Te Pūwero Ukume Silicon Carbide mō te Wafer SiC sapphire Si GAAs

Whakaahuatanga Poto:

Ko te Silicon Carbide Ceramic Chuck he tūāpapa mahi-teitei i hangaia mō te tirotiro i ngā haurua-ā-ira, te hanga wafer, me ngā tono hononga. I hangaia ki ngā rauemi uku matatau—tae atu ki te SiC kua whakatōkia (SSiC), te SiC kua honoa-tauhohenga (RSiC), te silicon nitride, me te konumohe nitride—he tino pakari, he iti te whakawhānui wera, he tino ātete ki te kakahu, me te roa o te ora mahi.


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He Tirohanga Whānui mō te Chuck Uku Silicon Carbide (SiC)

TeChuck Ukume Silicon Carbidehe tūāpapa mahi teitei i hangaia mō te tirotiro i ngā haurua-ā-ira, te hanga papa, me ngā tono hononga. I hangaia ki ngā rauemi uku matatau—tae atu kiSiC kua whakatōkia (SSiC), SiC honohono-tauhohenga (RSiC), nitride silicon, mekonumohe hauota—e tuku anahe pakari teitei, he iti te horapa wera, he ātete pai ki te kakahu, ā, he roa te ora mahi.

Mā te hangarau tika me te oro hou, ka tukuna e te chuckte papatahi o raro i te maikorona, ngā mata kounga whakaata, me te pumau o ngā āhuatanga mō te wā roa, koinei te otinga tino pai mō ngā tukanga haurua-ira nui.

Ngā Painga Matua

  • Teitei o te Tika
    Papatahi e whakahaerehia ana i roto0.3–0.5 µm, kia mau ai te pumau o te anga me te tika o te tukanga.

  • Te Whakakanapa Whakaata
    WhakatutukiRa 0.02 μmte taratara o te mata, te whakaiti i ngā karawarawa me te poke o te papatahi—he tino pai mō ngā taiao tino ma.

  • Tino Māmā
    He kaha ake, he mama ake i ngā papa kiripaka, i ngā papa whakarewa rānei, e whakapai ake ana i te whakahaere nekehanga, te urupare, me te tika o te tūnga.

  • Teitei o te Pakari
    Mā te modulus a Exceptional Young ka pumau te āhua i raro i ngā kawenga taumaha me te mahi tere-tiketike.

  • Whānuitanga Wera Iti
    He tino ōrite te CTE ki ngā anga silicon, e whakaiti ana i te ahotea wera me te whakarei ake i te pono o te tukanga.

  • Ātete Whakamau Tino Pai
    Mā te tino pakeke ka mau tonu te papatahi me te tika ahakoa te whakamahinga roa, teitei hoki.

Tukanga Hanga

  • Te Whakarite Rauemi Mata
    He paura SiC tino parakore, he rahi matūriki kua whakahaeretia, ā, he tino iti ngā poke.

  • Te Hanga me te Sintering
    Ngā tikanga pēnei i tete whakakorikori kore-pēhanga (SSiC) or hononga tauhohenga (RSiC)hanga papa uku matotoru, ōrite.

  • Mīhini Tika
    Mā te huri CNC, te kuti taiaho, me te miihini tino tika ka tutuki te ātete ±0.01 mm me te whakarara ≤3 μm.

  • Te Maimoatanga Mata
    Te huri me te oro maha-wāhanga ki te Ra 0.02 μm; kei te wātea ngā paninga kōwhiringa mō te ātete ki te waikura, ngā āhuatanga waku ritenga rānei.

  • Tirotiro me te Mana Kounga
    Ka manatokohia e ngā ine whakawhiti me ngā whakamātautau taratara te tutuki i ngā whakaritenga taumata-haurua-haurua.

Ngā Whakatakotoranga Hangarau

Tawhā Uara Wāhanga
Papatahi ≤0.5 µm
Ngā rahi o te anga 6'', 8'', 12'' (e wātea ana te whakaritenga)
Momo mata Momo pine / Momo mowhiti
Teitei o te pine 0.05–0.2 mm
Te whānui iti rawa o te pine ϕ0.2 mm
Te mokowā iti rawa o te pine 3 mm
Whānui iti rawa o te mowhiti hiri 0.7 mm
Te taratara o te mata Ra 0.02 µm
Te manawanui matotoru ±0.01 mm
Te manawanui o te diameter ±0.01 mm
Te manawanui whakarara ≤3 µm

 

Ngā Taupānga Matua

  • Ngā taputapu tirotiro anga haurua-korikori

  • Ngā pūnaha hanga me te whakawhiti anga

  • Ngā taputapu here me te takai angiangi

  • Te hanga taputapu optoelectronic matatau

  • Ngā taputapu tino tika e hiahia ana ki ngā mata tino papatahi, tino ma

Pātai me ngā Whakautu – Chuck Uku Hiraka Warowaihā

Q1: He aha te whakataurite o ngā pūtu uku SiC ki ngā pūtu quartz, ngā pūtu whakarewa rānei?
A1: He mama ake, he pakari ake ngā tītaha SiC, ā, he tata tonu te CTE ki ngā papa silicon, e whakaiti ana i te rerekētanga wera. He pai ake hoki te ātete ki te kakahu me te roa ake o te ora.

Q2: He aha te papatahi ka taea te whakatutuki?
A2: Whakahaeretia i roto i0.3–0.5 µm, e whakatutuki ana i ngā whakaritenga pakari o te hanga haurua-ā-ira.

Q3: Ka rakurakuhia rānei ngā papa o te mata?
A3: Kāo—kua orohia te whakaata kiaRa 0.02 μm, kia kore ai e rakuraku te whakahaere, kia iti ai hoki te whakaputanga o ngā matūriki.

Q4: He aha ngā rahi o te wafer e tautokona ana?
A4: Ngā rahi paerewa o6'', 8'', me te 12'', me ngā whakaritenga e wātea ana.

Q5: He pēhea te ātete wera?
A5: He tino pai te mahi a ngā uku SiC i te pāmahana teitei, ā, he iti noa te rerekētanga i raro i te huringa wera.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.

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