12 Inihi te whānui o te papa SiC 300mm te matotoru 750μm Ka taea te whakarite i te momo 4H-N

Whakaahuatanga Poto:

I tētahi wā tino nui o te nekehanga o te umanga haurua-ira ki ngā otinga whai hua ake, kiato ake hoki, kua tino hurihia te whenua e te putanga mai o te papa SiC 12-inihi (papa silicon carbide 12-inihi). Ki te whakatauritea ki ngā whakaritenga tuku iho 6-inihi me te 8-inihi, ko te painga nui o te papa 12-inihi ka whakanui ake i te maha o ngā maramara e whakaputaina ana mō ia wafer neke atu i te whā ngā wā. Hei tāpiri, ka whakaitihia te utu mō ia papa SiC 12-inihi mā te 35-40% ki te whakatauritea ki ngā papa 8-inihi tuku iho, he mea nui tēnei mō te whānui o te whakamahinga o ngā hua whakamutunga.
Mā te whakamahi i tā mātou hangarau tipu kawe mamaoa motuhake, kua tutuki i a mātou te mana whakahaere matua o te ahumahi mō te kiato o te nekehanga i roto i ngā tioata 12-inihi, e whakarato ana i tētahi turanga rauemi tino pai mō te hanga taputapu i muri mai. He mea tino nui tēnei whanaketanga i waenganui i te korenga o ngā maramara o te ao i tēnei wā.

Kei te piki haere te whakamahi a ngā taputapu hiko matua i roto i ngā mahi o ia rā—pērā i ngā teihana utu tere EV me ngā teihana turanga 5G—i tēnei papa nui. Ina koa i roto i ngā taiao mahi pāmahana teitei, ngaohiko teitei, me ētahi atu taiao mahi uaua, he pai ake te pumau o te papa SiC 12-inihi ki te whakataurite ki ngā rauemi e hangai ana ki te silicon.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Ngā tawhā hangarau

Whakatakotoranga Papatūāpapa Silicon Carbide (SiC) 12 inihi
Tau		Te Hanganga ZeroMPD Taumata (Taumata Z)	Te Hanga Paerewa Taumata (Taumata P)		Tauira Tauira (Kōeke D)
Diameter		3 0 0 mm~1305mm
Matotoru	4H-N	750μm±15 μm	750μm±25 μm
	4H-SI	750μm±15 μm	750μm±25 μm
Te Aronga o te Wafer		Tuaka ki waho: 4.0° ki te <1120 >±0.5° mō te 4H-N, Kei runga i te tuaka: <0001>±0.5° mō te 4H-SI
Te Kīanga o te Paipa Maikoro	4H-N	≤0.4cm-2	≤4cm-2		≤25cm-2
	4H-SI	≤5cm-2	≤10cm-2		≤25cm-2
Ātete	4H-N	0.015~0.024 Ω·cm			0.015~0.028 Ω·cm
	4H-SI	≥1E10 Ω·cm			≥1E5 Ω·cm
Te whakatakotoranga papatahi tuatahi		{10-10} ±5.0°
Roa Papatahi Tuatahi	4H-N	Kāore he
	4H-SI	Te kokoru
Te Whakakore i te Tapa		3 mm
LTV/TTV/Pīkoko/Whā		≤5μm/≤15μm/≤35 μm/≤55 μm			≤5μm/≤15μm/≤35 □ μm/≤55 □ μm
Te taratara		Pōrana Ra≤1 nm
		CMP Ra≤0.2 nm			Ra≤0.5 nm
Ngā Kapiti o te Tapa i te Mārama Kaha Rawa Pereti Hex mā te Mārama Kaha Teitei Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei Ngā Whakaurunga Waro Tirohanga Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei		Kāore Te horahanga tāpiri ≤0.05% Kāore Te horahanga tāpiri ≤0.05% Kāore			Te roa tāpiri ≤ 20 mm, te roa takitahi ≤2 mm Te horahanga tāpiri ≤0.1% Te horahanga tāpiri ≤3% Te horahanga tāpiri ≤3% Te roa tāpiri ≤1 × te diameter o te angaanga
Ngā Maramara Tapa Mā te Mārama Kaha Teitei		Kāore i whakaaetia te whānui me te hohonu ≥0.2mm			7 e whakaaetia ana, ≤1 mm ia
(TSD) Te nekehanga o te tīwiri miro		≤500 cm-2		Kāore he
(BPD) Te nekehanga o te papa turanga		≤1000 cm-2		Kāore he
Te Parahanga o te Mata Silicon e te Mārama Kaha Teitei		Kāore
Tākai		Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei
Ngā Tuhipoka:
1 Ka pā ngā herenga hapa ki te mata papatahi katoa engari ko te wāhi aukati taha. 2Me tirotiro ngā karawarawa ki te mata o Si anake. 3 Nō ngā anga whakairo KOH anake ngā raraunga nekehanga.

Ngā Āhuatanga Matua

1. Te Kaha Whakaputa me ngā Painga Utu: Ko te whakaputanga papatipu o te papa SiC 12-inihi (papa silicon carbide 12-inihi) he tohu i tētahi wā hou i roto i te hanga semiconductor. Ko te maha o ngā maramara e taea te tiki mai i tētahi wafer kotahi e eke ana ki te 2.25 ngā wā i ērā o ngā papa 8-inihi, e akiaki tika ana i te pikinga o te whai huatanga o te whakaputanga. E whakaatu ana ngā urupare a ngā kiritaki kua whakaitihia ngā utu whakaputa o ā rātou waeine hiko mā te 28% nā te tango i ngā papa 12-inihi, ā, ka hangaia he painga whakataetae nui i roto i te mākete whakataetae nui.
2. Ngā Āhuatanga Ā-tinana Tino Pai: Kei te papa SiC 12-inihi te whiwhinga i ngā painga katoa o te rauemi silicon carbide - ko tōna kawe wera e 3 ngā wā i tō te silicon, ko tōna kaha pakaru e 10 ngā wā i tō te silicon. Mā ēnei āhuatanga ka taea e ngā taputapu e hangai ana ki ngā papa 12-inihi te mahi pumau i roto i ngā taiao pāmahana teitei neke atu i te 200°C, e tino pai ai mō ngā tono uaua pēnei i ngā waka hiko.
3. Hangarau Maimoatanga Mata: Kua whakawhanakehia e mātou tētahi tukanga whakakanapa matū hou (CMP) mō ngā papa SiC 12-inihi, kia tutuki ai te papatahi o te mata taumata-atomika (Ra<0.15nm). Mā tēnei putanga hou ka ea te wero o te ao mō te maimoatanga mata papa silicon carbide whānui-rahi, ka whakakorea ngā arai mō te tipu epitaxial kounga teitei.
4. Te Mahi Whakahaere Wera: I roto i ngā mahi whaihua, he tino kaha te tuku wera o ngā papa SiC 12-inihi. E whakaatu ana ngā raraunga whakamātautau i raro i te kaha kotahi, ka mahi ngā taputapu e whakamahi ana i ngā papa 12-inihi i ngā pāmahana 40-50°C iti iho i ngā taputapu e hangai ana ki te silicon, ā, ka roa ake te ora o ngā taputapu.

Ngā Taupānga Matua

1. Pūnaha Waka Pūngao Hou: Kei te hurihia e te papa SiC 12-inihi (papa silicon carbide 12-inihi) te hoahoanga hiko o ngā waka hiko. Mai i ngā rihi o runga (OBC) ki ngā inverters puku matua me ngā pūnaha whakahaere pākahiko, ko ngā whakapainga whai hua e kawea mai ana e ngā papa 12-inihi ka whakanui ake i te whānuitanga o te waka mā te 5-8%. E whakaatu ana ngā pūrongo mai i tētahi kaihanga waka matua ko te tango i ā mātou papa 12-inihi i whakaiti i te ngaronga pūngao i roto i tā rātou pūnaha utu tere mā te 62% whakamiharo.
2. Rāngai Pūngao Whakahou: I roto i ngā teihana hiko photovoltaic, ko ngā inverters e hangai ana ki ngā papa SiC 12-inihi ehara i te mea he iti ake ngā āhua engari ka eke hoki ki te pai o te tahuritanga neke atu i te 99%. Ina koa i roto i ngā āhuatanga whakaputanga tohatoha, ko te tikanga o tēnei pai teitei he penapena ā-tau o ngā rau mano yuan i roto i ngā mate hiko mō ngā kaiwhakahaere.
3. Aunoatanga Ahumahi: Ko ngā kaitahuri auau e whakamahi ana i ngā papa 12-inihi e whakaatu ana i te mahi tino pai i roto i ngā karetao ahumahi, ngā taputapu mīhini CNC, me ētahi atu taputapu. Ko ō rātou āhuatanga whakawhiti auau teitei ka whakapai ake i te tere urupare motuka mā te 30% me te whakaiti i te pokanoa hikohiko ki te hautoru o ngā otinga tuku iho.
4. Auahatanga Hiko Kaihoko: Kua tīmata ngā hangarau utu tere waea atamai o te whakatupuranga hou ki te whakamahi i ngā papa SiC 12-inihi. E matapaetia ana ka huri katoa ngā hua utu tere neke atu i te 65W ki ngā otinga silicon carbide, me ngā papa 12-inihi e puta ake ana hei whiringa utu-pai rawa atu.

Ngā Ratonga Whakaritenga XKH mō te Papa SiC 12-inihi

Hei whakatutuki i ngā whakaritenga motuhake mō ngā papa SiC 12-inihi (ngā papa silicon carbide 12-inihi), ka tukuna e XKH te tautoko ratonga whānui:
1. Whakaritenga Matotoru:
Ka whakaratohia e mātou he papa 12-inihi i roto i ngā momo matotoru tae atu ki te 725μm hei whakatutuki i ngā hiahia tono rerekē.
2. Te kukū o te doping:
Ka tautokohia e tā mātou mahi hanga ngā momo kawe hiko maha tae atu ki ngā papa momo-n me ngā papa momo-p, me te whakahaere ātete tika i te awhe o te 0.01-0.02Ω·cm.
3. Ratonga Whakamātautau:
Me ngā taputapu whakamātautau taumata-wafer katoa, ka whakaratohia e mātou ngā pūrongo tirotiro katoa.
E mārama ana a XKH he rerekē ngā whakaritenga a ia kiritaki mō ngā papa SiC 12-inihi. Nō reira, ka tukuna e mātou he tauira mahi tahi pakihi ngāwari hei whakarato i ngā otinga tino whakataetae, ahakoa mō:
· Ngā tauira R&D
· Ngā hokonga whakaputa nui
Mā ā mātou ratonga ritenga ka taea e mātou te whakatutuki i ō hiahia hangarau me ō hiahia whakaputa mō ngā papa SiC 12-inihi.