12 inihi te whānui o te papa SIC silicon carbide prime grade 300mm te rahi nui 4H-N. He pai mō te whakamarara wera o te taputapu mana nui.

He papa SIC 12 inihi te whānui, he 300mm te rahi nui, 4H-N. He pai mō te whakamarara wera o ngā taputapu mana nui. Whakaahua Matua

Whakaahuatanga Poto:

Ko te papa whakarewa silicon carbide 12-inihi (papa SiC) he papa rauemi haurua-ā-ringa nui, mahi-teitei, he mea hanga mai i te tioata kotahi o te silicon carbide. Ko te silicon carbide (SiC) he rauemi haurua-ā-ringa whānui āputa me ngā āhuatanga hiko, wera me te miihini tino pai, e whakamahia whānuitia ana i roto i te hanga taputapu hiko i roto i ngā taiao mana teitei, auau teitei me te pāmahana teitei. Ko te papa whakarewa 12-inihi (300mm) te whakatakotoranga matatau o nāianei o te hangarau silicon carbide, ka taea te whakapai ake i te pai o te whakaputa me te whakaiti i ngā utu.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Ngā āhuatanga o te hua

1. Te kawe wera teitei: ko te kawe wera o te silicon carbide e toru ngā wā neke atu i te silicon, he mea e tika ana mō te whakamarara wera o ngā taputapu mana nui.

2. Te kaha o te papa pakaru: Ko te kaha o te papa pakaru he 10 ngā wā i tō te silicon, he pai mō ngā tono pēhanga teitei.

3. Āputa whānui: Ko te āputa he 3.26eV (4H-SiC), he pai mō ngā tono pāmahana teitei me te auau teitei.

4. Te pakeketanga teitei: Ko te pakeketanga Mohs he 9.2, ko tōna tuarua anake i te taimana, he tino pai te ātete ki te kakahu me te kaha ā-ringa.

5. Te pumau matū: te ātete kaha ki te waikura, te mahi pumau i roto i te pāmahana teitei me te taiao uaua.

6. Rahi nui: 12 inihi (300mm) te papa, whakapai ake i te pai o te whakaputa, whakaiti i te utu o te waeine.

7. Kiato iti te koha: he hangarau tipu karaihe kotahi kounga teitei hei whakarite kia iti te koha me te ōritetanga teitei.

Te aronga tono matua o te hua

1. Ngā hikohiko mana:

Ngā Mosfet: Whakamahia i roto i ngā waka hiko, ngā puku motuka ahumahi me ngā kaitahuri hiko.

Ngā taiohiko: pērā i ngā taiohiko Schottky (SBD), e whakamahia ana mō ngā pūtake hiko whakatikatika me te whakawhiti whai hua.

2. Ngā taputapu Rf:

Whakakaha mana RF: e whakamahia ana i roto i ngā teihana turanga whakawhitiwhiti kōrero 5G me ngā whakawhitiwhiti kōrero amiorangi.

Ngā taputapu ngaruiti: He pai mō ngā pūnaha whakawhitiwhiti kōrero radar me te ahokore.

3. Ngā waka pūngao hou:

Ngā pūnaha taraiwa hiko: ngā kaiwhakahaere motuka me ngā kaitahuri mō ngā waka hiko.

Puranga utu: Pūrere hiko mō ngā taputapu utu tere.

4. Ngā tono ahumahi:

Kaitahuri ngaohiko teitei: mō te whakahaere motuka ahumahi me te whakahaere pūngao.

Whatunga atamai: Mō ngā whakawhiti hiko tuku HVDC me te hikohiko mana.

5. Rererangi:

Ngā hikohiko pāmahana teitei: he pai mō ngā taiao pāmahana teitei o ngā taputapu rererangi.

6. Marae rangahau:

Rangahau haurua-āputa whānui: mō te whakawhanaketanga o ngā rauemi me ngā taputapu haurua-āputa hou.

Ko te paparanga silicon carbide 12-inihi he momo paparanga rauemi semiconductor mahi-teitei me ngā āhuatanga tino pai pēnei i te kawe wera teitei, te kaha o te mara pakaru teitei me te āputa whānui. He whānui te whakamahinga i roto i ngā hikohiko mana, ngā taputapu auau reo irirangi, ngā waka hiko hou, te whakahaere ahumahi me te rererangi, ā, he rauemi matua hei whakatairanga i te whanaketanga o te whakatupuranga e whai ake nei o ngā taputapu hiko whai hua me te mana-teitei.

Ahakoa he iti ake ngā whakamahinga tika o ngā papa hiko silicon carbide i roto i ngā taputapu hiko kaihoko pēnei i ngā mōhiti AR, ko tōna pūmanawa ki te whakahaere hiko whai hua me ngā taputapu hiko iti ka taea te tautoko i ngā otinga tuku hiko mama, mahi teitei mō ngā taputapu AR/VR a meake nei. I tēnei wā, ko te whanaketanga matua o te papa hiko silicon carbide e aro ana ki ngā mara ahumahi pēnei i ngā waka hiko hou, ngā hanganga whakawhitiwhiti kōrero me te aunoatanga ahumahi, ā, e whakatairanga ana i te ahumahi semiconductor kia whanake i roto i te huarahi whai hua me te pono.

E whakapau kaha ana a XKH ki te whakarato i ngā papaaho SIC 12 "kounga teitei me te tautoko hangarau me ngā ratonga whānui, tae atu ki:

1. Hanganga ritenga: E ai ki ngā hiahia o te kiritaki, me whakarato i ngā momo ātete rerekē, te whakatakotoranga karaihe me te papa maimoatanga mata.

2. Te arotau i te tukanga: Te whakarato tautoko hangarau ki ngā kiritaki mō te tipu epitaxial, te hanga taputapu me ētahi atu tukanga hei whakapai ake i te mahi a te hua.

3. Whakamātautau me te tiwhikete: Whakaratohia he tohu tino tika mō te kimi hapa me te tiwhikete kounga hei whakarite kia tutuki i te papa te paerewa ahumahi.

4. Mahi tahi ki te R&D: Te whakawhanake tahi i ngā taputapu silicon carbide hou me ngā kiritaki hei whakatairanga i te auahatanga hangarau.

Tūtohi raraunga

Whakatakotoranga Papatūāpapa 1 2 inihi Silicon Carbide (SiC)
Tau		Te Hanganga ZeroMPD Taumata (Taumata Z)	Te Hanga Paerewa Taumata (Taumata P)		Tauira Tauira (Kōeke D)
Diameter		3 0 0 mm~305mm
Matotoru	4H-N	750μm±15 μm	750μm±25 μm
	4H-SI	750μm±15 μm	750μm±25 μm
Te Aronga o te Wafer		Tuaka ki waho: 4.0° ki te <1120 >±0.5° mō te 4H-N, Kei runga i te tuaka: <0001>±0.5° mō te 4H-SI
Te Kīanga o te Paipa Maikoro	4H-N	≤0.4cm-2	≤4cm-2		≤25cm-2
	4H-SI	≤5cm-2	≤10cm-2		≤25cm-2
Ātete	4H-N	0.015~0.024 Ω·cm			0.015~0.028 Ω·cm
	4H-SI	≥1E10 Ω·cm			≥1E5 Ω·cm
Te whakatakotoranga papatahi tuatahi		{10-10} ±5.0°
Roa Papatahi Tuatahi	4H-N	Kāore he
	4H-SI	Te kokoru
Te Whakakore i te Tapa		3 mm
LTV/TTV/Pīkau/Whā		≤5μm/≤15μm/≤35 μm/≤55 μm			≤5μm/≤15μm/≤35 □ μm/≤55 □ μm
Te taratara		Pōrana Ra≤1 nm
		CMP Ra≤0.2 nm			Ra≤0.5 nm
Ngā Kapiti o te Tapa i te Mārama Kaha Rawa Pereti Hex mā te Mārama Kaha Teitei Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei Ngā Whakaurunga Waro Tirohanga Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei		Kāore Te horahanga tāpiri ≤0.05% Kāore Te horahanga tāpiri ≤0.05% Kāore			Te roa tāpiri ≤ 20 mm, te roa takitahi ≤2 mm Te horahanga tāpiri ≤0.1% Te horahanga tāpiri ≤3% Te horahanga tāpiri ≤3% Te roa tāpiri ≤1 × te diameter o te angaanga
Ngā Maramara Tapa Mā te Mārama Kaha Teitei		Kāore i whakaaetia te whānui me te hohonu ≥0.2mm			7 e whakaaetia ana, ≤1 mm ia
(TSD) Te nekehanga o te tīwiri miro		≤500 cm-2		Kāore he
(BPD) Te nekehanga o te papa turanga		≤1000 cm-2		Kāore he
Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei		Kāore
Tākai		Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei
Ngā Tuhipoka:
1 Ka pā ngā herenga hapa ki te mata papatahi katoa engari ko te wāhi aukati taha. 2Me tirotiro ngā karawarawa ki te mata o Si anake. 3 Nō ngā anga whakairo KOH anake ngā raraunga nekehanga.

Ka haere tonu a XKH ki te haumi ki te rangahau me te whanaketanga hei whakatairanga i te putanga hou o ngā papa hiko waro 12-inihi i roto i te rahi nui, te iti o ngā hapa me te ōritetanga teitei, i te wā e tūhuratia ana e XKH ana tono i roto i ngā wāhanga hou pēnei i te hiko kaihoko (pēnei i ngā waeine hiko mō ngā taputapu AR/VR) me te rorohiko irahiko. Mā te whakaiti i ngā utu me te whakanui ake i te kaha, ka kawea mai e XKH te whai hua ki te umanga haurua-ira.