Wafer 12-Inihi 4H-SiC mō ngā karāhe AR

Whakaahuatanga Poto:

TePapa hiko 4H-SiC (karaipiura silicon) 12-inihi te roahe anga haurua-rahi-rahi te whānui i whakawhanakehia mō te whakatupuranga e whai ake neingaohiko teitei, mana teitei, auau teitei, me te pāmahana teiteite hanga hikohiko mana. Te whakamahi i ngā painga ā-roto o te SiC—pērā i tete papa hiko tino nui, te tere tere o te nekenekehanga irahiko kua mākū, kawe wera teitei, mete pumau matū tino pai—kua whakatūria tēnei papa hei rauemi tūāpapa mō ngā tūāpapa taputapu hiko matatau me ngā tono papa angiangi whānui e puta ake ana.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

Tirohanga Whānui

Hei whakatutuki i ngā whakaritenga ā-umanga mōte whakaiti i ngā utu me te whakapai ake i te hua, te whakawhiti mai i te ao whānuiSiC 6–8 inihi to SiC 12-inihiE mōhiotia whānuitia ana ngā papa hei huarahi matua. He nui ake te wāhi whakamahi o te wafer 12-inihi i ngā whakatakotoranga iti ake, e āhei ai te putanga mate teitei ake mō ia wafer, te whakamahinga wafer pai ake, me te whakaiti i te ōwehenga ngaronga taha—nā reira e tautoko ana i te arotautanga o te utu hanga puta noa i te mekameka tuku.

Ara Whakatipu Karaihe me te Hanga Wafer

Ka hangaia tēnei papa hiko 4H-SiC 12-inihi mā roto i tētahi mekameka tukanga katoa e hipoki ana.te whakawhānui i te purapura, te tipu o te karaihe kotahi, te whakapūpū, te angiangi, me te whakakanapa, e whai ana i ngā tikanga hanga haurua-ā-ira paerewa:

Te whakawhānui i te purapura mā te Kawe Kohu Tinana (PVT):
He 12-inihiKiriata purapura 4H-SiCka whiwhihia mā te whakawhanui i te diameter mā te whakamahi i te tikanga PVT, e āhei ai te tipu o ngā boule 4H-SiC 12-inihi te roa.
Te tipu o te tioata kotahi 4H-SiC e ārahi ana:
Ārahin⁺ 4H-SiCKa tutuki te tipu o te tioata kotahi mā te whakauru i te hauota ki roto i te taiao tipu hei whakarato i te tāpiringa kaitakoha kua whakahaeretia.
Te hanga anga (te tukatuka haurua-ā-ira paerewa):
I muri i te hanga boule, ka hangaia ngā wafers māte tapahi laser, ā, whai muri kote whakangawari, te whakakanapa (tae atu ki te whakaotinga taumata-CMP), me te horoi.
Ko te matotoru o te paparanga hua ko560 µm.

Kua hangaia tēnei huarahi whakauru hei tautoko i te tipu pumau i te diameter tino nui, me te pupuri tonu i te pono o te karaihe me ngā āhuatanga hiko ōrite.

Hei whakarite i te aromatawai kounga whānui, ka tautuhia te papa mā te whakamahi i te huinga o ngā taputapu tirotiro hanganga, whatu, hiko, me ngā hapa:

Te mātakitakitanga Raman (mahere rohe):te manatoko i te ōritetanga o te momo momo puta noa i te wafer
Te karu tirotiro whatu aunoa katoa (mahere anga):te kimi me te aromatawai tatauranga o ngā paipa iti
Te ine ātete kore-pā (mahere anga):te tohatoha ātete i runga i ngā pae ine maha
Te whakarara hihi-X taumira teitei (HRXRD):aromatawai i te kounga tioata mā te ine i te pihi ru
Tirotiro i te nekehanga o te wāhi (whai muri i te whakairo whiriwhiri):aromatawai i te kiato me te āhua o te nekehanga (me te aro nui ki ngā nekehanga tīwiri)

wafer sic 10

Ngā Hua Mahi Matua (Māngai)

E whakaatu ana ngā hua whakaahuatanga he kaha te kounga o te rauemi o te papa hiko 4H-SiC 12-inihi puta noa i ngā tawhā matua:

(1) Te parakore me te ōritetanga o te momo momo

E whakaatu ana ngā mahere o te rohe o Raman100% te kapinga momo-maha 4H-SiCputa noa i te papa raro.
Kāore i kitea he whakaurunga o ētahi atu momo maha (hei tauira, 6H, 15R rānei), e tohu ana i te mana whakahaere momo maha tino pai i te tauine 12-inihi.

(2) Te mātotoru o te paipa iti (MPD)

E tohu ana te mahere karuārai-tauine wafer i tete mātotoru o te paipa iti < 0.01 cm⁻², e whakaata ana i te pehi whai hua o tēnei kāwai hapa e whakawhāiti ana i te taputapu.

(3) Te ātete hiko me te ōritetanga

E whakaatu ana te mahere ātete kore-pā (ine 361-ira):
- Awhe ātete:20.5–23.6 mΩ·cm
- Ātete toharite:22.8 mΩ·cm
- Te kore-taurite:< 2%
  E whakaatu ana ēnei hua i te ōritetanga pai o te whakaurunga o te dopant me te ōritetanga hiko pai i roto i te tauine wafer.

(4) Kounga tioata (HRXRD)

Ngā inenga o te pihi wiri HRXRD i runga i te(004) whakaata, i tangohia ie rima ngā tohui te ahunga o te diameter o te wafer, whakaaturia:
- He tihi kotahi, tata rite te āhua, kāore he whanonga tihi maha, e tohu ana i te korenga o ngā āhuatanga rohe kōpaka koki-iti.
- Te toharite o te FWHM:20.8 āwhata (″), e tohu ana i te kounga tioata teitei.

(5) Te mātotoru o te nekehanga tīwiri (TSD)

I muri i te whakairo whiriwhiri me te matawai aunoa, ko tete matotoru o te nekehanga o te tīwirika inehia ki2 henimita⁻², e whakaatu ana i te TSD iti i te tauine 12-inihi.

Whakatau mai i ngā hua o runga ake nei:
E whakaatu ana te papa rarohe tino pai te parakore o te momo 4H, he iti rawa te matotoru o te paipa moroiti, he iti te ātete pumau me te ōrite, he kounga tioata kaha, ā, he iti te matotoru o te nekehanga tīwiri., e tautoko ana i tōna pai mō te hanga taputapu matatau.

Uara me ngā Painga o te Hua

Ka taea te nekenekehanga hanga SiC 12-inihi
E whakarato ana i tētahi tūāpapa paparanga kounga teitei e hangai ana ki te mahere ara o te umanga ki te hanga anga wafer SiC 12-inihi.
He iti te mātotoru o ngā hapa hei whakapai ake i te hua me te pono o te taputapu
Mā te iti rawa o te mātotoru o ngā paipa iti me te iti o te mātotoru o ngā tīwiri ka āwhina i te whakaiti i ngā tikanga ngaronga hua kino me te tawhā.
He tino ōrite te hiko mō te pumau o te tukanga
Mā te tohatoha ātete kikī ka pai ake te ōritetanga o te pūrere wafer-ki-wafer me te pūrere wafer-i roto.
He kounga teitei o te tioata e tautoko ana i te epitaxy me te tukatuka taputapu
Ko ngā hua HRXRD me te ngaro o ngā tohu rohe kōpaka iti-koki e tohu ana i te kounga rauemi pai mō te tipu epitaxial me te hanga taputapu.

Ngā Taupānga Whāinga

Ka taea te whakamahi i te papa hiko 4H-SiC 12-inihi hei:

Ngā taputapu hiko SiC:Ngā MOSFET, ngā diode ārai Schottky (SBD), me ngā hanganga e pā ana
Ngā waka hiko:ngā kaitahuri hiko matua, ngā rihi hiko o runga (OBC), me ngā kaitahuri DC-DC
Pūngao whakahou me te whatunga:ngā kaitahuri photovoltaic, ngā pūnaha rokiroki pūngao, me ngā kōwae whatunga atamai
Ngā hikohiko mana ahumahi:ngā pūhiko hiko tino whai hua, ngā puku motuka, me ngā kaitahuri ngaohiko teitei
Ngā whakaritenga mō ngā papa whenua nui e puta ake ana:te takai matatau me ētahi atu āhuatanga hanga semiconductor hototahi ki te 12-inihi

Ngā Pātai Auau – Papaaho Arataki 4H-SiC 12-Inihi

P1. He aha te momo papa SiC o tēnei hua?

A:
He hua tēneiPapa whakarewa kotahi-kiritaki 4H-SiC 12-inihi (momo-n⁺), i whakatōkia mā te tikanga Kawe Kohu Tinana (PVT) ā, i tukatukahia mā te whakamahi i ngā tikanga whakapūmau haurua-haurua paerewa.

P2. He aha i whiriwhiria ai te 4H-SiC hei momo momo?

A:
Ko te 4H-SiC te huinga tino pai ote nekehanga hiko teitei, te āputa whānui, te āpure pakaru teitei, me te kawe werai roto i ngā momo SiC e pā ana ki te arumoni. Koinei te momo matua e whakamahia ana mōngā taputapu SiC ngaohiko teitei me te mana teitei, pērā i ngā MOSFET me ngā diode Schottky.

P3. He aha ngā painga o te neke mai i ngā papa SiC 8-inihi ki te 12-inihi?

A:
Ka whakaratohia e te anga SiC 12-inihi:

He mea nuihe nui ake te horahanga mata e taea te whakamahi
Te putanga mate teitei ake mō ia wafer
Te ōwehenga taha-ngaronga iti iho
Hototahitanga kua whakapaitia kingā raina hanga haurua-ā-ira 12-inihi matatau

Ka whai wāhi tika ēnei āhuatanga kiutu iti ake mō ia taputapume te teitei ake o te whai huatanga o te hanga.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.