Wafer Hapaira 12 Inihi mō te Hanganga Ārahi-rahi Teitei

He Anga Hapaira 12 Inihi mō te Hanganga Ārahi-rahi Teitei Whakaahua Matua

Whakaahuatanga Poto:

Kua hangaia te anga hapaira 12 inihi hei whakatutuki i te hiahia e tipu haere ana mō te hanga haurua-rahi, te whakaputanga-teitei me te optoelectronic. I te mea kei te piki haere tonu ngā hoahoa taputapu me te neke haere o ngā raina whakaputa ki ngā whakatakotoranga anga hapaira nui ake, ka tukuna e ngā papa hapaira me ngā diameter tino nui ngā painga mārama i roto i te hua, te arotautanga hua, me te whakahaere utu.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

He kupu whakataki mō te anga hapaira 12 inihi

He mea hanga mai i te Al₂O₃ kotahi-kiriata parakore-teitei, ka whakakotahi ā mātou papa sapphire 12 inihi i te kaha miihini pai rawa atu, te pumau wera, me te kounga o te mata. Mā te tipu tioata kua arotauhia me te tukatuka papa tika, ka tukuna e ēnei papa te mahi pono mō ngā tono LED matatau, GaN, me ngā tono semiconductor motuhake.

Ngā Āhuatanga Rauemi

E mōhiotia whānuitia ana te hapaira (te waikura konumohe karaihe kotahi, Al₂O₃) mō ōna āhuatanga ā-tinana me te matū tino pai. Ka riro i ngā papa hapaira 12 inihi ngā painga katoa o te rauemi hapaira, ā, ka nui ake te horahanga o te mata e taea ai te whakamahi.

Ko ngā āhuatanga matua o te rauemi ko:

Tino pakeke me te ātete ki te kakahu
He tino pai te pumau o te wera me te teitei o te ira rewa
He ātete matū pai rawa atu ki ngā waikawa me ngā kawakore
Te māramatanga whatu teitei mai i ngā roangaru UV ki te IR
Ngā āhuatanga whakamarumaru hiko tino pai

Nā ēnei āhuatanga e pai ai ngā anga hapaira 12 inihi mō ngā taiao tukatuka uaua me ngā tukanga hanga haurua-ira pāmahana teitei.

Tukanga Hanga

Ko te hanga i ngā anga hapaira 12 inihi te rahi e hiahiatia ana he tipu tioata matatau me ngā hangarau tukatuka tino tika. Ko te tukanga hanga noa ko:

Te Tiputanga o te Karaihe Kotahi
Ka whakatipuria ngā tioata hapaira tino parakore mā te whakamahi i ngā tikanga matatau pēnei i te KY me ētahi atu hangarau tipu tioata whānui-rahi, kia rite ai te takotoranga tioata me te iti o te ahotea ā-roto.
Te Hanga me te Tapahi i te Kiriata
He tino tika te hanga o te konganuku hapaira, ā, he tapatapahia kia rite ki ngā angiangi 12 inihi te whānui mā te whakamahi i ngā taputapu tapahi tino tika hei whakaiti i te kino o raro i te mata.
Te Whakakoi me te Whakakanapa
Ka whakamahia ngā tukanga whakapiri maha-taahiraa me te whakakanapa matū (CMP) hei whakatutuki i te taratara o te mata, te papatahi, me te ōritetanga o te matotoru.
Te Horoi me te Tirotiro
Ka horoia rawatia ia anga hapaira 12 inihi te rahi, ka tirotirohia hoki, tae atu ki te kounga o te mata, te TTV, te kopere, te whenu, me te tātari hapa.

Ngā tono

E whakamahia whānuitia ana ngā papa hapaira 12 inihi i roto i ngā hangarau matatau me ngā hangarau hou, tae atu ki:

Ngā papa LED kaha-teitei me te kanapa-teitei
Ngā taputapu hiko e hangai ana ki te GaN me ngā taputapu RF
Kawe taputapu haurua-arahi me ngā papa whakamahana
Ngā matapihi whatu me ngā wāhanga whatu whānui
Te takai haurua-ā-ira matatau me ngā kaikawe tukanga motuhake

Mā te whānui o te diameter ka nui ake te kaha whakaputa me te pai ake o te utu i roto i te whakaputa papatipu.

Ngā Painga o ngā Wafer Hapaira 12 Inihi

He nui ake te wāhi whakamahi mō te putanga taputapu teitei ake mō ia anga
Te whakapai ake i te ōritetanga me te ōritetanga o te tukanga
He iti ake te utu mō ia taputapu i roto i te whakaputanga nui
He kaha ā-mīhini tino pai mō te whakahaere i ngā rahi nui
Ngā whakaritenga whakaritenga mō ngā tono rerekē

Ngā Kōwhiringa Whakaritenga

Ka tukuna e mātou he whakaritenga ngāwari mō ngā papa sapphire 12 inihi, tae atu ki:

Te whakatakotoranga karaihe (papa-C, papa-A, papa-R, me ētahi atu)
Te ātete matotoru me te diameter
Te whakakanapa taha-kotahi, taha-rua rānei
Te hoahoa o te taha me te anga whakarara
Ngā whakaritenga mō te taratara me te papatahi o te mata

Tawhā	Whakatakotoranga	Ngā Tuhipoka
Te Diameter o te Wafer	12 inihi (300 mm)	Wafere whānui-rahi paerewa
Rauemi	Hapira karaihe kotahi (Al₂O₃)	Teitei-parakore, te taumata hiko/whatu
Te Tirohanga o te Karaihe	Papa-C (0001), Papa-A (11-20), Papa-R (1-102)	Kei te wātea ngā aronga whiriwhiri
Matotoru	430–500 μm	Kei te wātea te matotoru ritenga ina tonoa
Manawanui Matotoru	±10 μm	Te manawanui pakari mō ngā taputapu matatau
Rerekētanga Matotoru Katoa (TTV)	≤10 μm	Ka whakarite kia ōrite te tukatuka puta noa i te wafer
Kopere	≤50 μm	I inehia ki runga i te anga katoa
Wāwhati	≤50 μm	I inehia ki runga i te anga katoa
Whakaotinga Mata	Kotahi-taha whakakanapa (SSP) / Takirua-taha whakakanapa (DSP)	Mata kounga teitei
Te Pākari o te Mata (Ra)	≤0.5 nm (kua orohia)	Te maeneene taumata-atomika mō te tipu epitaxial
Kōtaha Tapa	Tapa porowhita / Tapa porowhita	Hei ārai i te pakaru i te wā e whakahaeretia ana
Te Tika o te Aronga	±0.5°	Ka whakarite kia tika te tipu o te paparanga epitaxial
Te Kīanga o te Koha	<10 henimita⁻²	I inehia mā te tirotiro whatu
Papatahi	≤2 μm / 100 mm	Ka whakarite kia ōrite te hanga o te lithography me te tipu epitaxial
Te ma	Akomanga 100 – Akomanga 1000	Hototahi ki te rūma ma
Tukunga Whatu	>85% (UV–IR)	Ka whakawhirinaki ki te roangaru me te matotoru

Ngā Pātai Auau mō te Wafer Hapaira 12 Inihi

Q1: He aha te matotoru paerewa o tētahi anga hapaira 12 inihi te whānui?
A: Ko te matotoru paerewa kei waenga i te 430 μm ki te 500 μm. Ka taea hoki te whakaputa i ngā matotoru ritenga kia rite ki ngā hiahia o te kiritaki.

Q2: He aha ngā whakatakotoranga karaihe e wātea ana mō ngā anga hapaira 12 inihi?
A: Kei a mātou ngā aronga C-plane (0001), A-plane (11-20), me R-plane (1-102). Ka taea te whakarite i ētahi atu aronga i runga i ngā whakaritenga motuhake o te taputapu.

Q3: He aha te rerekētanga matotoru katoa (TTV) o te papa angiangi?
A: Ko te TTV o ā mātou anga hapaira 12 inihi te rahi he ≤10 μm, e whakarite ana i te ōritetanga puta noa i te mata o te anga anga mō te hanga taputapu kounga teitei.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.