Mīhini tapahi waea taimana silicon carbide tukatuka ingot SiC 4/6/8/12 inihi

Whakaahuatanga Poto:

Ko te mīhini tapahi waea taimana silicon carbide he momo taputapu tukatuka tino tika e whakatapua ana ki te tapahi ingot silicon carbide (SiC), mā te whakamahi i te hangarau kani waea taimana, mā te neke tere i te waea taimana (diameter raina 0.1 ~ 0.3mm) ki te tapahi waea maha-ingot SiC, kia tutuki ai te whakarite wafer tino tika, iti te kino. He whānuitia te whakamahinga o te taputapu i roto i te tukatuka papa hiko SiC (MOSFET/SBD), te taputapu auau reo irirangi (GaN-on-SiC) me te taputapu optoelectronic, he taputapu matua i roto i te mekameka ahumahi SiC.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Te kaupapa mahi:

1. Te whakau i te pitopito: Ka whakauhia te pitopito SiC (4H/6H-SiC) ki runga i te papa tapahi mā roto i te taputapu hei whakarite i te tika o te tūranga (±0.02mm).

2. Te nekehanga raina taimana: ko te raina taimana (ngā matūriki taimana whakakikoruatia ki te mata) ka peia e te pūnaha wira ārahi mō te tohanga tere-teitei (tere raina 10 ~ 30m/s).

3. Te tapahi whāngai: ka whāngaihia te ingot i te ahunga kua whakaritea, ā, ka tapahia te rārangi taimana i te wā kotahi me ngā rārangi whakarara maha (100 ~ 500 rārangi) hei hanga i ngā angaanga maha.

4. Te whakamatao me te tango maramara: Rehuhia te wai whakamatao (wai whakakore iona me ngā tāpiringa) ki te wāhi tapahi hei whakaiti i te kino o te wera me te tango i ngā maramara.

Ngā tawhā matua:

1. Tere tapahi: 0.2~1.0mm/min (i runga i te ahunga tioata me te matotoru o te SiC).

2. Te kukū o te aho: 20~50N (he tiketike rawa, he ngāwari ki te whati i te aho, he iti rawa te pānga ki te tika o te tapahi).

3. Te matotoru o te angaanga: 350 ~ 500μm te paerewa, ka taea e te angaanga te tae ki te 100μm.

Ngā āhuatanga matua:

(1) Te tika o te tapahi
Te ātete matotoru: ±5μm (@350μm wafer), he pai ake i te tapahi moata tikanga (±20μm).

Te taratara o te mata: Ra<0.5μm (kāore e hiahiatia he huri anō hei whakaiti i te nui o te tukatuka i muri mai).

Te piko: <10μm (whakaiti i te uauatanga o te whakakanapa i muri mai).

(2) Te whai huatanga o te tukatuka
Te tapahi maha-rārangi: te tapahi i te 100~500 ngā wahi i te wā kotahi, te whakanui ake i te kaha whakaputa 3~5 ngā wā (ki te tapahi kotahi-rārangi).

Te roa o te raina: Ka taea e te raina taimana te tapahi i te 100~300km SiC (i runga i te pakeke o te ingot me te arotautanga tukanga).

(3) Te tukatuka kino iti
Pakaru o te taha: <15μm (tapahi tuku iho >50μm), whakapai ake i te hua o te anga.

Paparanga pakaru o raro i te mata: <5μm (whakaitihia te tango oro).

(4) Te tiaki taiao me te ōhanga
Kāore he poke o te moata: He iti ake ngā utu whakakore para wai ki te whakaritea ki te tapahi moata.

Te whakamahinga rauemi: Te ngaronga tapahi <100μm/ kaitapahi, te penapena i ngā rauemi mata SiC.

Pānga tapahi:

1. Te kounga o te angaanga: kāore he kapiti nui i runga i te mata, he iti noa ngā hapa moroiti (ka taea te whakahaere i te toronga o te nekehanga). Ka taea te tomo tika ki te hononga whakakanapa taratara, ka whakapoto i te rere o te tukanga.

2. Te ōritetanga: ko te rerekētanga matotoru o te anga i roto i te puranga he <±3%, he pai mō te whakaputa aunoa.

3. Te Whakamahinga: Tautoko i te tapahi ingota 4H/6H-SiC, e hototahi ana ki te momo kawe hiko/haurua-whakamaroke.

Ngā whakatakotoranga hangarau：

Whakatakotoranga	Ngā Taipitopito
Ngā Ahu (R × W × T)	2500x2300x2500, whakarite rānei
Awhe rahi o te rauemi tukatuka	4, 6, 8, 10, 12 inihi o te karawiti silicon
Te taratara o te mata	Ra≤0.3u
Tere tapahi toharite	0.3mm/min
Taumaha	5.5t
Ngā taahiraa whakatakoto tukanga tapahi	≤30 ngā hikoinga
Haruru taputapu	≤80 dB
Te kukū o te waea maitai	0~110N (0.25 te kukū o te waea he 45N)
Tere waea maitai	0~30m/H
Mana katoa	50kw
Te whānui o te waea taimana	≥0.18mm
Papatahi o te pito	≤0.05mm
Te tere tapahi me te pakaru	≤1% (haunga ngā take tangata, rauemi silicon, raina, tiaki me ētahi atu take)

Ngā Ratonga XKH:

Ka whakaratohia e XKH te ratonga tukanga katoa o te mīhini tapahi waea taimana silicon carbide, tae atu ki te kōwhiringa taputapu (te taurite o te diameter waea/te tere waea), te whakawhanaketanga tukanga (te arotau i ngā tawhā tapahi), te tuku rauemi pau (waea taimana, wira ārahi) me te tautoko muri-hoko (te tiaki taputapu, te tātari kounga tapahi), hei āwhina i ngā kiritaki ki te whakatutuki i te hua nui (>95%), te utu iti o te hanga papatipu SiC wafer. Ka tukuna hoki e ia ngā whakapainga ritenga (pēnei i te tapahi tino angiangi, te uta me te tango aunoa) me te wā arahi 4-8 wiki.