Waka Angiangi Silicon Carbide (SiC)

Whakaahuatanga Poto:

Ko te poti angaanga Silicon Carbide (SiC) he kawe tukanga haurua-ira i hangaia ki te rauemi SiC tino parakore, i hangaia hei pupuri me te kawe i ngā angaanga i ngā tukanga pāmahana teitei nui pērā i te epitaxy, te waikura, te horapa, me te whakamahana.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

He Tirohanga Whānui mō te Karāhe Quartz

I te tere o te whanaketanga o ngā semiconductors hiko me ngā taputapu whānui o te awhe roopu, ka pāngia ngā poti quartz tuku iho e ngā herenga pēnei i te whakarerekētanga i ngā pāmahana teitei, te poke nui o ngā matūriki, me te poto o te ora mahi. Ko ngā poti wafer SiC, he pai ake te pumau o te wera, te iti o te poke, me te roa o te ora, kei te whakakapi haere i ngā poti quartz, ā, ko rātou te whiringa pai rawa atu i roto i te hanga taputapu SiC.

Ngā Āhuatanga Matua

1. Ngā Painga Rauemi

I hangaia mai i te SiC tino parakore mete pakeke me te kaha teitei.
Kei runga ake i te 2700°C te ira rewa, he teitei ake i te quartz, e whakarite ana i te pumau mō te wā roa i roto i ngā taiao tino kino.

2. Ngā Āhuatanga Wera

He kawe wera teitei mō te whakawhiti wera tere me te ōrite, me te whakaiti i te ahotea o te wafer.
He tata te ōrite o te tauwehenga whānui wera (CTE) ki ngā papa SiC, ka whakaiti i te piko me te ngatata o te papa wafer.

3. Te Pūmautanga Matū

Pūmau i raro i te pāmahana tiketike me ngā momo āhuarangi rerekē (H₂, N₂, Ar, NH₃, me ētahi atu).
He ātete pai rawa atu ki te waikura, e ārai ana i te pirau me te whakaputa matūriki.

4. Te Mahi a te Tukanga

Ka whakaitihia te maturuturunga o ngā matūriki me te poke e te mata maeneene, mātotoru hoki.
Ka mau tonu te pumau o ngā āhuatanga me te kaha kawenga i muri i te whakamahinga roa.

5. Te Whai Hua o te Utu

E 3–5 ngā wā e roa ake ai te ora ratonga i ngā poti kuata.
He iti ake te auau tiaki, ka whakaiti i te wā kore mahi me ngā utu whakakapinga.

Ngā tono

Te Epitaxy SiCTe tautoko i ngā papa SiC 4-inihi, 6-inihi, me te 8-inihi i te wā e tipu ana te epitaxial i te pāmahana teitei.
Te Hanga Pūrere HikoHe pai mō ngā SiC MOSFET, ngā Schottky Barrier Diodes (SBD), ngā IGBT, me ētahi atu taputapu.
Maimoatanga WeraNgā tukanga whakawerawera, whakanitrogenation, me te whakawaro.
Te Waikura me te HorohorangaHe tūāpapa tautoko anga pumau mō te waikura me te horapa i te pāmahana tiketike.

Ngā Whakatakotoranga Hangarau

Taonga	Whakatakotoranga
Rauemi	Teitei-parakore Silicon Carbide (SiC)
Rahi o te Wafer	4-inihi / 6-inihi / 8-inihi (ka taea te whakarite)
Te Pāmahana Whakahaere Mōrahi.	≤ 1800°C
Whakawhanuitanga Wera CTE	4.2 × 10⁻⁶ /K (e tata ana ki te papa SiC)
Te Arahi Wera	120–200 W/m·K
Te Pākari o te Mata	Ra < 0.2 μm
Te whakarara	±0.1 mm
Te Ora Ratonga	≥ 3× te roa atu i ngā poti quartz

Whakataurite: Waka Quartz me te Waka SiC

Ahu	Waka Quartz	Waka SiC
Ātete ki te pāmahana	≤ 1200°C, ka rerekē te āhua i te pāmahana teitei.	≤ 1800°C, pumau te pāmahana
Taurite CTE ki SiC	He nui te kore taurite, te mōrearea o te ahotea wafer	Te ōrite tata, ka whakaiti i te pakaru o te wafer
Te Parahanga o te Matūriki	Teitei, ka whakaputa i ngā poke	He mata iti, he maeneene, he matotoru hoki
Te Ora Ratonga	Whakakapinga poto, auau	Roa, 3–5× te roa o te oranga
Tukanga Tika	Te epitaxy Si tuku iho	Kua arotauhia mō ngā taputapu epitaxy me te hiko SiC

Ngā Pātai Auau – Ngā Waka Angiangi Silicon Carbide (SiC)

1. He aha te poti wafer SiC?

He waka kawe tukanga haurua-ira te waka wafer SiC i hangaia ki te karawiti silicon parakore-teitei. E whakamahia ana hei pupuri me te kawe i ngā wafer i roto i ngā tukanga pāmahana teitei pēnei i te epitaxy, te waikura, te horapa, me te whakamahana. Ki te whakatauritea ki ngā waka quartz tuku iho, he pai ake te pumau o te wera o ngā waka wafer SiC, he iti ake te poke, ā, he roa ake te ora ratonga.

2. He aha i whiriwhiria ai ngā poti wafer SiC i ngā poti quartz?

Te ātete pāmahana teitei akePūmau ki te 1800°C, ki te quartz (≤1200°C).
He pai ake te ōritenga CTE: E tata ana ki ngā papa SiC, e whakaiti ana i te ahotea o te wafer me te ngatata.
Te whakaputanga matūriki itiKa whakaitihia te poke e te mata maeneene, matotoru.
Te roa o te ora3–5 ngā wā roa atu i ngā poti kuata, e whakaiti ana i te utu o te mana.

3. He aha ngā rahi o ngā wafer ka taea e ngā poti wafer SiC te tautoko?

Ka whakaratohia e mātou ngā hoahoa paerewa mō4-inihi, 6-inihi, me te 8-inihingā angiangi, me ngā whakaritenga katoa e wātea ana kia tutuki ai ngā hiahia o te kiritaki.

4. I roto i ēhea tukanga e whakamahia whānuitia ana ngā poti wafer SiC?

Te tipu epitaxial SiC
Te hanga taputapu haurua hiko (SiC MOSFET, SBD, IGBT)
Te whakamahana i te pāmahana teitei, te whakahāngaitanga, me te whakawaro
Ngā tukanga waikura me te horapa

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.