Tawhā Rauemi
Ka tukuna e mātou he whakatikatika ātete tika i roto i te awhe 10⁶-10¹⁰ Ω·cm, me ngā kōwhiringa ātete tino teitei motuhake >10⁹ Ω·cm e wātea ana mō ngā tono hōia/rererangi.
2. Ngā Whakatakotoranga Matotoru
E toru ngā kōwhiringa matotoru paerewa:
· 200μm (kua arotauhia mō ngā taputapu auau-teitei)
· 350μm (whakatakotoranga paerewa)
· 500μm (i hangaia mō ngā tono mana-nui)
· He pakupaku te matotoru o ngā momo katoa, arā, ±10μm.
3. Ngā Hangarau Maimoatanga Mata
Te Whakakanapa Matū Ā-Mīhini (CMP): Ka tutuki te papatahi o te mata taumata-atomika me te Ra<0.15nm, e tutuki ana i ngā whakaritenga tipu epitaxial pakari mō ngā taputapu RF me te hiko.
4. Te Tukatuka Mata Epi-Ready
· Ka tukuna he mata tino maeneene me te taratara Sq<0.3nm
· Whakahaere i te matotoru o te waikura taketake ki te <1nm
· Ka whakakorea kia toru ngā mahi tukatuka-mua i ngā whare o ngā kiritaki
