Papa Hanga Kotahi-Karaihe Silicon Carbide (SiC) – Wafer 10×10mm

Papanga Kiriata Kotahi-Kotahi o te Silicon Carbide (SiC) – 10×10mm te Wafer Whakaahua Matua

Whakaahuatanga Poto:

Ko te papa whakarewa kotahi-kiritaki Silicon Carbide (SiC) 10×10mm he rauemi haurua-whakakotahi mahi-teitei i hangaia mō ngā tono hikohiko mana me ngā tono optoelectronic o te whakatupuranga e whai ake nei. He tino pai te kawe wera, te whānui o te āputa roopu, me te pumau matū pai rawa atu, ka whakaratohia e ngā papa whakarewa SiC te turanga mō ngā taputapu e mahi pai ana i raro i ngā āhuatanga pāmahana teitei, auau teitei, me te ngaohiko teitei. Ka tapahia tika ēnei papa whakarewa ki ngā maramara tapawhā 10×10mm, he mea pai mō te rangahau, te hanga tauira, me te hanga taputapu.

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Ngā Āhuatanga

Kauwhata Taipitopito o te papa whakarewa Silicon Carbide (SiC)

He tirohanga whānui mō te papa whakarewa Silicon Carbide (SiC)

TeHe papa whakarewa karaihe kotahi 10×10mm Silicon Carbide (SiC)He rauemi haurua-ā-ira teitei te mahi, i hangaia mō ngā hikohiko mana me ngā tono optoelectronic o te whakatupuranga e whai ake nei. He tino pai te kawe wera, te whānui o te āputa roopu, me te pumau matū, ka whakaratohia e te papa anga Silicon Carbide (SiC) te turanga mō ngā taputapu e mahi pai ana i raro i ngā āhuatanga pāmahana teitei, auau teitei, me te ngaohiko teitei. He tino tika te tapahi i ēnei papa ki roto.maramara tapawhā 10×10mm, he mea tino pai mō te rangahau, te hanga tauira, me te hanga taputapu.

Te Mātāpono Whakaputa o te papa whakarewa Silicon Carbide (SiC)

Ka hangaia ngā papa whakarewa Silicon Carbide (SiC) mā te Kawe Kohu Tinana (PVT) mā te tikanga whakatipu whakapūhau rānei. Ka tīmata te tukanga mā te paura SiC tino parakore kua utaina ki roto i te ipu karāpeti. I raro i ngā pāmahana tino nui atu i te 2,000°C me te taiao whakahaeretia, ka whakapūhau te paura hei kohu ka rewa anō ki runga i te tioata purapura kua āta whakaritea, ka hanga he poro tioata kotahi nui, he iti te hapa.

Kia tupu te boule SiC, ka pāngia e:

Te tapatapahi i ngā ingota: Ka tapahia e ngā kani waea taimana tino tika te ingota SiC kia rite ki ngā angiangi, ki ngā maramara rānei.

Te mirimiri me te huri: Ka papatahitia ngā mata hei tango i ngā tohu kani, kia ōrite ai te matotoru.

Te Whakakanapa Matū Ā-Mīhini (CMP): Ka tutuki he āhua whakaata kua rite rawa, ā, he tino iti te taratara o te mata.

Te tāpiringa kōwhiringa: Ka taea te tāpiringa hauota, konumohe, boron rānei hei whakarite i ngā āhuatanga hiko (momo-n, momo-p rānei).

Tirotiro kounga: Mā te ine kounga matatau ka tutuki te papatahi o te papatahi, te ōritetanga o te matotoru, me te kiato o te hapa i ngā whakaritenga pakari o te taumata haurua-haurua.

Mā tēnei tukanga maha-taahiraa ka hua ake he maramara papa angiangi Silicon Carbide (SiC) pakari 10×10mm kua rite mō te tipu epitaxial, te hanga tika rānei i te taputapu.

Ngā Āhuatanga Rauemi o te papa whakarewa Silicon Carbide (SiC)

Ko te papa whakarewa Silicon Carbide (SiC) he mea hanga tuatahi mai i4H-SiC or 6H-SiCmomo maha:

4H-SiC:He tino pai te nekenekehanga irahiko, ā, he mea tino pai mō ngā taputapu hiko pēnei i te MOSFET me ngā diode Schottky.
6H-SiC:He āhuatanga ahurei mō ngā wāhanga RF me ngā wāhanga optoelectronic.

Ngā āhuatanga ā-tinana matua o te papa whakarewa Silicon Carbide (SiC):

Āputa whānui:~3.26 eV (4H-SiC) – ka taea te whakamahi i te ngaohiko pakaru teitei me te iti o ngā mate whakawhiti.
Te kawe wera:3–4.9 W/cm·K – ka mimiti i te wera, ka whakarite kia pumau i roto i ngā pūnaha mana-tiketike.
Te pakeketanga:~9.2 i te tauine Mohs – ka whakarite kia mau tonu te mahi a te mīhini i te wā e tukatukahia ana, e whakahaeretia ana hoki te taputapu.

Ngā Whakamahinga o te Wafere Papa Silicon Carbide (SiC)

Nā te maha o ngā whakamahinga o te papa whakarewa Silicon Carbide (SiC) ka whai hua ai ēnei mea puta noa i ngā ahumahi maha:

Te Hikohiko Mana: He pūtake mō ngā MOSFET, ngā IGBT, me ngā diode Schottky e whakamahia ana i roto i ngā waka hiko (EV), ngā pūtake hiko ahumahi, me ngā kaitahuri pūngao whakahou.

Ngā Pūrere RF me te Ngaruiti: E tautoko ana i ngā transistors, ngā whakakaha, me ngā wāhanga radar mō ngā tono 5G, amiorangi, me te parepare.

Ngā Optoelectronics: E whakamahia ana i roto i ngā UV LED, ngā photodetectors, me ngā taiaho taiaho ina nui te māramatanga me te pumau o te UV.

Rererangi me te Ārai: He papa pono mō ngā hikohiko e ātete ana ki te pāmahana teitei, e whakapakeketia ana e te irahiko.

Ngā Whare Rangahau me ngā Whare Wānanga: He mea tino pai mō ngā rangahau pūtaiao rauemi, te whakawhanake i ngā tauira taputapu, me te whakamātautau i ngā tukanga epitaxial hou.

Ngā Whakatakotoranga mō ngā Maramara Papa Wafer Silicon Carbide (SiC)

Taonga	Uara
Rahi	10mm × 10mm tapawhā
Matotoru	330–500 μm (ka taea te whakarite)
Momo maha	4H-SiC, 6H-SiC rānei
Te Whakatakotoranga	Papa-C, kei waho o te tuaka (0°/4°)
Whakaotinga Mata	Kua orohia te taha kotahi, te taha rua rānei; kei te wātea te epi-ready
Ngā Kōwhiringa Doping	Momo-N, Momo-P rānei
Tau	Te taumata rangahau, te taumata taputapu rānei

Ngā Pātai Auau mō te papa whakarewa Silicon Carbide (SiC)

P1: He aha te mea e pai ake ai te papa anga Silicon Carbide (SiC) i ngā papa anga silicon tuku iho?
Ka tukuna e te SiC he kaha ake i te 10× te kaha o te papa pakaru, he ātete wera pai ake, me ngā ngaronga whakawhiti iti iho, he mea tino pai mō ngā taputapu kaha-teitei, kaha-nui e kore e taea e te silicon te tautoko.

P2: Ka taea te whakarato i ngā paparanga epitaxial ki te papa whakarewa Silicon Carbide (SiC) 10×10mm?
Āe. Ka whakaratohia e mātou ngā papa epi-ready, ā, ka taea e mātou te tuku i ngā paparanga epitaxial ritenga hei whakatutuki i ngā hiahia motuhake o te hanga taputapu hiko, LED rānei.

Q3: Kei te wātea ngā rahi ritenga me ngā taumata tāpiringa?
Ae. Ahakoa he paerewa ngā maramara 10×10mm mō te rangahau me te tauira taputapu, kei te wātea ngā ine ritenga, ngā matotoru, me ngā kōtaha tāpiringa ina tonoa.

Q4: He pēhea te pakari o ēnei papa angiangi i roto i ngā taiao tino kino?
Ka mau tonu te hanganga me te mahi hiko o te SiC i runga ake i te 600°C, i raro hoki i te hihi teitei, he mea tino pai mō ngā taputapu hiko ā-rangi me ngā taputapu hiko hōia.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.