Te Waferi Silikoni Panipani-Metara Ti/Cu (Titanium/Parahi)
Kauwhata Taipitopito
Tirohanga Whānui
Tō mātouNgā papa angiangi silicon kua pania ki te konganuku Ti/Cuhe paparanga silicon kounga teitei (he karāhe/quartz rānei hei whiriwhiri) kua pania ki tepaparanga piri o te titaniumme tepaparanga arataki parahite whakamahite pupuhi magnetron paerewaKa whakapai ake te paparanga Ti i te piri me te pumau o te tukanga, ko te paparanga Cu ia he mata ōrite, he iti te ātete, he pai mō te hononga hiko me te hanga moroiti i raro iho.
I hangaia mō ngā mahi rangahau me ngā mahi whakamātautau, e wātea ana ēnei anga i roto i ngā rahi me ngā awhe ātete maha, me te whakaritenga ngāwari mō te matotoru, te momo papa, me te whirihoranga paninga.
Ngā Āhuatanga Matua
-
Te piri kaha me te pono: Ka whakarei ake te paparanga here Ti i te piri o te kiriata ki te Si/SiO₂, ā, ka whakapai ake i te pakari o te whakahaere
-
Mata kawe hiko teitei: He tino pai te mahi hiko a te paninga Cu mō ngā hoapā me ngā hanganga whakamātautau
-
Whānuitanga whakaritenga: te rahi o te anga, te ātete, te whakatakotoranga, te matotoru o te papa, me te matotoru o te kiriata e wātea ana i runga i te tono
-
Ngā papa kua rite mō te tukatuka: hototahi ki ngā rerengamahi taiwhanga me ngā hanganga hanga noa (te whakaahua, te hanga whakakikorua hiko, te ine ine, me ētahi atu)
-
Rauemi raupapa e wātea anaHaunga a Ti/Cu, kei a mātou anō ngā anga whakarewa Au, Pt, Al, Ni, Ag
Hanganga me te Whakatakotoranga Noa
-
PurangaPapa raro + paparanga piri Ti + paparanga paninga Cu
-
Tukanga paerewa: Te pupuhi a te Magnetron
-
Ngā tukanga whiriwhiriTe mimiti wera / Te whakakikorua hiko (mō ngā whakaritenga Cu matotoru ake)
Ngā Āhuatanga Hangarau o te Karāhe Quartz
| Taonga | Ngā Kōwhiringa |
|---|---|
| Rahi o te anga | 2", 4", 6", 8"; 10×10 mm; ngā rahi tapatapahi ritenga |
| Momo kawe hiko | Momo-P / Momo-N / Ātete-teitei ā-roto (Un) |
| Te Whakatakotoranga | <100>, <111>, me ētahi atu. |
| Ātete | <0.0015 Ω·cm; 1–10 Ω·cm; >1000–10000 Ω·cm |
| Matotoru (µm) | 2": 200/280/400/500; 4": 450/500/525; 6": 625/650/675; 8": 650/700/725/775; ritenga |
| Ngā rauemi papa | Hiraka; he kiripaka whiriwhiri, he karāhe BF33, me ētahi atu. |
| Te matotoru o te kiriata | 10 nm / 50 nm / 100 nm / 150 nm / 300 nm / 500 nm / 1 µm (ka taea te whakarite) |
| Ngā kōwhiringa kiriata whakarewa | Ti/Cu; hoki Au, Pt, Al, Ni, Ag e wātea ana |
Ngā tono
-
Ngā papa whakapā me ngā papa kawe hiko ohmicmō te R&D taputapu me te whakamātautau hiko
-
Ngā paparanga purapura mō te whakakikorua hiko(RDL, ngā hanganga MEMS, te hanga matotoru o te Cu)
-
Ngā papa tipu sol-gel me ngā nanomaterialmō te rangahau nano me te kiriata angiangi
-
Te karuārai me te ine mata(Te whakarite tauira me te ine i te SEM/AFM/SPM)
-
Ngā mata koiora/matūpērā i ngā tūāpapa ahurea pūtau, ngā microarray pūmua/DNA, me ngā substrate reflectometry
FAQ (Ti/Cu Metal-Coated Silicon Wafers)
P1: He aha i whakamahia ai he paparanga Ti i raro i te paninga Cu?
A: He mahi a te Titanium heipaparanga piri (hononga), te whakapai ake i te piri o te parahi ki te papa me te whakarei ake i te pumau o te atanga, e āwhina ana ki te whakaiti i te tihorenga, te wehewehe rānei i te wā e whakahaeretia ana, e tukatukahia ana hoki.
Q2: He aha te matotoru o te Ti/Cu?
A: Ko ngā huinga noa koTi: tekau nm (hei tauira, 10–50 nm)meCu: 50–300 nmmō ngā kiriata pakarukaru. Ko ngā paparanga Cu matotoru (taumata-µm) ka tutukihia mā tete whakakikorua hiko i runga i te paparanga purapura Cu kua pakaru, kei tō tono.
Q3: Ka taea e koe te pani i ngā taha e rua o te wafer?
Āe.Paninga taha-kotahi, taha-rua rāneiKei te wātea mēnā ka tonoa. Tena koa whakamāramahia mai ō hiahia ina tono ana koe.
Mō Mātou
He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.
