Ngā Wafer Epitaxial 4H-SiC mō ngā MOSFET Ngaohiko Tino-Teitei (100–500 μm, 6 inihi)

Whakaahuatanga Poto:

Nā te tere o te tipu o ngā waka hiko, ngā whatunga atamai, ngā pūnaha pūngao hou, me ngā taputapu ahumahi kaha-teitei, kua puta he hiahia nui mō ngā taputapu haurua-ā-ira e kaha ana ki te whakahaere i ngā ngaohiko teitei ake, ngā kiato mana teitei ake, me te pai ake o te mahi. I roto i ngā haurua-ā-ira whānui,kāpira silicon (SiC)e tu ke ana mō tōna whānui o te āputa ira, tōna kawe wera teitei, me tōna kaha teitei o te papa hiko whakahirahira.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

Tirohanga Whānui o te Hua

Tō mātouNgā papa epitaxial 4H-SiChe mea hanga motuhake mōngā tono MOSFET ngaohiko tino teitei. Me ngā paparanga epitaxial mai i100 μm ki te 500 μm on Ngā papa 6-inihi (150 mm), ka tukuna e ēnei angaanga ngā rohe nekeneke roa e hiahiatia ana mō ngā taputapu karaehe kV me te pupuri tonu i te kounga tioata tino pai me te kaha tauine. Ko ngā matotoru paerewa ko te 100 μm, 200 μm, me te 300 μm, me te whakaritenga e wātea ana.

Matotoru o te Paparanga Epitaxial

He mea nui te mahi a te paparanga epitaxial ki te whakatau i te mahi a te MOSFET, inā koa te taurite i waenga ingaohiko pakarumeātete-i-te-tū.

100–200 μmKua arotauhia mō ngā MOSFET ngaohiko waenga-ki-teitei, e tuku ana i te taurite tino pai o te whai huatanga o te kawe hiko me te kaha aukati.
200–500 μmHe pai mō ngā taputapu ngaohiko tino teitei (10 kV+), e āhei ai ngā rohe roa e nekeneke ana mō ngā āhuatanga pakaru pakari.

I te whānuitanga katoa,ka whakahaeretia te matotoru ōrite i roto i te ±2%, e whakarite ana i te ōritetanga mai i te wafer ki te wafer, mai i te puranga ki te puranga. Mā tēnei ngāwari ka taea e ngā kaihoahoa te whakatikatika i te mahi a te taputapu mō ā rātou akomanga ngaohiko ūnga me te pupuri tonu i te āheinga tāruarua i roto i te hanga papatipu.

Tukanga Hanga

Ka hangaia ā mātou papa wafer mā te whakamahi ite epitaxy CVD (Te Whakatakotoranga Kohu Matū) hou rawa atu, e āhei ai te whakahaere tika i te matotoru, te tāpiringa, me te kounga tioata, ahakoa mō ngā paparanga matotoru rawa.

Te Epitaxy CVD– Mā ngā hau parakore teitei me ngā āhuatanga kua arotauhia ka maeneene ngā mata me te iti o ngā hapa.
Te Tipu o te Papa Matotoru– Mā ngā tohutao tukanga motuhake ka taea te matotoru o te epitaxial tae atu ki500 μmme te ōritetanga tino pai.
Te Mana Whakahaere i te Doping– Te kukū whakarerekētanga i waenga i te1×10¹⁴ – 1×10¹⁶ henimita⁻³, me te ōritetanga pai ake i te ±5%.
Te Whakaritenga o te Mata– Ka pāngia ngā wafers eTe whakakanapa CMPme te tirotiro pakari, kia rite ai ki ngā tukanga matatau pēnei i te whakahāngaitanga o te kuaha, te whakaahua-ipurangi, me te whakarewatanga.

Ngā Painga Matua

Te Kaha o te Ngaohiko Tino-Teitei– Ka tautokona e ngā paparanga epitaxial matotoru (100–500 μm) ngā hoahoa MOSFET karaehe-kV.
Kounga Karaihe Tino Pai– Mā te iti o te nekehanga me te matotoru o ngā hapa papa taketake ka pono, ka whakaitihia hoki te turuturu.
Ngā Papa Rahi 6-Inihi– Tautoko mō te whakaputa nui, te utu iti mō ia taputapu, me te hototahi ki ngā taputapu hanga.
Ngā Āhuatanga Wera Pai Rawa– Mā te kawe wera teitei me te āputa whānui e taea ai te mahi pai i te kaha me te pāmahana teitei.
Ngā Tawhā Whakaritenga– Ka taea te whakarite i te matotoru, te paninga, te whakatakotoranga, me te whakaotinga mata kia rite ki ngā whakaritenga motuhake.

Ngā Whakatakotoranga Noa

Tawhā	Whakatakotoranga
Momo Ārahi	Momo-N (Kua tāpirihia ki te hauota)
Ātete	tetahi
Koki Tuaka-kore	4° ± 0.5° (ki te taha [11-20])
Te Tirohanga o te Karaihe	(0001) Si-mata
Matotoru	200–300 μm (ka taea te whakarite 100–500 μm)
Whakaotinga Mata	Mua: CMP kua orohia (kua rite mō te wā poto) Muri: kua pania, kua orohia rānei
TTV	≤ 10 μm
Kopere/Whārangi	≤ 20 μm

Ngā Wāhi Whakamahinga

He tino pai ngā papa epitaxial 4H-SiC mōNgā MOSFET i roto i ngā pūnaha ngaohiko tino teitei, tae atu ki:

Ngā kaitahuri kukume waka hiko me ngā kōwae utu ngaohiko teitei
Ngā taputapu tuku me te tohatoha whatunga atamai
Ngā kaitahuri pūngao whakahou (rā, hau, rokiroki)
Ngā taputapu ahumahi me ngā pūnaha whakawhiti mana-tiketike

Ngā Pātai Auau

P1: He aha te momo kawe hiko?
A1: Momo-N, kua tāpirihia ki te hauota — te paerewa ahumahi mō ngā MOSFET me ētahi atu taputapu hiko.

Q2: He aha ngā matotoru epitaxial e wātea ana?
A2: 100–500 μm, me ngā kōwhiringa paerewa i te 100 μm, 200 μm, me te 300 μm. E wātea ana ngā matotoru ritenga mēnā ka tonoa.

Q3: He aha te whakatakotoranga o te anga me te koki kei waho o te tuaka?
A3: (0001) Mata-Si, me te 4° ± 0.5° mai i te tuaka ki te ahunga [11-20].

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.