4inihi 6inihi 8inihi Ouma Tipu Karāhe SiC mō te Tukanga CVD

1. Pūnaha Whakahaere Pāmahana Matatau
Kei roto i te oumu he pūnaha whakamahana ātete maha-rohe e taea ai te pupuri i te pāmahana tae atu ki te 2300°C me te ōritetanga ±1°C puta noa i te rūma whakatipu katoa. Ka tutukihia tēnei whakahaere wera tika mā roto i:
12 ngā rohe whakamahana e whakahaeretia motuhaketia ana.
Te aroturuki i te takirua wera āpiti (Momo C W-Re).
Ngā rauropi whakarerekētanga kōtaha wera wā-tūturu.
Ngā pakitara rūma wai-whakamatao hei whakahaere i te pikinga wera.

2. Hangarau Tukunga me te Whakaranu Hau
Mā tā mātou pūnaha tohatoha hau motuhake ka whakarite kia pai te whakaranu i ngā matū matū me te tuku ōrite:
Ngā kaiwhakahaere rere papatipu me te tika ±0.05sccm.
Putanga werohanga hau maha-ira.
Te aroturuki i te hanganga hau i roto i te wāhi (mātakitakitanga FTIR).
Te utunga rere aunoa i ngā huringa tipu.

3. Te Whakapai Ake i te Kounga o te Tioata
He maha ngā mahi auaha a te pūnaha hei whakapai ake i te kounga o te tioata:
Pūmau papa hurihuri (0-100rpm ka taea te whakarite).
Hangarau whakahaere paparanga rohe matatau.
Pūnaha aroturuki hapa ā-tūnga (marara UV laser).
Te utu aunoa i te ahotea i te wā e tipu ana.

4. Te Aunoatanga me te Whakahaere Tukanga
Te whakahaere aunoa i te tunu kai.
Te arotautanga o ngā tawhā tipu i te wā tūturu.
Te aroturuki mamao me te tātaritanga.
Neke atu i te 1000 ngā raraunga tawhā kua tuhia (kua rongoatia mō ngā tau e 5).

5. Ngā Āhuatanga Haumaru me te Pono
Te parenga toru-taumaha i te pāmahana nui.
Pūnaha horoi ohorere aunoa.
Te hoahoa hanganga kua aromatawaihia mō te rū whenua.
98.5% te taurangi wā mahi.

6. Hanganga Tauine
Mā te hoahoa modular ka taea te whakapai ake i te kaha.
Hototahi ki ngā rahi wafer 100mm ki te 200mm.
Ka tautoko i ngā whirihoranga poutū me ngā whirihoranga whakapae.
Ngā wāhanga whakarerekē tere mō te tiaki.

7. Te Whai Hua o te Pūngao
30% te iti iho o te whakamahinga hiko i ērā atu pūnaha rite.
E 60% o te wera para e hopukina ana e te pūnaha whakaora wera.
Ngā rauropi whakapai ake mō te whakapaunga hau.
Ngā whakaritenga whare e tutuki ana i ngā whakaritenga LEED.

8. Te Whānuitanga o ngā Rauemi
Ka whakatipu i ngā momo SiC matua katoa (4H, 6H, 3C).
E tautoko ana i ngā momo ara iahiko me ngā momo ārai-haurua.
E tautoko ana i ngā momo kaupapa tāpiringa (momo-N, momo-P).
Hototahi ki ngā matūmua kē atu (hei tauira, TMS, TES).

9. Te Mahi a te Pūnaha Korehau
Pēhanga turanga: <1×10⁻⁶ Torr
Te tere turuturu: <1×10⁻⁹ Torr·L/hēkona
Tere papu: 5000L/s (mō SiH₄)

Te whakahaere pēhanga aunoa i ngā huringa tipu
E whakaatu ana tēnei whakatakotoranga hangarau whānui i te kaha o tā mātou pūnaha ki te whakaputa tioata SiC kounga-rangahau me te kounga whakaputa me te ōritetanga me te hua e ārahi ana i te umanga. Mā te whakakotahitanga o te whakahaere tika, te aroturuki matatau, me te hangarau pakari ka waiho tēnei pūnaha CVD hei whiringa pai mō ngā tono R&D me te hanga rōrahi i roto i ngā hikohiko mana, ngā taputapu RF, me ētahi atu tono semiconductor matatau.