12 inihi te rahi o te papa SiC Momo N, he tono RF mahi teitei.
Ngā tawhā hangarau
| Whakatakotoranga Papatūāpapa Silicon Carbide (SiC) 12 inihi | |||||
| Tau | Te Hanganga ZeroMPD Taumata (Taumata Z) | Te Hanga Paerewa Taumata (Taumata P) | Tauira Tauira (Kōeke D) | ||
| Diameter | 3 0 0 mm~1305mm | ||||
| Matotoru | 4H-N | 750μm±15 μm | 750μm±25 μm | ||
| 4H-SI | 750μm±15 μm | 750μm±25 μm | |||
| Te Aronga o te Wafer | Tuaka ki waho: 4.0° ki te <1120 >±0.5° mō te 4H-N, Kei runga i te tuaka: <0001>±0.5° mō te 4H-SI | ||||
| Te Kīanga o te Paipa Maikoro | 4H-N | ≤0.4cm-2 | ≤4cm-2 | ≤25cm-2 | |
| 4H-SI | ≤5cm-2 | ≤10cm-2 | ≤25cm-2 | ||
| Ātete | 4H-N | 0.015~0.024 Ω·cm | 0.015~0.028 Ω·cm | ||
| 4H-SI | ≥1E10 Ω·cm | ≥1E5 Ω·cm | |||
| Te whakatakotoranga papatahi tuatahi | {10-10} ±5.0° | ||||
| Roa Papatahi Tuatahi | 4H-N | Kāore he | |||
| 4H-SI | Te kokoru | ||||
| Te Whakakore i te Tapa | 3 mm | ||||
| LTV/TTV/Pīkau/Whā | ≤5μm/≤15μm/≤35 μm/≤55 μm | ≤5μm/≤15μm/≤35 □ μm/≤55 □ μm | |||
| Te taratara | Pōrana Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Ngā Kapiti o te Tapa i te Mārama Kaha Rawa Pereti Hex mā te Mārama Kaha Teitei Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei Ngā Whakaurunga Waro Tirohanga Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei | Kāore Te horahanga tāpiri ≤0.05% Kāore Te horahanga tāpiri ≤0.05% Kāore | Te roa tāpiri ≤ 20 mm, te roa takitahi ≤2 mm Te horahanga tāpiri ≤0.1% Te horahanga tāpiri ≤3% Te horahanga tāpiri ≤3% Te roa tāpiri ≤1 × te diameter o te angaanga | |||
| Ngā Maramara Tapa Mā te Mārama Kaha Teitei | Kāore i whakaaetia te whānui me te hohonu ≥0.2mm | 7 e whakaaetia ana, ≤1 mm ia | |||
| (TSD) Te nekehanga o te tīwiri miro | ≤500 cm-2 | Kāore he | |||
| (BPD) Te nekehanga o te papa turanga | ≤1000 cm-2 | Kāore he | |||
| Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei | Kāore | ||||
| Tākai | Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei | ||||
| Ngā Tuhipoka: | |||||
| 1 Ka pā ngā herenga hapa ki te mata papatahi katoa engari ko te wāhi aukati taha. 2Me tirotiro ngā karawarawa ki te mata o Si anake. 3 Nō ngā anga whakairo KOH anake ngā raraunga nekehanga. | |||||
Ngā Āhuatanga Matua
1. Painga Rahi Nui: He nui ake te horahanga o te papa SiC 12-inihi (te papa silicon carbide 12-inihi) i te papa kotahi-wafer, ka taea ai te whakaputa i ngā maramara maha atu mō ia wafer, ā, ka whakaitihia ngā utu hanga me te whakapiki ake i te hua.
2. Rauemi Mahi-Teitei: Nā te ātete pāmahana teitei o te silicon carbide me te kaha o te mara pakaru teitei, he mea tino pai te papa 12-inihi mō ngā tono ngaohiko teitei me te auau-teitei, pērā i ngā kaitahuri EV me ngā pūnaha utu-tere.
3. Hototahi Tukatuka: Ahakoa te pakeketanga me ngā wero tukatuka o te SiC, ka iti ake ngā hapa o te mata o te papa SiC 12-inihi mā roto i ngā tikanga tapahi me te oro kua arotauhia, ka pai ake te hua o te taputapu.
4. Whakahaere Wera Pai Rawa: He pai ake te kawe wera i ngā rauemi silicon, ā, ka aro pai te papa 12-inihi ki te marara wera i roto i ngā taputapu mana-teitei, ka roa ake te roa o te ora o ngā taputapu.
Ngā Taupānga Matua
1. Ngā Waka Hiko: Ko te papa SiC 12-inihi (te papa silicon carbide 12-inihi) he wāhanga matua o ngā pūnaha taraiwa hiko o te whakatupuranga e whai ake nei, e āhei ana i ngā kaitahuri tino whai hua e whakarei ake ana i te whānuitanga me te whakaiti i te wā utu.
2. Ngā Teihana Tūāpapa 5G: Ka tautokohia e ngā papa SiC rahi-rahi ngā taputapu RF auau-tiketike, e tutuki ai ngā hiahia o ngā teihana tūāpapa 5G mō te mana nui me te mate iti.
3. Ngā Pūnaha Hiko Ahumahi: I roto i ngā pūwhakawhiti hiko o te rā me ngā whatunga atamai, ka taea e te papa 12-inihi te tu atu i ngā ngaohiko teitei ake me te whakaiti i te ngaronga hiko.
4. Ngā Hikohiko Kaihoko: Tērā pea ka whakamahia e ngā rihi tere me ngā pūtake hiko pokapū raraunga o muri mai ngā papa SiC 12-inihi hei whakatutuki i te rahi kiato me te pai ake o te mahi.
Ngā Ratonga a XKH
He tohunga mātou ki ngā ratonga tukatuka ritenga mō ngā papa SiC 12-inihi (ngā papa silicon carbide 12-inihi), tae atu ki:
1. Tapatapa me te Oro: He tukatuka papa iti-kino, he papatahi hoki i whakaritea kia rite ki ngā hiahia o te kiritaki, kia mau ai te mahi a te taputapu.
2. Tautoko Tipu Epitaxial: Ngā ratonga wafer epitaxial kounga teitei hei whakateretere i te hanga maramara.
3. Tauira Tauira Iti: Tautoko ana i te whakamana R&D mō ngā whare rangahau me ngā umanga, ka whakapoto i ngā huringa whanaketanga.
4. Tohutohu Hangarau: Ngā otinga katoa mai i te whiriwhiri rauemi ki te arotau tukanga, hei āwhina i ngā kiritaki ki te wikitoria i ngā wero tukatuka SiC.
Ahakoa mō te hanga papatipu, mō te whakaritenga motuhake rānei, ka hangai ā mātou ratonga papa SiC 12-inihi ki ngā hiahia o tō kaupapa, ka whakamana i ngā whanaketanga hangarau.
