Ringa/Ringa Marau Ukume Silicon Carbide SiC mō ngā Pūnaha Whakahaere Tino Hiranga

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TeRinga/Ringa Marau Ukume Silicon Carbidehe wāhanga matatau i whakawhanakehia mō te aunoatanga ahumahi matatau, te tukatuka haurua-ira, me ngā taiao tino ma. Ko tōna hoahoa marau motuhake me te mata uku tino papatahi he mea tino pai mō te whakahaere i ngā papa ngohengohe, tae atu ki ngā papa silicon, ngā panera karāhe, me ngā taputapu whatu. He mea hanga tika, he mea hanga mai i te silicon carbide tino parakore, teRinga/Ringa Marau Ukume Silicon Carbidehe kaha ā-pūkaha, he pono ki te pāmahana, me te whakahaere poke kāore i te rite.

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Te Whakauru i te Ringa/Ringa Marau Ukume Silicon Carbide

He rerekē ki ngā ringaringa whakarewa, kirihou rānei,Ringa/Ringa Marau Ukume Silicon CarbideKa tukuna he mahi pumau i roto i ngā āhuatanga wera, matū, me te korehau tino kino. Ahakoa kei roto i te rūma ma Akomanga 1, i roto rānei i te rūma plasma korehau-nui, ka whakarite tēnei wāhanga kia haumaru, kia whai hua, kia kore hoki he para e kawe i ngā wāhanga utu nui.

Me te hanganga kua whakaritea mō ngā ringa karetao, ngā kaiwhakahaere wafer, me ngā taputapu whakawhiti aunoa, ko teRinga/Ringa Marau Ukume Silicon Carbidehe whakahoutanga atamai mō tētahi pūnaha tino tika.

Te Tukanga Hanga o te Ringa/Ringa Marau Ukume Silicon Carbide

Te hanga i tētahi mahi tino teiteiRinga/Ringa Marau Ukume Silicon Carbidekei roto ko tētahi tukanga mahi hangarau uku e tino whakahaeretia ana, e whakarite ana i te auautanga, te pono, me te iti rawa o ngā reiti hapa.

1. Hangarau Rauemi

Ko te paura silicon carbide tino-teitei anake e whakamahia ana i roto i te hanganga o teRinga/Ringa Marau Ukume Silicon Carbide, kia iti ai te poke ionic me te kaha nui. Ka whakaranua tikatia ngā paura ki ngā tāpiringa sintering me ngā here hei whakatutuki i te whakakīkī tino pai.

2. Te Hanga i te Hanganga Tūāpapa

Ko te āhuahanga turanga o teringa/ringa marauka hangaia mā te pēhi matao isostatic, mā te werohanga rānei, e whakarite ana i te kiato matomato teitei me te tohatoha ahotea ōrite. Kua arotauhia te whirihoranga āhua-U mō te ōwehenga pakari-ki-taumaha me te urupare hihiri.

3. Tukanga Sintering

Ko te tinana matomato o teRinga/Ringa Marau Ukume Silicon Carbideka whakakāhia ki roto i te oumu hau kore mahi, pāmahana teitei, neke atu i te 2000°C. Mā tēnei taahiraa ka whakarite kia tata ki te kiato ariā, ka puta he wāhanga e ātete ana ki te ngatata, te piko, me te rerekētanga o te āhua i raro i ngā kawenga wera o te ao tūturu.

4. Te Huri me te Mīhini Tika

Ka whakamahia ngā taputapu taimana CNC matatau hei hanga i ngā inenga whakamutunga o teRinga/Ringa Marau Ukume Silicon Carbide. Mā ngā ātete kikī (±0.01 mm) me te whakaotinga mata taumata-whakaata ka whakaiti i te tukunga matūriki me te ahotea ā-mīhini.

5. Te Whakamaarama me te Horoi i te Mata

Ko te whakaotinga mata whakamutunga ko te whakakanapa matū me te horoi ultrasonic hei whakarite i teringa/ringa maraumō te whakaurunga tika ki ngā pūnaha tino-ma. Kei te wātea hoki ngā paninga kōwhiringa (CVD-SiC, ngā paparanga ārai-whakaata).

Mā tēnei tukanga tino tupato ka taea e iaRinga/Ringa Marau Ukume Silicon Carbidee tutuki ana i ngā paerewa ahumahi tino pakari, tae atu ki ngā whakaritenga rūma ma SEMI me ISO.

Tawhā o te Ringa/Ringa Marau Ukume Silicon Carbide

Taonga	Ngā Tikanga Whakamātautau	Raraunga	Wāhanga
Ihirangi o te Silicon Carbide	/	>99.5	%
Rahi Wiri Toharite	/	4-10	maikorona
Kiato	/	>3.14	karamu/cm3
Te Āhua o te Porowhita	/	<0.5	% o te rōrahi
Te Pakari o Vickers	HV0.5	2800	Kg/mm2
Te Tauwehenga o te Pakaru (3 Ngā Tohu)	Rahi o te pae whakamātautau: 3 x 4 x 40mm	450	MPa
Te Kaha o te Pehitanga	20°C	3900	MPa
Te Tauwehenga o te Āhuatanga	20°C	420	GPa
Te Pakari o te Whati	/	3.5	MPa/m^1/2
Te Arahi Wera	20°C	160	W/(mK)
Ātete Hiko	20°C	10⁶-10⁸	Ωcm
Tauwehenga o te Whanuitanga Wera	20°C-800°C	4.3	K^-110^-6
Te pāmahana tono mōrahi	Āhuarangi Waikura	1600	°C
Te pāmahana tono mōrahi	Āhuarangi Korekore	1950	°C

Ngā Whakamahinga o te Ringa/Ringa Marau Ukume Silicon Carbide

TeRinga/Ringa Marau Ukume Silicon CarbideKua hangaia mō te whakamahi i roto i ngā tono tino tika, tino mōrearea, me ngā tono tairongo ki te poke. Ka taea te whakahaere pono, te whakawhiti, te tautoko rānei i ngā wāhanga nui me te kore e whakararu.

➤ Ahumahi Ārahi-Haumaru

Whakamahia hei marau karetao i roto i te whakawhiti wafer pito-mua me ngā teihana FOUP.
Kua whakauruhia ki roto i ngā rūma korehau mō te whakairo plasma me ngā tukanga PVD/CVD.
He ringa kawe i roto i ngā taputapu ine me te whakarite ine.

TeRinga/Ringa Marau Ukume Silicon Carbideka whakakore i ngā mōrearea o te tukunga hiko pateko (ESD), ka tautoko i te tika o ngā āhuatanga, ā, ka ātete ki te waikura parāoa.

➤ Ngā Whakaahua me ngā Tirohanga Mata

Tautoko ana i ngā karāhe ātaahua, ngā tioata taiaho, me ngā pūoko i te wā e hangaia ana, e tirotirohia ana rānei.
Mā tōna pakari teitei ka ārai i te wiri, ko te tinana uku ia ka ātete ki te poke o ngā mata whatu.

➤ Whakaaturanga me te Hanga Paewhiri

Ka taea te pupuri i te karāhe angiangi, ngā kōwae OLED, me ngā papa LCD i te wā e kawehia ana, e tirotirohia ana rānei.
Ko te papatahi, ā, he koretake te matūRinga/Ringa Marau Ukume Silicon Carbidehei tiaki i te rakuraku, i te whakairo matū rānei.

➤ Ngā Taputapu Rererangi me te Pūtaiao

Whakamahia ana i roto i te huihuinga o ngā whatu amiorangi, te karetao korehau, me ngā tatūnga raina hihi synchrotron.
He tino pai te mahi i roto i ngā rūma ma e tika ana mō te wāhi me ngā taiao e pāngia ana e te irahiko.

I ia mara, ko teRinga/Ringa Marau Ukume Silicon Carbideka whakarei ake i te whai huatanga o te pūnaha, ka whakaiti i te rahunga o tētahi wāhanga, ā, ka whakaiti hoki i te wā kore mahi.

Ngā Pātai Auau – Ngā Pātai Auau mō te Ringa/Ringa Marau Ukume Silicon Carbide

P1: He aha te mea e pai ake ai te Ringa/Ringa Marau Ukume Silicon Carbide i ngā momo whakarewa kē atu?

TeRinga/Ringa Marau Ukume Silicon CarbideHe tino pakari, he iti ake te mātotoru, he pai ake te ātete ki ngā matū, ā, he iti ake te horapa o te wera i ngā konganuku. He hototahi hoki ki ngā rūma ma, ā, kāore he waikura, he matūriki rānei e puta mai ana.

Q2: Ka taea e au te tono i ngā ine ritenga mō taku Ringa/Ringa Marau Ukume Silicon Carbide?

Āe. Ka tukuna e mātou he whakaritenga katoa, tae atu ki te whānui o te marau, te matotoru, ngā kōhao whakairi, ngā tapahi, me ngā maimoatanga mata. Ahakoa mō ngā wafer 6", 8", 12" rānei, ko tāuringa/ringa marauka taea te whakarite kia rite.

Q3: Kia pēhea te roa o te ringa/ringa o te marau uku Silicon Carbide i raro i te plasma, i te korehau rānei?

Nā te rauemi SiC kiato-teitei me te āhua kore mahi, teringa/ringa maraue mau tonu ana te mahi ahakoa ngā mano o ngā huringa tukanga. He iti noa te pakaru i raro i ngā kawenga wera plasma, wera korehau rānei.

P4: He pai te hua mō ngā rūma horoi ISO Class 1?

Tino. Ko teRinga/Ringa Marau Ukume Silicon Carbidekua hangaia, kua tākaihia hoki i roto i ngā whare horoi kua whaimana, me ngā taumata matūriki kei raro iho i ngā whakaritenga ISO Akomanga 1.

Q5: He aha te pāmahana whakahaere mōrahi mō tēnei ringa/ringa marau?

TeRinga/Ringa Marau Ukume Silicon Carbideka taea te mahi tonu i te pāmahana tae atu ki te 1500°C, kia pai ai te whakamahi tika i roto i ngā rūma tukatuka pāmahana teitei me ngā pūnaha korehau wera.

E whakaata ana ēnei FAQ i ngā āwangawanga hangarau e tino kitea ana mai i ngā miihini, ngā kaiwhakahaere taiwhanga, me ngā kaiwhakauru pūnaha e whakamahi ana i teRinga/Ringa Marau Ukume Silicon Carbide.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.