3inihi te parakore teitei, te haurua-whakamātao (HPSI) te papa SiC 350um te karaehe Tauira Tuatahi
Tono
He mea nui ngā anga HPSI SiC hei whakahohe i ngā taputapu hiko o te whakatupuranga e whai ake nei, e whakamahia ana i roto i ngā momo tono mahi-teitei:
Ngā Pūnaha Whakawhiti Hiko: Ko ngā papa SiC te rauemi matua mō ngā taputapu hiko pēnei i ngā MOSFET hiko, ngā diode, me ngā IGBT, he mea nui ēnei mō te whakawhiti hiko whai hua i roto i ngā ara iahiko hiko. Kei roto i ngā pūhiko hiko whai hua teitei, ngā puku motuka, me ngā kaitahuri ahumahi ēnei wāhanga.
Ngā Waka Hiko (EV):Ko te pikinga o te hiahia mō ngā waka hiko e hiahia ana kia whakamahia ngā hikohiko mana whai hua ake, ā, ko ngā wafer SiC kei mua i tēnei panonitanga. I roto i ngā pūnaha hiko EV, ka whakaratohia e ēnei wafer he tino whai hua me ngā āheinga whakawhiti tere, e whai wāhi ana ki ngā wā utu tere ake, te tawhiti roa ake, me te whakapai ake i te mahi whānui o te waka.
Pūngao Whakahou:I roto i ngā pūnaha pūngao hou pērā i te hiko o te rā me te hau, ka whakamahia ngā papa SiC i roto i ngā inverters me ngā converters e āhei ai te hopu me te tohatoha pūngao pai ake. Mā te kawe wera teitei me te ngaohiko pakaru pai o te SiC ka whakarite kia pono te mahi a ēnei pūnaha, ahakoa i raro i ngā āhuatanga taiao tino kino.
Aunoatanga Ahumahi me te Robotics:Ko ngā hikohiko mana mahi-teitei i roto i ngā pūnaha aunoatanga ahumahi me ngā karetao e hiahia ana ki ngā taputapu e kaha ana ki te huri tere, ki te whakahaere i ngā kawenga mana nui, me te mahi i raro i te ahotea nui. Ka tutuki i ngā semiconductors e hangai ana ki te SiC ēnei whakaritenga mā te whakarato i te pai me te pakari teitei ake, ahakoa i roto i ngā taiao mahi uaua.
Ngā Pūnaha Whakawhitiwhiti Kōrero:I roto i ngā hanganga whakawhitiwhiti kōrero, he mea nui te pono me te whai hua o te huringa pūngao, ka whakamahia ngā anga SiC i roto i ngā pūtake hiko me ngā kaitahuri DC-DC. Ka āwhina ngā taputapu SiC ki te whakaiti i te whakapaunga pūngao me te whakarei ake i te mahi a te pūnaha i roto i ngā pokapū raraunga me ngā whatunga whakawhitiwhiti kōrero.
Mā te whakarato i tētahi turanga pakari mō ngā tono mana-tiketike, ka taea e te anga HPSI SiC te whakawhanake i ngā taputapu penapena-pūngao, hei āwhina i ngā ahumahi ki te neke ki ngā otinga matomato ake, pumau ake.
Ngā Āhuatanga
| mahi | Taumata Whakaputa | Taumata Rangahau | Tauira Tauira |
| Diameter | 75.0 mm ± 0.5 mm | 75.0 mm ± 0.5 mm | 75.0 mm ± 0.5 mm |
| Matotoru | 350 µm ± 25 µm | 350 µm ± 25 µm | 350 µm ± 25 µm |
| Te Aronga o te Wafer | I runga i te tuaka: <0001> ± 0.5° | I runga i te tuaka: <0001> ± 2.0° | I runga i te tuaka: <0001> ± 2.0° |
| Te Matotoru o te Paipa Moroiti mō te 95% o ngā Wafers (MPD) | ≤ 1 henimita⁻² | ≤ 5 henimita⁻² | ≤ 15 henimita⁻² |
| Ātete Hiko | ≥ 1E7 Ω·cm | ≥ 1E6 Ω·cm | ≥ 1E5 Ω·cm |
| Tāpiri | Kua whakakorea te waipiro | Kua whakakorea te waipiro | Kua whakakorea te waipiro |
| Te whakatakotoranga papatahi tuatahi | {11-20} ± 5.0° | {11-20} ± 5.0° | {11-20} ± 5.0° |
| Roa Papatahi Tuatahi | 32.5 mm ± 3.0 mm | 32.5 mm ± 3.0 mm | 32.5 mm ± 3.0 mm |
| Roa Papatahi Tuarua | 18.0 mm ± 2.0 mm | 18.0 mm ± 2.0 mm | 18.0 mm ± 2.0 mm |
| Te whakatakotoranga papatahi tuarua | Te anga whakarunga o Si: 90° CW mai i te papa tuatahi ± 5.0° | Te anga whakarunga o Si: 90° CW mai i te papa tuatahi ± 5.0° | Te anga whakarunga o Si: 90° CW mai i te papa tuatahi ± 5.0° |
| Te Whakakore i te Tapa | 3 mm | 3 mm | 3 mm |
| LTV/TTV/Pīkau/Whā | 3 µm / 10 µm / ±30 µm / 40 µm | 3 µm / 10 µm / ±30 µm / 40 µm | 5 µm / 15 µm / ±40 µm / 45 µm |
| Te Pākari o te Mata | Mata-C: Kua orohia, Mata-Si: CMP | Mata-C: Kua orohia, Mata-Si: CMP | Mata-C: Kua orohia, Mata-Si: CMP |
| Ngā kapiti (tirohia mā te mārama kaha) | Kāore | Kāore | Kāore |
| Pereti Hex (tirohia mā te mārama kaha) | Kāore | Kāore | Te horahanga tāpiri 10% |
| Ngā Rohe Momo-maha (i tirotirohia e te mārama kaha-nui) | Te horahanga tāpiri 5% | Te horahanga tāpiri 5% | Te horahanga tāpiri 10% |
| Ngā karawarawa (ka tirohia mā te mārama kaha) | ≤ 5 ngā karawarawa, te roanga whakaemi ≤ 150 mm | ≤ 10 ngā karawarawa, te roanga whakaemi ≤ 200 mm | ≤ 10 ngā karawarawa, te roanga whakaemi ≤ 200 mm |
| Tapahi Tapa | Kāore e whakaaetia he whānui me te hohonu ≥ 0.5 mm | 2 e whakaaetia ana, ≤ 1 mm te whānui me te hohonu | 5 e whakaaetia ana, ≤ 5 mm te whānui me te hohonu |
| Te Parahanga o te Mata (tirohia mā te mārama kaha) | Kāore | Kāore | Kāore |
Ngā Painga Matua
Te Mahi Wera Pai Rawa: Mā te kawe wera teitei o te SiC ka pai te tohatoha wera i roto i ngā taputapu hiko, ka taea ai e rātou te mahi i ngā taumata hiko me ngā auau teitei ake me te kore e wera rawa. Ko te tikanga o tēnei he iti ake, he pai ake ngā pūnaha, ā, he roa ake te roa o te oranga mahi.
Ngaohiko Pakaru Teitei: Nā te whānui ake o te āputa i te silicon, ka tautoko ngā anga SiC i ngā tono ngaohiko teitei, ā, he mea tino pai mō ngā wāhanga hiko mana e hiahia ana kia tu atu i ngā ngaohiko pakaru teitei, pērā i ngā waka hiko, ngā pūnaha hiko whatunga, me ngā pūnaha pūngao whakahou.
Te Whakaiti i te Ngaronga Hiko: Ko te iti o te ātete-ki-te-whakaoho me te tere whakawhiti o ngā taputapu SiC ka hua ake te whakaiti i te ngaronga hiko i te wā e whakahaerehia ana. Ehara i te mea ka whakapai ake i te whai huatanga anake engari ka whakarei ake hoki i te penapena hiko whānui o ngā pūnaha e whakatinanahia ana.
Te Whakarei Ake i te Pono i roto i ngā Taiao Kino: Mā ngā āhuatanga pakari o te rauemi SiC ka taea e ia te mahi i roto i ngā āhuatanga tino kino, pērā i te pāmahana teitei (tae atu ki te 600°C), ngā ngaohiko teitei, me ngā auau teitei. Nā tēnei ka pai ngā anga SiC mō ngā tono ahumahi, motuka, me te pūngao uaua.
Te Whai Hua o te Pūngao: He nui ake te mātotoru o te mana o ngā taputapu SiC i ngā taputapu hiko-silicon tuku iho, e whakaiti ana i te rahi me te taumaha o ngā pūnaha hiko mana me te whakapai ake i tō rātou whai huatanga whānui. Ka hua ake tēnei i ngā penapena utu me te iti ake o te tapuwae taiao i roto i ngā tono pēnei i te pūngao whakahou me ngā waka hiko.
Āhuatanga Tauine: Mā te whānui 3-inihi me ngā āheinga hanga tika o te anga HPSI SiC ka taea te tauine mō te hanga papatipu, e tutuki ai ngā whakaritenga rangahau me te hanga arumoni.
Whakamutunga
Ko te anga HPSI SiC, me tōna whānui 3-inihi me te matotoru 350 µm ± 25 µm, koia te rauemi tino pai mō te whakatupuranga e whai ake nei o ngā taputapu hiko mana mahi-teitei. Nā tōna huinga ahurei o te kawe wera, te ngaohiko pakaru teitei, te ngaronga pūngao iti, me te pono i raro i ngā āhuatanga tino kino, he mea nui ia mō ngā tono maha i roto i te hurihanga hiko, te pūngao whakahou, ngā waka hiko, ngā pūnaha ahumahi, me ngā whakawhitiwhiti kōrero.
He tino pai tēnei anga SiC mō ngā ahumahi e whai ana kia nui ake te pai o te mahi, kia nui ake te penapena pūngao, kia pai ake hoki te pono o te pūnaha. I te whanaketanga tonu o te hangarau hikohiko mana, ka whakaratohia e te anga SiC HPSI te turanga mō te whakawhanaketanga o ngā otinga whai hua-pūngao o te whakatupuranga e whai ake nei, e akiaki ana i te whakawhiti ki tētahi heke mai tauwhiro ake, iti-waro.
Kauwhata Taipitopito
