Silicon carbide taimana mīhini tapahi waea 4/6/8/12 inihi SiC tukatuka ingot

Whakaahuatanga Poto:

Silicon carbide Diamond Waea tapahi mīhini ko te momo o te taputapu tukatuka tiketike-pū whakatapua ki silicon carbide (SiC) poro ingot, te whakamahi i te hangarau Diamond Waea Saw, i roto i te tere-tere neke waea taimana (raina diameter 0.1 ~ 0.3mm) ki SiC ingot tapahi waea-maha, ki te whakatutuki i tiketike-pū, te whakarite angiangi iti-kino. Kei te whakamahia nuitia nga taputapu i roto i te SiC power semiconductor (MOSFET / SBD), te taputapu auau reo irirangi (GaN-on-SiC) me te tukatuka taputapu taputapu optoelectronic, he taputapu matua i roto i te mekameka ahumahi SiC.

Tukuna he imeera ki a matou

Taipitopito Hua

Tohu Hua

Tikanga mahi:

1. Whakatikatika Ingot: Ko te SiC ingot (4H / 6H-SiC) kua whakaritea ki runga i te papa tapahi i roto i te waahanga hei whakarite i te tika o te waahi (± 0.02mm).

2. Ko te nekehanga o te raina taimana: te raina taimana (nga matūriki taimana hiko i runga i te mata) ka peia e te punaha wira kaiarahi mo te tere tere (tere raina 10 ~ 30m / s).

3. Te kai tapahi: ka whangaihia te ingot i te taha o te ahunga kua whakaritea, ka tapahia te raina taimana i te wa kotahi me nga rarangi whakarara maha (100~500 rarangi) hei hanga angiangi maha.

4. Te whakamatao me te tango maramara: Mapuhia te whakamahana (wai kua whakakorehia me nga taapiri) ki te waahi tapahi hei whakaiti i te kino o te wera me te tango maramara.

Tawhā matua:

1. Te tere tapahi: 0.2 ~ 1.0mm / min (i runga i te ahunga karaihe me te matotoru o SiC).

2. Te raruraru Raina: 20 ~ 50N (he tiketike rawa te ngawari ki te wawahi i te raina, he iti rawa te pa ki te tapahi tika).

3.Wafer matotoru: paerewa 350 ~ 500μm, ka taea e te angiangi te tae ki te 100μm.

Āhuatanga matua:

(1) Te tapahi tika
Matotoru kātakí: ± 5μm (@350μm angiangi), pai atu i te tapahi kumete tikanga (± 20μm).

Te taratara o te mata: Ra<0.5μm (kaore he hurihanga taapiri e hiahiatia ana hei whakaiti i te nui o te tukatuka ka whai ake).

Warpage: <10μm (whakaitihia te uaua o te whakakoi i muri mai).

(2) Tukatuka kaha
Te tapahi maha-raina: te tapahi i nga waahanga 100 ~ 500 i te wa, te whakanui ake i te kaha o te whakaputa 3 ~ 5 wa (vs. Tapahia te raina kotahi).

Raina ora: Ka taea e te raina taimana te tapahi 100 ~ 300km SiC (i runga i te pakeke o te ingot me te arotautanga o te tukanga).

(3) Tukatuka kino iti
Te pakaru o te taha: <15μm (te tapahi tawhito> 50μm), te whakapai ake i te hua angiangi.

Paparanga kino o raro: <5μm (whakaitihia te tango oro).

(4) Te tiaki taiao me te ohanga
Karekau he paru kumete: He iti ake nga utu mo te ruku paru ki te whakatairite ki te tapahi moata.

Te whakamahi rauemi: Te tapahi mate <100μm/ kaitapahi, ka tiakina nga rawa SiC.

Pānga tapahi:

1. Te kounga angiangi: karekau he kapiti tonotono i runga i te mata, he iti noa nga kohatanga mokitokito (te toronga whakahekenga ka taea te whakahaere). Ka taea te uru tika ki te hononga whakakoi taratara, whakapoto i te rere o te tukanga.

2. Te riterite: ko te rereketanga o te matotoru o te wafer i roto i te puranga he <± 3%, he pai mo te hanga aunoa.

3.Applicability: Tautokohia te tapahi ingot 4H / 6H-SiC, he hototahi ki te momo conductive / semi-insulated.

Whakatakotoranga Hangarau:

Whakatakotoranga	Nga korero
Ahu (L × W × H)	2500x2300x2500 whakarite ranei
Tukatuka rahinga rauemi	4, 6, 8, 10, 12 inihi o te carbide silicon
Te taratara o te mata	Ra≤0.3u
Te tere tapahi toharite	0.3mm/min
Taumaha	5.5t
Te tapahi i nga waahanga tautuhinga tukanga	≤30 taahiraa
Haruru taputapu	≤80 dB
Te ahotea waea maitai	0~110N(0.25 waea mānukanuka ko 45N)
Tere waea maitai	0~30m/S
Te mana katoa	50kw
Te diameter waea taimana	≥0.18mm
Whakamutua te papatahi	≤0.05mm
Te tapahi me te pakaru tere	≤1%(haunga mo nga take tangata, nga taonga silicon, raina, tiaki me etahi atu take)

Ratonga XKH:

Ka whakaratohia e XKH te katoa o te ratonga tukanga o te miihini carbide taimana taimana tapahi miihini, tae atu ki te kowhiringa taputapu (te waea diameter / te tere tere waea), te whanaketanga tukanga (te tapahi tapawhā arotautanga), te tuku taonga (waea taimana, te wira arahi) me te tautoko i muri i te hoko (te tiaki taputapu, te tapahi kounga tātari), hei awhina i nga kaihoko ki te whakatutuki i nga hua nui (> 95%), te utu iti SiC wafer production papatipu. Ka tukuna ano e ia nga whakamohoatanga kua whakaritea (penei i te tapahi ultra-aniangi, te uta aunoa me te wetewete) me te 4-8 wiki te wa arahi.