Angaanga Kuata SiO₂ Angaanga Kuata Ngā Angaanga Kuata SiO₂ Te Mahana MEMS 2″ 3″ 4″ 6″ 8″ 12″

Wafer Quartz SiO₂ Wafer Quartz Mahana MEMS SiO₂ 2″ 3″ 4″ 6″ 8″ 12″ Whakaahua Matua

Whakaahuatanga Poto:

He mea nui ngā papa whatu kuata hei whakatairanga i ngā ahumahi hikohiko, haurua-ira, me ngā mahi whatu. Kei roto i ngā waea atamai e ārahi ana i tō GPS, e whakaurua ana ki ngā teihana turanga auau-teitei e whakakaha ana i ngā whatunga 5G, ā, e whakaurua ana ki ngā taputapu e hanga ana i ngā maramara iti o te whakatupuranga hou, he mea nui ngā papa whatu kuata. Mā ēnei papa parakore teitei ka taea e ngā mahi auaha i roto i ngā mea katoa mai i te rorohiko irahiko ki te hangarau whakaahua matatau. Ahakoa i ahu mai i tētahi o ngā kohuke tino nui o te Ao, ka hangaia ngā papa whatu kuata ki ngā paerewa tino tika me te mahi.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

te angaanga_quartz_whakakotahi_4_inihi_te_angaanga_kirika_whakakotahi_

Ngā Wafer Karāhe Hiraka me te Kuata Whatu i Whakaranua-2

Kupu Whakataki

Ngā Waferi Karaehe Hiraka me te Quartz Whatu kua Whakakotahitia

He aha ngā Wafer Quartz

He kōpae angiangi, porowhita ngā paparanga kuata i hangaia mai i te tioata kuata hangai tino parakore. Kei te wātea i roto i ngā diameter paerewa mai i te 2 ki te 12 inihi, ko te matotoru o ngā paparanga kuata he 0.5 mm ki te 6 mm. Kāore i rite ki te kuata tūturu, e hanga ana i ngā tioata porowhita koretake, ka whakatipuhia te kuata hangai i raro i ngā tikanga taiwhanga e tino tirotirohia ana, ka puta he hanganga tioata ōrite.

Ko te āhua tioata o ngā papa quartz e whakarato ana i te ātete matū, te mārama whatu, me te pumau i raro i te pāmahana teitei me te ahotea miihini. Nā ēnei āhuatanga ka waiho ngā papa quartz hei wāhanga matua mō ngā taputapu tika e whakamahia ana i roto i te tuku raraunga, te pūoko, te tatau, me ngā hangarau e hangai ana ki te laser.

Ngā Whakatakotoranga o te Wafer Quartz

Momo Kuata	4	6	8	12
Rahi
Diameter (inihi)	4	6	8	12
Matotoru (mm)	0.05–2	0.25–5	0.3–5	0.4–5
Te Manawanuitanga o te Diameter (inihi)	±0.1	±0.1	±0.1	±0.1
Te Manawanui Matotoru (mm)	Ka taea te whakarite	Ka taea te whakarite	Ka taea te whakarite	Ka taea te whakarite
Ngā Āhuatanga Whatu
Taupū Whakaata @365 nm	1.474698	1.474698	1.474698	1.474698
Taupū Whakaata @546.1 nm	1.460243	1.460243	1.460243	1.460243
Taupū Whakaata @1014 nm	1.450423	1.450423	1.450423	1.450423
Te Whakawhiti ā-Roto (1250–1650 nm)	>99.9%	>99.9%	>99.9%	>99.9%
Tapeke Whakawhiti (1250–1650 nm)	>92%	>92%	>92%	>92%
Kounga Mīhini
TTV (Rerekētanga Matotoru Katoa, µm)	<3	<3	<3	<3
Papatahi (µm)	≤15	≤15	≤15	≤15
Te Pākarekare o te Mata (nm)	≤1	≤1	≤1	≤1
Kopere (µm)	<5	<5	<5	<5
Ngā Āhuatanga Ā-tinana
Kiato (g/cm³)	2.20	2.20	2.20	2.20
Te Tauwehenga o Young (GPa)	74.20	74.20	74.20	74.20
Te pakeketanga o Mohs	6–7	6–7	6–7	6–7
Te Wāhanga Kutikuti (GPa)	31.22	31.22	31.22	31.22
Te Ōwehenga a Poisson	0.17	0.17	0.17	0.17
Kaha Whakapūmau (GPa)	1.13	1.13	1.13	1.13
Kaha Kume (MPa)	49	49	49	49
Pūmau Whakakore Hiko (1 MHz)	3.75	3.75	3.75	3.75
Ngā Āhuatanga Wera
Pūwāhi Taumahatanga (10¹⁴.⁵ Pa·s)	1000°C	1000°C	1000°C	1000°C
Pūwāhi Whakamahana (10¹³ Pa·s)	1160°C	1160°C	1160°C	1160°C
Pūwāhi Whakangawari (10⁷.⁶ Pa·s)	1620°C	1620°C	1620°C	1620°C

Ngā Whakamahinga o ngā Wafer Quartz

He mea hanga motuhake ngā anga kuaha hei whakatutuki i ngā tono uaua puta noa i ngā ahumahi tae atu ki:

Ngā Pūrere Hikohiko me ngā Pūrere RF

Ko ngā anga kuata te kaupapa matua o ngā whakaoho me ngā oscillator karaihe kuata e whakarato ana i ngā tohu karaka mō ngā waea atamai, ngā waeine GPS, ngā rorohiko, me ngā taputapu whakawhitiwhiti ahokore.
Nā te iti o te horapa wera me te teitei o te tauwehe-Q, he mea tino pai ngā anga quartz mō ngā ara iahiko taima pumau-tiketike me ngā tātari RF.

Ngā Optoelectronics me te Whakaahua

He tino pai te whakawhiti UV me te IR o ngā anga Quartz, he mea tino pai mō ngā karāhe whatu, ngā wehewehe hihi, ngā matapihi taiaho, me ngā pūoko.
Nā tō rātou ātete ki te irahiko ka taea te whakamahi i roto i ngā taputapu ahupūngao teitei me ngā taputapu mokowā.

Ārahi-ārahi me ngā MEMS

Ka whakamahia ngā angaanga kuata hei papa mō ngā ara iahiko haurua-auau teitei, inā koa i roto i ngā tono GaN me RF.
I roto i ngā MEMS (Micro-Electro-Mīhini Pūnaha), ka hurihia e ngā anga quartz ngā tohu mīhini ki ngā tohu hiko mā te pānga piezoelectric, ka taea ai ngā pūoko pēnei i ngā gyroscope me ngā accelerometer.

Te Hanga me ngā Taiwhanga Matatau

E whakamahia whānuitia ana ngā anga kiripaka parakore-teitei i roto i ngā taiwhanga matū, hauora, me te whakaahua mō ngā pūtau whatu, ngā ipu UV, me te whakahaere tauira pāmahana-teitei.
Nā te hototahitanga ki ngā taiao tino kino, he pai mō ngā rūma plasma me ngā taputapu whakatakotoranga.

Te Hanganga o ngā Wafer Quartz

E rua ngā huarahi hanga matua mō ngā anga quartz:

Ngā Wafer Kuata Kua Whakakotahitia

Ka hangaia ngā papa kiripaka kua hanumi mā te whakarewa i ngā kirikiri kiripaka tūturu ki roto i te karāhe kore-āhua, kātahi ka tapatapahia, ka whakakanapahia te poraka totoka kia angiangi. Ka tukuna e ēnei papa kiripaka:

Te māramatanga UV tino pai
Whānui te whānuitanga o te mahi wera (>1100°C)
He ātete pai rawa atu ki te ru wera

He tino pai ēnei mō ngā taputapu whakairo kohatu, ngā oumu pāmahana-tiketike, me ngā matapihi whatu, engari kāore e pai mō ngā tono piezoelectric nā te kore o te raupapa tioata.

Ngā Wafer Kuata Whakatipu

Ka whakatipuhia ngā papa kiripaka kua whakatipuria mā te hangai hei whakaputa i ngā tioata kore-hapa me te whakatakotoranga whatunga tika. I hangaia ēnei papa mō ngā tono e hiahia ana ki:

Ngā koki tapahi tika (X-, Y-, Z-, AT-cut, me ētahi atu)
Ngā oscillator auau-tiketike me ngā tātari SAW
Ngā pūārai whatu me ngā taputapu MEMS matatau

Ko te tukanga whakaputa ko te whakatipu purapura i roto i ngā autoclave, ā, muri iho ko te tapatapahi, te whakatakoto, te whakamahana, me te whakakanapa.

Ngā Kaiwhakarato Wafer Quartz Matua

Ko ngā kaiwhakarato o te ao e tohunga ana ki ngā anga quartz tino tika ko:

Heraeus(Tiamana) – te kuata hanumi me te hangai
Shin-Etsu Quartz(Hapani) – ngā otinga wafer parakore-teitei
WaferPro(USA) – ngā papa me ngā papa o te kuata whānui
Korth Kristalle(Tiamana) – ngā papa karaihe hangai

Te Tūranga Whanaketanga o ngā Wafer Quartz

Kei te whanake tonu ngā papa quartz hei wāhanga nui i roto i ngā whenua hangarau hou:

Whakaiti– Kei te hangaia ngā angaanga kuata me ngā taunga pakari ake mō te whakaurunga taputapu kiato.
Ngā Hikohiko Auautanga Teitei– Kei te panaia ngā hoahoa hou o te anga quartz ki ngā rohe mmWave me THz mō te 6G me te radar.
Te Pūrongo o te Reanga Panuku– Mai i ngā waka aunoa ki te IoT ahumahi, kei te piki haere te hiranga o ngā pūoko e hangai ana ki te kuata.

Ngā pātai e pātaihia pinepinetia ana mō ngā papa quartz

1. He aha te angaanga kuata?

He kōpae angiangi, papatahi te papatahi o te papa kiripaka i hangaia mai i te hauhā silicon tioata (SiO₂), he mea hanga i ngā rahi haurua-ā-ira paerewa (hei tauira, 2", 3", 4", 6", 8", 12 rānei"). E mōhiotia ana mō tōna parakore teitei, tōna pumau wera, me tōna māramatanga whatu, ka whakamahia te papa kiripaka hei papa, hei kawe rānei i roto i ngā tono tino tika pērā i te hanga haurua-ā-ira, ngā taputapu MEMS, ngā pūnaha whatu, me ngā tukanga korehau.

2. He aha te rerekētanga i waenganui i te quartz me te silica gel?

He momo totoka tioata te kuata o te hauhā silicon (SiO₂), ko te silica gel ia he momo kore-āhua, he pūngāwerewere o te SiO₂, e whakamahia whānuitia ana hei whakamaroke hei mimiti i te makuku.

He mārō, he mārama te kuata, ā, e whakamahia ana i roto i ngā mahi hiko, whatu, me ngā mahi ahumahi.
He rite te āhua o te kirikiri silica ki ngā pirepire iti, ki ngā kirikiri rānei, ā, e whakamahia nuitia ana mō te whakahaere i te makuku i roto i ngā takai, ngā hikohiko, me te rokiroki.

3. He aha te whakamahinga o ngā tioata kuata?

E whakamahia whānuitia ana ngā tioata kuata i roto i ngā hikohiko me ngā whatu nā ō rātou āhuatanga piezoelectric (ka whakaputahia he utu hiko i raro i te ahotea miihini). Ko ngā whakamahinga noa ko:

Ngā oscillators me te whakahaere auau(hei tauira, ngā wati quartz, ngā karaka, ngā pūmana iti)
Ngā wāhanga whatu(hei tauira, ngā karāhe arotahi, ngā pereti ngaru, ngā matapihi)
Ngā pūorooro me ngā tātarii roto i ngā taputapu RF me ngā taputapu whakawhitiwhiti kōrero
Ngā Pūokomō te pēhanga, te whakaterenga, te kaha rānei
Te hanga i ngā mea hiko-hauruahei papa, hei matapihi tukatuka rānei

4. He aha i whakamahia ai te kuata i roto i ngā maramara iti?

E whakamahia ana te kuata i roto i ngā tono e pā ana ki te maramara iti nā te mea e tuku ana i:

Te pumau o te werai roto i ngā tukanga pāmahana teitei pēnei i te horapa me te whakamahana
Te whakamarumaru hikonā ōna āhuatanga dielectric
Ātete matūki ngā waikawa me ngā whakarewa e whakamahia ana i roto i te hanga haurua-ā-ira
Te tika o te āhuame te iti o te horapa wera mō te whakaritenga pono o te tuhi kohatu
Ahakoa kāore te kuata e whakamahia ana hei rauemi haurua-ā-ira hohe (pērā i te silicon), he mahi tautoko nui tāna i roto i te taiao hanga - inā koa i roto i ngā oumu, i ngā rūma, me ngā papa whakaahua-kōpare.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.