Ringa/Ringa Marau Ukume Silicon Carbide

Whakaahuatanga Poto:

TeRinga/Ringa Marau Ukume Silicon Carbidehe wāhanga tino tika, tino kaha i hangaia mō ngā tono i roto i ngā taiao uaua pēnei i te hanga haurua-ira, ngā pūnaha rererangi, me te karetao matatau. Me tana mahi takirua—heihanganga tautoko āhua marauā, heite taputapu mutunga-ā-ringa rite ki te karetao—he tino whai hua tēnei wāhanga mō te whakahaere, te tautoko, te whakawhiti rānei i ngā wāhanga pakarukaru, ngā wāhanga whai hua rānei.

I hangaia mā te whakamahi i ngā tikanga tukatuka uku matatau, ka whakaratohia e te ringa/ringa marau SiC he huinga ahurei opakari ā-mīhini, pumau wera, meātete matū, he whakakapinga pai mō ngā ringa whakarewa, pūmua rānei tuku iho i roto i ngā pūnaha e hiahia ana kia roa te mahi i raro i te ahotea me ngā āhuatanga tino kino.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Kauwhata Taipitopito

Te Whakauru i te Ringa/Ringa Marau Ukume Silicon Carbide

TeRinga/Ringa Marau Ukume Silicon Carbidehe wāhanga whakahaere matatau i whakawhanakehia mō ngā pūnaha aunoatanga tino tika, inā koa i roto i ngā ahumahi haurua-ira me te whatu. Kei roto i tēnei wāhanga he hoahoa āhua-U motuhake kua arotauhia mō te whakahaere i te wafer, e whakarite ana i te kaha miihini me te tika o ngā āhuatanga i raro i ngā āhuatanga taiao tino kino. I hangaia mai i te uku karawiti silicon parakore teitei, teringa/ringa marauhe tino pakari, he pumau i te wera, me te ātete ki ngā matū.

I te whanaketanga o ngā taputapu haurua-ā-ira ki ngā āhuahanga pai ake me ngā manawanui pakari ake, ka nui haere te hiahia mō ngā wāhanga kore-paru me te pumau ki te wera.Ringa/Ringa Marau Ukume Silicon CarbideKa tutuki i tēnei wero mā te tuku i te iti o te whakaputanga matūriki, ngā mata tino maeneene, me te hanganga pakari. Ahakoa i roto i te kawe i ngā papa, i te whakanoho i te papa, i ngā pane taputapu karetao rānei, he mea hanga tēnei wāhanga mō te pono me te roa o te wā.

Ngā take matua hei whiriwhiri i tēneiRinga/Ringa Marau Ukume Silicon Carbidewhakauru:

Te iti rawa o te whakawhānui wera mō te tika o ngā āhuatanga
Te pakeke teitei mō te roa o te ora ratonga
Ātete ki ngā waikawa, ngā kawakore, me ngā hau tauhohe
Hototahi ki ngā taiao rūma ma ISO Akomanga 1

Te Mātāpono Hanga o te Ringa/Ringa Marau Ukume Silicon Carbide

TeRinga/Ringa Marau Ukume Silicon Carbideka whakaputaina mā roto i tētahi tukanga tukatuka uku e tino whakahaerehia ana, kua hangaia hei whakarite i ngā āhuatanga rauemi tino pai me te ōritetanga o ngā āhuatanga.

1. Te Whakaritenga Paura

Ka tīmata te tukanga mā te whiriwhiri i ngā paura silicon carbide tino pai. Ka konatunatua ēnei paura ki ngā mea here me ngā āwhina sintering hei whakahaere i te whakakīkī me te whakakīkī. Mō tēneiringa/ringa marau, ka whakamahia ngā paura β-SiC, α-SiC rānei hei whakarite i te pakeketanga me te pakari.

2. Te Hanga me te Whakatakoto i te Āhua

I runga i te uauatanga o teringa/ringa marauhoahoa, ka hangaia te wāhanga mā te whakamahi i te pēhi isostatic, te whakakoi werohanga, te whakarewa paheke rānei. Mā tēnei ka taea te hanga i ngā āhuahanga uaua me ngā hanganga pakitara angiangi, he mea nui mō te āhua mama o teRinga/Ringa Marau Ukume Silicon Carbide.

3. Sintering Pāmahana-Teitei

Ka mahia te mahi sintering i ngā pāmahana neke atu i te 2000°C i roto i te hau korehau, i te hau argon rānei. Ka hurihia e tēnei wāhanga te tinana matomato hei wāhanga uku kua tino matotoru. Ko te sinteredringa/ringa maraue tutuki ana te mātotoru tata-ā-ariā, e whakarato ana i ngā āhuatanga ā-pūkaha me te ā-wera tino pai.

4. Mīhini Tika

I muri i te whakatōnga, teRinga/Ringa Marau Ukume Silicon Carbideka hurihia te taimana me te miihini CNC. Mā tēnei ka whakarite kia papatahi te āhua i roto i te ±0.01 mm, ā, ka taea te whakauru i ngā kōhao whakairi me ngā āhuatanga kimi e tika ana mō tōna tāutanga ki ngā pūnaha aunoa.

5. Whakaoti Mata

Ka whakaitihia e te oro te taratara o te mata (Ra < 0.02 μm), he mea nui hei whakaiti i te whakaputanga o ngā matūriki. Ka taea te pani i ngā paninga CVD hei whakapai ake i te ātete plasma, hei tāpiri rānei i ngā mahi pēnei i te whanonga ārai-pūmau.

I roto i tēnei tukanga, ka whakamahia ngā tikanga whakahaere kounga hei whakapūmau i teRinga/Ringa Marau Ukume Silicon Carbidehe pono te mahi i roto i ngā tono tino tairongo.

Ngā tawhā o te Ringa/Ringa Marau Ukume Silicon Carbide

Ngā Whakatakotoranga Matua o te Paninga CVD-SIC
Ngā Āhuatanga SiC-CVD
Hanganga Karaihe	Wāhanga β FCC
Kiato	karamu/cm³	3.21
Te pakeketanga	Te mārō o Vickers	2500
Rahi o te witi	µm	2~10
Te Parakore o te Matū	%	99.99995
Te kaha wera	J·kg-1 ·K-1	640
Te Pāmahana Whakatōtō	℃	2700
Te Kaha o te Felexural	MPa (RT 4-ira)	415
Te Modulus a Young	Gpa (piko 4pt, 1300℃)	430
Te Whakawhanuitanga Wera (CTE)	10-6K-1	4.5
Te kawe wera	(W/mK)	300

Ngā Whakamahinga o te Ringa/Ringa Marau Ukume Silicon Carbide

TeRinga/Ringa Marau Ukume Silicon Carbidee whakamahia whānuitia ana puta noa i ngā ahumahi e hiahiatia ana te parakore teitei, te pumau, me te tika o te miihini. Kei roto i ēnei:

1. Hanganga Ārahi-Hau

I roto i te hangahanga semiconductor, ko teRinga/Ringa Marau Ukume Silicon Carbidee whakamahia ana hei kawe i ngā angaanga silicon i roto i ngā taputapu tukatuka pēnei i ngā rūma whakairo, ngā pūnaha whakatakotoranga, me ngā taputapu tirotiro. Nā tōna ātete wera me te tika o ngā āhuatanga, he mea tino pai mō te whakaiti i te hē o te whakatakotoranga o ngā angaanga me te poke.

2. Te Hanganga o te Papa Whakaaturanga

I roto i te hanga whakaaturanga OLED me te LCD, ko teringa/ringa maraue whakamahia ana i roto i ngā pūnaha tango-me-te-whakatakoto, e taea ai te whakahaere i ngā papa karāhe pakarukaru. Nā tōna taumaha iti me tōna pakari teitei ka taea te neke tere me te pumau me te kore e wiri, e piko rānei.

3. Ngā Pūnaha Whatu me te Whakaahua

Mō te whakahāngai me te whakanoho i ngā karāhe arotahi, ngā whakaata, ngā maramara whakaahua rānei, teRinga/Ringa Marau Ukume Silicon Carbidee tuku ana i te tautoko kore wiri, he mea nui i roto i te tukatuka taiaho me ngā tono ine tika.

4. Ngā Pūnaha Rererangi me te Korehau

I roto i ngā pūnaha whatu rererangi me ngā taputapu korehau, ka whakarite te hanganga kore-aukume, ātete-waikura o tēnei wāhanga kia pumau mō te wā roa. Ko teringa/ringa marauka taea hoki te mahi i roto i te korehau tino-tiketike (UHV) me te kore e puta he hau.

I roto i ēnei mara katoa, ko teRinga/Ringa Marau Ukume Silicon Carbidehe pai ake te pono, te ma, me te roa o te mahi i ngā mea tuku iho e rite ana ki te konganuku, ki te polymer rānei.

en_177_d780dae2bf2639e7dd5142ca3d29c41d_image

Ngā Pātai Auau mō te Ringa/Ringa Marau Ukume Silicon Carbide

P1: He aha ngā rahi o te angaanga e tautokona ana e te Ringa/Ringa Marau Ukume Silicon Carbide?

Teringa/ringa marauka taea te whakarite kia tautoko i ngā anga 150 mm, 200 mm, me te 300 mm. Ka taea te whakarite i te whānuitanga o te marau, te whānui o te ringa, me ngā tauira kōhao kia uru ki tō tūāpapa aunoatanga motuhake.

P2: E hototahi ana te Ringa/Ringa Marau Ukume Silicon Carbide ki ngā pūnaha korehau?

Āe. Teringa/ringa marauHe pai mō ngā pūnaha korehau iti-korehau me ngā pūnaha korehau tino-teitei. He iti ngā tere whakaputa hau, ā, kāore e tuku i ngā matūriki, he mea tino pai mō ngā taiao rūma ma me ngā taiao korehau.

Q3: Ka taea e au te tāpiri i ngā paninga, i ngā whakarerekētanga mata rānei ki te ringa/ringa marau?

Ae ra. Ko teRinga/Ringa Marau Ukume Silicon Carbideka taea te pania ki ngā paparanga CVD-SiC, waro, waikura rānei hei whakarei ake i tōna ātete ki te parāoa toto, ki ōna āhuatanga ārai-pūmau, ki tōna pakeketanga rānei o te mata.

P4: Me pēhea te manatoko i te kounga o te ringa/ringa marau?

IaRinga/Ringa Marau Ukume Silicon Carbideka tirotirohia ngā āhuatanga mā te whakamahi i ngā taputapu CMM me te ine ine taiaho. Ka aromatawaihia te kounga o te mata mā te SEM me te ine ine kore-pa atu kia tutuki ai ngā paerewa ISO me te SEMI.

Q5: Kia pehea te wā ārahi mō ngā ota ringa/ringa marau ritenga?

Ko te roanga o te wā arahi mai i te 3 ki te 5 wiki i runga i te uauatanga me te rahinga. Kei te wātea te tauira tere mō ngā tono tere.

Ko te whāinga o ēnei FAQ he āwhina i ngā kaihangarau me ngā tīma hokohoko kia mārama ki ngā āheinga me ngā kōwhiringa e wātea ana i te wā e whiriwhiri ana i tētahiRinga/Ringa Marau Ukume Silicon Carbide.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.