He paepae uku silicon carbide e ngotea ana, he ngongo uku silicon carbide e tuku ana i te tukatuka ritenga sintering pāmahana teitei
Ngā āhuatanga matua:
1. Paepae uku hiraka waro
- He pakeke teitei me te ātete ki te kakahu: he tata te pakeke ki te taimana, ā, ka taea te tu atu i te kakahu miihini i roto i te tukatuka wafer mo te wa roa.
- He nui te kawe wera me te iti o te tauwehenga whānui wera: he tere te marara o te wera me te pumau o ngā āhuatanga, ka karo i te whakarerekētanga i puta mai i te ahotea wera.
- He papatahi teitei me te āhua o te mata: Ka tae te papatahi o te mata ki te taumata maikorone, kia tino pā ai te angaanga me te kōpae, kia whakaitihia ai te poke me te kino.
Te pumau matū: He kaha te ātete ki te waikura, he pai mō ngā tukanga horoi mākū me te whakairo i roto i te hanga haurua-ira.
2. Ngongo uku silicon carbide
- Ātete pāmahana teitei: Ka taea te mahi i roto i te taiao pāmahana teitei neke atu i te 1600°C mō te wā roa, he mea tika mō te tukanga pāmahana teitei o te haurua-haurua.
He ātete pai rawa atu ki te waikura: he ātete ki ngā waikawa, ki ngā kawakore me ngā momo whakarewa matū, he pai mō ngā taiao tukanga uaua.
- He pakari teitei me te ātete ki te kakahu: te ātete ki te horo o ngā matūriki me te kakahu miihini, te roa o te ora ratonga.
- He kawe wera teitei, he tauwehenga iti o te whakawhānui wera: he tere te kawe wera me te pumau o ngā āhuatanga, ka whakaiti i te rerekētanga, te ngatata rānei i puta mai i te ahotea wera.
Tawhā Hua：
Tawhā paepae uku silicon carbide:
| (Taonga rauemi) | (Wāhanga) | (ssic) | |
| (Ihirangi SiC) | (Taumaha)% | >99 | |
| (Rahi toharite o te witi) | maikorona | 4-10 | |
| (Kiato) | kg/dm3 | >3.14 | |
| (Te āhua o te pūngao) | Vo1% | <0.5 | |
| (Te mārō o Vickers) | HV 0.5 | GPa | 28 |
| *() Kaha piko* (toru ngā tohu) | 20ºC | MPa | 450 |
| (Kaha pēhi) | 20ºC | MPa | 3900 |
| (Te Tauwehenga Ārai) | 20ºC | GPa | 420 |
| (Te pakari o te whati) | MPa/m'% | 3.5 | |
| (Te kawe wera) | 20°ºC | W/(m*K) | 160 |
| (Ātete) | 20°ºC | Ōhm.cm | 106-108 |
(Tauwehenga whānui wera) | a(RT**...80ºC) | K-1*10-6 | 4.3 |
(Te pāmahana whakahaere mōrahi) | 0ºC | 1700 | |
Tawhā ngongo uku silicon carbide:
| Ngā taonga | Rārangi |
| α-SIC | 99% meneti |
| Te Āhua o te Porowhita | 16% te mōrahi |
| Te Kīanga Papatipu | 2.7g/cm3 meneti |
| Te Kaha Piko i te Pāmahana Nui | 100 Mpa min |
| Tauwehenga o te Whanuitanga Wera | K-1 4.7x10 -6 |
| Tauwehenga o te Aroturukitanga Wera (1400ºC) | 24 W/mk |
| Te pāmahana mahi mōrahi | 1650ºC |
Ngā tono matua:
1. Pereti uku silicon carbide
- Te tapahi me te whakakanapa i te angaanga: he tūāpapa tautoko hei whakarite i te tino tika me te pumau i te wā e tapahi ana, e whakakanapa ana hoki.
- Tukanga tuhi: Ka whakauhia te angaanga ki roto i te mīhini tuhi hei whakarite i te tūnga tino tika i te wā e whakaatuhia ana.
- Te Whakakanapa Matū Ā-Mīhini (CMP): hei tūāpapa tautoko mō ngā papa whakakanapa, e whakarato ana i te tohatoha pēhanga me te wera ōrite.
2. Ngongo uku silicon carbide
- Ngongo oumu pāmahana teitei: e whakamahia ana mō ngā taputapu pāmahana teitei pērā i te oumu horapa me te oumu whakahāora hei kawe i ngā anga mō te tukatuka tukanga pāmahana teitei.
- Tukanga CVD/PVD: Hei ngongo whāriki i roto i te rūma tauhohenga, ātete ki ngā pāmahana teitei me ngā hau waikura.
- Ngā taputapu taputapu haurua-arahi: mō ngā whakawhiti wera, ngā paipa hau, me ētahi atu, hei whakapai ake i te whai huatanga o te whakahaere wera o ngā taputapu.
He whānuitanga katoa ngā ratonga ritenga a XKH mō ngā paepae uku silicon carbide, ngā kapu momi me ngā ngongo uku silicon carbide. Ka taea te whakarite i ngā paepae uku silicon carbide me ngā kapu momi, XKH kia rite ki ngā hiahia o te kiritaki o ngā rahi rerekē, ngā āhua me te taratara o te mata, me te tautoko i te maimoatanga paninga motuhake, te whakarei ake i te ātete kakahu me te ātete waikura; Mō ngā ngongo uku silicon carbide, ka taea e XKH te whakarite i ngā momo diameter o roto, diameter o waho, roa me te hanganga uaua (pēnei i te ngongo āhua, te ngongo porous rānei), me te whakarato i te oro, te paninga ārai-waikura me ētahi atu tukanga maimoatanga mata. Ka whakarite a XKH ka taea e ngā kiritaki te whakamahi katoa i ngā painga mahi o ngā hua uku silicon carbide hei whakatutuki i ngā whakaritenga nui o ngā mara hangahanga teitei pēnei i ngā semiconductors, ngā LED me ngā photovoltaics.
Kauwhata Taipitopito
