Wāhanga Pūmau-Hau SiC Tino-Tika

Whakaahuatanga Poto:

I te whanaketanga tonu o te umanga haurua-irahiko, me piki ake te mahi a ngā taputapu tukatuka me te tirotiro. I runga i te tohungatanga whānui ki te whakahaere nekehanga me te tūnga taumata-nanomita, kua whakawhanakehia e mātou he atamira kawe hau tino tika momo-H.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

Tirohanga Whānui

I hangaia ki te hanganga uku silicon carbide (SiC) kua arotauhia ki ngā huānga mutunga kore me te hangarau kawe hau kua whakatikatikaina, ka tukuna e te atamira te tino tika, te pakari, me te urupare hihiri. He tino pai mō:

Te tukatuka me te tirotiro i te haurua-arahi
Te hanga moroiti/nano me te ine ine
Te tapahi me te whakakanapa i te rere ine-nanomita
Matawai tika tere-teitei

Ngā Āhuatanga Matua

Aratohu whāriki-hau SiCmō te tino pakari me te tika
Ngā hihiri teitei: tere tae atu ki te 1 m/s, whakaterenga tae atu ki te 4 karamu, tere te taunga
Tuaka-Y takirua-pukuka whakarite i te kaha kawenga teitei me te pumau
Ngā kōwhiringa whakakōwaea: te whatu whatu, te ine whakawhiti laser rānei
Te tika o te tūnga: ±0.15 µm;te āheinga ki te whakahoki anō: ±75 nm
Te ara taura kua arotauhiamō te hoahoa ma, me te pono mō te wā roa
Ngā whirihoranga whakaritengamō ngā hiahia motuhake o te tono

Hoahoa Tino Tika me te Hoahoa Puku-Tika, Kore-Papa

Anga Ukume SiC: ~5× te pakari o te koranu konumohe me te ~5× te iti ake o te whakawhānui wera, e whakarite ana i te pumau tere-tiketike me te pakari wera.
Te Utu-Haurangi UtuMā te hoahoa motuhake ka whakarei ake i te pakari, te kaha kawenga, me te pumau o te nekehanga.
Mahi HihiriE tautoko ana i te tere 1 m/s me te whakaterenga 4 karamu, he mea tino pai mō ngā tukanga whakaputa tere.
Whakaurunga Kore-MaeneeneHototahi ki ngā pūnaha wehe wiri, ngā wāhanga hurihuri, ngā kōwae honga, me ngā papa whakahaere wafer.
Whakahaere Taura: Mā te pūtoro piko whakahaere ka whakaitihia te ahotea mō te roa o te ora mahi.

Mōta Raina Kore-matuaNekehanga maeneene, kāore he kaha whakakorikori.
Puku Maha-MīhiniMā te whakatakotoranga o te motuka papa-uta ka pai ake te tika, te papatahi, me te tika o te koki.
Wehenga WeraKua wehea ngā motuka mai i te hanganga atamira; he kōwhiringa te whakamatao hau, te whakamatao wai rānei mō ngā huringa mahi-teitei.

Ngā Whakatakotoranga

Tauira	400-400	500-500	600-600
Ngā tuaka	X (matawai) / Y (taahiraa)	X (matawai) / Y (taahiraa)	X (matawai) / Y (taahiraa)
Haere (mm)	400 / 400	500 / 500	600 / 600
Te tika (μm)	±0.15	±0.2	±0.2
Te āheinga ki te tāruarua (nm)	±75	±100	±100
Taumira (nm)	0.3	0.3	0.3
Tere Mōrahi (m/s)	1	1	1
Whakaterenga (g)	4	4	4
Te tika (μm)	±0.2	±0.3	±0.4
Te pumau (nm)	±5	±5	±5
Utaina Mōrahi (kg)	20	20	20
Pitch/Roll/Yaw (arc-sec)	±1	±1	±1

Ngā Tikanga Whakamātautau:

Te tuku hau: ma, maroke; te ira tomairangi ≤ 0°F; te tātari matūriki ≤ 0.25 μm; te hauota rānei 99.99%.
I inehia te tika i te 25 mm i runga ake i te pokapū atamira i te 20±1 °C, 40–60% RH.

Ngā tono

Te tuhi ā-irahiko, te tirotiro, me te whakahaere i te wafer
Te hanga moroiti/nano me te ine tika
Te hanga karu matatau me te whakawhitiwhiti whakaaro
Te rererangi me te rangahau pūtaiao matatau

Ngā Pātai Auau – Te Wāhanga Whakapūmau Hau Silicon Carbide

1. He aha te atamira e mau ana i te hau?

Ka whakamahia e te atamira hau-ā-rangi he kiriata angiangi o te hau pēhanga i waenganui i te atamira me te ara ārahi hei whakaratokore-waku, kore-pakaru, ā, he tino maeneene te nekehanga. He rerekē ki ngā peera miihini tuku iho, ka whakakorea te paheke-piri, ka tukuna he tika taumata-nanomita, ā, ka tautoko i te pono mō te wā roa.

2. He aha i whakamahia ai te silicon carbide (SiC) mō te hanganga atamira?

Te pakari teitei: ~5× te rahi o te konumohe koranu, e whakaiti ana i te rerekētanga i te wā o te nekehanga hihiri.
Te whakawhānui wera iti: ~5× iti iho i te konumohe, e mau tonu ana te tika i raro i ngā rerekētanga pāmahana.
MamaHe iti ake te mātotoru ki te whakaritea ki te maitai, e āhei ai te mahi tere me te tere tere.
Te pumau tino paiHe tino pai te whakaiti me te pakari mō te tino tika o te tūnga.

3. Me whakahinuhinu, me tiaki rānei te atamira?

Kāore e hiahiatia he hinu whakahinuhinu tuku iho nā te mea kei reirakāore he pa ā-mīhiniKo ngā mahi tiaki e taunakitia ana ko:

Te tukuhau kōpeke ma, maroke, hauota rānei
Te tirotiro ā-wā i ngā tātari me ngā whakamaroke
Te aroturuki i ngā taura me ngā pūnaha whakamatao

4. He aha ngā whakaritenga mō te tuku hau?

Te pūwāhi tomairangi: ≤ 0 °F (≈ –18 °C)
Tātari matūriki: ≤ 0.25 μm
Hau ma, hau maroke, hauota parakore 99.99% rānei
Pēhanga pumau me te iti o te piki me te heke

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.